DE69424821T2 - Verfahren zur Herstellung eines Aluminiumnitrid-Sinterkörpers - Google Patents

Verfahren zur Herstellung eines Aluminiumnitrid-Sinterkörpers

Info

Publication number
DE69424821T2
DE69424821T2 DE69424821T DE69424821T DE69424821T2 DE 69424821 T2 DE69424821 T2 DE 69424821T2 DE 69424821 T DE69424821 T DE 69424821T DE 69424821 T DE69424821 T DE 69424821T DE 69424821 T2 DE69424821 T2 DE 69424821T2
Authority
DE
Germany
Prior art keywords
producing
sintered body
aluminum nitride
nitride sintered
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69424821T
Other languages
English (en)
Other versions
DE69424821D1 (de
Inventor
Seiji Nakahata
Takahiro Matsuura
Kouich Sogabe
Akira Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=12631353&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69424821(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Publication of DE69424821D1 publication Critical patent/DE69424821D1/de
Application granted granted Critical
Publication of DE69424821T2 publication Critical patent/DE69424821T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
DE69424821T 1993-02-05 1994-02-03 Verfahren zur Herstellung eines Aluminiumnitrid-Sinterkörpers Expired - Lifetime DE69424821T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP04227093A JP3633636B2 (ja) 1993-02-05 1993-02-05 窒化アルミニウム焼結体

Publications (2)

Publication Number Publication Date
DE69424821D1 DE69424821D1 (de) 2000-07-13
DE69424821T2 true DE69424821T2 (de) 2001-02-22

Family

ID=12631353

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69424821T Expired - Lifetime DE69424821T2 (de) 1993-02-05 1994-02-03 Verfahren zur Herstellung eines Aluminiumnitrid-Sinterkörpers

Country Status (4)

Country Link
US (2) US5482905A (de)
EP (1) EP0620203B1 (de)
JP (1) JP3633636B2 (de)
DE (1) DE69424821T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6830992B1 (en) 1990-02-28 2004-12-14 Toyoda Gosei Co., Ltd. Method for manufacturing a gallium nitride group compound semiconductor
DE69126152T2 (de) * 1990-02-28 1997-11-13 Toyoda Gosei Kk Lichtemittierende Halbleitervorrichtung mit Gallium-Nitrid-Verbindung
US6362017B1 (en) 1990-02-28 2002-03-26 Toyoda Gosei Co., Ltd. Light-emitting semiconductor device using gallium nitride group compound
DE69610673T2 (de) * 1995-08-03 2001-05-10 Ngk Insulators Ltd Gesinterte Aluminiumnitridkörper und ihr Herstellungsverfahren
EP0970932A1 (de) * 1998-07-10 2000-01-12 Sumitomo Electric Industries, Ltd. Keramisches Trägermaterial
WO2001017927A1 (fr) * 1999-09-06 2001-03-15 Ibiden Co., Ltd. Briquette et substrat ceramique en nitrure d'aluminium carbone fritte destine a des equipements de fabrication ou de verification de semi-conducteurs
DE69920230T2 (de) 1999-10-28 2005-04-28 Société des Produits Nestlé S.A. Auswurfvorrichtung für Kartusche
US20040256811A1 (en) * 2002-11-22 2004-12-23 Proper George N. Seal for high-pressure pumping system
TW200521103A (en) * 2003-11-21 2005-07-01 Toshiba Kk High thermally conductive aluminum nitride sintered product
EP2581357B1 (de) * 2010-06-08 2018-02-21 Denka Company Limited Leiterplatte enthaltend ein aluminiumnitridsubstrat und herstellungsverfahren dafür
JP6262598B2 (ja) * 2014-05-12 2018-01-17 住友電気工業株式会社 ＡｌＮ焼結体、ＡｌＮ基板およびＡｌＮ基板の製造方法
JP6643207B2 (ja) * 2016-08-30 2020-02-12 京セラ株式会社 サーマルヘッドおよびサーマルプリンタ
JP7425960B2 (ja) * 2019-10-29 2024-02-01 Tdk株式会社 圧電薄膜素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3247985C2 (de) * 1982-12-24 1992-04-16 W.C. Heraeus Gmbh, 6450 Hanau Keramischer Träger
US5001089A (en) * 1985-06-28 1991-03-19 Kabushiki Kaisha Toshiba Aluminum nitride sintered body
DE3608326A1 (de) * 1986-03-13 1987-09-17 Kempten Elektroschmelz Gmbh Praktisch porenfreie formkoerper aus polykristallinem aluminiumnitrid und verfahren zu ihrer herstellung ohne mitverwendung von sinterhilfsmitteln
CA1334475C (en) * 1986-09-04 1995-02-21 E.I. Du Pont De Nemours And Company High purity aluminum nitride of controlled morphology
JPS63129075A (ja) * 1986-11-18 1988-06-01 旭硝子株式会社 窒化アルミニウム焼結体の製造方法
EP0301529B1 (de) * 1987-07-29 1992-05-13 MITSUI TOATSU CHEMICALS, Inc. Verfahren zur Gewinnung von Aluminiumnitrid und daraus hergestelltes Sinterprodukt
JPH01203270A (ja) * 1988-02-08 1989-08-16 Sumitomo Electric Ind Ltd 高熱伝導性窒化アルミニウム焼結体及びその製造法
EP0593679A1 (de) * 1991-07-08 1994-04-27 The Dow Chemical Company Verdichtung von Aluminiumnitrid mit minimalen Kornwachstum

Also Published As

Publication number Publication date
EP0620203B1 (de) 2000-06-07
JPH06227867A (ja) 1994-08-16
US5529962A (en) 1996-06-25
JP3633636B2 (ja) 2005-03-30
EP0620203A1 (de) 1994-10-19
US5482905A (en) 1996-01-09
DE69424821D1 (de) 2000-07-13

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8328 Change in the person/name/address of the agent

Representative=s name: FIENER, J., PAT.-ANW., 87719 MINDELHEIM

8365 Fully valid after opposition proceedings
8330 Complete disclaimer