DE3672559D1 - Verfahren zum herstellen einer ladungstransportanordnung und danach hergestellte ladungstransportanordnung. - Google Patents
Verfahren zum herstellen einer ladungstransportanordnung und danach hergestellte ladungstransportanordnung.Info
- Publication number
- DE3672559D1 DE3672559D1 DE8686402263T DE3672559T DE3672559D1 DE 3672559 D1 DE3672559 D1 DE 3672559D1 DE 8686402263 T DE8686402263 T DE 8686402263T DE 3672559 T DE3672559 T DE 3672559T DE 3672559 D1 DE3672559 D1 DE 3672559D1
- Authority
- DE
- Germany
- Prior art keywords
- cargo transport
- transport arrangement
- producing
- produced
- cargo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66946—Charge transfer devices
- H01L29/66954—Charge transfer devices with an insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42396—Gate electrodes for field effect devices for charge coupled devices
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8515503A FR2589003B1 (fr) | 1985-10-18 | 1985-10-18 | Procede de realisation d'un dispositif a transfert de charge et dispositif a transfert de charge mettant en oeuvre ce procede |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3672559D1 true DE3672559D1 (de) | 1990-08-16 |
Family
ID=9323974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686402263T Expired - Fee Related DE3672559D1 (de) | 1985-10-18 | 1986-10-10 | Verfahren zum herstellen einer ladungstransportanordnung und danach hergestellte ladungstransportanordnung. |
Country Status (5)
Country | Link |
---|---|
US (1) | US4774199A (de) |
EP (1) | EP0220120B1 (de) |
JP (1) | JPS6298773A (de) |
DE (1) | DE3672559D1 (de) |
FR (1) | FR2589003B1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4900688A (en) * | 1987-06-25 | 1990-02-13 | The United States Of America As Represented By The Secretary Of The Air Force | Pseudo uniphase charge coupled device fabrication by self-aligned virtual barrier and virtual gate formation |
DE3817153A1 (de) * | 1988-05-19 | 1989-11-30 | Messerschmitt Boelkow Blohm | Halbleiter-bauelement |
FR2679379B1 (fr) * | 1991-07-16 | 1997-04-25 | Thomson Composants Militaires | Procede de fabrication de circuits integres avec electrodes tres etroites. |
US5369040A (en) * | 1992-05-18 | 1994-11-29 | Westinghouse Electric Corporation | Method of making transparent polysilicon gate for imaging arrays |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4347656A (en) * | 1970-10-29 | 1982-09-07 | Bell Telephone Laboratories, Incorporated | Method of fabricating polysilicon electrodes |
US3795847A (en) * | 1973-03-26 | 1974-03-05 | Gen Electric | Method and apparatus for storing and transferring information |
US4001861A (en) * | 1973-10-12 | 1977-01-04 | The United States Of America As Represented By The Secretary Of The Navy | Double-layer, polysilicon, two-phase, charge coupled device |
US4290187A (en) * | 1973-10-12 | 1981-09-22 | Siemens Aktiengesellschaft | Method of making charge-coupled arrangement in the two-phase technique |
US3943543A (en) * | 1974-07-26 | 1976-03-09 | Texas Instruments Incorporated | Three level electrode configuration for three phase charge coupled device |
JPS5849035B2 (ja) * | 1976-08-16 | 1983-11-01 | 株式会社東芝 | 電荷転送素子 |
US4365261A (en) * | 1977-08-26 | 1982-12-21 | Texas Instruments Incorporated | Co-planar barrier-type charge coupled device with enhanced storage capacity and decreased leakage current |
NL8004328A (nl) * | 1980-07-29 | 1982-03-01 | Philips Nv | Schakelinrichting voor het ontladen van een capaciteit. |
US4613402A (en) * | 1985-07-01 | 1986-09-23 | Eastman Kodak Company | Method of making edge-aligned implants and electrodes therefor |
-
1985
- 1985-10-18 FR FR8515503A patent/FR2589003B1/fr not_active Expired
-
1986
- 1986-10-10 EP EP86402263A patent/EP0220120B1/de not_active Expired - Lifetime
- 1986-10-10 DE DE8686402263T patent/DE3672559D1/de not_active Expired - Fee Related
- 1986-10-15 US US06/918,931 patent/US4774199A/en not_active Expired - Fee Related
- 1986-10-18 JP JP61248264A patent/JPS6298773A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US4774199A (en) | 1988-09-27 |
FR2589003A1 (fr) | 1987-04-24 |
EP0220120B1 (de) | 1990-07-11 |
FR2589003B1 (fr) | 1987-11-20 |
EP0220120A1 (de) | 1987-04-29 |
JPS6298773A (ja) | 1987-05-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |