DE69031141D1 - Integrierte Hybridschaltungsanordnung - Google Patents

Integrierte Hybridschaltungsanordnung

Info

Publication number
DE69031141D1
DE69031141D1 DE69031141T DE69031141T DE69031141D1 DE 69031141 D1 DE69031141 D1 DE 69031141D1 DE 69031141 T DE69031141 T DE 69031141T DE 69031141 T DE69031141 T DE 69031141T DE 69031141 D1 DE69031141 D1 DE 69031141D1
Authority
DE
Germany
Prior art keywords
circuit arrangement
hybrid circuit
integrated hybrid
integrated
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69031141T
Other languages
English (en)
Other versions
DE69031141T2 (de
Inventor
Akira Kazami
Osamu Nakamoto
Hisashi Shimizu
Katsumi Ohkawa
Yasuhiro Koike
Koji Nagahama
Masao Kaneko
Masakazu Ueno
Yasuo Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1100785A external-priority patent/JPH0680764B2/ja
Priority claimed from JP1100786A external-priority patent/JPH0680765B2/ja
Priority claimed from JP1119109A external-priority patent/JPH02298060A/ja
Priority claimed from JP1119113A external-priority patent/JPH0680770B2/ja
Priority claimed from JP1119110A external-priority patent/JPH0680767B2/ja
Priority claimed from JP1120906A external-priority patent/JPH0680776B2/ja
Priority claimed from JP1120901A external-priority patent/JPH0680771B2/ja
Priority claimed from JP1122356A external-priority patent/JPH0680778B2/ja
Priority claimed from JP1122357A external-priority patent/JPH0680779B2/ja
Priority claimed from JP12390489A external-priority patent/JPH0680782B2/ja
Priority claimed from JP12390389A external-priority patent/JPH0680781B2/ja
Priority claimed from JP12491289A external-priority patent/JPH0680783B2/ja
Priority claimed from JP1124913A external-priority patent/JPH0680784B2/ja
Priority claimed from JP12731089A external-priority patent/JPH0680785B2/ja
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Publication of DE69031141D1 publication Critical patent/DE69031141D1/de
Application granted granted Critical
Publication of DE69031141T2 publication Critical patent/DE69031141T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/162—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits the devices being mounted on two or more different substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
    • H01L2224/45124—Aluminium (Al) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01014—Silicon [Si]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
    • H01L2924/097—Glass-ceramics, e.g. devitrified glass
    • H01L2924/09701—Low temperature co-fired ceramic [LTCC]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3025—Electromagnetic shielding
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/14—Structural association of two or more printed circuits
    • H05K1/141—One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/189—Printed circuits structurally associated with non-printed electric components characterised by the use of a flexible or folded printed circuit
DE69031141T 1989-04-20 1990-04-19 Integrierte Hybridschaltungsanordnung Expired - Fee Related DE69031141T2 (de)

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
JP1100786A JPH0680765B2 (ja) 1989-04-20 1989-04-20 混成集積回路装置
JP1100785A JPH0680764B2 (ja) 1989-04-20 1989-04-20 混成集積回路装置
JP1119110A JPH0680767B2 (ja) 1989-05-12 1989-05-12 混成集積回路装置
JP1119113A JPH0680770B2 (ja) 1989-05-12 1989-05-12 混成集積回路装置
JP1119109A JPH02298060A (ja) 1989-05-12 1989-05-12 混成集積回路装置
JP1120901A JPH0680771B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP1120906A JPH0680776B2 (ja) 1989-05-15 1989-05-15 混成集積回路装置
JP1122357A JPH0680779B2 (ja) 1989-05-16 1989-05-16 混成集積回路装置
JP1122356A JPH0680778B2 (ja) 1989-05-16 1989-05-16 混成集積回路装置
JP12390489A JPH0680782B2 (ja) 1989-05-17 1989-05-17 混成集積回路装置
JP12390389A JPH0680781B2 (ja) 1989-05-17 1989-05-17 混成集積回路装置
JP12491289A JPH0680783B2 (ja) 1989-05-18 1989-05-18 混成集積回路装置
JP1124913A JPH0680784B2 (ja) 1989-05-18 1989-05-18 混成集積回路装置
JP12731089A JPH0680785B2 (ja) 1989-05-19 1989-05-19 混成集積回路装置

Publications (2)

Publication Number Publication Date
DE69031141D1 true DE69031141D1 (de) 1997-09-04
DE69031141T2 DE69031141T2 (de) 1997-12-11

Family

ID=27584873

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69031141T Expired - Fee Related DE69031141T2 (de) 1989-04-20 1990-04-19 Integrierte Hybridschaltungsanordnung

Country Status (3)

Country Link
US (1) US5285107A (de)
EP (1) EP0393657B1 (de)
DE (1) DE69031141T2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2960560B2 (ja) 1991-02-28 1999-10-06 株式会社日立製作所 超小型電子機器
US5278442A (en) * 1991-07-15 1994-01-11 Prinz Fritz B Electronic packages and smart structures formed by thermal spray deposition
JP2721093B2 (ja) * 1992-07-21 1998-03-04 三菱電機株式会社 半導体装置
EP0654866A3 (de) * 1993-11-23 1997-08-20 Motorola Inc Träger zur Verbindung eines Halbleiterwürfels und Herstellungsverfahren.
US5789815A (en) * 1996-04-23 1998-08-04 Motorola, Inc. Three dimensional semiconductor package having flexible appendages
FR2758935B1 (fr) * 1997-01-28 2001-02-16 Matra Marconi Space France Boitier micro-electronique multi-niveaux
US6300679B1 (en) * 1998-06-01 2001-10-09 Semiconductor Components Industries, Llc Flexible substrate for packaging a semiconductor component
DE10030994A1 (de) * 2000-06-30 2002-01-17 Infineon Technologies Ag Halbleiter-Chip
US6614121B1 (en) * 2000-08-21 2003-09-02 Advanced Micro Devices, Inc. Vertical cache configuration
US6603193B2 (en) * 2001-09-06 2003-08-05 Silicon Bandwidth Inc. Semiconductor package
JP4459883B2 (ja) * 2005-04-28 2010-04-28 三菱電機株式会社 半導体装置
US8022519B2 (en) * 2005-05-19 2011-09-20 Sandisk Technologies Inc. System-in-a-package based flash memory card
US7767543B2 (en) * 2005-09-06 2010-08-03 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing a micro-electro-mechanical device with a folded substrate
US20080224199A1 (en) * 2007-03-14 2008-09-18 Li Hui Lu Non-volatile memory module package capability of replacing
JP4425961B2 (ja) * 2008-01-15 2010-03-03 パナソニック株式会社 回路基板モジュール及び電子機器
US8362368B2 (en) * 2009-04-27 2013-01-29 Ultrasource, Inc. Method and apparatus for an improved filled via
US20110031607A1 (en) * 2009-08-06 2011-02-10 Advanced Chip Engineering Technology Inc. Conductor package structure and method of the same
US20110031594A1 (en) * 2009-08-06 2011-02-10 Advanced Chip Engineering Technology Inc. Conductor package structure and method of the same
US20110209908A1 (en) * 2009-08-06 2011-09-01 Advanced Chip Engineering Technology Inc. Conductor package structure and method of the same
US20110180891A1 (en) * 2009-08-06 2011-07-28 Advanced Chip Engineering Technology Inc. Conductor package structure and method of the same
TW201143013A (en) * 2010-05-26 2011-12-01 Princeton Technology Corp Anti-UV electronic device and fabrication method thereof
TWI517341B (zh) 2013-05-10 2016-01-11 矽品精密工業股份有限公司 半導體封裝件及其製法
JP6552450B2 (ja) * 2016-04-19 2019-07-31 三菱電機株式会社 半導体装置
US10057989B1 (en) * 2017-04-10 2018-08-21 Tactotek Oy Multilayer structure and related method of manufacture for electronics

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614832A (en) * 1966-03-09 1971-10-26 Ibm Decal connectors and methods of forming decal connections to solid state devices
GB1601520A (en) * 1978-05-31 1981-10-28 Gen Electric Co Ltd Electric circuit arrangements
JPS58131756A (ja) * 1982-01-29 1983-08-05 Fujitsu Ltd Ｄｉｐ型ハイブリツドｉｃ
JPS59141258A (ja) * 1983-02-02 1984-08-13 Sanyo Electric Co Ltd 混成集積回路
JPS59228748A (ja) * 1983-06-09 1984-12-22 Toshiba Corp 混成集積回路装置
JPS61180463A (ja) * 1985-02-05 1986-08-13 Matsushita Electric Ind Co Ltd 部品の実装方法
JPS62115750A (ja) * 1985-11-15 1987-05-27 Nec Corp 半導体装置
US5016138A (en) * 1987-10-27 1991-05-14 Woodman John K Three dimensional integrated circuit package
FR2630859B1 (fr) * 1988-04-27 1990-07-13 Thomson Composants Militaires Boitier ceramique multicouches a plusieurs puces de circuit-integre
US4972253A (en) * 1988-06-27 1990-11-20 Digital Equipment Corporation Programmable ceramic high performance custom package

Also Published As

Publication number Publication date
EP0393657A3 (de) 1991-02-13
US5285107A (en) 1994-02-08
EP0393657B1 (de) 1997-07-30
DE69031141T2 (de) 1997-12-11
EP0393657A2 (de) 1990-10-24

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee