DE69511782T2 - Magnetischer Mikroschalter und sein Herstellungsverfahren - Google Patents

Magnetischer Mikroschalter und sein Herstellungsverfahren

Info

Publication number
DE69511782T2
DE69511782T2 DE69511782T DE69511782T DE69511782T2 DE 69511782 T2 DE69511782 T2 DE 69511782T2 DE 69511782 T DE69511782 T DE 69511782T DE 69511782 T DE69511782 T DE 69511782T DE 69511782 T2 DE69511782 T2 DE 69511782T2
Authority
DE
Germany
Prior art keywords
manufacturing process
magnetic microswitch
microswitch
magnetic
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69511782T
Other languages
English (en)
Other versions
DE69511782D1 (de
Inventor
Etienne Bornand
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asulab AG
Original Assignee
Asulab AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asulab AG filed Critical Asulab AG
Publication of DE69511782D1 publication Critical patent/DE69511782D1/de
Application granted granted Critical
Publication of DE69511782T2 publication Critical patent/DE69511782T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/64—Protective enclosures, baffle plates, or screens for contacts
    • H01H1/66—Contacts sealed in an evacuated or gas-filled envelope, e.g. magnetic dry-reed contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H36/00—Switches actuated by change of magnetic field or of electric field, e.g. by change of relative position of magnet and switch, by shielding
    • H01H2036/0093—Micromechanical switches actuated by a change of the magnetic field

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacture Of Switches (AREA)
  • Micromachines (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Thin Magnetic Films (AREA)
  • Magnetic Heads (AREA)
DE69511782T 1994-06-17 1995-06-01 Magnetischer Mikroschalter und sein Herstellungsverfahren Expired - Lifetime DE69511782T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9407468A FR2721435B1 (fr) 1994-06-17 1994-06-17 Microcontacteur magnétique et son procédé de fabrication.

Publications (2)

Publication Number Publication Date
DE69511782D1 DE69511782D1 (de) 1999-10-07
DE69511782T2 true DE69511782T2 (de) 2000-04-20

Family

ID=9464353

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69511782T Expired - Lifetime DE69511782T2 (de) 1994-06-17 1995-06-01 Magnetischer Mikroschalter und sein Herstellungsverfahren

Country Status (8)

Country Link
US (1) US5605614A (de)
EP (1) EP0688033B1 (de)
JP (1) JP3641018B2 (de)
KR (1) KR100334312B1 (de)
CN (1) CN1050436C (de)
DE (1) DE69511782T2 (de)
ES (1) ES2138683T3 (de)
FR (1) FR2721435B1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10043549C1 (de) * 2000-09-01 2002-06-20 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
DE112008002554B4 (de) 2007-10-15 2018-05-09 Epcos Ag Verfahren zur Herstellung eines MEMS-Elements auf einem Substrat

