DE69224975D1 - Tintenstrahldruckkopf und sein Herstellungsverfahren - Google Patents

Tintenstrahldruckkopf und sein Herstellungsverfahren

Info

Publication number
DE69224975D1
DE69224975D1 DE69224975T DE69224975T DE69224975D1 DE 69224975 D1 DE69224975 D1 DE 69224975D1 DE 69224975 T DE69224975 T DE 69224975T DE 69224975 T DE69224975 T DE 69224975T DE 69224975 D1 DE69224975 D1 DE 69224975D1
Authority
DE
Germany
Prior art keywords
manufacturing process
inkjet printhead
printhead
inkjet
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69224975T
Other languages
English (en)
Other versions
DE69224975T2 (de
Inventor
Hisashi Miyazawa
Takashi Nakamura
Osamu Nakamura
Shinji Yasukawa
Minoru Usui
Tomoaki Abe
Satoru Hosono
Takahiro Naka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP34534391A external-priority patent/JP3199076B2/ja
Priority claimed from JP2283392A external-priority patent/JP3173520B2/ja
Priority claimed from JP2512692A external-priority patent/JP3262134B2/ja
Priority claimed from JP4519592A external-priority patent/JP3246517B2/ja
Priority claimed from JP8400392A external-priority patent/JP3149890B2/ja
Priority claimed from JP10305992A external-priority patent/JP3185812B2/ja
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of DE69224975D1 publication Critical patent/DE69224975D1/de
Application granted granted Critical
Publication of DE69224975T2 publication Critical patent/DE69224975T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1618—Fixing the piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69224975T 1991-12-26 1992-12-24 Tintenstrahldruckkopf und sein Herstellungsverfahren Expired - Lifetime DE69224975T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP34534391A JP3199076B2 (ja) 1991-12-26 1991-12-26 インクジェット記録ヘッド、及びインクジェット記録ヘッド用圧電ユニット
JP2283392A JP3173520B2 (ja) 1992-02-07 1992-02-07 インクジェットヘッド及びその製造方法
JP2512692A JP3262134B2 (ja) 1992-02-12 1992-02-12 インクジェット記録ヘッド、及びその製造方法
JP4519592A JP3246517B2 (ja) 1992-03-03 1992-03-03 インクジェットヘッド
JP8400392A JP3149890B2 (ja) 1992-04-06 1992-04-06 インクジェットヘッド
JP10306092 1992-04-22
JP10305992A JP3185812B2 (ja) 1992-04-22 1992-04-22 インクジェットヘッド

Publications (2)

Publication Number Publication Date
DE69224975D1 true DE69224975D1 (de) 1998-05-07
DE69224975T2 DE69224975T2 (de) 1998-07-30

Family

ID=27563981

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69224975T Expired - Lifetime DE69224975T2 (de) 1991-12-26 1992-12-24 Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69233523T Expired - Lifetime DE69233523T2 (de) 1991-12-26 1992-12-24 Tintenstrahldruckkopf

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE69233523T Expired - Lifetime DE69233523T2 (de) 1991-12-26 1992-12-24 Tintenstrahldruckkopf

Country Status (4)

Country Link
US (2) US5517225A (de)
EP (2) EP0795404B1 (de)
DE (2) DE69224975T2 (de)
HK (1) HK1010045A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5764257A (en) 1991-12-26 1998-06-09 Seiko Epson Corporation Ink jet recording head
FR2710877B1 (fr) * 1993-10-07 1997-05-09 Seiko Epson Corp Organe piézoélectrique de tête d'enregistrement à jets d'encre, et son procédé de fabrication.
JP3235635B2 (ja) * 1993-11-29 2001-12-04 セイコーエプソン株式会社 インクジェット記録ヘッド
JP3422342B2 (ja) * 1994-03-28 2003-06-30 セイコーエプソン株式会社 インクジェツト式記録ヘツド
JP3235638B2 (ja) * 1994-07-25 2001-12-04 セイコーエプソン株式会社 インクジェット式記録ヘッド、及びその製造方法
US5757400A (en) * 1996-02-01 1998-05-26 Spectra, Inc. High resolution matrix ink jet arrangement
JP3589277B2 (ja) * 1997-01-27 2004-11-17 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69805457T2 (de) 1997-02-21 2003-01-16 Seiko Epson Corp Tintenstrahlaufzeichnungskopf
DE60006878T2 (de) * 1999-03-29 2004-10-14 Seiko Epson Corp. Tintenstrahlaufzeichnungskopf, piezoelektrische Vibratorelementeinheit und Verfahren zur Herstellung der piezoelektrischen Vibratorelementeinheit
US6578953B2 (en) 1999-03-29 2003-06-17 Seiko Epson Corporation Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit
EP1364793B1 (de) * 2001-03-01 2009-07-15 Ngk Insulators, Ltd. Kammförmiges, piezoelektrisches stellglied und herstellungsverfahren dafür
US7407270B2 (en) 2002-03-18 2008-08-05 Seiko Epson Corporation Liquid jet head and liquid jet apparatus
DE102006025362A1 (de) * 2006-05-31 2007-12-06 Siemens Ag Vollaktiver Piezoaktor und Verfahren zu seiner Herstellung
JP5188158B2 (ja) * 2006-12-15 2013-04-24 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US8029111B2 (en) 2007-11-05 2011-10-04 Seiko Epson Corporation Droplet ejection head and droplet ejection apparatus
US8029110B2 (en) * 2007-11-05 2011-10-04 Seiko Epson Corporation Droplet ejection head and droplet ejection apparatus
JP4865688B2 (ja) * 2007-12-11 2012-02-01 セイコーエプソン株式会社 液滴吐出ヘッドおよび液滴吐出装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900162A (en) * 1974-01-10 1975-08-19 Ibm Method and apparatus for generation of multiple uniform fluid filaments
US4095232A (en) * 1977-07-18 1978-06-13 The Mead Corporation Apparatus for producing multiple uniform fluid filaments and drops
US4250510A (en) * 1979-09-04 1981-02-10 The Mead Corporation Fluid jet device
US4439780A (en) * 1982-01-04 1984-03-27 Exxon Research And Engineering Co. Ink jet apparatus with improved transducer support
JPS58119871A (ja) * 1982-01-04 1983-07-16 データプロダクツ　コーポレイション インクジエツト装置
JPS59162061A (ja) * 1983-03-07 1984-09-12 Hitachi Koki Co Ltd オンデマンド型印字ヘッド
EP0126649B1 (de) * 1983-05-19 1988-04-13 The Mead Corporation Flüssigkeitsstrahldruckkopf
JPS608953A (ja) * 1983-06-29 1985-01-17 Omron Tateisi Electronics Co プログラム・アナライザ
DE3342844A1 (de) * 1983-11-26 1985-06-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Mikroplanarer tintenstrahldruckkopf
JPS61283553A (ja) * 1985-06-10 1986-12-13 Ricoh Co Ltd インクジエツトヘツドの振動ユニツト及びその製造方法
US4768266A (en) * 1986-08-29 1988-09-06 Dataproducts Corporation Method of making an ink jet printer transducer array
JPS63265646A (ja) * 1987-11-20 1988-11-02 Nec Corp 噴射ヘッドの製造方法
JPH0245985A (ja) * 1988-08-08 1990-02-15 Nippon Telegr & Teleph Corp <Ntt> 光回路素子の放熱性塔載基板および実装法
JP2841397B2 (ja) * 1988-12-01 1998-12-24 セイコーエプソン株式会社 インクジェット記録ヘッド
EP0372521B1 (de) * 1988-12-07 1993-04-14 Seiko Epson Corporation Auf Abruf arbeitender Tintenstrahldruckkopf
JPH02220848A (ja) * 1989-02-23 1990-09-04 Seiko Epson Corp プラスチックインクジェットヘッド
JPH02277640A (ja) * 1989-04-19 1990-11-14 Seiko Epson Corp インクジェットヘッド
JP2807497B2 (ja) * 1989-08-14 1998-10-08 株式会社リコー インクジェット記録装置
US4937589A (en) * 1989-08-23 1990-06-26 Eastman Kodak Company Continuous ink jet print heads
JPH03234538A (ja) * 1990-02-09 1991-10-18 Sharp Corp インクジェット記録ヘッドの製造方法
JP2802138B2 (ja) * 1990-03-15 1998-09-24 シャープ株式会社 インクジェット記録ヘッド
JP2637830B2 (ja) * 1990-03-23 1997-08-06 シャープ株式会社 インクジェット記録ヘッド

Also Published As

Publication number Publication date
HK1010045A1 (en) 1999-06-11
EP0795404A2 (de) 1997-09-17
EP0795404B1 (de) 2005-06-08
EP0550030A2 (de) 1993-07-07
EP0795404A3 (de) 2000-11-02
EP0550030A3 (en) 1993-08-25
EP0550030B1 (de) 1998-04-01
US5630274A (en) 1997-05-20
DE69233523D1 (de) 2005-07-14
DE69233523T2 (de) 2006-03-16
DE69224975T2 (de) 1998-07-30
US5517225A (en) 1996-05-14

Similar Documents

Publication Publication Date Title
DE69200361T2 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren.
DE69432197D1 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69320766T2 (de) Tintenstrahl-Druckkopf und sein Herstellungsverfahren
DE69210115D1 (de) Thermische Tintenstrahldruckkopfstruktur und Herstellungsverfahren
DE69327762T2 (de) Farbstrahldruckkopf, dessen Herstellungsverfahren und zugehöriges Farbstrahlgerät
DE69307178T2 (de) Piezoelektrischer Tintenstrahldruckkopf und Herstellungsverfahren
DE69306198D1 (de) Tintenstrahlaufzeichnungskopf und sein Herstellungsverfahren
DE69600167D1 (de) Tintenstrahldruckkopf und dessen Herstellungsverfahren
DE69224975T2 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69209039T2 (de) Tintenstrahldruckverfahren
DE69326204T2 (de) Farbstrahlkopf und sein Herstellungsverfahren
DE69528444D1 (de) Tintenstrahlaufzeichnungskopf, sein Herstellungsverfahren und Aufzeichnungsvorrichtung
DE69228286D1 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69320383D1 (de) Tintenstrahlkopfherstellungsverfahren
DE69229767T2 (de) Tintenstrahlkopfherstellungsverfahren, Tintenstrahlkopf und Tintenstrahlgerät
DE69206689T2 (de) Tintenstrahldruckkopf und Tintenstrahldrucker
DE69205022D1 (de) Organopentasiloxan und sein Herstellungsverfahren.
DE69804724T2 (de) Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69708067D1 (de) Integrierter Tintenstrahldruckkopf und sein Herstellungsverfahren
DE69508881D1 (de) Tintenstrahlkopf und Herstellungsverfahren
DE69201656D1 (de) Thermodruckkopf und sein Herstellungsverfahren.
DE69232774T2 (de) Tintenstrahldrucker-Aufbau und zugehöriges Verfahren
DE69201481D1 (de) Umhüllte Schweisskopf-Baugruppe und Herstellungsverfahren.
DE69020517D1 (de) Thermodruckkopf und Herstellungsverfahren dazu.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
R071 Expiry of right

Ref document number: 550030

Country of ref document: EP