ATE143489T1 - Stimmgabelinertialsensor mit einem ende und verfahren - Google Patents

Stimmgabelinertialsensor mit einem ende und verfahren

Info

Publication number
ATE143489T1
ATE143489T1 AT92301746T AT92301746T ATE143489T1 AT E143489 T1 ATE143489 T1 AT E143489T1 AT 92301746 T AT92301746 T AT 92301746T AT 92301746 T AT92301746 T AT 92301746T AT E143489 T1 ATE143489 T1 AT E143489T1
Authority
AT
Austria
Prior art keywords
tines
tuning fork
linear sensor
single end
housing
Prior art date
Application number
AT92301746T
Other languages
English (en)
Inventor
David F Macy
Original Assignee
New Sd Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24679821&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE143489(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by New Sd Inc filed Critical New Sd Inc
Application granted granted Critical
Publication of ATE143489T1 publication Critical patent/ATE143489T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Axle Suspensions And Sidecars For Cycles (AREA)
AT92301746T 1991-03-12 1992-02-28 Stimmgabelinertialsensor mit einem ende und verfahren ATE143489T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66782891A 1991-03-12 1991-03-12

Publications (1)

Publication Number Publication Date
ATE143489T1 true ATE143489T1 (de) 1996-10-15

Family

ID=24679821

Family Applications (1)

Application Number Title Priority Date Filing Date
AT92301746T ATE143489T1 (de) 1991-03-12 1992-02-28 Stimmgabelinertialsensor mit einem ende und verfahren

Country Status (7)

Country Link
US (3) US5408876B1 (de)
EP (1) EP0503807B1 (de)
JP (1) JP3007216B2 (de)
AT (1) ATE143489T1 (de)
AU (1) AU659434B2 (de)
CA (1) CA2062114C (de)
DE (1) DE69213976T2 (de)

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US7237169B2 (en) * 2004-07-26 2007-06-26 Bei Technologies, Inc. Cross-monitoring sensor system and method
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JP4502219B2 (ja) * 2006-10-10 2010-07-14 日本電波工業株式会社 音叉型水晶振動子素子の製造方法
US8390912B2 (en) 2007-01-10 2013-03-05 Seiko Epson Corporation Actuator, optical scanner and image forming device
WO2009034682A1 (ja) * 2007-09-13 2009-03-19 Panasonic Corporation 角速度センサ
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
JP5560806B2 (ja) 2010-03-19 2014-07-30 セイコーエプソン株式会社 ジャイロ素子、ジャイロセンサー、および電子機器
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JP5652155B2 (ja) 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
JP5838689B2 (ja) 2011-09-26 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5838695B2 (ja) * 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
JP5838696B2 (ja) 2011-09-29 2016-01-06 セイコーエプソン株式会社 センサー素子、センサー素子の製造方法、センサーデバイスおよび電子機器
CN103245339B (zh) * 2012-02-14 2017-05-24 精工爱普生株式会社 振动片、传感器单元以及电子设备
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6078968B2 (ja) 2012-03-29 2017-02-15 セイコーエプソン株式会社 振動片の製造方法
JP5970698B2 (ja) 2012-03-29 2016-08-17 セイコーエプソン株式会社 振動片、センサーユニット、電子機器
JP6160027B2 (ja) 2012-04-27 2017-07-12 セイコーエプソン株式会社 振動片およびジャイロセンサー並びに電子機器および移動体
JP5974629B2 (ja) * 2012-05-23 2016-08-23 セイコーエプソン株式会社 振動片、振動片の製造方法、角速度センサー、電子機器、移動体
US8890446B2 (en) * 2012-11-14 2014-11-18 Northrop Grumman Systems Corporation Amplitude control for vibrating resonant sensors
JP6209886B2 (ja) * 2013-07-18 2017-10-11 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器および移動体
JP6337443B2 (ja) * 2013-10-30 2018-06-06 セイコーエプソン株式会社 振動片、角速度センサー、電子機器及び移動体
JP6105648B2 (ja) * 2015-02-10 2017-03-29 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法

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Also Published As

Publication number Publication date
DE69213976T2 (de) 1997-04-03
EP0503807B1 (de) 1996-09-25
AU1137792A (en) 1992-09-17
US5343749B1 (en) 2000-01-11
CA2062114A1 (en) 1992-09-13
US5408876B1 (en) 2000-06-20
AU659434B2 (en) 1995-05-18
EP0503807A3 (en) 1993-01-20
JPH05256723A (ja) 1993-10-05
US5343749A (en) 1994-09-06
EP0503807A2 (de) 1992-09-16
DE69213976D1 (de) 1996-10-31
CA2062114C (en) 2001-02-27
JP3007216B2 (ja) 2000-02-07
US5408876A (en) 1995-04-25
US5522249A (en) 1996-06-04

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