DE69311277T2 - Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen - Google Patents

Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen

Info

Publication number
DE69311277T2
DE69311277T2 DE69311277T DE69311277T DE69311277T2 DE 69311277 T2 DE69311277 T2 DE 69311277T2 DE 69311277 T DE69311277 T DE 69311277T DE 69311277 T DE69311277 T DE 69311277T DE 69311277 T2 DE69311277 T2 DE 69311277T2
Authority
DE
Germany
Prior art keywords
suspended
manufacturing process
protection tube
tube switch
dimensional metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69311277T
Other languages
English (en)
Other versions
DE69311277D1 (de
Inventor
Etienne Bornand
Jean-Luc Simon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR9215213A external-priority patent/FR2699323B1/fr
Application filed by Asulab AG filed Critical Asulab AG
Application granted granted Critical
Publication of DE69311277D1 publication Critical patent/DE69311277D1/de
Publication of DE69311277T2 publication Critical patent/DE69311277T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0078—Switches making use of microelectromechanical systems [MEMS] with parallel movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field
DE69311277T 1992-12-15 1993-12-09 Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen Expired - Lifetime DE69311277T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9215213A FR2699323B1 (fr) 1992-12-15 1992-12-15 Contacteur "reed" et procédé de fabrication de microstructures métalliques tridimensionnelles suspendues.
CH199193 1993-07-02

Publications (2)

Publication Number Publication Date
DE69311277D1 DE69311277D1 (de) 1997-07-10
DE69311277T2 true DE69311277T2 (de) 1998-01-15

Family

ID=25689202

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311277T Expired - Lifetime DE69311277T2 (de) 1992-12-15 1993-12-09 Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen

Country Status (7)

Country Link
US (1) US5430421A (de)
EP (1) EP0602538B1 (de)
JP (1) JPH06223686A (de)
KR (1) KR100326129B1 (de)
DE (1) DE69311277T2 (de)
HK (1) HK1006604A1 (de)
TW (1) TW264556B (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112015003991B4 (de) * 2014-09-26 2020-03-19 Dongguan Chuanqiang Electronic Technology Co., Ltd. Hochstrom-Reedschalter

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FR2721435B1 (fr) * 1994-06-17 1996-08-02 Asulab Sa Microcontacteur magnétique et son procédé de fabrication.
DE19648539C2 (de) * 1996-11-25 2000-04-13 Mannesmann Vdo Ag Passiver magnetischer Positionssensor
CH691559A5 (fr) * 1997-04-21 2001-08-15 Asulab Sa Micro-contacteur magnétique et son procédé de fabrication.
DE69714408T2 (de) * 1997-04-23 2003-04-24 Asulab Sa Magnetischer Mikroschalter und Herstellungsverfahren
DE19736674C1 (de) * 1997-08-22 1998-11-26 Siemens Ag Mikromechanisches elektrostatisches Relais und Verfahren zu dessen Herstellung
EP0951068A1 (de) 1998-04-17 1999-10-20 Interuniversitair Micro-Elektronica Centrum Vzw Herstellungsverfahren für eine Mikrostruktur mit Innenraum
US6147790A (en) * 1998-06-02 2000-11-14 Texas Instruments Incorporated Spring-ring micromechanical device
KR100506073B1 (ko) * 1998-10-26 2005-09-26 삼성전자주식회사 고진공패키징마이크로자이로스코프및그제조방법
DE19854803A1 (de) * 1998-11-27 2000-05-31 Bosch Gmbh Robert Verfahren zur Herstellung einer lokal verstärkten metallischen Mikrostruktur
JP3379484B2 (ja) * 1999-07-09 2003-02-24 日本電気株式会社 高周波装置およびその製造方法
US6780001B2 (en) * 1999-07-30 2004-08-24 Formfactor, Inc. Forming tool for forming a contoured microelectronic spring mold
US6853067B1 (en) 1999-10-12 2005-02-08 Microassembly Technologies, Inc. Microelectromechanical systems using thermocompression bonding
DE10043549C1 (de) * 2000-09-01 2002-06-20 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
US6804552B2 (en) * 2000-11-03 2004-10-12 Medtronic, Inc. MEMs switching circuit and method for an implantable medical device
US20020096421A1 (en) * 2000-11-29 2002-07-25 Cohn Michael B. MEMS device with integral packaging
US6711317B2 (en) * 2001-01-25 2004-03-23 Lucent Technologies Inc. Resiliently packaged MEMs device and method for making same
US20090163980A1 (en) * 2007-12-21 2009-06-25 Greatbatch Ltd. Switch for turning off therapy delivery of an active implantable medical device during mri scans
US7301334B2 (en) * 2001-09-17 2007-11-27 Schneider Electric Industries Sas Micro magnetic proximity sensor system
AUPR846701A0 (en) * 2001-10-25 2001-11-15 Microtechnology Centre Management Limited A method of fabrication of micro-devices
CN100565740C (zh) * 2002-09-18 2009-12-02 麦克弗森公司 层压机电系统
FR2849016B1 (fr) * 2002-12-18 2005-06-10 Commissariat Energie Atomique Procede de realisation d'une micro-structure suspendue plane, utilisant une couche sacrificielle en materiau polymere et composant obtenu
US7215229B2 (en) * 2003-09-17 2007-05-08 Schneider Electric Industries Sas Laminated relays with multiple flexible contacts
US7321282B2 (en) * 2005-02-17 2008-01-22 Honeywell International, Inc. MEM's reed switch array
US7692521B1 (en) 2005-05-12 2010-04-06 Microassembly Technologies, Inc. High force MEMS device
TWI395258B (zh) * 2005-11-11 2013-05-01 Semiconductor Energy Lab 微結構以及微機電系統的製造方法
US7463123B2 (en) * 2005-11-22 2008-12-09 University Of South Florida Nanometer electromechanical switch and fabrication process
JP2007207498A (ja) * 2006-01-31 2007-08-16 Oki Sensor Device Corp 機構デバイス
US8665041B2 (en) * 2008-03-20 2014-03-04 Ht Microanalytical, Inc. Integrated microminiature relay
KR101434280B1 (ko) * 2008-03-20 2014-09-05 에이치티 마이크로아날리티칼 아이엔씨 집적 리드 스위치
US8451077B2 (en) 2008-04-22 2013-05-28 International Business Machines Corporation MEMS switches with reduced switching voltage and methods of manufacture
US8635765B2 (en) * 2011-06-15 2014-01-28 International Business Machines Corporation Method of forming micro-electrical-mechanical structure (MEMS)
DE102014210717A1 (de) * 2014-06-05 2015-12-17 Robert Bosch Gmbh Füllstandssensor für Kraftfahrzeugtank mit metallischem Abstandshalterelement
JP2016177989A (ja) * 2015-03-20 2016-10-06 アルプス電気株式会社 磁気リードスイッチの製造方法
JP2017073227A (ja) * 2015-10-05 2017-04-13 アルプス電気株式会社 磁気リードスイッチ
JP2017073229A (ja) * 2015-10-05 2017-04-13 アルプス電気株式会社 磁気リードスイッチ
JP2017073228A (ja) * 2015-10-05 2017-04-13 アルプス電気株式会社 磁気リードスイッチ
JP2017073230A (ja) * 2015-10-05 2017-04-13 アルプス電気株式会社 磁気リードスイッチ
US10145906B2 (en) * 2015-12-17 2018-12-04 Analog Devices Global Devices, systems and methods including magnetic structures
JP6950613B2 (ja) * 2018-04-11 2021-10-13 Tdk株式会社 磁気作動型ｍｅｍｓスイッチ

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JPS55115216A (en) * 1979-02-27 1980-09-05 Fujitsu Ltd Method of forming movable electrode on base
US4915983A (en) * 1985-06-10 1990-04-10 The Foxboro Company Multilayer circuit board fabrication process
JPS6188417A (ja) * 1985-10-08 1986-05-06 オムロン株式会社 無接点スイッチの製造方法
DD248454B1 (de) * 1986-04-18 1988-11-02 Ilmenau Tech Hochschule Miniaturisiertes elektromagnetisches schaltelement
KR950003244B1 (ko) * 1986-12-17 1995-04-06 더 폭스보로 컴패니 다층 회로판 제조공정
JPH073553Y2 (ja) * 1987-10-26 1995-01-30 株式会社東海理化電機製作所 小型磁気スイッチ
DE3812414A1 (de) * 1988-04-14 1989-10-26 Standard Elektrik Lorenz Ag Verfahren zum herstellen einer allseitig geschirmten signalleitung
JPH081542Y2 (ja) * 1988-10-27 1996-01-17 株式会社東海理化電機製作所 磁気応動スイッチ
JPH0736295Y2 (ja) * 1988-10-28 1995-08-16 株式会社東海理化電機製作所 過電流検出センサ
JPH02148637A (ja) * 1988-11-30 1990-06-07 Tokai Rika Co Ltd 磁気応動スイッチ
US4899439A (en) * 1989-06-15 1990-02-13 Microelectronics And Computer Technology Corporation Method of fabricating a high density electrical interconnect
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JPH0636472B2 (ja) * 1990-05-28 1994-05-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 多層配線基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112015003991B4 (de) * 2014-09-26 2020-03-19 Dongguan Chuanqiang Electronic Technology Co., Ltd. Hochstrom-Reedschalter

Also Published As

Publication number Publication date
EP0602538B1 (de) 1997-06-04
JPH06223686A (ja) 1994-08-12
KR940016737A (ko) 1994-07-25
US5430421A (en) 1995-07-04
KR100326129B1 (ko) 2002-11-13
DE69311277D1 (de) 1997-07-10
EP0602538A1 (de) 1994-06-22
HK1006604A1 (en) 1999-03-05
TW264556B (de) 1995-12-01

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