DE69118613T2 - Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung - Google Patents

Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung

Info

Publication number
DE69118613T2
DE69118613T2 DE69118613T DE69118613T DE69118613T2 DE 69118613 T2 DE69118613 T2 DE 69118613T2 DE 69118613 T DE69118613 T DE 69118613T DE 69118613 T DE69118613 T DE 69118613T DE 69118613 T2 DE69118613 T2 DE 69118613T2
Authority
DE
Germany
Prior art keywords
production
sintered body
thermally conductive
aluminum nitride
nitride sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69118613T
Other languages
English (en)
Other versions
DE69118613D1 (de
Inventor
Kouhei Shimoda
Takao Maeda
Kouichi Sogabe
Masaya Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16582526&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69118613(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Application granted granted Critical
Publication of DE69118613D1 publication Critical patent/DE69118613D1/de
Publication of DE69118613T2 publication Critical patent/DE69118613T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69118613T 1990-08-07 1991-07-31 Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung Expired - Fee Related DE69118613T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2210022A JP2943275B2 (ja) 1990-08-07 1990-08-07 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Publications (2)

Publication Number Publication Date
DE69118613D1 DE69118613D1 (de) 1996-05-15
DE69118613T2 true DE69118613T2 (de) 1996-11-21

Family

ID=16582526

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69118613T Expired - Fee Related DE69118613T2 (de) 1990-08-07 1991-07-31 Wärmeleitender gefärbter Aluminiumnitrid-Sinterkörper und Verfahren zu seiner Herstellung

Country Status (8)

Country Link
US (1) US5147832A (de)
EP (1) EP0470501B1 (de)
JP (1) JP2943275B2 (de)
KR (1) KR940001660B1 (de)
CA (1) CA2048498C (de)
DE (1) DE69118613T2 (de)
SG (1) SG43219A1 (de)
TW (1) TW235291B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法
US5273700A (en) * 1990-10-29 1993-12-28 Sumitomo Electric Industries Ltd. Aluminum nitride sintered body and process for producing the same
TW280836B (de) * 1992-09-21 1996-07-11 Sumitomo Electric Industries
US5541145A (en) * 1993-12-22 1996-07-30 The Carborundum Company/Ibm Corporation Low temperature sintering route for aluminum nitride ceramics
US5424261A (en) * 1993-12-22 1995-06-13 The Carborundum Company Low temperature sintering route for aluminum nitride ceramics
US5773377A (en) * 1993-12-22 1998-06-30 Crystalline Materials Corporation Low temperature sintered, resistive aluminum nitride ceramics
JPH07187788A (ja) * 1993-12-27 1995-07-25 Ngk Spark Plug Co Ltd 窒化アルミニウム焼結体及びその製造方法
US5677253A (en) * 1995-03-30 1997-10-14 Kyocera Corporation Wafer holding member
EP0992470B1 (de) * 1995-08-03 2006-03-08 Ngk Insulators, Ltd. Gesinterte Aluminiumnitridkörper und deren Verwendung als Subtrat in einer Vorrichtung zur Herstellung von Halbleitern
US5705450A (en) * 1996-12-17 1998-01-06 The Dow Chemical Company A1N sintered body containing a rare earth aluminum oxynitride and method to produce said body
DE60005234T2 (de) * 1999-03-17 2004-07-01 Asahi Techno Glass Corp., Funabashi Aluminiumnitridsinterprodukt und Verfahren zu seiner Herstellung
JP4447750B2 (ja) * 1999-09-30 2010-04-07 日本碍子株式会社 窒化アルミニウム焼結体および半導体製造用部材
WO2002091457A1 (fr) 1999-12-09 2002-11-14 Ibiden Co., Ltd. Plaque ceramique pour appareil de production/controle de semi-conducteurs
JP4493264B2 (ja) * 2001-11-26 2010-06-30 日本碍子株式会社 窒化アルミニウム質セラミックス、半導体製造用部材および耐蝕性部材
KR101160109B1 (ko) * 2004-03-29 2012-06-26 덴끼 가가꾸 고교 가부시키가이샤 질화알루미늄 분말 및 질화알루미늄 소결체
US7799269B2 (en) * 2007-09-25 2010-09-21 Osram Sylvania Inc. Method of sintering AIN under a methane-containing nitrogen atmosphere
JP5180034B2 (ja) * 2008-11-21 2013-04-10 日本碍子株式会社 窒化アルミニウム焼結体、その製法及びそれを用いた静電チャック
US20190296194A1 (en) * 2016-06-10 2019-09-26 Nippon Electric Glass Co., Ltd. Method for producing hermetic package, and hermetic package
KR102108023B1 (ko) * 2018-09-28 2020-05-07 포항공과대학교 산학협력단 이작용성 나노자임 및 이의 용도

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855377A (ja) * 1981-09-28 1983-04-01 株式会社東芝 窒化アルミニウム焼結体の製造方法
US4478785A (en) * 1983-08-01 1984-10-23 General Electric Company Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body
US4877760A (en) * 1985-05-22 1989-10-31 Ngk Spark Plug Co., Ltd. Aluminum nitride sintered body with high thermal conductivity and process for producing same
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
DE3684821D1 (de) * 1985-06-28 1992-05-21 Toshiba Kawasaki Kk Aluminiumnitridsinterkoerper und verfahren zu seiner herstellung.
US4843038A (en) * 1986-11-13 1989-06-27 Narumi China Corporation Black sintered body of aluminum nitride and process for producing the same
JPS63233072A (ja) * 1986-11-14 1988-09-28 旭硝子株式会社 ＣａＯ含有耐火物
US4833108A (en) * 1987-03-28 1989-05-23 Narumi China Corporation Sintered body of aluminum nitride
JPS63310772A (ja) * 1987-06-10 1988-12-19 Shinko Electric Ind Co Ltd 窒化アルミニウム焼結体
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
JPH01242468A (ja) * 1988-03-23 1989-09-27 Japan Steel Works Ltd:The 窒化アルミニウム焼結体の製造方法
KR920003226B1 (ko) * 1988-05-16 1992-04-24 스미도모덴기고오교오 가부시기가이샤 질화알루미늄소결체와 그것을 사용한 회로기판 및 반도체패키지
EP0437449A1 (de) * 1988-09-02 1991-07-24 THE DOW CHEMICAL COMPANY (a Delaware corporation) Erhöhung der wärmeleitfähigkeit von aluminiumnitrid durch behandlung vor der verdichtung
JPH02172868A (ja) * 1988-12-26 1990-07-04 Hitachi Metals Ltd 窒化アルミニウム焼結体並びにそれを用いた電子部品
JP2567491B2 (ja) * 1990-04-17 1996-12-25 住友電気工業株式会社 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法

Also Published As

Publication number Publication date
JPH0492867A (ja) 1992-03-25
EP0470501A2 (de) 1992-02-12
CA2048498A1 (en) 1992-02-08
EP0470501A3 (en) 1992-09-02
CA2048498C (en) 1995-12-05
US5147832A (en) 1992-09-15
SG43219A1 (en) 1997-10-17
TW235291B (de) 1994-12-01
EP0470501B1 (de) 1996-04-10
KR940001660B1 (ko) 1994-02-28
KR920004311A (ko) 1992-03-27
JP2943275B2 (ja) 1999-08-30
DE69118613D1 (de) 1996-05-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: GROSSE, BOCKHORNI, SCHUMACHER, 81476 MUENCHEN

8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN

8339 Ceased/non-payment of the annual fee