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE29613790U1 (de) * 1996-08-09 1996-09-26 Festo Kg Mikroschalter
EP1015669B1 (de) * 1997-04-04 2010-11-17 University Of Southern California Galvanisches verfahren zur herstellung einer mehrlagenstruktur
CH691559A5 (fr) * 1997-04-21 2001-08-15 Asulab Sa Micro-contacteur magnétique et son procédé de fabrication.
DE69714408T2 (de) * 1997-04-23 2003-04-24 Asulab Sa Magnetischer Mikroschalter und Herstellungsverfahren
CA2211830C (en) * 1997-08-22 2002-08-13 Cindy Xing Qiu Miniature electromagnetic microwave switches and switch arrays
US6713908B1 (en) * 1998-03-31 2004-03-30 California Institute Of Technology Using a micromachined magnetostatic relay in commutating a DC motor
US20090163980A1 (en) * 2007-12-21 2009-06-25 Greatbatch Ltd. Switch for turning off therapy delivery of an active implantable medical device during mri scans
FR2826645B1 (fr) * 2001-07-02 2004-06-04 Memscap Composant microelectromecanique
US7301334B2 (en) * 2001-09-17 2007-11-27 Schneider Electric Industries Sas Micro magnetic proximity sensor system
AUPR846701A0 (en) * 2001-10-25 2001-11-15 Microtechnology Centre Management Limited A method of fabrication of micro-devices
US9614266B2 (en) 2001-12-03 2017-04-04 Microfabrica Inc. Miniature RF and microwave components and methods for fabricating such components
AU2002360464A1 (en) * 2001-12-03 2003-06-17 Memgen Corporation Miniature rf and microwave components and methods for fabricating such components
JP3770158B2 (ja) * 2001-12-26 2006-04-26 ソニー株式会社 Ｍｅｍｓ素子の製造方法
US9244101B2 (en) * 2003-02-04 2016-01-26 University Of Southern California Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
US8613846B2 (en) * 2003-02-04 2013-12-24 Microfabrica Inc. Multi-layer, multi-material fabrication methods for producing micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
US10416192B2 (en) 2003-02-04 2019-09-17 Microfabrica Inc. Cantilever microprobes for contacting electronic components
US20050189959A1 (en) * 2003-02-04 2005-09-01 Microfabrica Inc. Electrochemical fabrication process for forming multilayer multimaterial microprobe structures
US9671429B2 (en) 2003-05-07 2017-06-06 University Of Southern California Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
WO2004101857A2 (en) * 2003-05-07 2004-11-25 Microfabrica Inc. Methods and apparatus for forming multi-layer structures using adhered masks
US10297421B1 (en) 2003-05-07 2019-05-21 Microfabrica Inc. Plasma etching of dielectric sacrificial material from reentrant multi-layer metal structures
US10641792B2 (en) 2003-12-31 2020-05-05 University Of Southern California Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties
JP2010501114A (ja) * 2006-08-15 2010-01-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 磁界生成装置
JP4694519B2 (ja) * 2007-02-28 2011-06-08 富士通株式会社 マイクロ構造体およびマイクロ構造体製造方法
CN102867699B (zh) * 2011-07-08 2016-03-02 富士康(昆山)电脑接插件有限公司 微开关及其制造方法
US11973301B2 (en) 2018-09-26 2024-04-30 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US11262383B1 (en) 2018-09-26 2022-03-01 Microfabrica Inc. Probes having improved mechanical and/or electrical properties for making contact between electronic circuit elements and methods for making
US11867721B1 (en) 2019-12-31 2024-01-09 Microfabrica Inc. Probes with multiple springs, methods for making, and methods for using
US11761982B1 (en) 2019-12-31 2023-09-19 Microfabrica Inc. Probes with planar unbiased spring elements for electronic component contact and methods for making such probes
US11774467B1 (en) 2020-09-01 2023-10-03 Microfabrica Inc. Method of in situ modulation of structural material properties and/or template shape

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE248454C (de) *
SE378475B (de) * 1974-02-07 1975-09-01 Ygfors Trading Ab
JPS52131167A (en) * 1976-04-26 1977-11-02 Nippon Electric Co Multilayer circuit substrate
US4436766A (en) * 1981-05-15 1984-03-13 The United States Of America As Represented By The Secretary Of The Navy Plated bridge step-over connection for monolithic devices and method for making thereof
DD248454B1 (de) * 1986-04-18 1988-11-02 Ilmenau Tech Hochschule Miniaturisiertes elektromagnetisches schaltelement
US4899439A (en) * 1989-06-15 1990-02-13 Microelectronics And Computer Technology Corporation Method of fabricating a high density electrical interconnect
US4920639A (en) * 1989-08-04 1990-05-01 Microelectronics And Computer Technology Corporation Method of making a multilevel electrical airbridge interconnect
JPH0636472B2 (ja) * 1990-05-28 1994-05-11 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 多層配線基板の製造方法
EP0602538B1 (de) * 1992-12-15 1997-06-04 Asulab S.A. Schutzrohrschalter und Herstellungsverfahren für aufgehängte dreidimensionale metallische Mikrostrukturen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10043549C1 (de) * 2000-09-01 2002-06-20 Little Things Factory Gmbh Mikroschalter und Verfahren zu dessen Herstellung
DE112008002554B4 (de) 2007-10-15 2018-05-09 Epcos Ag Verfahren zur Herstellung eines MEMS-Elements auf einem Substrat

Also Published As

Publication number Publication date
DE69511782D1 (de) 1999-10-07
KR960003515A (ko) 1996-01-26
FR2721435B1 (fr) 1996-08-02
CN1118510A (zh) 1996-03-13
KR100334312B1 (ko) 2002-11-27
CN1050436C (zh) 2000-03-15
JP3641018B2 (ja) 2005-04-20
US5605614A (en) 1997-02-25
ES2138683T3 (es) 2000-01-16
JPH087728A (ja) 1996-01-12
EP0688033A1 (de) 1995-12-20
EP0688033B1 (de) 1999-09-01
FR2721435A1 (fr) 1995-12-22

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