DE69034031T2 - Herstellung von einem selbstausrichtenden T-Gatter-Hemt - Google Patents
Herstellung von einem selbstausrichtenden T-Gatter-HemtInfo
- Publication number
- DE69034031T2 DE69034031T2 DE69034031T DE69034031T DE69034031T2 DE 69034031 T2 DE69034031 T2 DE 69034031T2 DE 69034031 T DE69034031 T DE 69034031T DE 69034031 T DE69034031 T DE 69034031T DE 69034031 T2 DE69034031 T2 DE 69034031T2
- Authority
- DE
- Germany
- Prior art keywords
- shirt
- aligning
- gate
- self
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
- H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/10—Lift-off masking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/102—Mask alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/143—Shadow masking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/951—Lift-off
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/444,708 US5053348A (en) | 1989-12-01 | 1989-12-01 | Fabrication of self-aligned, t-gate hemt |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69034031D1 DE69034031D1 (de) | 2003-01-30 |
DE69034031T2 true DE69034031T2 (de) | 2003-10-16 |
Family
ID=23766014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69034031T Expired - Lifetime DE69034031T2 (de) | 1989-12-01 | 1990-11-30 | Herstellung von einem selbstausrichtenden T-Gatter-Hemt |
Country Status (5)
Country | Link |
---|---|
US (1) | US5053348A (de) |
EP (1) | EP0430289B1 (de) |
JP (1) | JPH03185739A (de) |
KR (1) | KR940007074B1 (de) |
DE (1) | DE69034031T2 (de) |
Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5155054A (en) * | 1989-09-28 | 1992-10-13 | Oki Electric Industry Co., Ltd. | Method of manufacturing a semiconductor MOSFET having a projection T-shaped semiconductor portion |
JPH04130619A (ja) * | 1990-09-20 | 1992-05-01 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
US5185278A (en) * | 1990-10-22 | 1993-02-09 | Motorola, Inc. | Method of making self-aligned gate providing improved breakdown voltage |
US5550068A (en) * | 1990-11-05 | 1996-08-27 | Nippon Telegraph And Telephone Corporation | Process of fabricating a circuit element for transmitting microwave signals |
JPH04342142A (ja) * | 1991-05-17 | 1992-11-27 | Sony Corp | 高電子移動度電界効果型トランジスタ |
US5155053A (en) * | 1991-05-28 | 1992-10-13 | Hughes Aircraft Company | Method of forming t-gate structure on microelectronic device substrate |
JPH0575139A (ja) * | 1991-09-12 | 1993-03-26 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
US5334542A (en) * | 1991-11-27 | 1994-08-02 | Oki Electric Industry Co., Ltd. | Method of forming T-shaped electrode |
DE69321184T2 (de) * | 1992-08-19 | 1999-05-20 | Mitsubishi Electric Corp | Verfahren zur Herstellung eines Feldeffekttransistors |
DE4228836A1 (de) * | 1992-08-29 | 1994-03-03 | Daimler Benz Ag | Selbstjustierendes Verfahren zur Herstellung von Feldeffekttransistoren |
US5288660A (en) * | 1993-02-01 | 1994-02-22 | Avantek, Inc. | Method for forming self-aligned t-shaped transistor electrode |
JP2560993B2 (ja) * | 1993-09-07 | 1996-12-04 | 日本電気株式会社 | 化合物半導体装置の製造方法 |
US5486483A (en) * | 1994-09-27 | 1996-01-23 | Trw Inc. | Method of forming closely spaced metal electrodes in a semiconductor device |
KR0135024B1 (en) * | 1994-11-15 | 1998-04-20 | Korea Electronics Telecomm | Fabrication method of self-aligned t-gare gaas metal semiconductor field effect transistor |
US5554865A (en) * | 1995-06-07 | 1996-09-10 | Hughes Aircraft Company | Integrated transmit/receive switch/low noise amplifier with dissimilar semiconductor devices |
US5620909A (en) * | 1995-12-04 | 1997-04-15 | Lucent Technologies Inc. | Method of depositing thin passivating film on microminiature semiconductor devices |
US5854086A (en) * | 1996-08-21 | 1998-12-29 | Hughes Electronics Corporation | Method for manufacturing planar field effect transistors and planar high electron mobility transistors |
DE19717363C2 (de) * | 1997-04-24 | 2001-09-06 | Siemens Ag | Herstellverfahren für eine Platinmetall-Struktur mittels eines Lift-off-Prozesses und Verwendung des Herstellverfahrens |
KR100262940B1 (ko) * | 1998-05-29 | 2000-09-01 | 이계철 | 절연막 리프트 오프를 이용한 화합물 반도체 소자 제조 방법 |
US6524937B1 (en) * | 2000-08-23 | 2003-02-25 | Tyco Electronics Corp. | Selective T-gate process |
DE10101825B4 (de) * | 2001-01-17 | 2006-12-14 | United Monolithic Semiconductors Gmbh | Verfahren zur Herstellung eines Halbleiter-Bauelements mit einer T-förmigen Kontaktelektrode |
JP2003209124A (ja) * | 2001-11-06 | 2003-07-25 | Sony Corp | 電界効果半導体素子の製造方法及び電界効果半導体素子 |
US7030428B2 (en) * | 2001-12-03 | 2006-04-18 | Cree, Inc. | Strain balanced nitride heterojunction transistors |
EP1335418B1 (de) * | 2002-02-05 | 2005-09-07 | Bernd E. Dr. Maile | Verfahren zur Herstellung einer T-förmigen Elektrode |
US6982204B2 (en) * | 2002-07-16 | 2006-01-03 | Cree, Inc. | Nitride-based transistors and methods of fabrication thereof using non-etched contact recesses |
US7045404B2 (en) * | 2004-01-16 | 2006-05-16 | Cree, Inc. | Nitride-based transistors with a protective layer and a low-damage recess and methods of fabrication thereof |
US7901994B2 (en) * | 2004-01-16 | 2011-03-08 | Cree, Inc. | Methods of manufacturing group III nitride semiconductor devices with silicon nitride layers |
US7612390B2 (en) * | 2004-02-05 | 2009-11-03 | Cree, Inc. | Heterojunction transistors including energy barriers |
US7170111B2 (en) * | 2004-02-05 | 2007-01-30 | Cree, Inc. | Nitride heterojunction transistors having charge-transfer induced energy barriers and methods of fabricating the same |
US7573078B2 (en) * | 2004-05-11 | 2009-08-11 | Cree, Inc. | Wide bandgap transistors with multiple field plates |
US7550783B2 (en) * | 2004-05-11 | 2009-06-23 | Cree, Inc. | Wide bandgap HEMTs with source connected field plates |
US9773877B2 (en) * | 2004-05-13 | 2017-09-26 | Cree, Inc. | Wide bandgap field effect transistors with source connected field plates |
US7432142B2 (en) * | 2004-05-20 | 2008-10-07 | Cree, Inc. | Methods of fabricating nitride-based transistors having regrown ohmic contact regions |
US7084441B2 (en) | 2004-05-20 | 2006-08-01 | Cree, Inc. | Semiconductor devices having a hybrid channel layer, current aperture transistors and methods of fabricating same |
US7238560B2 (en) * | 2004-07-23 | 2007-07-03 | Cree, Inc. | Methods of fabricating nitride-based transistors with a cap layer and a recessed gate |
US20060017064A1 (en) * | 2004-07-26 | 2006-01-26 | Saxler Adam W | Nitride-based transistors having laterally grown active region and methods of fabricating same |
US7709859B2 (en) * | 2004-11-23 | 2010-05-04 | Cree, Inc. | Cap layers including aluminum nitride for nitride-based transistors |
US7456443B2 (en) * | 2004-11-23 | 2008-11-25 | Cree, Inc. | Transistors having buried n-type and p-type regions beneath the source region |
US7355215B2 (en) * | 2004-12-06 | 2008-04-08 | Cree, Inc. | Field effect transistors (FETs) having multi-watt output power at millimeter-wave frequencies |
US7161194B2 (en) * | 2004-12-06 | 2007-01-09 | Cree, Inc. | High power density and/or linearity transistors |
