DE69122726D1 - Tintenstrahlaufzeichnung - Google Patents

Tintenstrahlaufzeichnung

Info

Publication number
DE69122726D1
DE69122726D1 DE69122726T DE69122726T DE69122726D1 DE 69122726 D1 DE69122726 D1 DE 69122726D1 DE 69122726 T DE69122726 T DE 69122726T DE 69122726 T DE69122726 T DE 69122726T DE 69122726 D1 DE69122726 D1 DE 69122726D1
Authority
DE
Germany
Prior art keywords
ink
inkjet recording
energy generators
substrate
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69122726T
Other languages
English (en)
Other versions
DE69122726T2 (de
Inventor
Toshio Suzuki
Asao Saito
Makoto Shibata
Junichi Kobayashi
Hirokazu Komuro
Toshihiro Mori
Shuji Koyama
Sakai Yokoyama
Ryoichi Koizumi
Keiichi Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP40989590A external-priority patent/JPH04214357A/ja
Priority claimed from JP473691A external-priority patent/JPH04247947A/ja
Priority claimed from JP6104591A external-priority patent/JPH04276456A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69122726D1 publication Critical patent/DE69122726D1/de
Application granted granted Critical
Publication of DE69122726T2 publication Critical patent/DE69122726T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1637Manufacturing processes molding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/13Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69122726T 1990-12-12 1991-12-11 Tintenstrahlaufzeichnung Expired - Lifetime DE69122726T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP40989590A JPH04214357A (ja) 1990-12-12 1990-12-12 インクジェット記録ヘッドおよびインクジェット記録装置
JP473691A JPH04247947A (ja) 1991-01-18 1991-01-18 インクジェット記録ヘッドおよびインクジェット記録装置
JP6104591A JPH04276456A (ja) 1991-03-04 1991-03-04 液体噴射記録ヘッド、及び同ヘッドを備えた記録装置

Publications (2)

Publication Number Publication Date
DE69122726D1 true DE69122726D1 (de) 1996-11-21
DE69122726T2 DE69122726T2 (de) 1997-03-13

Family

ID=27276434

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69122726T Expired - Lifetime DE69122726T2 (de) 1990-12-12 1991-12-11 Tintenstrahlaufzeichnung

Country Status (4)

Country Link
US (1) US5491505A (de)
EP (1) EP0490668B1 (de)
AT (1) ATE144193T1 (de)
DE (1) DE69122726T2 (de)

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US5719607A (en) * 1994-08-25 1998-02-17 Seiko Epson Corporation Liquid jet head
DE69509862T2 (de) * 1994-12-05 2000-03-09 Canon K.K. Verfahren zur Herstellung eines Tintenstrahlkopfes
JPH08174833A (ja) * 1994-12-21 1996-07-09 Canon Inc インクジェット記録装置の記録ヘッドおよびその基板端面への酸化皮膜形成方法
JP3513270B2 (ja) * 1995-06-30 2004-03-31 キヤノン株式会社 インクジェット記録ヘッド及びインクジェット記録装置
JPH09109392A (ja) 1995-10-13 1997-04-28 Canon Inc インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
US5924197A (en) * 1995-12-22 1999-07-20 Canon Kabushiki Kaisha Method for manufacturing an ink jet printing head
DE69723764T2 (de) 1996-05-13 2004-04-15 Canon K.K. Tintenstrahldruckkopf und damit versehene Tintenstrahlvorrichtung
JP3461240B2 (ja) * 1996-05-28 2003-10-27 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6302504B1 (en) 1996-06-26 2001-10-16 Canon Kabushiki Kaisha Recording head and recording apparatus using the same
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ES2203755T3 (es) 1996-07-31 2004-04-16 Canon Kabushiki Kaisha Cabezal de impresion y metodo de impresion.
KR100209515B1 (ko) * 1997-02-05 1999-07-15 윤종용 자성잉크를 이용한 잉크젯 프린터의 분사 장치 및 방법
US6155674A (en) * 1997-03-04 2000-12-05 Hewlett-Packard Company Structure to effect adhesion between substrate and ink barrier in ink jet printhead
US6209991B1 (en) * 1997-03-04 2001-04-03 Hewlett-Packard Company Transition metal carbide films for applications in ink jet printheads
JPH10264374A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp インクジェット式記録ヘッド
JP3501619B2 (ja) 1997-05-07 2004-03-02 キヤノン株式会社 インクジェット記録ヘッド
US6139699A (en) * 1997-05-27 2000-10-31 Applied Materials, Inc. Sputtering methods for depositing stress tunable tantalum and tantalum nitride films
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US7253109B2 (en) * 1997-11-26 2007-08-07 Applied Materials, Inc. Method of depositing a tantalum nitride/tantalum diffusion barrier layer system
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US20050272254A1 (en) * 1997-11-26 2005-12-08 Applied Materials, Inc. Method of depositing low resistivity barrier layers for copper interconnects
JP3408130B2 (ja) 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
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US6361150B1 (en) * 1999-08-30 2002-03-26 Hewlett-Packard Company Electrostatic discharge protection of electrically-inactive components in a thermal ink jet printing system
JP3576888B2 (ja) * 1999-10-04 2004-10-13 キヤノン株式会社 インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
JP3592208B2 (ja) 2000-07-10 2004-11-24 キヤノン株式会社 液体噴射記録ヘッドおよびその製造方法
JP4669138B2 (ja) * 2001-02-22 2011-04-13 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3652321B2 (ja) 2001-05-08 2005-05-25 キヤノン株式会社 インクジェット記録ヘッド
US6663235B2 (en) 2001-10-31 2003-12-16 Hewlett-Packard Development Company, L.P. Coverlayer based on functional polymers
JP2003145770A (ja) * 2001-11-15 2003-05-21 Canon Inc 記録ヘッド用基板、記録ヘッド、記録装置、および記録ヘッドの製造方法
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JP4393303B2 (ja) * 2003-09-05 2010-01-06 キヤノン株式会社 半導体装置の製造方法
JP2005125638A (ja) * 2003-10-24 2005-05-19 Sony Corp 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの製造方法
JP4537246B2 (ja) * 2004-05-06 2010-09-01 キヤノン株式会社 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
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JP4137027B2 (ja) * 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
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JP4290154B2 (ja) * 2004-12-08 2009-07-01 キヤノン株式会社 液体吐出記録ヘッドおよびインクジェット記録装置
JP4630680B2 (ja) * 2005-01-31 2011-02-09 キヤノン株式会社 半導体素子の製造方法およびインクジェット記録ヘッドの製造方法
US8142678B2 (en) * 2005-08-23 2012-03-27 Canon Kabushiki Kaisha Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material
US8438729B2 (en) * 2006-03-09 2013-05-14 Canon Kabushiki Kaisha Method of producing liquid discharge head
WO2007105801A1 (ja) * 2006-03-10 2007-09-20 Canon Kabushiki Kaisha 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
US20080002000A1 (en) * 2006-06-29 2008-01-03 Robert Wilson Cornell Protective Layers for Micro-Fluid Ejection Devices and Methods for Depositing the Same
KR100911323B1 (ko) * 2007-01-15 2009-08-07 삼성전자주식회사 잉크젯 프린트헤드용 발열 구조체 및 이를 구비한 잉크젯프린트헤드
KR20080104851A (ko) * 2007-05-29 2008-12-03 삼성전자주식회사 잉크젯 프린트헤드
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
JP2010000632A (ja) * 2008-06-18 2010-01-07 Canon Inc インクジェットヘッド用基板および該基板を具えるインクジェットヘッド
JP5765924B2 (ja) * 2010-12-09 2015-08-19 キヤノン株式会社 液体吐出ヘッドの駆動方法、液体吐出ヘッド、及び液体吐出装置
US8411121B2 (en) 2011-06-14 2013-04-02 Rohm Semiconductor USA, LLC Thermal printhead with optimally shaped resistor layer
US8395646B2 (en) * 2011-06-14 2013-03-12 Rohm Semiconductors USA, LLC Thermal printer with energy save features
CN110832108B (zh) * 2017-06-30 2023-03-31 凸版印刷株式会社 膜处理方法及膜制造方法

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Also Published As

Publication number Publication date
DE69122726T2 (de) 1997-03-13
EP0490668A3 (en) 1992-12-02
EP0490668A2 (de) 1992-06-17
EP0490668B1 (de) 1996-10-16
US5491505A (en) 1996-02-13
ATE144193T1 (de) 1996-11-15

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