DE69326204T2 - Farbstrahlkopf und sein Herstellungsverfahren - Google Patents
Farbstrahlkopf und sein HerstellungsverfahrenInfo
- Publication number
- DE69326204T2 DE69326204T2 DE69326204T DE69326204T DE69326204T2 DE 69326204 T2 DE69326204 T2 DE 69326204T2 DE 69326204 T DE69326204 T DE 69326204T DE 69326204 T DE69326204 T DE 69326204T DE 69326204 T2 DE69326204 T2 DE 69326204T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing process
- color beam
- beam head
- head
- color
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14379—Edge shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14576492 | 1992-06-05 | ||
JP15380892 | 1992-06-12 | ||
JP18123392 | 1992-07-08 | ||
JP18124092 | 1992-07-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69326204D1 DE69326204D1 (de) | 1999-10-07 |
DE69326204T2 true DE69326204T2 (de) | 2000-03-23 |
Family
ID=27472661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69326204T Expired - Lifetime DE69326204T2 (de) | 1992-06-05 | 1993-06-03 | Farbstrahlkopf und sein Herstellungsverfahren |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0580283B1 (de) |
JP (4) | JPH0671882A (de) |
DE (1) | DE69326204T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6550897B2 (en) | 2000-12-19 | 2003-04-22 | Fuji Xerox Co., Ltd. | Inkjet recording head and recording apparatus using the same |
Families Citing this family (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6164759A (en) * | 1990-09-21 | 2000-12-26 | Seiko Epson Corporation | Method for producing an electrostatic actuator and an inkjet head using it |
US5648806A (en) | 1992-04-02 | 1997-07-15 | Hewlett-Packard Company | Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer |
JP3144115B2 (ja) * | 1993-01-27 | 2001-03-12 | ブラザー工業株式会社 | インク噴射装置 |
EP0671372A3 (de) * | 1994-03-09 | 1996-07-10 | Seiko Epson Corp | Anodisches Bindeverfahren und Verfahren zur Herstellung eines Tintenstrahlkopfes unter Verwendung des Bindeverfahrens. |
US6371598B1 (en) | 1994-04-20 | 2002-04-16 | Seiko Epson Corporation | Ink jet recording apparatus, and an ink jet head |
US5992978A (en) * | 1994-04-20 | 1999-11-30 | Seiko Epson Corporation | Ink jet recording apparatus, and an ink jet head manufacturing method |
US6000785A (en) * | 1995-04-20 | 1999-12-14 | Seiko Epson Corporation | Ink jet head, a printing apparatus using the ink jet head, and a control method therefor |
US5894316A (en) * | 1995-04-20 | 1999-04-13 | Seiko Epson Corporation | Ink jet head with diaphragm having varying compliance or stepped opposing wall |
JPH09123437A (ja) | 1995-08-28 | 1997-05-13 | Seiko Epson Corp | インクジェットプリンタ及びインクジェット記録用インク |
KR100505514B1 (ko) * | 1996-12-20 | 2005-10-19 | 세이코 엡슨 가부시키가이샤 | 정전형액추에이터및그제조방법 |
JPH10305578A (ja) * | 1997-03-03 | 1998-11-17 | Seiko Epson Corp | インクジェット式記録ヘッド |
US6375310B1 (en) | 1997-03-26 | 2002-04-23 | Seiko Epson Corporation | Ink jet head, manufacturing method therefor, and ink jet recording apparatus |
WO1998047710A1 (fr) * | 1997-04-18 | 1998-10-29 | Seiko Epson Corporation | Tete a jet d'encre et enregistreur a jet d'encre pourvu de cette tete |
JPH11320873A (ja) | 1997-06-05 | 1999-11-24 | Ricoh Co Ltd | インクジェットヘッド |
US6234608B1 (en) * | 1997-06-05 | 2001-05-22 | Xerox Corporation | Magnetically actuated ink jet printing device |
JP3500636B2 (ja) | 1998-01-09 | 2004-02-23 | セイコーエプソン株式会社 | インクジェットヘッド及びその製造方法並びにインクジェット記録装置 |
US6315394B1 (en) | 1998-01-28 | 2001-11-13 | Seiko Epson Corporation | Method of manufacturing a silicon substrate with a recess, an ink jet head manufacturing method, a silicon substrate with a recess, and an ink jet head |
JP2000015804A (ja) | 1998-06-30 | 2000-01-18 | Ricoh Co Ltd | インクジェットヘッド及びその製造方法 |
JP3628182B2 (ja) | 1998-08-04 | 2005-03-09 | 株式会社リコー | インクジェットヘッド及びその作成方法 |
JP2000094696A (ja) | 1998-09-24 | 2000-04-04 | Ricoh Co Ltd | インクジェットヘッド及びその作製方法 |
US6367914B1 (en) | 1999-04-15 | 2002-04-09 | Ricoh Company, Ltd. | Electrostatic ink-jet head and method of production of the same |
JP2001026105A (ja) | 1999-07-15 | 2001-01-30 | Ricoh Co Ltd | インクジェットヘッド |
US6485126B1 (en) | 1999-08-05 | 2002-11-26 | Ricoh Company, Ltd. | Ink jet head and method of producing the same |
JP2001113701A (ja) | 1999-08-06 | 2001-04-24 | Ricoh Co Ltd | 静電型インクジェットヘッドおよびその製造方法 |
KR100368929B1 (ko) * | 2000-02-01 | 2003-01-24 | 한국과학기술원 | 발열장치 제조방법 및 열분사방식 잉크젯 프린트헤드제조방법 |
JP2001270110A (ja) | 2000-03-24 | 2001-10-02 | Ricoh Co Ltd | 液滴吐出ヘッド及びインクジェット記録装置 |
JP4144810B2 (ja) | 2000-06-21 | 2008-09-03 | 株式会社リコー | 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置 |
JP4342749B2 (ja) | 2000-08-04 | 2009-10-14 | 株式会社リコー | 液滴吐出ヘッド、インクカートリッジ及びインクジェット記録装置 |
US6568794B2 (en) | 2000-08-30 | 2003-05-27 | Ricoh Company, Ltd. | Ink-jet head, method of producing the same, and ink-jet printing system including the same |
US6299291B1 (en) * | 2000-09-29 | 2001-10-09 | Illinois Tool Works Inc. | Electrostatically switched ink jet device and method of operating the same |
JP2003001817A (ja) | 2001-06-20 | 2003-01-08 | Ricoh Co Ltd | ヘッド駆動装置及び画像記録装置 |
WO2003026897A1 (en) | 2001-09-20 | 2003-04-03 | Ricoh Company, Ltd. | Image recording apparatus and head driving control apparatus |
KR100669965B1 (ko) | 2002-05-20 | 2007-01-19 | 가부시키가이샤 리코 | 환경 변화에 대해 안정적인 동작 특성을 갖는 정전형액츄에이터 및 액적 토출 헤드 |
JP4408608B2 (ja) | 2002-06-24 | 2010-02-03 | 株式会社リコー | ヘッド駆動制御装置及び画像記録装置 |
JP2004042576A (ja) | 2002-07-16 | 2004-02-12 | Ricoh Co Ltd | ヘッド駆動制御装置及び画像記録装置 |
WO2004012942A1 (en) | 2002-08-06 | 2004-02-12 | Ricoh Company, Ltd. | Electrostatic actuator formed by a semiconductor manufacturing process |
JP4635580B2 (ja) * | 2004-11-25 | 2011-02-23 | セイコーエプソン株式会社 | エッチング液及びその製造方法、並びに液体噴射ヘッドの製造方法 |
JP4371092B2 (ja) | 2004-12-14 | 2009-11-25 | セイコーエプソン株式会社 | 静電アクチュエータ、液滴吐出ヘッド及びその製造方法、液滴吐出装置並びにデバイス |
JP4507965B2 (ja) * | 2005-04-15 | 2010-07-21 | セイコーエプソン株式会社 | 液滴吐出ヘッドの製造方法 |
JP4655807B2 (ja) * | 2005-08-02 | 2011-03-23 | セイコーエプソン株式会社 | 静電アクチュエータ、液滴吐出ヘッド及び液滴吐出装置 |
JP4811067B2 (ja) * | 2006-03-20 | 2011-11-09 | セイコーエプソン株式会社 | 静電アクチュエータ及び液滴吐出ヘッド |
GB0606685D0 (en) * | 2006-04-03 | 2006-05-10 | Xaar Technology Ltd | Droplet Deposition Apparatus |
JP4182360B2 (ja) | 2006-06-05 | 2008-11-19 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
EP2061846B1 (de) | 2006-09-15 | 2015-10-07 | Ricoh Company, Ltd. | Tinte für tintenstrahlaufzeichnung, tintensatz für tintenstrahlaufzeichnung, tintenmediensatz für tintenstrahlaufzeichnung, tintenpatrone, tintenstrahlaufzeichnungsverfahren und tintenstrahlaufzeichnungsgerät |
EP2028242B1 (de) | 2007-08-14 | 2013-07-10 | Ricoh Company, Ltd. | Tintenpatrone, Tintenaufzeichnungsverfahren, Tintenaufzeichnungsgerät und Tintenaufzeichnung damit |
JP2009149021A (ja) * | 2007-12-21 | 2009-07-09 | Seiko Epson Corp | 液滴吐出ヘッド、インクジェットプリンタ、液滴吐出ヘッドの製造方法およびインクジェットプリンタの製造方法 |
JP5381015B2 (ja) | 2008-10-30 | 2014-01-08 | 株式会社リコー | インクジェット記録用インクセット、インクカートリッジ、インクジェット記録方法及びインクジェット記録装置 |
JP5672065B2 (ja) | 2010-03-02 | 2015-02-18 | 株式会社リコー | インクジェット記録用インク、並びに、インクジェット記録用インクセット、インクカートリッジ、インクジェット記録方法、インクジェット記録装置、及びインク記録物 |
JP5601075B2 (ja) | 2010-08-04 | 2014-10-08 | 株式会社リコー | インクジェット用インク、並びにインクカートリッジ、インクジェット記録方法、インクジェット記録装置及びインク記録物 |
JP5825126B2 (ja) | 2011-03-14 | 2015-12-02 | 株式会社リコー | インクジェット用インク、インクジェット記録方法、及びインクジェット記録装置 |
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JP5942708B2 (ja) | 2011-09-13 | 2016-06-29 | 株式会社リコー | インクジェット用インク、インクジェット記録方法、インクジェット記録装置及びインク記録物 |
JP5810883B2 (ja) | 2011-12-14 | 2015-11-11 | 株式会社リコー | 画像形成方法 |
EP2614964B1 (de) | 2012-01-10 | 2017-01-04 | Ricoh Company, Ltd. | Bilderzeugungsverfahren |
JP6116864B2 (ja) | 2012-11-12 | 2017-04-19 | 株式会社リコー | 画像形成装置及びその画像形成方法 |
JP6163797B2 (ja) | 2013-03-06 | 2017-07-19 | 株式会社リコー | 画像形成装置、画像形成システム、画像形成方法及び印刷物の印刷方法 |
JP6269145B2 (ja) | 2013-03-13 | 2018-01-31 | 株式会社リコー | インクジェット用インク、該インクを用いたインクカートリッジ、インクジェット記録装置、及び、インク記録物 |
JP6186934B2 (ja) | 2013-06-24 | 2017-08-30 | 株式会社リコー | 液滴吐出ヘッドの制御装置、液滴吐出ヘッド、液滴吐出ヘッドの制御方法及び液滴吐出ヘッドの製造方法、並びに、その制御方法若しくは製造方法のプログラム及びそのプログラムを記録した記録媒体 |
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US9290005B1 (en) | 2014-09-11 | 2016-03-22 | Ricoh Company, Ltd. | Image formation apparatus, method for examining discharge of transparent droplets, and program for examining discharge of transparent droplets |
JP6696136B2 (ja) | 2014-10-10 | 2020-05-20 | 株式会社リコー | インクセット、及びインクジェット記録方法 |
JP6645201B2 (ja) | 2015-06-10 | 2020-02-14 | 株式会社リコー | インク、並びにインクジェット記録方法、インクジェット記録装置、及び記録物 |
US9868288B2 (en) | 2015-07-15 | 2018-01-16 | Ricoh Company, Ltd. | Cleaning liquid for inkjet recording apparatus, method for cleaning inkjet recording apparatus, recording method, and cleaning and filling liquid |
JP6741230B2 (ja) | 2015-07-27 | 2020-08-19 | 株式会社リコー | インク、インク収容容器及びインクジェット記録装置 |
US9873252B2 (en) | 2015-12-25 | 2018-01-23 | Ricoh Company, Ltd. | Printing device and printing method |
CN108699371A (zh) | 2016-01-22 | 2018-10-23 | 株式会社理光 | 墨、墨和基材的套件、喷墨印刷方法、喷墨印刷机和印刷物 |
US11278882B2 (en) | 2016-07-27 | 2022-03-22 | Hewlett-Packard Development Company, L.P. | Vibrating a dispense head to move fluid |
US10113078B2 (en) | 2016-10-17 | 2018-10-30 | Ricoh Company, Ltd. | Ink discharge device and ink discharge method |
CN109863259A (zh) * | 2016-11-03 | 2019-06-07 | Tgo科技株式会社 | 母板、母板的制造方法、掩模的制造方法及oled像素蒸镀方法 |
WO2019004488A1 (en) | 2017-06-28 | 2019-01-03 | Ricoh Company, Ltd. | INK, INK SET, INK CONTAINER, IMAGE FORMING METHOD, AND IMAGE FORMING APPARATUS |
EP3540041A1 (de) | 2018-03-16 | 2019-09-18 | Ricoh Company, Ltd. | Verfahren und vorrichtung zur herstellung von zellgewebe |
EP3686254A1 (de) | 2019-01-25 | 2020-07-29 | Ricoh Company, Ltd. | Tinte, verfahren zur herstellung von tinte, druckverfahren und druckvorrichtung |
US20210292709A1 (en) | 2020-03-23 | 2021-09-23 | Ricoh Commpany, Ltd. | Manufacturing method for substrate on which nerve cells are arranged |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4312008A (en) * | 1979-11-02 | 1982-01-19 | Dataproducts Corporation | Impulse jet head using etched silicon |
US4384899A (en) * | 1981-11-09 | 1983-05-24 | Motorola Inc. | Bonding method adaptable for manufacturing capacitive pressure sensing elements |
GB2146566B (en) * | 1983-09-16 | 1986-11-26 | Standard Telephones Cables Ltd | Electrostatic bonding |
JPS6159911A (ja) | 1984-08-30 | 1986-03-27 | Nec Corp | 切換スイツチ回路 |
JPH01246850A (ja) * | 1988-03-29 | 1989-10-02 | Fujitsu Ltd | 半導体基板及びその製法 |
JPH0212218A (ja) * | 1988-06-30 | 1990-01-17 | Sharp Corp | 可変干渉フィルターの製造方法 |
JPH02266943A (ja) * | 1989-04-07 | 1990-10-31 | Fujitsu Ltd | インクジェットヘッド |
JPH03288649A (ja) * | 1990-04-05 | 1991-12-18 | Seiko Epson Corp | 液体噴射ヘッド |
JPH03295654A (ja) * | 1990-04-13 | 1991-12-26 | Seiko Epson Corp | 液体噴射ヘッド |
JP2976479B2 (ja) * | 1990-04-17 | 1999-11-10 | セイコーエプソン株式会社 | インクジェットヘッド |
US5534900A (en) * | 1990-09-21 | 1996-07-09 | Seiko Epson Corporation | Ink-jet recording apparatus |
-
1993
- 1993-05-11 JP JP5109654A patent/JPH0671882A/ja active Pending
- 1993-06-03 DE DE69326204T patent/DE69326204T2/de not_active Expired - Lifetime
- 1993-06-03 EP EP93304334A patent/EP0580283B1/de not_active Expired - Lifetime
-
2002
- 2002-02-18 JP JP2002040106A patent/JP3351427B2/ja not_active Expired - Fee Related
- 2002-02-18 JP JP2002040105A patent/JP3381729B2/ja not_active Expired - Fee Related
- 2002-10-17 JP JP2002303235A patent/JP3412628B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6550897B2 (en) | 2000-12-19 | 2003-04-22 | Fuji Xerox Co., Ltd. | Inkjet recording head and recording apparatus using the same |
Also Published As
Publication number | Publication date |
---|---|
JP2003118126A (ja) | 2003-04-23 |
JP3351427B2 (ja) | 2002-11-25 |
JP2002283579A (ja) | 2002-10-03 |
EP0580283A3 (en) | 1995-08-23 |
JP3381729B2 (ja) | 2003-03-04 |
EP0580283B1 (de) | 1999-09-01 |
DE69326204D1 (de) | 1999-10-07 |
JP2002283569A (ja) | 2002-10-03 |
JP3412628B2 (ja) | 2003-06-03 |
EP0580283A2 (de) | 1994-01-26 |
JPH0671882A (ja) | 1994-03-15 |
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8364 | No opposition during term of opposition |