DE69522573D1 - METHOD FOR COATING GLASS AND THE COVERED GLA AFTER IT - Google Patents

METHOD FOR COATING GLASS AND THE COVERED GLA AFTER IT

Info

Publication number
DE69522573D1
DE69522573D1 DE69522573T DE69522573T DE69522573D1 DE 69522573 D1 DE69522573 D1 DE 69522573D1 DE 69522573 T DE69522573 T DE 69522573T DE 69522573 T DE69522573 T DE 69522573T DE 69522573 D1 DE69522573 D1 DE 69522573D1
Authority
DE
Germany
Prior art keywords
radical scavenger
oxygen
precursor
silane
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522573T
Other languages
German (de)
Other versions
DE69522573T2 (en
Inventor
J Soubeyrand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington North America Inc
Original Assignee
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Libbey Owens Ford Co filed Critical Libbey Owens Ford Co
Publication of DE69522573D1 publication Critical patent/DE69522573D1/en
Application granted granted Critical
Publication of DE69522573T2 publication Critical patent/DE69522573T2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/401Oxides containing silicon
    • C23C16/402Silicon dioxide
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/21Oxides
    • C03C2217/213SiO2
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Glass Compositions (AREA)

Abstract

A method of pyrolytically forming a silica-containing coating on a glass substrate at an elevated temperature. Silane, oxygen, a radical scavenger gas and a carrier gas are combined as a precursor mixture, and the precursor is directed toward and along the surface of the heated glass substrate. The presence of the radical scavenger allows the silane, which is pyrophoric, to be premixed with the oxygen without undergoing ignition and premature reaction at the operating temperatures. The radical scavenger further provides control of and permits optimization of the kinetics of the chemical vapor deposition (CVD) reaction on the glass. A preferred combination of precursor materials includes monosilane and oxygen, with ethylene as the radical scavenger, and including nitrogen as a carrier gas.
DE69522573T 1994-10-14 1995-10-13 METHOD FOR COATING GLASS AND CORRECTLY COATED GLASS Expired - Lifetime DE69522573T2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32327294A 1994-10-14 1994-10-14
PCT/US1995/013001 WO1996011802A1 (en) 1994-10-14 1995-10-13 Glass coating method and glass coated thereby

Publications (2)

Publication Number Publication Date
DE69522573D1 true DE69522573D1 (en) 2001-10-11
DE69522573T2 DE69522573T2 (en) 2002-08-22

Family

ID=23258450

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522573T Expired - Lifetime DE69522573T2 (en) 1994-10-14 1995-10-13 METHOD FOR COATING GLASS AND CORRECTLY COATED GLASS

Country Status (20)

Country Link
US (1) US5798142A (en)
EP (1) EP0785868B1 (en)
JP (1) JP4290760B2 (en)
KR (1) KR100360629B1 (en)
CN (1) CN1084674C (en)
AT (1) ATE205136T1 (en)
AU (1) AU688153B2 (en)
BR (1) BR9509303A (en)
CA (1) CA2159296C (en)
CZ (1) CZ293607B6 (en)
DE (1) DE69522573T2 (en)
ES (1) ES2160176T3 (en)
FI (1) FI971553A (en)
HU (1) HU225402B1 (en)
MY (1) MY112816A (en)
PL (1) PL181307B1 (en)
TR (1) TR199501271A2 (en)
TW (1) TW403727B (en)
WO (1) WO1996011802A1 (en)
ZA (1) ZA958310B (en)

