DE69602632D1 - Feldeffekttransistor mit Kammstruktur - Google Patents

Feldeffekttransistor mit Kammstruktur

Info

Publication number
DE69602632D1
DE69602632D1 DE69602632T DE69602632T DE69602632D1 DE 69602632 D1 DE69602632 D1 DE 69602632D1 DE 69602632 T DE69602632 T DE 69602632T DE 69602632 T DE69602632 T DE 69602632T DE 69602632 D1 DE69602632 D1 DE 69602632D1
Authority
DE
Germany
Prior art keywords
field effect
effect transistor
comb structure
comb
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69602632T
Other languages
English (en)
Other versions
DE69602632T2 (de
Inventor
Kazunori Asano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Compound Semiconductor Devices Ltd
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Application granted granted Critical
Publication of DE69602632D1 publication Critical patent/DE69602632D1/de
Publication of DE69602632T2 publication Critical patent/DE69602632T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
    • H01L29/41725—Source or drain electrodes for field effect devices
    • H01L29/41758—Source or drain electrodes for field effect devices for lateral devices with structured layout for source or drain region, i.e. the source or drain region having cellular, interdigitated or ring structure or being curved or angular
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/4824—Pads with extended contours, e.g. grid structure, branch structure, finger structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
    • H01L29/0642—Isolation within the component, i.e. internal isolation
    • H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H01L29/1029—Channel region of field-effect devices of field-effect transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
    • H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
    • H01L29/42312—Gate electrodes for field effect devices
    • H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
    • H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
    • H01L29/42372—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out
    • H01L29/4238—Gate electrodes for field effect devices for field-effect transistors with insulated gate characterised by the conducting layer, e.g. the length, the sectional shape or the lay-out characterised by the surface lay-out
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
DE69602632T 1995-02-06 1996-02-05 Feldeffekttransistor mit Kammstruktur Expired - Fee Related DE69602632T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7041373A JPH08213409A (ja) 1995-02-06 1995-02-06 半導体装置

Publications (2)

Publication Number Publication Date
DE69602632D1 true DE69602632D1 (de) 1999-07-08
DE69602632T2 DE69602632T2 (de) 1999-12-09

Family

ID=12606625

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69602632T Expired - Fee Related DE69602632T2 (de) 1995-02-06 1996-02-05 Feldeffekttransistor mit Kammstruktur

Country Status (4)

Country Link
US (1) US5652452A (de)
EP (1) EP0725445B1 (de)
JP (1) JPH08213409A (de)
DE (1) DE69602632T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3256110B2 (ja) * 1995-09-28 2002-02-12 シャープ株式会社 液晶表示装置
US5681761A (en) * 1995-12-28 1997-10-28 Philips Electronics North America Corporation Microwave power SOI-MOSFET with high conductivity metal gate
JP3129223B2 (ja) * 1997-02-28 2001-01-29 日本電気株式会社 半導体装置
JP3379376B2 (ja) * 1997-03-14 2003-02-24 松下電器産業株式会社 電界効果トランジスタおよびそれを用いた電力増幅器
JP3515886B2 (ja) * 1997-09-29 2004-04-05 三菱電機株式会社 半導体装置およびその製造方法
US6373094B2 (en) 1998-09-11 2002-04-16 Texas Instruments Incorporated EEPROM cell using conventional process steps
US6084277A (en) * 1999-02-18 2000-07-04 Power Integrations, Inc. Lateral power MOSFET with improved gate design
US6313512B1 (en) * 1999-02-25 2001-11-06 Tyco Electronics Logistics Ag Low source inductance compact FET topology for power amplifiers
US6398347B1 (en) * 2000-07-24 2002-06-04 Hewlett-Packard Company Energy balanced ink jet printhead
JP3712111B2 (ja) * 2001-03-30 2005-11-02 ユーディナデバイス株式会社 電力増幅用半導体装置
US6642578B1 (en) 2002-07-22 2003-11-04 Anadigics, Inc. Linearity radio frequency switch with low control voltage
EP1654765A2 (de) * 2004-01-10 2006-05-10 Hvvi Semiconductors, Inc. Leistungshalbleiterbauelement und verfahren dafür querverweis auf verwandte anmeldungen
US7135747B2 (en) * 2004-02-25 2006-11-14 Cree, Inc. Semiconductor devices having thermal spacers
US8530963B2 (en) * 2005-01-06 2013-09-10 Estivation Properties Llc Power semiconductor device and method therefor
JP2006269835A (ja) * 2005-03-24 2006-10-05 Nec Electronics Corp 半導体装置
WO2009027488A1 (de) * 2007-08-31 2009-03-05 Forschungsverbund Berlin E. V. Plaited-signal-manifold-anschlussstruktur für ein hochfrequenzbauelement und ein solches hochfrequenzbauelement
JP5106041B2 (ja) * 2007-10-26 2012-12-26 株式会社東芝 半導体装置
JP2009111217A (ja) 2007-10-31 2009-05-21 Toshiba Corp 半導体装置
JP5728842B2 (ja) * 2010-07-27 2015-06-03 住友電気工業株式会社 半導体装置
JP2012079942A (ja) * 2010-10-01 2012-04-19 Renesas Electronics Corp 半導体装置
US8557643B2 (en) * 2011-10-03 2013-10-15 International Business Machines Corporation Transistor device with reduced gate resistance
US9779988B2 (en) * 2013-12-20 2017-10-03 Nxp Usa, Inc. Semiconductor devices with inner via
CN103700696A (zh) * 2013-12-24 2014-04-02 中国电子科技集团公司第五十五研究所 一种均匀散热的串管结构GaN管芯
US9064864B1 (en) 2013-12-30 2015-06-23 Visic Technologies Ltd. Semiconductor device
WO2015101973A1 (en) * 2013-12-30 2015-07-09 Visic Technologies Ltd. Semiconductor device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254302A (en) * 1968-03-11 1971-11-17 Associated Semiconductor Mft Improvements in insulated gate field effect transistors
US4462041A (en) * 1981-03-20 1984-07-24 Harris Corporation High speed and current gain insulated gate field effect transistors
JPS57160148A (en) * 1981-03-30 1982-10-02 Toshiba Corp Microwave integrated circuit device
JPS5853862A (ja) * 1981-09-25 1983-03-30 Toshiba Corp 電界効果型半導体装置
JPS63150966A (ja) * 1986-12-13 1988-06-23 Sony Corp 電界効果型トランジスタ
US5025296A (en) * 1988-02-29 1991-06-18 Motorola, Inc. Center tapped FET
EP0373803A3 (de) * 1988-12-16 1991-07-10 Raytheon Company R.F.-Wechselschalter
EP0488801B1 (de) * 1990-11-30 1998-02-04 Sharp Kabushiki Kaisha Dünnfilm-Halbleitervorrichtung
US5321291A (en) * 1991-12-16 1994-06-14 Texas Instruments Incorporated Power MOSFET transistor
KR940008009Y1 (ko) * 1991-12-24 1994-11-16 금성일렉트론 주식회사 가변 동작속도 트랜지스터
GB9201004D0 (en) * 1992-01-17 1992-03-11 Philips Electronic Associated A semiconductor device comprising an insulated gate field effect device
US5321292A (en) * 1992-10-15 1994-06-14 Atmel Corporation Voltage limiting device having improved gate-aided breakdown
JPH06151843A (ja) * 1992-11-02 1994-05-31 Sanyo Electric Co Ltd 電解効果型トランジスタ

Also Published As

Publication number Publication date
EP0725445B1 (de) 1999-06-02
EP0725445A1 (de) 1996-08-07
DE69602632T2 (de) 1999-12-09
US5652452A (en) 1997-07-29
JPH08213409A (ja) 1996-08-20

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: NEC COMPOUND SEMICONDUCTOR DEVICES, LTD., KAWASAKI

8339 Ceased/non-payment of the annual fee