DE69128709T2 - Aluminiumnitrid-sinterkörper und seine herstellung - Google Patents

Aluminiumnitrid-sinterkörper und seine herstellung

Info

Publication number
DE69128709T2
DE69128709T2 DE69128709T DE69128709T DE69128709T2 DE 69128709 T2 DE69128709 T2 DE 69128709T2 DE 69128709 T DE69128709 T DE 69128709T DE 69128709 T DE69128709 T DE 69128709T DE 69128709 T2 DE69128709 T2 DE 69128709T2
Authority
DE
Germany
Prior art keywords
aluminum nitride
sintered body
mixture
less
thermal conductivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69128709T
Other languages
German (de)
English (en)
Other versions
DE69128709D1 (de
Inventor
Masaya Miyake
Kohei Shimoda
Kouiti Sogabe
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2288570A external-priority patent/JPH04164863A/ja
Priority claimed from JP3249734A external-priority patent/JPH0585828A/ja
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69128709D1 publication Critical patent/DE69128709D1/de
Publication of DE69128709T2 publication Critical patent/DE69128709T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69128709T 1990-10-29 1991-10-29 Aluminiumnitrid-sinterkörper und seine herstellung Expired - Lifetime DE69128709T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2288570A JPH04164863A (ja) 1990-10-29 1990-10-29 窒化アルミニウム焼結体及びその製造方法
JP3249734A JPH0585828A (ja) 1991-09-27 1991-09-27 窒化アルミニウム焼結体およびその製造方法
PCT/JP1991/001474 WO1992007805A1 (fr) 1990-10-29 1991-10-29 Piece frittee en nitrure d'aluminium et procede de production

Publications (2)

Publication Number Publication Date
DE69128709D1 DE69128709D1 (de) 1998-02-19
DE69128709T2 true DE69128709T2 (de) 1998-06-04

Family

ID=26539448

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69128709T Expired - Lifetime DE69128709T2 (de) 1990-10-29 1991-10-29 Aluminiumnitrid-sinterkörper und seine herstellung

Country Status (7)

Country Link
US (2) US5273700A (OSRAM)
EP (1) EP0507961B1 (OSRAM)
KR (1) KR950006209B1 (OSRAM)
DE (1) DE69128709T2 (OSRAM)
SG (1) SG47121A1 (OSRAM)
TW (1) TW230789B (OSRAM)
WO (1) WO1992007805A1 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3404813B2 (ja) * 1992-09-04 2003-05-12 住友電気工業株式会社 窒化アルミニウム焼結体およびその製造方法
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
JP3100871B2 (ja) * 1995-07-11 2000-10-23 株式会社東芝 窒化アルミニウム焼結体
US5958813A (en) * 1996-11-26 1999-09-28 Kyocera Corporation Semi-insulating aluminum nitride sintered body
JP4812144B2 (ja) 1998-07-22 2011-11-09 住友電気工業株式会社 窒化アルミニウム焼結体及びその製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855376A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
JPS62187172A (ja) * 1986-02-12 1987-08-15 株式会社村田製作所 窒化アルミニウム焼結体の製造方法
JPS63274668A (ja) * 1987-05-01 1988-11-11 Nec Corp 窒化アルミニウム焼結体の製造方法
KR920003226B1 (ko) * 1988-05-16 1992-04-24 스미도모덴기고오교오 가부시기가이샤 질화알루미늄소결체와 그것을 사용한 회로기판 및 반도체패키지
JPH02124772A (ja) * 1988-05-16 1990-05-14 Sumitomo Electric Ind Ltd 窒化アルミニウム焼結体および製造法
WO1990002717A1 (en) * 1988-09-02 1990-03-22 The Dow Chemical Company Increasing aluminum nitride thermal conductivity via pre-densification treatment
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
JPH0492864A (ja) * 1990-08-06 1992-03-25 Sumitomo Electric Ind Ltd 窒化アルミニウム粉末および焼結体およびその製造法
JP2943275B2 (ja) * 1990-08-07 1999-08-30 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
US5273700A (en) 1993-12-28
KR950006209B1 (ko) 1995-06-12
EP0507961B1 (en) 1998-01-14
EP0507961A4 (OSRAM) 1994-02-02
TW230789B (OSRAM) 1994-09-21
EP0507961A1 (en) 1992-10-14
WO1992007805A1 (fr) 1992-05-14
SG47121A1 (en) 1998-03-20
US5312786A (en) 1994-05-17
DE69128709D1 (de) 1998-02-19
KR920703477A (ko) 1992-12-18

Similar Documents

Publication Publication Date Title
DE3347862C2 (OSRAM)
DE3108677C2 (de) "Optisch durchscheinender polykristalliner Sinterkörper und Verfahren zu seiner Herstellung"
DE69414727T2 (de) Druckloses sintern von siliziumnitid bei tiefer temperatur
DE3627317C2 (OSRAM)
DE69736205T2 (de) Aluminumnitridsinterkörper, Gegenstand mit eingebettetem Metall, elektronisch funktionalem Material und elektrostatische Einspannvorrichtung
DE69635908T2 (de) Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
DE2932789C2 (de) Polykristalline transparente Spinelsinterkörper und Verfahren zu deren Herstellung
DE102010050553B4 (de) Hexagonales Bariumtitanatpulver, Erzeugungsverfahren hierfür, dielektrische Keramikzusammensetzung und elektronische Komponente
DE3650264T2 (de) Aluminiumnitridsinterkörper und Verfahren zu seiner Herstellung.
DE2800174C2 (OSRAM)
DE69530678T2 (de) Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür
DE3127649A1 (de) Dichtgesinterter siliciumcarbid-keramikkoerper
DE4331877A1 (de) Verbundmaterial auf der Basis von Zirconiumoxid und Verfahren zu dessen Herstellung
DE2759159A1 (de) Polykristalliner siliziumnitrid- sinterkoerper und verfahren zu dessen herstellung
DE3610041A1 (de) Keramik auf zirkonoxidbasis
DE2920795A1 (de) Hochfester und temperaturwechselbestaendiger keramikformkoerper, insbesondere aus mullit, seine herstellung und verwendung
DE69117090T2 (de) Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung
EP0002067A1 (de) Verfahren zur Herstellung von polykristallinen dichten Formkörpern aus Borcarbid durch drucklose Sinterung
DE3800749C2 (OSRAM)
DE60125129T2 (de) Werkstoff mit geringem Volumenwiderstand, Aluminiumnitridsinterkörper und Gegenstand für die Halbleiterherstellung
DE69118613T2 (de) Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung
DE2528869B2 (de) Sinterkörper auf der Basis von Siliziumnitrid und ein Verfahren zu dessen Herstellung
DE2910059C2 (de) Verfahren zur Herstellung von feinteiligem Siliziumkarbid sowie dessen Verwendung zur Herstellung von hochdichten Sinterkörpern
DE69112542T2 (de) Selbstarmierter Siliciumnitrid-Keramikkörper und Verfahren zu seiner Herstellung.
EP0021239A1 (de) Verfahren zur Herstellung von dichten Formkörpern aus polykristallinem alpha-Siliciumcarbid durch Heisspressen und so hergestellte Formkörper

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM

8330 Complete renunciation