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FR2730990B1 (en) * 1995-02-23 1997-04-04 Saint Gobain Vitrage TRANSPARENT SUBSTRATE WITH ANTI-REFLECTIVE COATING
FR2738813B1 (en) * 1995-09-15 1997-10-17 Saint Gobain Vitrage SUBSTRATE WITH PHOTO-CATALYTIC COATING
US6024084A (en) * 1999-02-22 2000-02-15 Engineered Glass Products, Llc Double sided heat barrier glass with clear CVD coating and method of making the same
US6350397B1 (en) 1999-03-10 2002-02-26 Aspen Research Corporation Optical member with layer having a coating geometry and composition that enhance cleaning properties
FR2797627B1 (en) * 1999-08-19 2001-10-26 Stein Heurtey IMPROVEMENTS RELATING TO FLAT GLASS COLLECTION RACKS
US6111224A (en) * 1999-12-02 2000-08-29 Hatco Corporation Food warming oven with transparent heating shelves
US6413579B1 (en) 2000-01-27 2002-07-02 Libbey-Owens-Ford Co. Temperature control of CVD method for reduced haze
US20030165731A1 (en) * 2002-03-01 2003-09-04 Gayatri Vyas Coated fuel cell electrical contact element
US7968251B2 (en) 2000-11-24 2011-06-28 GM Global Technology Operations LLC Electrical contact element and bipolar plate
US20050144981A1 (en) * 2002-01-31 2005-07-07 Nippon Sheet Glass Company, Limited Method of manufacturing glass sheet with thin film and the glass sheet
US7299657B2 (en) * 2002-07-12 2007-11-27 Corning Incorporated Method of making high strain point glass
US20050044894A1 (en) * 2003-08-29 2005-03-03 Douglas Nelson Deposition of silica coatings on a substrate
US20050221003A1 (en) * 2004-03-31 2005-10-06 Remington Michael P Jr Enhancement of SiO2 deposition using phosphorus (V) compounds
JP4479572B2 (en) * 2005-04-08 2010-06-09 富士電機デバイステクノロジー株式会社 Method for manufacturing disk substrate for perpendicular magnetic recording medium, disk substrate for perpendicular magnetic recording medium, and perpendicular magnetic recording medium
US20080092915A1 (en) * 2004-08-17 2008-04-24 Dickson Industrial Co. Ltd. Hair Styling Apparatus
CN101023040B (en) * 2004-08-23 2011-08-03 赫罗伊斯石英玻璃股份有限两合公司 Coated component consisting of quartz glass, and method for producing said component
CN101233087A (en) * 2005-07-26 2008-07-30 皮尔金顿北美公司 Silver-free low-E solar control coating
WO2007108445A1 (en) * 2006-03-20 2007-09-27 The Furukawa Electric Co., Ltd. Method of forming continuous thin film and linear glass substrate with thin film
US7670694B2 (en) * 2006-12-22 2010-03-02 Hitachi Global Storage Technologies Netherlands B.V. Media for recording devices
GB0808338D0 (en) 2008-05-08 2008-06-18 Pilkington Group Ltd Production of coated glass
US20120240634A1 (en) * 2011-03-23 2012-09-27 Pilkington Group Limited Method of depositing zinc oxide coatings by chemical vapor deposition
JP2014520201A (en) * 2011-03-23 2014-08-21 ピルキントン グループ リミテッド Apparatus for coating thin film coating and coating method using such apparatus
US8734903B2 (en) 2011-09-19 2014-05-27 Pilkington Group Limited Process for forming a silica coating on a glass substrate
FR2982609B1 (en) * 2011-11-16 2014-06-20 Saint Gobain HYDROPHOBIC GLAZING
EP2817433B1 (en) * 2012-02-23 2021-09-29 Pilkington Group Limited Chemical vapor deposition process for depositing a silica coating on a glass substrate
PL2879999T3 (en) * 2012-07-30 2020-01-31 Pilkington Group Limited A method of depositing a coating utilizing a coating apparatus
CN104812717A (en) * 2012-11-26 2015-07-29 旭硝子株式会社 Method for forming thin film
PL3137823T3 (en) 2014-04-30 2019-05-31 Arcelik As Improved water drainage assembly for use in a refrigeration appliance
GB201507330D0 (en) * 2015-04-29 2015-06-10 Pilkington Group Ltd Splash screen
US11795102B2 (en) * 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
EP3448820B1 (en) * 2016-04-26 2023-07-12 Pilkington Group Limited Corrosion resistant coated glass substrate
EP3676231A1 (en) * 2017-08-31 2020-07-08 Pilkington Group Limited Coated glass article, method of making the same, and photovoltaic cell made therewith
WO2019043399A1 (en) * 2017-08-31 2019-03-07 Pilkington Group Limited Chemical vapor deposition process for forming a silicon oxide coating
WO2023026049A1 (en) * 2021-08-26 2023-03-02 Pilkington Group Limited Method of producing a coated glass article
WO2023057756A1 (en) * 2021-10-06 2023-04-13 Pilkington Group Limited Method of forming a silicon oxide coating

Family Cites Families (15)

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Publication number Priority date Publication date Assignee Title
US496712A (en) * 1893-05-02 Running-gear
US4019877A (en) * 1975-10-21 1977-04-26 Westinghouse Electric Corporation Method for coating of polyimide by electrodeposition
GB1573154A (en) * 1977-03-01 1980-08-13 Pilkington Brothers Ltd Coating glass
US5165972A (en) * 1984-08-13 1992-11-24 Pilkington Plc Coated glass
GB8420534D0 (en) * 1984-08-13 1984-09-19 Pilkington Brothers Plc Coated products
US4661381A (en) * 1985-10-07 1987-04-28 Libbey-Owens-Ford Co. Continuous vapor deposition method for producing a coated glass article
US4946712A (en) * 1986-08-28 1990-08-07 Libbey-Owens-Ford Co. Glass coating method and resulting article
GB8630918D0 (en) * 1986-12-24 1987-02-04 Pilkington Brothers Plc Coatings on glass
GB8814922D0 (en) * 1988-06-23 1988-07-27 Pilkington Plc Coatings on glass
US5217753A (en) * 1989-02-21 1993-06-08 Libbey-Owens-Ford Co. Coated glass articles
GB8914047D0 (en) * 1989-06-19 1989-08-09 Glaverbel Method of and apparatus for pyrolytically forming an oxide coating on a hot glass substrate
US5221352A (en) * 1989-06-19 1993-06-22 Glaverbel Apparatus for pyrolytically forming an oxide coating on a hot glass substrate
GB2247691B (en) * 1990-08-31 1994-11-23 Glaverbel Method of coating glass
FR2677639B1 (en) * 1991-06-14 1994-02-25 Saint Gobain Vitrage Internal TECHNIQUE FOR FORMING BY PYROLYSIS IN A GASEOUS WAY A COATING BASED ON OXYGEN AND SILICON.
GB9127268D0 (en) * 1991-12-23 1992-02-19 Glaverbel Coated glass

Also Published As

Publication number Publication date
MX9702640A (en) 1997-07-31
WO1996011802A1 (en) 1996-04-25
AU3828995A (en) 1996-05-06
PL319633A1 (en) 1997-08-18
AU688153B2 (en) 1998-03-05
DE69522573T2 (en) 2002-08-22
JPH10506874A (en) 1998-07-07
ATE205136T1 (en) 2001-09-15
CA2159296C (en) 2007-01-30
TR199501271A3 (en) 1997-05-21
CA2159296A1 (en) 1996-04-15
CN1084674C (en) 2002-05-15
EP0785868A4 (en) 1998-01-21
ZA958310B (en) 1996-04-26
BR9509303A (en) 1997-12-23
KR100360629B1 (en) 2003-03-15
CN1169694A (en) 1998-01-07
US5798142A (en) 1998-08-25
HUT77872A (en) 1998-09-28
MY112816A (en) 2001-09-29
TR199501271A2 (en) 1997-05-21
JP4290760B2 (en) 2009-07-08
EP0785868A1 (en) 1997-07-30
CZ110197A3 (en) 1997-09-17
PL181307B1 (en) 2001-07-31
CZ293607B6 (en) 2004-06-16
ES2160176T3 (en) 2001-11-01
KR970706960A (en) 1997-12-01
EP0785868B1 (en) 2001-09-05
HU225402B1 (en) 2006-11-28
FI971553A0 (en) 1997-04-14
TW403727B (en) 2000-09-01
FI971553A (en) 1997-04-14

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Legal Events

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