US11791385B2 (en) * | 2005-03-11 | 2023-10-17 | Wolfspeed, Inc. | Wide bandgap transistors with gate-source field plates |
US7465967B2 (en) * | 2005-03-15 | 2008-12-16 | Cree, Inc. | Group III nitride field effect transistors (FETS) capable of withstanding high temperature reverse bias test conditions |
US7626217B2 (en) * | 2005-04-11 | 2009-12-01 | Cree, Inc. | Composite substrates of conductive and insulating or semi-insulating group III-nitrides for group III-nitride devices |
US8575651B2 (en) | 2005-04-11 | 2013-11-05 | Cree, Inc. | Devices having thick semi-insulating epitaxial gallium nitride layer |
US7615774B2 (en) * | 2005-04-29 | 2009-11-10 | Cree.Inc. | Aluminum free group III-nitride based high electron mobility transistors |
US7544963B2 (en) * | 2005-04-29 | 2009-06-09 | Cree, Inc. | Binary group III-nitride based high electron mobility transistors |
US9331192B2 (en) * | 2005-06-29 | 2016-05-03 | Cree, Inc. | Low dislocation density group III nitride layers on silicon carbide substrates and methods of making the same |
US20070018198A1 (en) * | 2005-07-20 | 2007-01-25 | Brandes George R | High electron mobility electronic device structures comprising native substrates and methods for making the same |
US7592211B2 (en) | 2006-01-17 | 2009-09-22 | Cree, Inc. | Methods of fabricating transistors including supported gate electrodes |
US7709269B2 (en) | 2006-01-17 | 2010-05-04 | Cree, Inc. | Methods of fabricating transistors including dielectrically-supported gate electrodes |
US7608497B1 (en) | 2006-09-08 | 2009-10-27 | Ivan Milosavljevic | Passivated tiered gate structure transistor and fabrication method |
US7534672B1 (en) * | 2006-09-08 | 2009-05-19 | Hrl Laboratories, Llc | Tiered gate device with source and drain extensions |
US8823057B2 (en) | 2006-11-06 | 2014-09-02 | Cree, Inc. | Semiconductor devices including implanted regions for providing low-resistance contact to buried layers and related devices |
JP5105160B2 (ja) * | 2006-11-13 | 2012-12-19 | クリー インコーポレイテッド | トランジスタ |
US7582518B2 (en) * | 2006-11-14 | 2009-09-01 | Northrop Grumman Space & Mission Systems Corp. | High electron mobility transistor semiconductor device and fabrication method thereof |
US8420978B2 (en) * | 2007-01-18 | 2013-04-16 | The Board Of Trustees Of The University Of Illinois | High throughput, low cost dual-mode patterning method for large area substrates |
US8003300B2 (en) * | 2007-04-12 | 2011-08-23 | The Board Of Trustees Of The University Of Illinois | Methods for fabricating complex micro and nanoscale structures and electronic devices and components made by the same |
US8652763B2 (en) * | 2007-07-16 | 2014-02-18 | The Board Of Trustees Of The University Of Illinois | Method for fabricating dual damascene profiles using sub pixel-voting lithography and devices made by same |
US7750370B2 (en) * | 2007-12-20 | 2010-07-06 | Northrop Grumman Space & Mission Systems Corp. | High electron mobility transistor having self-aligned miniature field mitigating plate on a protective dielectric layer |
US8264048B2 (en) * | 2008-02-15 | 2012-09-11 | Intel Corporation | Multi-gate device having a T-shaped gate structure |
US8546067B2 (en) * | 2008-03-21 | 2013-10-01 | The Board Of Trustees Of The University Of Illinois | Material assisted laser ablation |
US8187795B2 (en) * | 2008-12-09 | 2012-05-29 | The Board Of Trustees Of The University Of Illinois | Patterning methods for stretchable structures |
CN102361010B (zh) * | 2011-11-01 | 2015-06-10 | 中国科学院微电子研究所 | 一种t型栅hemt器件及其制作方法 |
US8698230B2 (en) * | 2012-02-22 | 2014-04-15 | Eastman Kodak Company | Circuit including vertical transistors with a conductive stack having reentrant profile |
US9099433B2 (en) * | 2012-04-23 | 2015-08-04 | Freescale Semiconductor, Inc. | High speed gallium nitride transistor devices |
US9847411B2 (en) | 2013-06-09 | 2017-12-19 | Cree, Inc. | Recessed field plate transistor structures |
US9679981B2 (en) | 2013-06-09 | 2017-06-13 | Cree, Inc. | Cascode structures for GaN HEMTs |
CN104319237B (zh) * | 2014-10-11 | 2018-05-22 | 中国科学院微电子研究所 | 通过自对准工艺制备石墨烯顶栅场效应晶体管器件的方法 |
DE102016122399A1 (de) | 2016-11-21 | 2018-05-24 | Forschungsverbund Berlin E.V. | Gate-Struktur und Verfahren zu dessen Herstellung |
DE102017127182A1 (de) | 2017-11-17 | 2019-05-23 | Forschungsverbund Berlin E.V. | Gate-Struktur und Verfahren zu deren Herstellung |
CN109935630B (zh) * | 2017-12-15 | 2021-04-23 | 苏州能讯高能半导体有限公司 | 半导体器件及其制造方法 |
US10325982B1 (en) | 2018-05-17 | 2019-06-18 | Northrop Grumman Systems Corporation | Drain ledge for self-aligned gate and independent channel region and drain-side ridges for SLCFET |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55105326A (en) * | 1979-02-07 | 1980-08-12 | Matsushita Electronics Corp | Manufacturing method of electrode of semiconductor device |
JPS586179A (ja) * | 1981-07-03 | 1983-01-13 | Nec Corp | 電界郊果トランジスタの製造方法 |
JPS5851570A (ja) * | 1981-09-24 | 1983-03-26 | Hitachi Ltd | 半導体装置 |
JPS5950567A (ja) * | 1982-09-16 | 1984-03-23 | Hitachi Ltd | 電界効果トランジスタの製造方法 |
JPS6155969A (ja) * | 1984-08-27 | 1986-03-20 | Nec Corp | 半導体装置およびその製造方法 |
JPH0630361B2 (ja) * | 1984-09-21 | 1994-04-20 | 富士通株式会社 | パターン形成方法 |
JPS6215861A (ja) * | 1985-07-12 | 1987-01-24 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
US4916498A (en) * | 1985-09-15 | 1990-04-10 | Trw Inc. | High electron mobility power transistor |
US4670090A (en) * | 1986-01-23 | 1987-06-02 | Rockwell International Corporation | Method for producing a field effect transistor |
JPS62186568A (ja) * | 1986-02-12 | 1987-08-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS62190773A (ja) * | 1986-02-17 | 1987-08-20 | Sumitomo Electric Ind Ltd | 電界効果トランジスタとその製造方法 |
JPS62245679A (ja) * | 1986-04-17 | 1987-10-26 | Mitsubishi Electric Corp | 短チヤネル・シヨツトキ−形電界効果トランジスタ |
JPH0793429B2 (ja) * | 1986-06-19 | 1995-10-09 | 富士通株式会社 | 半導体装置の製造方法 |
US4700462A (en) * | 1986-10-08 | 1987-10-20 | Hughes Aircraft Company | Process for making a T-gated transistor |
JPS63174374A (ja) * | 1987-01-14 | 1988-07-18 | Fujitsu Ltd | 電界効果型半導体装置の製造方法 |
JPS63276267A (ja) * | 1987-05-08 | 1988-11-14 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS6444681A (en) * | 1987-08-12 | 1989-02-17 | Fuji Photo Film Co Ltd | Dot screen forming method |
JPH0236658A (ja) * | 1988-07-26 | 1990-02-06 | Nec Corp | 音声蓄積装置間のメッセージ転送方式 |
-
1989
- 1989-12-01 US US07/444,708 patent/US5053348A/en not_active Expired - Lifetime
-
1990
- 1990-11-30 EP EP90122995A patent/EP0430289B1/de not_active Expired - Lifetime
- 1990-11-30 KR KR1019900019581A patent/KR940007074B1/ko not_active IP Right Cessation
- 1990-11-30 JP JP2336918A patent/JPH03185739A/ja active Pending
- 1990-11-30 DE DE69034031T patent/DE69034031T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0430289A3 (en) | 1995-08-16 |
JPH03185739A (ja) | 1991-08-13 |
EP0430289B1 (de) | 2002-12-18 |
DE69034031D1 (de) | 2003-01-30 |
US5053348A (en) | 1991-10-01 |
EP0430289A2 (de) | 1991-06-05 |
KR910013430A (ko) | 1991-08-08 |
KR940007074B1 (ko) | 1994-08-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |