DE69213976D1 - Stimmgabelinertialsensor mit einem Ende und Verfahren - Google Patents

Stimmgabelinertialsensor mit einem Ende und Verfahren

Info

Publication number
DE69213976D1
DE69213976D1 DE69213976T DE69213976T DE69213976D1 DE 69213976 D1 DE69213976 D1 DE 69213976D1 DE 69213976 T DE69213976 T DE 69213976T DE 69213976 T DE69213976 T DE 69213976T DE 69213976 D1 DE69213976 D1 DE 69213976D1
Authority
DE
Germany
Prior art keywords
tines
tuning fork
inertial sensor
procedure
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69213976T
Other languages
English (en)
Other versions
DE69213976T2 (de
Inventor
David F Macy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
New SD Inc
Original Assignee
New SD Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24679821&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69213976(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by New SD Inc filed Critical New SD Inc
Publication of DE69213976D1 publication Critical patent/DE69213976D1/de
Application granted granted Critical
Publication of DE69213976T2 publication Critical patent/DE69213976T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Axle Suspensions And Sidecars For Cycles (AREA)
DE69213976T 1991-03-12 1992-02-28 Stimmgabelinertialsensor mit einem Ende und Verfahren Expired - Fee Related DE69213976T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66782891A 1991-03-12 1991-03-12

Publications (2)

Publication Number Publication Date
DE69213976D1 true DE69213976D1 (de) 1996-10-31
DE69213976T2 DE69213976T2 (de) 1997-04-03

Family

ID=24679821

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69213976T Expired - Fee Related DE69213976T2 (de) 1991-03-12 1992-02-28 Stimmgabelinertialsensor mit einem Ende und Verfahren

Country Status (7)

Country Link
US (3) US5408876B1 (de)
EP (1) EP0503807B1 (de)
JP (1) JP3007216B2 (de)
AT (1) ATE143489T1 (de)
AU (1) AU659434B2 (de)
CA (1) CA2062114C (de)
DE (1) DE69213976T2 (de)

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WO1994011706A1 (en) * 1992-11-17 1994-05-26 Citizen Watch Co., Ltd. Angular velocity detector circuit
JP3123301B2 (ja) * 1993-04-16 2001-01-09 株式会社村田製作所 角速度センサ
DE4332944A1 (de) * 1993-09-28 1995-03-30 Bosch Gmbh Robert Sensor mit einer Quarz-Stimmgabel
JP3029001B2 (ja) * 1993-10-28 2000-04-04 トヨタ自動車株式会社 振動子
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FR2735868B1 (fr) * 1995-06-21 1997-08-08 Asulab Sa Dispositif de mesure d'une vitesse angulaire
JP3536497B2 (ja) * 1995-12-21 2004-06-07 株式会社デンソー 振動型角速度検出装置
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US6747393B2 (en) 1996-11-26 2004-06-08 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6018212A (en) 1996-11-26 2000-01-25 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US5998911A (en) * 1996-11-26 1999-12-07 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6437483B2 (en) 1996-11-26 2002-08-20 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
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US5987987A (en) 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
DE19853063B4 (de) 1997-11-18 2011-07-28 DENSO CORPORATION, Aichi-pref. Winkelgeschwindigkeitssensor und Diagnosesystem dafür
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JP3335122B2 (ja) * 1998-05-06 2002-10-15 松下電器産業株式会社 角速度センサ
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US6854315B2 (en) * 2002-04-22 2005-02-15 Northrop Grumman Corporation Quadrature compensation technique for vibrating gyroscopes
US6858972B2 (en) * 2002-06-21 2005-02-22 Ngk Insulators, Ltd. Vibrator, vibratory gyroscope, and vibration adjusting method
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US7721590B2 (en) * 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
WO2005103620A1 (en) * 2004-04-14 2005-11-03 Analog Devices, Inc. Inertial sensor with a linear array of sensor elements
JP4412477B2 (ja) * 2004-06-11 2010-02-10 株式会社デンソー 振動型角速度センサ
US7124632B2 (en) * 2004-07-26 2006-10-24 Bei Technologies, Inc. Electronically configurable rate sensor circuit and method
US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
US7478557B2 (en) * 2004-10-01 2009-01-20 Analog Devices, Inc. Common centroid micromachine driver
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
JP4502219B2 (ja) * 2006-10-10 2010-07-14 日本電波工業株式会社 音叉型水晶振動子素子の製造方法
US8390912B2 (en) 2007-01-10 2013-03-05 Seiko Epson Corporation Actuator, optical scanner and image forming device
JP5287722B2 (ja) * 2007-09-13 2013-09-11 パナソニック株式会社 角速度センサ
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
JP5560806B2 (ja) 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
JP2011209002A (ja) * 2010-03-29 2011-10-20 Seiko Epson Corp 振動片、角速度センサー、および電子機器
JP2012039509A (ja) * 2010-08-10 2012-02-23 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP5652155B2 (ja) 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
JP5838689B2 (ja) * 2011-09-26 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5838695B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5838696B2 (ja) 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
CN103245339B (zh) * 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6078968B2 (ja) 2012-03-29 2017-02-15 セイコーエプソン株式会社 振動片の製造方法
JP5970698B2 (ja) * 2012-03-29 2016-08-17 セイコーエプソン株式会社 振動片、センサーユニット、電子機器
JP6160027B2 (ja) 2012-04-27 2017-07-12 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
JP5974629B2 (ja) 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
US8890446B2 (en) * 2012-11-14 2014-11-18 Northrop Grumman Systems Corporation Amplitude control for vibrating resonant sensors
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6337443B2 (ja) * 2013-10-30 2018-06-06 セイコーエプソン株式会社 振動片、角速度センサー、電子機器及び移動体
JP6105648B2 (ja) * 2015-02-10 2017-03-29 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法

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JPS60178313A (ja) * 1984-02-24 1985-09-12 Japan Aviation Electronics Ind Ltd 振動ジヤイロ用振動子
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JPS61191917A (ja) * 1985-02-20 1986-08-26 Tadashi Konno 音叉型振動ジヤイロ
JPS61191916A (ja) * 1985-02-20 1986-08-26 Tadashi Konno 横振動音片ジヤイロ
JPH0743262B2 (ja) * 1985-06-21 1995-05-15 東京航空計器株式会社 振動ジャイロ
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JPS6358111A (ja) * 1986-08-27 1988-03-12 Japan Storage Battery Co Ltd 音叉形圧電体角速度センサ−
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US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
JPH02129514A (ja) * 1988-11-10 1990-05-17 Canon Inc 角速度センサー
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Also Published As

Publication number Publication date
JPH05256723A (ja) 1993-10-05
US5522249A (en) 1996-06-04
CA2062114A1 (en) 1992-09-13
US5343749B1 (en) 2000-01-11
EP0503807B1 (de) 1996-09-25
AU659434B2 (en) 1995-05-18
AU1137792A (en) 1992-09-17
EP0503807A3 (en) 1993-01-20
JP3007216B2 (ja) 2000-02-07
EP0503807A2 (de) 1992-09-16
US5343749A (en) 1994-09-06
DE69213976T2 (de) 1997-04-03
US5408876A (en) 1995-04-25
CA2062114C (en) 2001-02-27
ATE143489T1 (de) 1996-10-15
US5408876B1 (en) 2000-06-20

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8365 Fully valid after opposition proceedings
8339 Ceased/non-payment of the annual fee