DE69310236D1 - Räumlicher Lichtmodulator und seine Herstellungsverfahren - Google Patents

Räumlicher Lichtmodulator und seine Herstellungsverfahren

Info

Publication number
DE69310236D1
DE69310236D1 DE69310236T DE69310236T DE69310236D1 DE 69310236 D1 DE69310236 D1 DE 69310236D1 DE 69310236 T DE69310236 T DE 69310236T DE 69310236 T DE69310236 T DE 69310236T DE 69310236 D1 DE69310236 D1 DE 69310236D1
Authority
DE
Germany
Prior art keywords
light modulator
spatial light
manufacturing processes
processes
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69310236T
Other languages
English (en)
Other versions
DE69310236T2 (de
Inventor
Kuniharu Takizawa
Hiroshi Kikuchi
Yukihisa Osugi
Shoji Tange
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Japan Broadcasting Corp
Original Assignee
NGK Insulators Ltd
Nippon Hoso Kyokai NHK
Japan Broadcasting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4018989A external-priority patent/JP2647780B2/ja
Priority claimed from JP4018988A external-priority patent/JPH05216060A/ja
Priority claimed from JP1898792A external-priority patent/JP2647779B2/ja
Application filed by NGK Insulators Ltd, Nippon Hoso Kyokai NHK, Japan Broadcasting Corp filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69310236D1 publication Critical patent/DE69310236D1/de
Publication of DE69310236T2 publication Critical patent/DE69310236T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/135—Liquid crystal cells structurally associated with a photoconducting or a ferro-electric layer, the properties of which can be optically or electrically varied
    • G02F1/1351—Light-absorbing or blocking layers

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
DE69310236T 1992-02-04 1993-02-04 Räumlicher Lichtmodulator und seine Herstellungsverfahren Expired - Fee Related DE69310236T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP4018989A JP2647780B2 (ja) 1992-02-04 1992-02-04 空間光変調素子及びその製造方法
JP4018988A JPH05216060A (ja) 1992-02-04 1992-02-04 空間光変調素子及びその製造方法
JP1898792A JP2647779B2 (ja) 1992-02-04 1992-02-04 空間光変調素子及びその製造方法

Publications (2)

Publication Number Publication Date
DE69310236D1 true DE69310236D1 (de) 1997-06-05
DE69310236T2 DE69310236T2 (de) 1997-10-16

Family

ID=27282446

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310236T Expired - Fee Related DE69310236T2 (de) 1992-02-04 1993-02-04 Räumlicher Lichtmodulator und seine Herstellungsverfahren

Country Status (3)

Country Link
US (1) US5471331A (de)
EP (2) EP0556985B1 (de)
DE (1) DE69310236T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6071616A (en) * 1996-12-05 2000-06-06 Texas Instruments Incorporated Opaque low reflecting coating aperture on glass
DE19914112A1 (de) * 1999-03-23 2000-09-28 Deutsche Telekom Ag Verfahren zum Aufbringen einer lichtblockierenden Schicht zwischen photoleitender Schicht und Spiegel bei der Herstellung eines optisch adressierbaren, ortsauflösenden Lichtmodulators OASLM
US20050077005A1 (en) * 2003-10-14 2005-04-14 Photon Dynamics, Inc. Method for fabricating electro-optic light modulator
JP4674287B2 (ja) * 2003-12-12 2011-04-20 奇美電子股▲ふん▼有限公司 画像表示装置
DE202005011574U1 (de) * 2005-07-22 2006-11-23 Aeg Gesellschaft für Moderne Informationssysteme mbH Flüssigkristallanzeige
KR20160061548A (ko) * 2014-11-21 2016-06-01 삼성디스플레이 주식회사 어레이 테스트 모듈레이터 및 이를 포함하는 박막트랜지스터 기판 검사 장치
US10928579B2 (en) 2016-06-27 2021-02-23 Viavi Solutions Inc. Optical devices
JP6837930B2 (ja) 2016-06-27 2021-03-03 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 高色度フレーク
EP3263650B1 (de) * 2016-06-27 2019-08-14 Viavi Solutions Inc. Magnetische gegenstände
US10707298B2 (en) 2018-09-05 2020-07-07 Micron Technology, Inc. Methods of forming semiconductor structures
US10790145B2 (en) 2018-09-05 2020-09-29 Micron Technology, Inc. Methods of forming crystallized materials from amorphous materials
US11018229B2 (en) 2018-09-05 2021-05-25 Micron Technology, Inc. Methods of forming semiconductor structures
US10734540B1 (en) * 2019-07-03 2020-08-04 Advanced Semiconductor Engineering, Inc. Optical device and method for manufacturing the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178445A (en) * 1989-06-09 1993-01-12 Garrett Moddel Optically addressed spatial light modulator
US5260815A (en) * 1989-08-03 1993-11-09 Nippon Hoso Kyokai Light writing type projection display using polymer-dispersed liquid crystal and liquid crystal television set as image light source
DE69027158T2 (de) * 1989-08-11 1996-10-24 Sharp Kk Lichtadressierte Flüssigkristallanzeigevorrichtung
US5084777A (en) * 1989-11-14 1992-01-28 Greyhawk Systems, Inc. Light addressed liquid crystal light valve incorporating electrically insulating light blocking material of a-SiGe:H
WO1991007689A1 (en) * 1989-11-14 1991-05-30 Greyhawk Systems, Inc. Improved light addressed liquid crystal light valve incorporating electrically insulating light blocking material
US5132814A (en) * 1990-01-26 1992-07-21 Victor Company Of Japan, Ltd. Liquid crystal spatial light modulator with multilayer photoconductor
JPH03221924A (ja) * 1990-01-26 1991-09-30 Victor Co Of Japan Ltd 空間光変調器
US5148298A (en) * 1990-03-27 1992-09-15 Victor Company Of Japan Spatial light modulator
US5272554A (en) * 1991-01-28 1993-12-21 Samsung Electronics Co. Ltd. Liquid crystal light valve having a SiO2 /TiO2 dielectric mirror and a Si/SiO2 light blocking layer

Also Published As

Publication number Publication date
EP0722112A2 (de) 1996-07-17
EP0556985A1 (de) 1993-08-25
DE69310236T2 (de) 1997-10-16
EP0556985B1 (de) 1997-05-02
US5471331A (en) 1995-11-28
EP0722112A3 (de) 1996-07-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee