WO2009034682A1 - 角速度センサ - Google Patents

角速度センサ Download PDF

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Publication number
WO2009034682A1
WO2009034682A1 PCT/JP2008/002257 JP2008002257W WO2009034682A1 WO 2009034682 A1 WO2009034682 A1 WO 2009034682A1 JP 2008002257 W JP2008002257 W JP 2008002257W WO 2009034682 A1 WO2009034682 A1 WO 2009034682A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
electrode portion
angular velocity
velocity sensor
rise
Prior art date
Application number
PCT/JP2008/002257
Other languages
English (en)
French (fr)
Inventor
Satoshi Ohuchi
Hiroyuki Aizawa
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to US12/672,925 priority Critical patent/US8201450B2/en
Priority to JP2009532048A priority patent/JP5287722B2/ja
Publication of WO2009034682A1 publication Critical patent/WO2009034682A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

固定部と、屈曲部を有する可撓部を介して固定部と連結された錘部と、屈曲部において外側に配置された第１電極部と、屈曲部において内側に配置された第２電極部とを有し、第１電極部および第２電極部は、それぞれ、圧電層を間に介在させた上部電極と下部電極とを備え、第１電極部の幅は第２電極部の幅よりも狭い構成により、第１電極部において発生する電荷の量と第２電極部において発生する電荷の量との差を抑制することができ、その結果、検知精度を向上させることができる。
PCT/JP2008/002257 2007-09-13 2008-08-21 角速度センサ WO2009034682A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/672,925 US8201450B2 (en) 2007-09-13 2008-08-21 Angular velocity sensor
JP2009532048A JP5287722B2 (ja) 2007-09-13 2008-08-21 角速度センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-237719 2007-09-13
JP2007237719 2007-09-13

Publications (1)

Publication Number Publication Date
WO2009034682A1 true WO2009034682A1 (ja) 2009-03-19

Family

ID=40451703

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002257 WO2009034682A1 (ja) 2007-09-13 2008-08-21 角速度センサ

Country Status (3)

Country Link
US (1) US8201450B2 (ja)
JP (1) JP5287722B2 (ja)
WO (1) WO2009034682A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011093077A1 (ja) * 2010-01-29 2011-08-04 パナソニック株式会社 角速度センサ
US20140238131A1 (en) * 2011-09-30 2014-08-28 Panasonic Corporation Inertial force sensor
US20150204897A1 (en) * 2010-06-25 2015-07-23 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101529257B (zh) * 2006-11-14 2011-06-15 松下电器产业株式会社 传感器
JP2010190706A (ja) * 2009-02-18 2010-09-02 Panasonic Corp 慣性力センサ
JP2011155629A (ja) * 2009-12-29 2011-08-11 Seiko Epson Corp 振動片、振動子、発振器、電子機器、および周波数調整方法
JP5581887B2 (ja) * 2009-12-29 2014-09-03 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、および周波数調整方法
US9303993B2 (en) * 2010-12-28 2016-04-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
US20140238129A1 (en) * 2011-10-24 2014-08-28 Panasonic Corporation Angular velocity sensor and detection element used in same
JPWO2015075908A1 (ja) * 2013-11-19 2017-03-16 パナソニックＩｐマネジメント株式会社 角速度センサ素子およびそれを用いた角速度センサ
JP2015224893A (ja) * 2014-05-26 2015-12-14 Tdk株式会社 角速度センサ

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JPH09287957A (ja) * 1996-02-21 1997-11-04 Fujitsu Ltd 音叉型圧電振動ジャイロ
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
JP2005003588A (ja) * 2003-06-13 2005-01-06 Matsushita Electric Ind Co Ltd 角速度センサ用振動子の特性検査方法
JP2006017538A (ja) * 2004-06-30 2006-01-19 Kyocera Kinseki Corp 振動子及び角速度センサ
WO2006006361A1 (ja) * 2004-07-08 2006-01-19 Matsushita Electric Industrial Co., Ltd. 角速度センサおよびその製造方法
JP2006162315A (ja) * 2004-12-03 2006-06-22 Matsushita Electric Ind Co Ltd 複合センサ

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JP3344888B2 (ja) * 1995-12-28 2002-11-18 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JPH1047971A (ja) * 1996-08-05 1998-02-20 Nippon Soken Inc 角速度センサ
JP3975518B2 (ja) * 1997-08-21 2007-09-12 株式会社豊田中央研究所 圧電セラミックス
JP4122564B2 (ja) * 1998-04-24 2008-07-23 セイコーエプソン株式会社 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
US6268068B1 (en) * 1998-10-06 2001-07-31 Case Western Reserve University Low stress polysilicon film and method for producing same
DE19964218C2 (de) * 1999-10-08 2003-04-10 Hahn Schickard Ges Elektromechanisches Bauelement mit einem Polymerkörper und Verfahren zur Herstellung desselben
US6717506B2 (en) * 2000-11-02 2004-04-06 Murata Manufacturing Co., Ltd. Chip-type resistor element
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
US6880399B1 (en) * 2001-11-29 2005-04-19 Matsushita Electric Industrial Co., Ltd. Angular velocity sensor
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JP3791485B2 (ja) * 2002-06-04 2006-06-28 株式会社村田製作所 音叉形振動子およびそれを用いた振動ジャイロおよびそれを用いた電子装置および音叉形振動子の製造方法
JP3807437B2 (ja) * 2002-06-10 2006-08-09 松下電器産業株式会社 角速度センサ
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JP4529444B2 (ja) * 2004-01-13 2010-08-25 パナソニック株式会社 角速度センサ
JP4631329B2 (ja) * 2004-07-01 2011-02-16 パナソニック株式会社 角速度センサ及びその製造方法
JP4415997B2 (ja) * 2007-03-19 2010-02-17 セイコーエプソン株式会社 角速度センサおよび電子機器
JP2008233029A (ja) * 2007-03-23 2008-10-02 Seiko Epson Corp 加速度センサおよび電子機器
JP2008241547A (ja) * 2007-03-28 2008-10-09 Seiko Epson Corp 加速度センサおよび電子機器
JP4299360B2 (ja) * 2007-08-21 2009-07-22 富士フイルム株式会社 圧電素子及びそれを用いた液体吐出装置
JP5525143B2 (ja) * 2008-06-05 2014-06-18 日立金属株式会社 圧電薄膜素子及び圧電薄膜デバイス
US8384497B2 (en) * 2009-12-18 2013-02-26 Hao Zhang Piezoelectric resonator structure having an interference structure
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Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09287957A (ja) * 1996-02-21 1997-11-04 Fujitsu Ltd 音叉型圧電振動ジャイロ
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
JP2005003588A (ja) * 2003-06-13 2005-01-06 Matsushita Electric Ind Co Ltd 角速度センサ用振動子の特性検査方法
JP2006017538A (ja) * 2004-06-30 2006-01-19 Kyocera Kinseki Corp 振動子及び角速度センサ
WO2006006361A1 (ja) * 2004-07-08 2006-01-19 Matsushita Electric Industrial Co., Ltd. 角速度センサおよびその製造方法
JP2006162315A (ja) * 2004-12-03 2006-06-22 Matsushita Electric Ind Co Ltd 複合センサ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011093077A1 (ja) * 2010-01-29 2011-08-04 パナソニック株式会社 角速度センサ
US8991248B2 (en) 2010-01-29 2015-03-31 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor
US20150204897A1 (en) * 2010-06-25 2015-07-23 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same
US9835641B2 (en) * 2010-06-25 2017-12-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same
US20140238131A1 (en) * 2011-09-30 2014-08-28 Panasonic Corporation Inertial force sensor
US20150192602A1 (en) * 2011-09-30 2015-07-09 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
US9632105B2 (en) * 2011-09-30 2017-04-25 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor for suppressing fluctuation of detection sensitivity

Also Published As

Publication number Publication date
US8201450B2 (en) 2012-06-19
JP5287722B2 (ja) 2013-09-11
JPWO2009034682A1 (ja) 2010-12-24
US20110203371A1 (en) 2011-08-25

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