ATE156066T1 - Tintenstrahlkopf - Google Patents

Tintenstrahlkopf

Info

Publication number
ATE156066T1
ATE156066T1 AT90305889T AT90305889T ATE156066T1 AT E156066 T1 ATE156066 T1 AT E156066T1 AT 90305889 T AT90305889 T AT 90305889T AT 90305889 T AT90305889 T AT 90305889T AT E156066 T1 ATE156066 T1 AT E156066T1
Authority
AT
Austria
Prior art keywords
support
substrate
intermediate layer
heat energy
ink
Prior art date
Application number
AT90305889T
Other languages
English (en)
Inventor
Yoshifumi Hattori
Masamichi Suzumura
Haruhiko Terai
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE156066T1 publication Critical patent/ATE156066T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14016Structure of bubble jet print heads
    • B41J2/14088Structure of heating means
    • B41J2/14112Resistive element
    • B41J2/14129Layer structure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1604Production of bubble jet print heads of the edge shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1626Manufacturing processes etching
    • B41J2/1628Manufacturing processes etching dry etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1631Manufacturing processes photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1642Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1643Manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1645Manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/164Manufacturing processes thin film formation
    • B41J2/1646Manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/03Specific materials used
AT90305889T 1989-05-30 1990-05-30 Tintenstrahlkopf ATE156066T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP13470189 1989-05-30
JP27981889 1989-10-30

Publications (1)

Publication Number Publication Date
ATE156066T1 true ATE156066T1 (de) 1997-08-15

Family

ID=26468732

Family Applications (1)

Application Number Title Priority Date Filing Date
AT90305889T ATE156066T1 (de) 1989-05-30 1990-05-30 Tintenstrahlkopf

Country Status (5)

Country Link
US (1) US6086187A (de)
EP (1) EP0400997B1 (de)
JP (1) JP2824123B2 (de)
AT (1) ATE156066T1 (de)
DE (1) DE69031150T2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0566116B1 (de) * 1992-04-16 1997-12-03 Canon Kabushiki Kaisha Tintenstrahlaufzeichnungskopf und Verfahren zu seiner Herstellung und Aufzeichnungsgerät damit versehen
US6505914B2 (en) * 1997-10-02 2003-01-14 Merckle Gmbh Microactuator based on diamond
JP2000190500A (ja) * 1998-12-24 2000-07-11 Canon Inc インクジェットヘッド、インクジェットカートリッジ、インクジェット装置及び該インクジェットヘッドの製造方法
US6328429B1 (en) * 1999-04-06 2001-12-11 Canon Kabushiki Kaisha Ink jet recording head and ink jet recording apparatus
US6629757B1 (en) * 1999-06-07 2003-10-07 Canon Kabushiki Kaisha Recording head, substrate therefor, and recording apparatus
US7784916B2 (en) * 2006-09-28 2010-08-31 Lexmark International, Inc. Micro-fluid ejection heads with multiple glass layers
KR101155991B1 (ko) * 2007-06-27 2012-06-18 삼성전자주식회사 잉크젯 화상형성기기의 헤드칩 및 그 제조방법
US8376523B2 (en) 2010-04-21 2013-02-19 Lexmark International, Inc. Capping layer for insulator in micro-fluid ejection heads
JP2014240152A (ja) 2013-06-12 2014-12-25 セイコーエプソン株式会社 圧電ユニット、液体噴射ヘッド、液体噴射装置、圧電ユニットの製造方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) * 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5936879B2 (ja) * 1977-10-14 1984-09-06 キヤノン株式会社 熱転写記録用媒体
US4330787A (en) * 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) * 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
AU531269B2 (en) * 1979-03-06 1983-08-18 Canon Kabushiki Kaisha Ink jet printer
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) * 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
US4336548A (en) * 1979-07-04 1982-06-22 Canon Kabushiki Kaisha Droplets forming device
US4429321A (en) * 1980-10-23 1984-01-31 Canon Kabushiki Kaisha Liquid jet recording device
US4558333A (en) * 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
US4499480A (en) * 1981-10-13 1985-02-12 Canon Kabushiki Kaisha Liquid jet recording device
US4616408A (en) * 1982-11-24 1986-10-14 Hewlett-Packard Company Inversely processed resistance heater
JPS59106974A (ja) * 1982-12-11 1984-06-20 Canon Inc 液体噴射記録ヘツド
JPS59123670A (ja) * 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) * 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
JPH0613219B2 (ja) * 1983-04-30 1994-02-23 キヤノン株式会社 インクジェットヘッド
US4513298A (en) * 1983-05-25 1985-04-23 Hewlett-Packard Company Thermal ink jet printhead
US4532530A (en) * 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4663640A (en) * 1984-07-20 1987-05-05 Canon Kabushiki Kaisha Recording head
US4612533A (en) * 1985-06-12 1986-09-16 The United States Of America As Represented By The Secretary Of The Air Force Harmonic distortion reduction technique for data acquistion
US4719477A (en) * 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
DE3771269D1 (de) * 1986-04-28 1991-08-14 Hewlett Packard Co Thermischer tintenstrahldruckkopf.
US4894664A (en) * 1986-04-28 1990-01-16 Hewlett-Packard Company Monolithic thermal ink jet printhead with integral nozzle and ink feed
GB8610782D0 (en) * 1986-05-02 1986-07-09 Vickers Plc Armoured vehicle
JP2815146B2 (ja) * 1987-03-27 1998-10-27 キヤノン株式会社 インクジェット記録ヘッド用基体及びインクジェット記録ヘッド並びに該記録ヘッドを具備するインクジェット記録装置
GB2204202B (en) * 1987-04-28 1991-11-27 Racal Communications Equip Radio transmitters
EP0304337B1 (de) * 1987-08-20 1994-10-05 Canon Kabushiki Kaisha Hybrid-Substrat
US4926197A (en) * 1988-03-16 1990-05-15 Hewlett-Packard Company Plastic substrate for thermal ink jet printer
JPH0671260A (ja) * 1992-08-27 1994-03-15 Matsushita Electric Works Ltd アルカリイオン水生成器

Also Published As

Publication number Publication date
JP2824123B2 (ja) 1998-11-11
US6086187A (en) 2000-07-11
DE69031150D1 (de) 1997-09-04
DE69031150T2 (de) 1997-11-13
EP0400997B1 (de) 1997-07-30
JPH03205155A (ja) 1991-09-06
EP0400997A1 (de) 1990-12-05

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Legal Events

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RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties