DE3853408T2 - Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlvorrichtung, versehen mit solch einem Kopf. - Google Patents

Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlvorrichtung, versehen mit solch einem Kopf.

Info

Publication number
DE3853408T2
DE3853408T2 DE3853408T DE3853408T DE3853408T2 DE 3853408 T2 DE3853408 T2 DE 3853408T2 DE 3853408 T DE3853408 T DE 3853408T DE 3853408 T DE3853408 T DE 3853408T DE 3853408 T2 DE3853408 T2 DE 3853408T2
Authority
DE
Germany
Prior art keywords
head
color beam
manufacturing
device provided
support layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3853408T
Other languages
English (en)
Other versions
DE3853408D1 (de
Inventor
Hirokazu Komuro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE3853408D1 publication Critical patent/DE3853408D1/de
Application granted granted Critical
Publication of DE3853408T2 publication Critical patent/DE3853408T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
DE3853408T 1987-12-02 1988-12-01 Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlvorrichtung, versehen mit solch einem Kopf. Expired - Lifetime DE3853408T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP30326487 1987-12-02
JP30326687 1987-12-02
JP30326587 1987-12-02

Publications (2)

Publication Number Publication Date
DE3853408D1 DE3853408D1 (de) 1995-04-27
DE3853408T2 true DE3853408T2 (de) 1995-08-10

Family

ID=27338597

Family Applications (2)

Application Number Title Priority Date Filing Date
DE3855839T Expired - Lifetime DE3855839T2 (de) 1987-12-02 1988-12-01 Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlgerät versehen mit solch einem Kopf
DE3853408T Expired - Lifetime DE3853408T2 (de) 1987-12-02 1988-12-01 Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlvorrichtung, versehen mit solch einem Kopf.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE3855839T Expired - Lifetime DE3855839T2 (de) 1987-12-02 1988-12-01 Trägerschicht für Farbstrahlkopf, Herstellungsverfahren und Farbstrahlgerät versehen mit solch einem Kopf

Country Status (4)

Country Link
US (1) US5062937A (de)
EP (2) EP0319000B1 (de)
JP (1) JP2971473B2 (de)
DE (2) DE3855839T2 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04214357A (ja) * 1990-12-12 1992-08-05 Canon Inc インクジェット記録ヘッドおよびインクジェット記録装置
ATE144193T1 (de) * 1990-12-12 1996-11-15 Canon Kk Tintenstrahlaufzeichnung
JP3231096B2 (ja) * 1991-10-15 2001-11-19 キヤノン株式会社 液体噴射記録ヘッド用基体、その製造方法および液体噴射記録ヘッドならびに液体噴射記録装置
DE4225799A1 (de) * 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Tintenstrahldruckkopf und Verfahren zu seiner Herstellung
US5557313A (en) * 1992-11-12 1996-09-17 Tdk Corporation Wear-resistant protective film for thermal head and method of producing the same
US5946013A (en) * 1992-12-22 1999-08-31 Canon Kabushiki Kaisha Ink jet head having a protective layer with a controlled argon content
US5403458A (en) * 1993-08-05 1995-04-04 Guardian Industries Corp. Sputter-coating target and method of use
US5376455A (en) * 1993-10-05 1994-12-27 Guardian Industries Corp. Heat-treatment convertible coated glass and method of converting same
DE69428253T2 (de) 1993-11-12 2002-06-27 Ppg Ind Ohio Inc Haltbare Sputterschicht aus Metalloxid
AU680786B2 (en) * 1995-06-07 1997-08-07 Guardian Industries Corporation Heat treatable, durable, IR-reflecting sputter-coated glasses and method of making same
JPH09235669A (ja) * 1996-02-27 1997-09-09 Read Rite S M I Kk 酸化膜の形成方法および電子デバイス
JPH1044416A (ja) 1996-07-31 1998-02-17 Canon Inc インクジェット記録ヘッド用基板及びそれを用いたインクジェットヘッド、インクジェットヘッドカートリッジおよび液体吐出装置
US5901425A (en) 1996-08-27 1999-05-11 Topaz Technologies Inc. Inkjet print head apparatus
US6099699A (en) * 1998-04-22 2000-08-08 Matsushita-Kotobuki Electronics Industries, Ltd. Thin encapsulation process for making thin film read/write heads
US6395148B1 (en) * 1998-11-06 2002-05-28 Lexmark International, Inc. Method for producing desired tantalum phase
US6514620B1 (en) 1999-12-06 2003-02-04 Guardian Industries Corp. Matchable low-E I G units and laminates and methods of making same
US6495263B2 (en) 1999-12-06 2002-12-17 Guardian Industries Corp. Low-E matchable coated articles and methods of making same
US6475626B1 (en) 1999-12-06 2002-11-05 Guardian Industries Corp. Low-E matchable coated articles and methods of making same
GB0116688D0 (en) * 2001-07-07 2001-08-29 Trikon Holdings Ltd Method of depositing aluminium nitride
KR100758024B1 (ko) * 2005-07-08 2007-09-11 주식회사 인터파크지마켓 웹 사이트에서 중개를 통한 수익배분시스템 및 방법
JP2007241018A (ja) * 2006-03-10 2007-09-20 Epson Toyocom Corp 全反射ミラー
CN100422261C (zh) * 2006-10-11 2008-10-01 苏州大学 氰酸酯树脂/碳纤维复合材料及其制备方法
US10354871B2 (en) * 2017-09-11 2019-07-16 General Electric Company Sputtering system and method for forming a metal layer on a semiconductor device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5459936A (en) * 1977-10-03 1979-05-15 Canon Inc Recording method and device therefor
JPS5885536A (ja) * 1981-11-17 1983-05-21 Sharp Corp 半導体装置の絶縁膜形成方法
JPS59114829A (ja) * 1982-12-21 1984-07-03 Agency Of Ind Science & Technol 窒化シリコン膜の製造方法
JPH0624855B2 (ja) * 1983-04-20 1994-04-06 キヤノン株式会社 液体噴射記録ヘッド
JPH0613219B2 (ja) * 1983-04-30 1994-02-23 キヤノン株式会社 インクジェットヘッド
JPS60159062A (ja) * 1984-01-31 1985-08-20 Canon Inc 液体噴射記録ヘツド
JPS60206657A (ja) * 1984-03-31 1985-10-18 Canon Inc 液体噴射記録ヘツド
JPH064323B2 (ja) * 1984-05-08 1994-01-19 キヤノン株式会社 液体噴射記録ヘツド
JPS61193469A (ja) * 1985-02-20 1986-08-27 Mitsubishi Electric Corp 半導体装置の製造方法
DE3609691A1 (de) * 1985-03-23 1986-10-02 Canon K.K., Tokio/Tokyo Thermischer schreibkopf

Also Published As

Publication number Publication date
DE3853408D1 (de) 1995-04-27
EP0570021A1 (de) 1993-11-18
EP0319000A2 (de) 1989-06-07
JP2971473B2 (ja) 1999-11-08
JPH02515A (ja) 1990-01-05
US5062937A (en) 1991-11-05
EP0319000A3 (de) 1991-04-03
EP0319000B1 (de) 1995-03-22
DE3855839D1 (de) 1997-04-24
DE3855839T2 (de) 1997-07-31
EP0570021B1 (de) 1997-03-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition