DE69228562D1 - Verfahren zur herstellung von aluminiumnitridpulver - Google Patents
Verfahren zur herstellung von aluminiumnitridpulverInfo
- Publication number
- DE69228562D1 DE69228562D1 DE69228562T DE69228562T DE69228562D1 DE 69228562 D1 DE69228562 D1 DE 69228562D1 DE 69228562 T DE69228562 T DE 69228562T DE 69228562 T DE69228562 T DE 69228562T DE 69228562 D1 DE69228562 D1 DE 69228562D1
- Authority
- DE
- Germany
- Prior art keywords
- aluminum nitride
- nitride powder
- producing aluminum
- producing
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0728—After-treatment, e.g. grinding, purification
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0722—Preparation by direct nitridation of aluminium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
- C01B21/0726—Preparation by carboreductive nitridation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/0615—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with transition metals other than titanium, zirconium or hafnium
- C01B21/0617—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with transition metals other than titanium, zirconium or hafnium with vanadium, niobium or tantalum
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/076—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with titanium or zirconium or hafnium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/819,425 US5219804A (en) | 1992-01-10 | 1992-01-10 | Process for preparing ultrafine aluminum nitride powder |
PCT/US1992/010574 WO1993014027A2 (en) | 1992-01-10 | 1992-12-09 | Process for preparing ultrafine aluminum nitride powder |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69228562D1 true DE69228562D1 (de) | 1999-04-08 |
DE69228562T2 DE69228562T2 (de) | 1999-11-11 |
Family
ID=25228124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69228562T Expired - Fee Related DE69228562T2 (de) | 1992-01-10 | 1992-12-09 | Verfahren zur herstellung von aluminiumnitridpulver |
Country Status (6)
Country | Link |
---|---|
US (1) | US5219804A (de) |
EP (1) | EP0620803B1 (de) |
JP (1) | JPH08508000A (de) |
CA (1) | CA2126343A1 (de) |
DE (1) | DE69228562T2 (de) |
WO (1) | WO1993014027A2 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5279808A (en) * | 1992-12-17 | 1994-01-18 | United Technologies Corporation | Metal nitride powders |
FR2710048B1 (fr) * | 1993-09-17 | 1995-11-03 | Atochem Elf Sa | Procédé de préparation en continu de nitrure d'aluminium par carbonitruration d'alumine. |
US5525320A (en) * | 1994-07-11 | 1996-06-11 | University Of Cincinnati | Process for aluminum nitride powder production |
FR2722492B1 (fr) * | 1994-07-12 | 1997-03-14 | Sumitomo Chemical Co | Poudre de nitrure d'aluminium et corps fritte et composition de resine la contenant |
US6344271B1 (en) | 1998-11-06 | 2002-02-05 | Nanoenergy Corporation | Materials and products using nanostructured non-stoichiometric substances |
US5939151A (en) * | 1996-10-25 | 1999-08-17 | Iowa State University Research Foundation, Inc. | Method and apparatus for reactive plasma atomization |
US5984997A (en) * | 1997-08-29 | 1999-11-16 | Nanomaterials Research Corporation | Combustion of emulsions: A method and process for producing fine powders |
JP3228924B2 (ja) * | 2000-01-21 | 2001-11-12 | イビデン株式会社 | 半導体製造・検査装置用セラミックヒータ |
JP4729180B2 (ja) * | 2001-02-02 | 2011-07-20 | 株式会社茨木研究所 | 窒化アルミニウムの製造方法 |
JP4578009B2 (ja) * | 2001-03-16 | 2010-11-10 | 東洋アルミニウム株式会社 | 窒素含有無機化合物の製造方法 |
JP4545357B2 (ja) * | 2001-07-23 | 2010-09-15 | 電気化学工業株式会社 | 窒化アルミニウム粉末の製造方法 |
JP3891076B2 (ja) * | 2001-11-13 | 2007-03-07 | 株式会社茨木研究所 | 窒化アルミニウムの製造方法 |
CA2603458C (en) * | 2006-09-21 | 2015-11-17 | Smith International, Inc. | Atomic layer deposition nanocoatings on cutting tool powder materials |
DE102019211921A1 (de) * | 2019-08-08 | 2021-02-11 | Schmid Silicon Technology Gmbh | Verfahren und Vorrichtung zur Erzeugung siliziumhaltiger Materialien |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1279586A (fr) * | 1959-12-22 | 1961-12-22 | Deutsche Edelstahlwerke Ag | Procédé de fabrication de nitrure d'aluminium résistant à l'humidité et profilés obtenus avec ce nitrure |
GB2127709A (en) * | 1982-10-06 | 1984-04-18 | Univ Edinburgh | Manufacture of aluminium nitride |
JPS60175537A (ja) * | 1984-02-22 | 1985-09-09 | Toyota Motor Corp | セラミツク超微粒子の製造方法 |
JPS6168311A (ja) * | 1984-09-10 | 1986-04-08 | Chugai Ro Kogyo Kaisha Ltd | 窒化アルミニウム粉未の製造方法およびその装置 |
JPS61275472A (ja) * | 1985-05-29 | 1986-12-05 | 三菱レイヨン株式会社 | 導電性繊維の製法 |
JPH0737664B2 (ja) * | 1985-07-16 | 1995-04-26 | 東洋アルミニウム株式会社 | 窒化アルミニウムの製造方法 |
FR2596745B1 (fr) * | 1986-04-03 | 1991-06-07 | Atochem | Poudres pour ceramiques en carbures et nitrures metalliques par reduction carbothermique et leur procede de fabrication |
US4790986A (en) * | 1986-10-15 | 1988-12-13 | Stemcor Corporation | Method and apparatus to produce a hot fluidizing gas |
DE3644057A1 (de) * | 1986-12-22 | 1988-06-30 | Vaw Ver Aluminium Werke Ag | Verfahren und vorrichtung zur thermischen und/oder reduzierenden behandlung von festen, koernigen und/oder agglomerierten einsatzmaterialien |
JPS63195102A (ja) * | 1987-02-09 | 1988-08-12 | Showa Alum Corp | 窒化アルミニウム粉末の連続的製造方法及び装置 |
JPS63221842A (ja) * | 1987-03-11 | 1988-09-14 | Nippon Steel Corp | 金属粉体、金属化合物粉体およびセラミツクス粉体の製造方法および装置 |
JPS63277503A (ja) * | 1987-05-08 | 1988-11-15 | Showa Alum Corp | 高純度窒化アルミニウム粉末の連続的製造方法及び装置 |
JPS63297206A (ja) * | 1987-05-28 | 1988-12-05 | Toyo Alum Kk | 窒化アルミニウムの製造方法 |
US4877759A (en) * | 1987-05-29 | 1989-10-31 | Regents Of The University Of California | One step process for producing dense aluminum nitride and composites thereof |
US5110565A (en) * | 1988-02-05 | 1992-05-05 | The Dow Chemical Company | Apparatus for producing uniform, fine ceramic powder |
JPH01226709A (ja) * | 1988-03-08 | 1989-09-11 | Showa Alum Corp | 高純度窒化アルミニウム紛末の製造方法 |
JPH01308813A (ja) * | 1988-06-06 | 1989-12-13 | Showa Alum Corp | 窒化アルミニウム粉末の製造方法及び装置 |
JPH01308812A (ja) * | 1988-06-06 | 1989-12-13 | Showa Alum Corp | 窒化アルミニウム粉末の連続的製造方法及び装置 |
JPH0226812A (ja) * | 1988-07-12 | 1990-01-29 | Showa Alum Corp | 高純度窒化アルミニウム粉末の製造方法 |
JPH0226811A (ja) * | 1988-07-12 | 1990-01-29 | Showa Alum Corp | 高純度窒化アルミニウム粉末の製造方法 |
JPH02283604A (ja) * | 1989-04-24 | 1990-11-21 | Showa Alum Corp | 窒化アルミニウム粉末の連続的製造方法及び装置 |
JPH02283605A (ja) * | 1989-04-24 | 1990-11-21 | Showa Alum Corp | 窒化アルミニウム粉末の連続的製造方法及び装置 |
JPH03109268A (ja) * | 1989-09-22 | 1991-05-09 | Babcock Hitachi Kk | 焼結用粉体、その粉体調整方法及び装置 |
US5126121A (en) * | 1991-05-03 | 1992-06-30 | The Dow Chemical Company | Process for preparing aluminum nitride powder via controlled combustion nitridation |
-
1992
- 1992-01-10 US US07/819,425 patent/US5219804A/en not_active Expired - Fee Related
- 1992-12-09 WO PCT/US1992/010574 patent/WO1993014027A2/en active IP Right Grant
- 1992-12-09 JP JP5512439A patent/JPH08508000A/ja active Pending
- 1992-12-09 CA CA002126343A patent/CA2126343A1/en not_active Abandoned
- 1992-12-09 DE DE69228562T patent/DE69228562T2/de not_active Expired - Fee Related
- 1992-12-09 EP EP93901411A patent/EP0620803B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2126343A1 (en) | 1993-07-22 |
DE69228562T2 (de) | 1999-11-11 |
EP0620803B1 (de) | 1999-03-03 |
WO1993014027A2 (en) | 1993-07-22 |
EP0620803A1 (de) | 1994-10-26 |
WO1993014027A3 (en) | 1993-10-14 |
JPH08508000A (ja) | 1996-08-27 |
US5219804A (en) | 1993-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |