DE3782599D1 - Laser mit monolitisch integrierten, planaren elementen und verfahren zu deren herstellung. - Google Patents

Laser mit monolitisch integrierten, planaren elementen und verfahren zu deren herstellung.

Info

Publication number
DE3782599D1
DE3782599D1 DE8787112176T DE3782599T DE3782599D1 DE 3782599 D1 DE3782599 D1 DE 3782599D1 DE 8787112176 T DE8787112176 T DE 8787112176T DE 3782599 T DE3782599 T DE 3782599T DE 3782599 D1 DE3782599 D1 DE 3782599D1
Authority
DE
Germany
Prior art keywords
laser
production
planar elements
monolitically
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787112176T
Other languages
English (en)
Other versions
DE3782599T2 (de
Inventor
Frank Thomas John Eastma Smith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of DE3782599D1 publication Critical patent/DE3782599D1/de
Publication of DE3782599T2 publication Critical patent/DE3782599T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/02—Structural details or components not essential to laser action
    • H01S5/0201—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth
    • H01S5/0205—Separation of the wafer into individual elements, e.g. by dicing, cleaving, etching or directly during growth during growth of the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
    • H01S5/042—Electrical excitation ; Circuits therefor
    • H01S5/0421—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers
    • H01S5/0422—Electrical excitation ; Circuits therefor characterised by the semiconducting contacting layers with n- and p-contacts on the same side of the active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/2201—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure in a specific crystallographic orientation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/227—Buried mesa structure ; Striped active layer
    • H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
DE8787112176T 1986-09-18 1987-08-21 Laser mit monolitisch integrierten, planaren elementen und verfahren zu deren herstellung. Expired - Fee Related DE3782599T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/908,743 US4891093A (en) 1986-09-18 1986-09-18 Processes for the manufacture of laser including monolithically integrated planar devices

Publications (2)

Publication Number Publication Date
DE3782599D1 true DE3782599D1 (de) 1992-12-17
DE3782599T2 DE3782599T2 (de) 1993-06-03

Family

ID=25426183

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787112176T Expired - Fee Related DE3782599T2 (de) 1986-09-18 1987-08-21 Laser mit monolitisch integrierten, planaren elementen und verfahren zu deren herstellung.

Country Status (5)

Country Link
US (1) US4891093A (de)
EP (1) EP0261408B1 (de)
JP (1) JPS6387783A (de)
CA (1) CA1279920C (de)
DE (1) DE3782599T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013682A (en) * 1986-10-22 1991-05-07 Texas Instruments Incorporated Method for selective epitaxy using a WSI mask
US5145807A (en) * 1988-05-11 1992-09-08 Mitsubishi Kasei Corporation Method of making semiconductor laser devices
DE58906978D1 (de) * 1988-09-22 1994-03-24 Siemens Ag Abstimmbarer DFB-Laser.
DE3910288A1 (de) * 1989-03-30 1990-10-04 Standard Elektrik Lorenz Ag Verfahren zur herstellung monolithisch integrierter optoelektronischer module
US4971928A (en) * 1990-01-16 1990-11-20 General Motors Corporation Method of making a light emitting semiconductor having a rear reflecting surface
US5625636A (en) * 1991-10-11 1997-04-29 Bryan; Robert P. Integration of photoactive and electroactive components with vertical cavity surface emitting lasers
EP0704913B1 (de) * 1994-09-28 1999-09-01 Nippon Telegraph And Telephone Corporation Optische Halbleitervorrichtung und Herstellungsverfahren
JPH10255645A (ja) * 1997-03-11 1998-09-25 Agency Of Ind Science & Technol 冷電子放出素子
US6670211B2 (en) * 2000-06-08 2003-12-30 The Furukawa Electric Co., Ltd. Semiconductor laser device

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3579055A (en) * 1968-08-05 1971-05-18 Bell & Howell Co Semiconductor laser device and method for it{3 s fabrication
US4033796A (en) * 1975-06-23 1977-07-05 Xerox Corporation Method of making buried-heterostructure diode injection laser
JPS5826834B2 (ja) * 1979-09-28 1983-06-06 株式会社日立製作所 半導体レ−ザ−装置
JPS56164587A (en) * 1980-05-21 1981-12-17 Fujitsu Ltd Semiconductor device
US4532694A (en) * 1981-06-11 1985-08-06 Honeywell Inc. Method of fabricating emitter/detector-in-a-well for the integration of electronic and optoelectronic components
US4484332A (en) * 1982-06-02 1984-11-20 The United States Of America As Represented By The Secretary Of The Air Force Multiple double heterojunction buried laser device
JPS5941317A (ja) * 1982-08-31 1984-03-07 Mitsui Toatsu Chem Inc プロピレン―エチレンブロック共重合体の製造法
JPS5944887A (ja) * 1982-09-07 1984-03-13 Fujitsu Ltd 半導体発光装置
US4509996A (en) * 1982-11-05 1985-04-09 International Standard Electric Corporation Injection laser manufacture
US4566171A (en) * 1983-06-20 1986-01-28 At&T Bell Laboratories Elimination of mask undercutting in the fabrication of InP/InGaAsP BH devices
EP0132408A3 (de) * 1983-07-26 1986-04-16 Jim Auclair Verfahren und Vorrichtung zur Züchtung von Schichten und zur Herstellung von Überzügen auf einem Substrat
JPS6045083A (ja) * 1983-08-23 1985-03-11 Agency Of Ind Science & Technol 平面型半導体レ−ザ集積回路装置
US4577321A (en) * 1983-09-19 1986-03-18 Honeywell Inc. Integrated quantum well lasers for wavelength division multiplexing
US4645687A (en) * 1983-11-10 1987-02-24 At&T Laboratories Deposition of III-V semiconductor materials
US4660208A (en) * 1984-06-15 1987-04-21 American Telephone And Telegraph Company, At&T Bell Laboratories Semiconductor devices employing Fe-doped MOCVD InP-based layer for current confinement

Also Published As

Publication number Publication date
US4891093A (en) 1990-01-02
EP0261408B1 (de) 1992-11-11
DE3782599T2 (de) 1993-06-03
CA1279920C (en) 1991-02-05
EP0261408A3 (en) 1989-01-11
EP0261408A2 (de) 1988-03-30
JPS6387783A (ja) 1988-04-19

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee