DE69522573D1 - Methode zum beschichtigen von glas und das danach beschichtete gla - Google Patents

Methode zum beschichtigen von glas und das danach beschichtete gla

Info

Publication number
DE69522573D1
DE69522573D1 DE69522573T DE69522573T DE69522573D1 DE 69522573 D1 DE69522573 D1 DE 69522573D1 DE 69522573 T DE69522573 T DE 69522573T DE 69522573 T DE69522573 T DE 69522573T DE 69522573 D1 DE69522573 D1 DE 69522573D1
Authority
DE
Germany
Prior art keywords
radical scavenger
oxygen
precursor
silane
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522573T
Other languages
English (en)
Other versions
DE69522573T2 (de
Inventor
J Soubeyrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Application granted granted Critical
Publication of DE69522573D1 publication Critical patent/DE69522573D1/de
Publication of DE69522573T2 publication Critical patent/DE69522573T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/213SiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd
DE69522573T 1994-10-14 1995-10-13 Verfahren zum beschichten von glas und dementsprechend beschichtetes glas Expired - Lifetime DE69522573T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32327294A 1994-10-14 1994-10-14
PCT/US1995/013001 WO1996011802A1 (en) 1994-10-14 1995-10-13 Glass coating method and glass coated thereby

Publications (2)

Publication Number Publication Date
DE69522573D1 true DE69522573D1 (de) 2001-10-11
DE69522573T2 DE69522573T2 (de) 2002-08-22

Family

ID=23258450

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522573T Expired - Lifetime DE69522573T2 (de) 1994-10-14 1995-10-13 Verfahren zum beschichten von glas und dementsprechend beschichtetes glas

Country Status (20)

Country Link
US (1) US5798142A (de)
EP (1) EP0785868B1 (de)
JP (1) JP4290760B2 (de)
KR (1) KR100360629B1 (de)
CN (1) CN1084674C (de)
AT (1) ATE205136T1 (de)
AU (1) AU688153B2 (de)
BR (1) BR9509303A (de)
CA (1) CA2159296C (de)
CZ (1) CZ293607B6 (de)
DE (1) DE69522573T2 (de)
ES (1) ES2160176T3 (de)
FI (1) FI971553A0 (de)
HU (1) HU225402B1 (de)
MY (1) MY112816A (de)
PL (1) PL181307B1 (de)
TR (1) TR199501271A2 (de)
TW (1) TW403727B (de)
WO (1) WO1996011802A1 (de)
ZA (1) ZA958310B (de)

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FR2730990B1 (fr) * 1995-02-23 1997-04-04 Saint Gobain Vitrage Substrat transparent a revetement anti-reflets
FR2738813B1 (fr) * 1995-09-15 1997-10-17 Saint Gobain Vitrage Substrat a revetement photo-catalytique
US6024084A (en) * 1999-02-22 2000-02-15 Engineered Glass Products, Llc Double sided heat barrier glass with clear CVD coating and method of making the same
US6350397B1 (en) 1999-03-10 2002-02-26 Aspen Research Corporation Optical member with layer having a coating geometry and composition that enhance cleaning properties
FR2797627B1 (fr) * 1999-08-19 2001-10-26 Stein Heurtey Perfectionnements apportes aux etenderies de recuisson de verre plat
US6111224A (en) * 1999-12-02 2000-08-29 Hatco Corporation Food warming oven with transparent heating shelves
US6413579B1 (en) 2000-01-27 2002-07-02 Libbey-Owens-Ford Co. Temperature control of CVD method for reduced haze
US20030165731A1 (en) * 2002-03-01 2003-09-04 Gayatri Vyas Coated fuel cell electrical contact element
US7968251B2 (en) 2000-11-24 2011-06-28 GM Global Technology Operations LLC Electrical contact element and bipolar plate
EP1486468A1 (de) * 2002-01-31 2004-12-15 Nippon Sheet Glass Company, Limited Verfahren zur herstellung einer glasplatte mit dünnem film und glasplatte
US7299657B2 (en) * 2002-07-12 2007-11-27 Corning Incorporated Method of making high strain point glass
US20050044894A1 (en) * 2003-08-29 2005-03-03 Douglas Nelson Deposition of silica coatings on a substrate
US20050221003A1 (en) * 2004-03-31 2005-10-06 Remington Michael P Jr Enhancement of SiO2 deposition using phosphorus (V) compounds
JP4479572B2 (ja) * 2005-04-08 2010-06-09 富士電機デバイステクノロジー株式会社 垂直磁気記録媒体用ディスク基板の製造方法、垂直磁気記録媒体用ディスク基板及び垂直磁気記録媒体
DE602005010885D1 (de) * 2004-08-17 2008-12-18 Dickson Industrial Co Ltd Frisiervorrichtung
CN101023041B (zh) * 2004-08-23 2012-08-01 赫罗伊斯石英玻璃股份有限两合公司 具有反射体层的组件及其生产方法
JP4890548B2 (ja) * 2005-07-26 2012-03-07 ピルキングトン・ノースアメリカ・インコーポレイテッド 銀フリー・低放射率の日照調整コーティング
WO2007108445A1 (ja) * 2006-03-20 2007-09-27 The Furukawa Electric Co., Ltd. 連続薄膜の形成方法及び薄膜付き線状ガラス基板
US7670694B2 (en) * 2006-12-22 2010-03-02 Hitachi Global Storage Technologies Netherlands B.V. Media for recording devices
GB0808338D0 (en) 2008-05-08 2008-06-18 Pilkington Group Ltd Production of coated glass
EP2688850B1 (de) * 2011-03-23 2018-02-21 Pilkington Group Limited Verfahren zur ablagerung von zinkoxidbeschichtungen mittels cvd
JP2014520201A (ja) * 2011-03-23 2014-08-21 ピルキントン グループ リミテッド 薄膜コーティングを被覆するための装置およびこのような装置を用いた被覆方法
US8734903B2 (en) * 2011-09-19 2014-05-27 Pilkington Group Limited Process for forming a silica coating on a glass substrate
FR2982609B1 (fr) * 2011-11-16 2014-06-20 Saint Gobain Vitrage hydrophobe
JP6320303B2 (ja) * 2012-02-23 2018-05-16 ピルキントン グループ リミテッド ガラス基材上にシリカ被膜を成膜するための化学的気相成長プロセス
WO2014020310A2 (en) 2012-07-30 2014-02-06 Pilkington Group Limited A method of depositing a coating utilizing a coating apparatus
JPWO2014081030A1 (ja) * 2012-11-26 2017-01-05 旭硝子株式会社 薄膜形成方法
PL3137823T3 (pl) 2014-04-30 2019-05-31 Arcelik As Ulepszony zespół do odprowadzania wody do zastosowania w urządzeniu chłodzącym
GB201507330D0 (en) * 2015-04-29 2015-06-10 Pilkington Group Ltd Splash screen
US11795102B2 (en) * 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
US20190135686A1 (en) * 2016-04-26 2019-05-09 Pilkington Group Limited Corrosion resistant coated glass substrate
WO2019043398A1 (en) * 2017-08-31 2019-03-07 Pilkington Group Limited COATED GLASS ARTICLE, MANUFACTURING METHOD THEREOF, AND PHOTOVOLTAIC CELL MADE THEREWITH
EP3676416A1 (de) * 2017-08-31 2020-07-08 Pilkington Group Limited Verfahren zur chemischen gasphasenabscheidung zur formung einer siliciumoxidbeschichtung
WO2023026049A1 (en) * 2021-08-26 2023-03-02 Pilkington Group Limited Method of producing a coated glass article
WO2023057756A1 (en) * 2021-10-06 2023-04-13 Pilkington Group Limited Method of forming a silicon oxide coating

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US496712A (en) * 1893-05-02 Running-gear
US4019877A (en) * 1975-10-21 1977-04-26 Westinghouse Electric Corporation Method for coating of polyimide by electrodeposition
GB1573154A (en) * 1977-03-01 1980-08-13 Pilkington Brothers Ltd Coating glass
US5165972A (en) * 1984-08-13 1992-11-24 Pilkington Plc Coated glass
GB8420534D0 (en) * 1984-08-13 1984-09-19 Pilkington Brothers Plc Coated products
US4661381A (en) * 1985-10-07 1987-04-28 Libbey-Owens-Ford Co. Continuous vapor deposition method for producing a coated glass article
US4946712A (en) * 1986-08-28 1990-08-07 Libbey-Owens-Ford Co. Glass coating method and resulting article
GB8630918D0 (en) * 1986-12-24 1987-02-04 Pilkington Brothers Plc Coatings on glass
GB8814922D0 (en) * 1988-06-23 1988-07-27 Pilkington Plc Coatings on glass
US5217753A (en) * 1989-02-21 1993-06-08 Libbey-Owens-Ford Co. Coated glass articles
US5221352A (en) * 1989-06-19 1993-06-22 Glaverbel Apparatus for pyrolytically forming an oxide coating on a hot glass substrate
GB8914047D0 (en) * 1989-06-19 1989-08-09 Glaverbel Method of and apparatus for pyrolytically forming an oxide coating on a hot glass substrate
GB2247691B (en) * 1990-08-31 1994-11-23 Glaverbel Method of coating glass
FR2677639B1 (fr) * 1991-06-14 1994-02-25 Saint Gobain Vitrage Internal Technique de formation par pyrolyse en voie gazeuse d'un revetement essentiellement a base d'oxygene et de silicium.
GB9127268D0 (en) * 1991-12-23 1992-02-19 Glaverbel Coated glass

Also Published As

Publication number Publication date
BR9509303A (pt) 1997-12-23
KR970706960A (ko) 1997-12-01
AU688153B2 (en) 1998-03-05
WO1996011802A1 (en) 1996-04-25
AU3828995A (en) 1996-05-06
DE69522573T2 (de) 2002-08-22
HUT77872A (hu) 1998-09-28
JP4290760B2 (ja) 2009-07-08
TR199501271A2 (tr) 1997-05-21
MY112816A (en) 2001-09-29
MX9702640A (es) 1997-07-31
HU225402B1 (en) 2006-11-28
CZ293607B6 (cs) 2004-06-16
CZ110197A3 (en) 1997-09-17
ATE205136T1 (de) 2001-09-15
US5798142A (en) 1998-08-25
TW403727B (en) 2000-09-01
KR100360629B1 (ko) 2003-03-15
CN1084674C (zh) 2002-05-15
PL319633A1 (en) 1997-08-18
TR199501271A3 (de) 1997-05-21
ES2160176T3 (es) 2001-11-01
CA2159296A1 (en) 1996-04-15
ZA958310B (en) 1996-04-26
FI971553A (fi) 1997-04-14
EP0785868B1 (de) 2001-09-05
EP0785868A1 (de) 1997-07-30
CN1169694A (zh) 1998-01-07
JPH10506874A (ja) 1998-07-07
CA2159296C (en) 2007-01-30
FI971553A0 (fi) 1997-04-14
PL181307B1 (pl) 2001-07-31
EP0785868A4 (de) 1998-01-21

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