DE69034031D1 - Herstellung von einem selbstausrichtenden T-Gatter-Hemt - Google Patents

Herstellung von einem selbstausrichtenden T-Gatter-Hemt

Info

Publication number
DE69034031D1
DE69034031D1 DE69034031T DE69034031T DE69034031D1 DE 69034031 D1 DE69034031 D1 DE 69034031D1 DE 69034031 T DE69034031 T DE 69034031T DE 69034031 T DE69034031 T DE 69034031T DE 69034031 D1 DE69034031 D1 DE 69034031D1
Authority
DE
Germany
Prior art keywords
shirt
aligning
gate
self
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69034031T
Other languages
English (en)
Other versions
DE69034031T2 (de
Inventor
Umesh K Mishra
Mark A Thompson
Linda M Jelloian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DirecTV Group Inc
Original Assignee
Hughes Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Electronics Corp filed Critical Hughes Electronics Corp
Application granted granted Critical
Publication of DE69034031D1 publication Critical patent/DE69034031D1/de
Publication of DE69034031T2 publication Critical patent/DE69034031T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
    • H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
    • H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/10—Lift-off masking
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/102—Mask alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/143—Shadow masking
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/948—Radiation resist
    • Y10S438/951—Lift-off
DE69034031T 1989-12-01 1990-11-30 Herstellung von einem selbstausrichtenden T-Gatter-Hemt Expired - Lifetime DE69034031T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/444,708 US5053348A (en) 1989-12-01 1989-12-01 Fabrication of self-aligned, t-gate hemt

Publications (2)

Publication Number Publication Date
DE69034031D1 true DE69034031D1 (de) 2003-01-30
DE69034031T2 DE69034031T2 (de) 2003-10-16

Family

ID=23766014

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69034031T Expired - Lifetime DE69034031T2 (de) 1989-12-01 1990-11-30 Herstellung von einem selbstausrichtenden T-Gatter-Hemt

Country Status (5)

Country Link
US (1) US5053348A (de)
EP (1) EP0430289B1 (de)
JP (1) JPH03185739A (de)
KR (1) KR940007074B1 (de)
DE (1) DE69034031T2 (de)

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US5155054A (en) * 1989-09-28 1992-10-13 Oki Electric Industry Co., Ltd. Method of manufacturing a semiconductor MOSFET having a projection T-shaped semiconductor portion
JPH04130619A (ja) * 1990-09-20 1992-05-01 Mitsubishi Electric Corp 半導体装置の製造方法
US5185278A (en) * 1990-10-22 1993-02-09 Motorola, Inc. Method of making self-aligned gate providing improved breakdown voltage
US5550068A (en) * 1990-11-05 1996-08-27 Nippon Telegraph And Telephone Corporation Process of fabricating a circuit element for transmitting microwave signals
JPH04342142A (ja) * 1991-05-17 1992-11-27 Sony Corp 高電子移動度電界効果型トランジスタ
US5155053A (en) * 1991-05-28 1992-10-13 Hughes Aircraft Company Method of forming t-gate structure on microelectronic device substrate
JPH0575139A (ja) * 1991-09-12 1993-03-26 Mitsubishi Electric Corp 半導体装置及びその製造方法
US5334542A (en) * 1991-11-27 1994-08-02 Oki Electric Industry Co., Ltd. Method of forming T-shaped electrode
DE69321184T2 (de) * 1992-08-19 1999-05-20 Mitsubishi Electric Corp Verfahren zur Herstellung eines Feldeffekttransistors
DE4228836A1 (de) * 1992-08-29 1994-03-03 Daimler Benz Ag Selbstjustierendes Verfahren zur Herstellung von Feldeffekttransistoren
US5288660A (en) * 1993-02-01 1994-02-22 Avantek, Inc. Method for forming self-aligned t-shaped transistor electrode
JP2560993B2 (ja) * 1993-09-07 1996-12-04 日本電気株式会社 化合物半導体装置の製造方法
US5486483A (en) * 1994-09-27 1996-01-23 Trw Inc. Method of forming closely spaced metal electrodes in a semiconductor device
KR0135024B1 (en) * 1994-11-15 1998-04-20 Korea Electronics Telecomm Fabrication method of self-aligned t-gare gaas metal semiconductor field effect transistor
US5554865A (en) * 1995-06-07 1996-09-10 Hughes Aircraft Company Integrated transmit/receive switch/low noise amplifier with dissimilar semiconductor devices
US5620909A (en) * 1995-12-04 1997-04-15 Lucent Technologies Inc. Method of depositing thin passivating film on microminiature semiconductor devices
US5854086A (en) * 1996-08-21 1998-12-29 Hughes Electronics Corporation Method for manufacturing planar field effect transistors and planar high electron mobility transistors
DE19717363C2 (de) * 1997-04-24 2001-09-06 Siemens Ag Herstellverfahren für eine Platinmetall-Struktur mittels eines Lift-off-Prozesses und Verwendung des Herstellverfahrens
KR100262940B1 (ko) * 1998-05-29 2000-09-01 이계철 절연막 리프트 오프를 이용한 화합물 반도체 소자 제조 방법
US6524937B1 (en) * 2000-08-23 2003-02-25 Tyco Electronics Corp. Selective T-gate process
DE10101825B4 (de) * 2001-01-17 2006-12-14 United Monolithic Semiconductors Gmbh Verfahren zur Herstellung eines Halbleiter-Bauelements mit einer T-förmigen Kontaktelektrode
JP2003209124A (ja) * 2001-11-06 2003-07-25 Sony Corp 電界効果半導体素子の製造方法及び電界効果半導体素子
US7030428B2 (en) * 2001-12-03 2006-04-18 Cree, Inc. Strain balanced nitride heterojunction transistors
EP1335418B1 (de) * 2002-02-05 2005-09-07 Bernd E. Dr. Maile Verfahren zur Herstellung einer T-förmigen Elektrode
US6982204B2 (en) * 2002-07-16 2006-01-03 Cree, Inc. Nitride-based transistors and methods of fabrication thereof using non-etched contact recesses
US7045404B2 (en) * 2004-01-16 2006-05-16 Cree, Inc. Nitride-based transistors with a protective layer and a low-damage recess and methods of fabrication thereof
US7901994B2 (en) * 2004-01-16 2011-03-08 Cree, Inc. Methods of manufacturing group III nitride semiconductor devices with silicon nitride layers
US7612390B2 (en) * 2004-02-05 2009-11-03 Cree, Inc. Heterojunction transistors including energy barriers
US7170111B2 (en) * 2004-02-05 2007-01-30 Cree, Inc. Nitride heterojunction transistors having charge-transfer induced energy barriers and methods of fabricating the same
US7573078B2 (en) * 2004-05-11 2009-08-11 Cree, Inc. Wide bandgap transistors with multiple field plates
US7550783B2 (en) * 2004-05-11 2009-06-23 Cree, Inc. Wide bandgap HEMTs with source connected field plates
US9773877B2 (en) * 2004-05-13 2017-09-26 Cree, Inc. Wide bandgap field effect transistors with source connected field plates
US7432142B2 (en) * 2004-05-20 2008-10-07 Cree, Inc. Methods of fabricating nitride-based transistors having regrown ohmic contact regions
US7084441B2 (en) 2004-05-20 2006-08-01 Cree, Inc. Semiconductor devices having a hybrid channel layer, current aperture transistors and methods of fabricating same
US7238560B2 (en) * 2004-07-23 2007-07-03 Cree, Inc. Methods of fabricating nitride-based transistors with a cap layer and a recessed gate
US20060017064A1 (en) * 2004-07-26 2006-01-26 Saxler Adam W Nitride-based transistors having laterally grown active region and methods of fabricating same
US7709859B2 (en) * 2004-11-23 2010-05-04 Cree, Inc. Cap layers including aluminum nitride for nitride-based transistors
US7456443B2 (en) * 2004-11-23 2008-11-25 Cree, Inc. Transistors having buried n-type and p-type regions beneath the source region
US7355215B2 (en) * 2004-12-06 2008-04-08 Cree, Inc. Field effect transistors (FETs) having multi-watt output power at millimeter-wave frequencies
US7161194B2 (en) * 2004-12-06 2007-01-09 Cree, Inc. High power density and/or linearity transistors
US11791385B2 (en) * 2005-03-11 2023-10-17 Wolfspeed, Inc. Wide bandgap transistors with gate-source field plates
US7465967B2 (en) * 2005-03-15 2008-12-16 Cree, Inc. Group III nitride field effect transistors (FETS) capable of withstanding high temperature reverse bias test conditions
US7626217B2 (en) * 2005-04-11 2009-12-01 Cree, Inc. Composite substrates of conductive and insulating or semi-insulating group III-nitrides for group III-nitride devices
US8575651B2 (en) 2005-04-11 2013-11-05 Cree, Inc. Devices having thick semi-insulating epitaxial gallium nitride layer
US7615774B2 (en) * 2005-04-29 2009-11-10 Cree.Inc. Aluminum free group III-nitride based high electron mobility transistors
US7544963B2 (en) * 2005-04-29 2009-06-09 Cree, Inc. Binary group III-nitride based high electron mobility transistors
US9331192B2 (en) * 2005-06-29 2016-05-03 Cree, Inc. Low dislocation density group III nitride layers on silicon carbide substrates and methods of making the same
US20070018198A1 (en) * 2005-07-20 2007-01-25 Brandes George R High electron mobility electronic device structures comprising native substrates and methods for making the same
US7592211B2 (en) 2006-01-17 2009-09-22 Cree, Inc. Methods of fabricating transistors including supported gate electrodes
US7709269B2 (en) 2006-01-17 2010-05-04 Cree, Inc. Methods of fabricating transistors including dielectrically-supported gate electrodes
US7608497B1 (en) 2006-09-08 2009-10-27 Ivan Milosavljevic Passivated tiered gate structure transistor and fabrication method
US7534672B1 (en) * 2006-09-08 2009-05-19 Hrl Laboratories, Llc Tiered gate device with source and drain extensions
US8823057B2 (en) 2006-11-06 2014-09-02 Cree, Inc. Semiconductor devices including implanted regions for providing low-resistance contact to buried layers and related devices
JP5105160B2 (ja) * 2006-11-13 2012-12-19 クリー インコーポレイテッド トランジスタ
US7582518B2 (en) * 2006-11-14 2009-09-01 Northrop Grumman Space & Mission Systems Corp. High electron mobility transistor semiconductor device and fabrication method thereof
US8420978B2 (en) * 2007-01-18 2013-04-16 The Board Of Trustees Of The University Of Illinois High throughput, low cost dual-mode patterning method for large area substrates
US8003300B2 (en) * 2007-04-12 2011-08-23 The Board Of Trustees Of The University Of Illinois Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same
US8652763B2 (en) * 2007-07-16 2014-02-18 The Board Of Trustees Of The University Of Illinois Method for fabricating dual damascene profiles using sub pixel-voting lithography and devices made by same
US7750370B2 (en) * 2007-12-20 2010-07-06 Northrop Grumman Space & Mission Systems Corp. High electron mobility transistor having self-aligned miniature field mitigating plate on a protective dielectric layer
US8264048B2 (en) * 2008-02-15 2012-09-11 Intel Corporation Multi-gate device having a T-shaped gate structure
US8546067B2 (en) * 2008-03-21 2013-10-01 The Board Of Trustees Of The University Of Illinois Material assisted laser ablation
US8187795B2 (en) * 2008-12-09 2012-05-29 The Board Of Trustees Of The University Of Illinois Patterning methods for stretchable structures
CN102361010B (zh) * 2011-11-01 2015-06-10 中国科学院微电子研究所 一种t型栅hemt器件及其制作方法
US8698230B2 (en) * 2012-02-22 2014-04-15 Eastman Kodak Company Circuit including vertical transistors with a conductive stack having reentrant profile
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Also Published As

Publication number Publication date
EP0430289A3 (en) 1995-08-16
JPH03185739A (ja) 1991-08-13
DE69034031T2 (de) 2003-10-16
EP0430289B1 (de) 2002-12-18
US5053348A (en) 1991-10-01
EP0430289A2 (de) 1991-06-05
KR910013430A (ko) 1991-08-08
KR940007074B1 (ko) 1994-08-04

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