DE69326204T2 - Farbstrahlkopf und sein Herstellungsverfahren - Google Patents

Farbstrahlkopf und sein Herstellungsverfahren

Info

Publication number
DE69326204T2
DE69326204T2 DE69326204T DE69326204T DE69326204T2 DE 69326204 T2 DE69326204 T2 DE 69326204T2 DE 69326204 T DE69326204 T DE 69326204T DE 69326204 T DE69326204 T DE 69326204T DE 69326204 T2 DE69326204 T2 DE 69326204T2
Authority
DE
Germany
Prior art keywords
manufacturing process
color beam
beam head
head
color
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69326204T
Other languages
English (en)
Other versions
DE69326204D1 (de
Inventor
Mitsuro Atobe
Shinichi Kamisuki
Shinichi Yotsuya
Hiroshi Koeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69326204D1 publication Critical patent/DE69326204D1/de
Publication of DE69326204T2 publication Critical patent/DE69326204T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14314Structure of ink jet print heads with electrostatically actuated membrane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1629Manufacturing processes etching wet etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/11Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
DE69326204T 1992-06-05 1993-06-03 Farbstrahlkopf und sein Herstellungsverfahren Expired - Lifetime DE69326204T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP14576492 1992-06-05
JP15380892 1992-06-12
JP18123392 1992-07-08
JP18124092 1992-07-08

Publications (2)

Publication Number Publication Date
DE69326204D1 DE69326204D1 (de) 1999-10-07
DE69326204T2 true DE69326204T2 (de) 2000-03-23

Family

ID=27472661

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69326204T Expired - Lifetime DE69326204T2 (de) 1992-06-05 1993-06-03 Farbstrahlkopf und sein Herstellungsverfahren

Country Status (3)

Country Link
EP (1) EP0580283B1 (de)
JP (4) JPH0671882A (de)
DE (1) DE69326204T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6550897B2 (en) 2000-12-19 2003-04-22 Fuji Xerox Co., Ltd. Inkjet recording head and recording apparatus using the same

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US6164759A (en) * 1990-09-21 2000-12-26 Seiko Epson Corporation Method for producing an electrostatic actuator and an inkjet head using it
US5648806A (en) 1992-04-02 1997-07-15 Hewlett-Packard Company Stable substrate structure for a wide swath nozzle array in a high resolution inkjet printer
JP3144115B2 (ja) * 1993-01-27 2001-03-12 ブラザー工業株式会社 インク噴射装置
EP0671372A3 (de) * 1994-03-09 1996-07-10 Seiko Epson Corp Anodisches Bindeverfahren und Verfahren zur Herstellung eines Tintenstrahlkopfes unter Verwendung des Bindeverfahrens.
US6371598B1 (en) 1994-04-20 2002-04-16 Seiko Epson Corporation Ink jet recording apparatus, and an ink jet head
US5992978A (en) * 1994-04-20 1999-11-30 Seiko Epson Corporation Ink jet recording apparatus, and an ink jet head manufacturing method
US6000785A (en) * 1995-04-20 1999-12-14 Seiko Epson Corporation Ink jet head, a printing apparatus using the ink jet head, and a control method therefor
US5894316A (en) * 1995-04-20 1999-04-13 Seiko Epson Corporation Ink jet head with diaphragm having varying compliance or stepped opposing wall
JPH09123437A (ja) 1995-08-28 1997-05-13 Seiko Epson Corp インクジェットプリンタ及びインクジェット記録用インク
KR100505514B1 (ko) * 1996-12-20 2005-10-19 세이코 엡슨 가부시키가이샤 정전형액추에이터및그제조방법
JPH10305578A (ja) * 1997-03-03 1998-11-17 Seiko Epson Corp インクジェット式記録ヘッド
US6375310B1 (en) 1997-03-26 2002-04-23 Seiko Epson Corporation Ink jet head, manufacturing method therefor, and ink jet recording apparatus
WO1998047710A1 (fr) * 1997-04-18 1998-10-29 Seiko Epson Corporation Tete a jet d'encre et enregistreur a jet d'encre pourvu de cette tete
JPH11320873A (ja) 1997-06-05 1999-11-24 Ricoh Co Ltd インクジェットヘッド
US6234608B1 (en) * 1997-06-05 2001-05-22 Xerox Corporation Magnetically actuated ink jet printing device
JP3500636B2 (ja) 1998-01-09 2004-02-23 セイコーエプソン株式会社 インクジェットヘッド及びその製造方法並びにインクジェット記録装置
US6315394B1 (en) 1998-01-28 2001-11-13 Seiko Epson Corporation Method of manufacturing a silicon substrate with a recess, an ink jet head manufacturing method, a silicon substrate with a recess, and an ink jet head
JP2000015804A (ja) 1998-06-30 2000-01-18 Ricoh Co Ltd インクジェットヘッド及びその製造方法
JP3628182B2 (ja) 1998-08-04 2005-03-09 株式会社リコー インクジェットヘッド及びその作成方法
JP2000094696A (ja) 1998-09-24 2000-04-04 Ricoh Co Ltd インクジェットヘッド及びその作製方法
US6367914B1 (en) 1999-04-15 2002-04-09 Ricoh Company, Ltd. Electrostatic ink-jet head and method of production of the same
JP2001026105A (ja) 1999-07-15 2001-01-30 Ricoh Co Ltd インクジェットヘッド
US6485126B1 (en) 1999-08-05 2002-11-26 Ricoh Company, Ltd. Ink jet head and method of producing the same
JP2001113701A (ja) 1999-08-06 2001-04-24 Ricoh Co Ltd 静電型インクジェットヘッドおよびその製造方法
KR100368929B1 (ko) * 2000-02-01 2003-01-24 한국과학기술원 발열장치 제조방법 및 열분사방식 잉크젯 프린트헤드제조방법
JP2001270110A (ja) 2000-03-24 2001-10-02 Ricoh Co Ltd 液滴吐出ヘッド及びインクジェット記録装置
JP4144810B2 (ja) 2000-06-21 2008-09-03 株式会社リコー 液滴吐出ヘッド及びその製造方法、インクジェット記録装置並びに画像形成装置、液滴吐出装置
JP4342749B2 (ja) 2000-08-04 2009-10-14 株式会社リコー 液滴吐出ヘッド、インクカートリッジ及びインクジェット記録装置
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JP4408608B2 (ja) 2002-06-24 2010-02-03 株式会社リコー ヘッド駆動制御装置及び画像記録装置
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JP4811067B2 (ja) * 2006-03-20 2011-11-09 セイコーエプソン株式会社 静電アクチュエータ及び液滴吐出ヘッド
GB0606685D0 (en) * 2006-04-03 2006-05-10 Xaar Technology Ltd Droplet Deposition Apparatus
JP4182360B2 (ja) 2006-06-05 2008-11-19 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
EP2061846B1 (de) 2006-09-15 2015-10-07 Ricoh Company, Ltd. Tinte für tintenstrahlaufzeichnung, tintensatz für tintenstrahlaufzeichnung, tintenmediensatz für tintenstrahlaufzeichnung, tintenpatrone, tintenstrahlaufzeichnungsverfahren und tintenstrahlaufzeichnungsgerät
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JP5942708B2 (ja) 2011-09-13 2016-06-29 株式会社リコー インクジェット用インク、インクジェット記録方法、インクジェット記録装置及びインク記録物
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JP6645201B2 (ja) 2015-06-10 2020-02-14 株式会社リコー インク、並びにインクジェット記録方法、インクジェット記録装置、及び記録物
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JPH03288649A (ja) * 1990-04-05 1991-12-18 Seiko Epson Corp 液体噴射ヘッド
JPH03295654A (ja) * 1990-04-13 1991-12-26 Seiko Epson Corp 液体噴射ヘッド
JP2976479B2 (ja) * 1990-04-17 1999-11-10 セイコーエプソン株式会社 インクジェットヘッド
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Cited By (1)

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JP2003118126A (ja) 2003-04-23
JP3351427B2 (ja) 2002-11-25
JP2002283579A (ja) 2002-10-03
EP0580283A3 (en) 1995-08-23
JP3381729B2 (ja) 2003-03-04
EP0580283B1 (de) 1999-09-01
DE69326204D1 (de) 1999-10-07
JP2002283569A (ja) 2002-10-03
JP3412628B2 (ja) 2003-06-03
EP0580283A2 (de) 1994-01-26
JPH0671882A (ja) 1994-03-15

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