DE69531798D1 - Elektronenstrahlgerät - Google Patents

Elektronenstrahlgerät

Info

Publication number
DE69531798D1
DE69531798D1 DE69531798T DE69531798T DE69531798D1 DE 69531798 D1 DE69531798 D1 DE 69531798D1 DE 69531798 T DE69531798 T DE 69531798T DE 69531798 T DE69531798 T DE 69531798T DE 69531798 D1 DE69531798 D1 DE 69531798D1
Authority
DE
Germany
Prior art keywords
directed
electron beam
row
column
beam device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69531798T
Other languages
English (en)
Other versions
DE69531798T2 (de
Inventor
Hideaki Mitsutake
Shinichi Kawate
Naoto Nakamura
Yoshihisa Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69531798D1 publication Critical patent/DE69531798D1/de
Publication of DE69531798T2 publication Critical patent/DE69531798T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242Spacers between faceplate and backplate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/028Mounting or supporting arrangements for flat panel cathode ray tubes, e.g. spacers particularly relating to electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/86Vessels; Containers; Vacuum locks
    • H01J29/864Spacers between faceplate and backplate of flat panel cathode ray tubes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems
    • H01J9/18Assembling together the component parts of electrode systems
    • H01J9/185Assembling together the component parts of electrode systems of flat panel display devices, e.g. by using spacers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/316Cold cathodes having an electric field parallel to the surface thereof, e.g. thin film cathodes
    • H01J2201/3165Surface conduction emission type cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/864Spacing members characterised by the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/8645Spacing members with coatings on the lateral surfaces thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/86Vessels
    • H01J2329/8625Spacing members
    • H01J2329/865Connection of the spacing members to the substrates or electrodes
    • H01J2329/8655Conductive or resistive layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Recrystallisation Techniques (AREA)
  • Lasers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Measurement Of Radiation (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
DE69531798T 1994-06-27 1995-06-27 Elektronenstrahlgerät Expired - Lifetime DE69531798T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP14463694 1994-06-27
JP14463694 1994-06-27
JP26521794 1994-10-28
JP26521794 1994-10-28
JP15796295A JP3305166B2 (ja) 1994-06-27 1995-06-23 電子線装置
JP15796295 1995-06-23

Publications (2)

Publication Number Publication Date
DE69531798D1 true DE69531798D1 (de) 2003-10-23
DE69531798T2 DE69531798T2 (de) 2004-07-01

Family

ID=27318850

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69509306T Expired - Lifetime DE69509306T2 (de) 1994-06-27 1995-06-27 Elektronenstrahlgerät und Bilderzeugungsgerät
DE69531798T Expired - Lifetime DE69531798T2 (de) 1994-06-27 1995-06-27 Elektronenstrahlgerät

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69509306T Expired - Lifetime DE69509306T2 (de) 1994-06-27 1995-06-27 Elektronenstrahlgerät und Bilderzeugungsgerät

Country Status (9)

Country Link
US (2) US5760538A (de)
EP (2) EP0690472B1 (de)
JP (1) JP3305166B2 (de)
KR (1) KR100220216B1 (de)
CN (2) CN1271675C (de)
AT (2) ATE179549T1 (de)
AU (1) AU685270B2 (de)
CA (1) CA2152740C (de)
DE (2) DE69509306T2 (de)

Families Citing this family (86)

* Cited by examiner, † Cited by third party
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CA2418595C (en) * 1993-12-27 2006-11-28 Canon Kabushiki Kaisha Electron-emitting device and method of manufacturing the same as well as electron source and image-forming apparatus
JP3222357B2 (ja) * 1994-06-09 2001-10-29 キヤノン株式会社 画像形成装置及びその製造方法
CN1271675C (zh) * 1994-06-27 2006-08-23 佳能株式会社 电子束设备
USRE40103E1 (en) * 1994-06-27 2008-02-26 Canon Kabushiki Kaisha Electron beam apparatus and image forming apparatus
US5486126A (en) 1994-11-18 1996-01-23 Micron Display Technology, Inc. Spacers for large area displays
JP3624041B2 (ja) * 1995-01-06 2005-02-23 キヤノン株式会社 導電性フリットを用いた画像表示装置
JP3083076B2 (ja) 1995-04-21 2000-09-04 キヤノン株式会社 画像形成装置
US5716251A (en) * 1995-09-15 1998-02-10 Micron Display Technology, Inc. Sacrificial spacers for large area displays
JPH09167583A (ja) * 1995-12-15 1997-06-24 Futaba Corp 表示装置
US5916004A (en) * 1996-01-11 1999-06-29 Micron Technology, Inc. Photolithographically produced flat panel display surface plate support structure
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US5851133A (en) 1996-12-24 1998-12-22 Micron Display Technology, Inc. FED spacer fibers grown by laser drive CVD
DE69730195T2 (de) 1996-12-25 2005-07-28 Canon K.K. Bilderzeugungsgerät
EP1115137A1 (de) 1996-12-26 2001-07-11 Canon Kabushiki Kaisha Abstandshalter, Bilderzeugungsgerät und Herstellungsverfahren dafür
CN1127750C (zh) * 1996-12-27 2003-11-12 佳能株式会社 减少电荷的薄膜,图象形成装置及其制造方法
US5888112A (en) * 1996-12-31 1999-03-30 Micron Technology, Inc. Method for forming spacers on a display substrate
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CN1230865C (zh) 1997-03-14 2005-12-07 佳能株式会社 成像装置
JP3199682B2 (ja) 1997-03-21 2001-08-20 キヤノン株式会社 電子放出装置及びそれを用いた画像形成装置
CN1139966C (zh) * 1997-03-21 2004-02-25 佳能株式会社 图象形成设备
JPH10326579A (ja) 1997-03-28 1998-12-08 Canon Inc 画像形成装置とその製造方法
JP3187367B2 (ja) 1997-03-31 2001-07-11 キヤノン株式会社 電子装置及びそれを用いた画像形成装置
JP3234188B2 (ja) 1997-03-31 2001-12-04 キヤノン株式会社 画像形成装置とその製造方法
JP3195290B2 (ja) * 1997-03-31 2001-08-06 キヤノン株式会社 画像形成装置
JP3703287B2 (ja) 1997-03-31 2005-10-05 キヤノン株式会社 画像形成装置
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JP4115050B2 (ja) 1998-10-07 2008-07-09 キヤノン株式会社 電子線装置およびスペーサの製造方法
JP4115051B2 (ja) 1998-10-07 2008-07-09 キヤノン株式会社 電子線装置
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JP3397738B2 (ja) * 1999-02-25 2003-04-21 キヤノン株式会社 電子源および画像形成装置
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JP3814527B2 (ja) * 2000-12-06 2006-08-30 キヤノン株式会社 画像表示装置
JP3667301B2 (ja) 2001-06-15 2005-07-06 キヤノン株式会社 真空容器および該真空容器を用いた画像形成装置の製造方法
JP3695703B2 (ja) * 2001-10-25 2005-09-14 株式会社日立製作所 電気めっき方法、電気めっき装置及び半導体装置の製造方法及び製造装置
JP3564120B2 (ja) 2002-10-30 2004-09-08 キヤノン株式会社 表示装置の容器及び電子線装置の各製造方法
JP2004246317A (ja) * 2002-12-20 2004-09-02 Hitachi Ltd 冷陰極型フラットパネルディスプレイ
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JP4098121B2 (ja) * 2003-03-03 2008-06-11 株式会社日立製作所 平面型表示装置
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US7138758B2 (en) * 2003-05-15 2006-11-21 Canon Kabushiki Kaisha Image forming apparatus having a high-resistance coated spacer in electrical contact with wirings components at predetermined intervals
EP1484782A3 (de) * 2003-06-06 2009-04-22 Canon Kabushiki Kaisha Elektronenstrahlgerät und Herstellungsverfahren für ein in diesem zu verwendendes Distanzelement
JP4773812B2 (ja) * 2003-06-06 2011-09-14 キヤノン株式会社 スペーサの製造方法
JP3970223B2 (ja) * 2003-08-12 2007-09-05 キヤノン株式会社 画像形成装置
JP3944211B2 (ja) 2004-01-05 2007-07-11 キヤノン株式会社 画像表示装置
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JP4481892B2 (ja) * 2004-06-30 2010-06-16 キヤノン株式会社 画像表示装置
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JP4594076B2 (ja) 2004-12-27 2010-12-08 キヤノン株式会社 画像表示装置
JP2006202523A (ja) * 2005-01-18 2006-08-03 Hitachi Displays Ltd 画像表示装置
JP2006202553A (ja) 2005-01-19 2006-08-03 Hitachi Displays Ltd 画像表示装置及びその製造方法
JP2006244745A (ja) * 2005-03-01 2006-09-14 Hitachi Ltd 表示パネル
KR20070046661A (ko) * 2005-10-31 2007-05-03 삼성에스디아이 주식회사 전자 방출 표시 디바이스
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JP2007294131A (ja) * 2006-04-21 2007-11-08 Hitachi Displays Ltd 自発光型表示装置
JP2007311329A (ja) * 2006-05-19 2007-11-29 Samsung Sdi Co Ltd 発光装置、発光装置の電子放出ユニット製造方法、及び表示装置
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JP7466456B2 (ja) * 2018-03-23 2024-04-12 ヒタチ・エナジー・リミテッド 付加製造技術による電気素子の製造方法

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Also Published As

Publication number Publication date
EP0690472A1 (de) 1996-01-03
EP0886294B1 (de) 2003-09-17
CA2152740A1 (en) 1995-12-28
EP0886294A3 (de) 1999-09-15
EP0690472B1 (de) 1999-04-28
JP3305166B2 (ja) 2002-07-22
KR100220216B1 (ko) 1999-09-01
DE69509306T2 (de) 1999-11-04
DE69509306D1 (de) 1999-06-02
CN1450583A (zh) 2003-10-22
AU2329095A (en) 1996-01-11
DE69531798T2 (de) 2004-07-01
CN1129849A (zh) 1996-08-28
EP0886294A2 (de) 1998-12-23
AU685270B2 (en) 1998-01-15
US6274972B1 (en) 2001-08-14
CA2152740C (en) 2001-09-11
US5760538A (en) 1998-06-02
ATE250278T1 (de) 2003-10-15
ATE179549T1 (de) 1999-05-15
CN1271675C (zh) 2006-08-23
CN1115710C (zh) 2003-07-23
KR960002448A (ko) 1996-01-26
JPH08180821A (ja) 1996-07-12

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