JP6552450B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP6552450B2 JP6552450B2 JP2016083444A JP2016083444A JP6552450B2 JP 6552450 B2 JP6552450 B2 JP 6552450B2 JP 2016083444 A JP2016083444 A JP 2016083444A JP 2016083444 A JP2016083444 A JP 2016083444A JP 6552450 B2 JP6552450 B2 JP 6552450B2
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- 239000004065 semiconductor Substances 0.000 title claims description 285
- 229920005989 resin Polymers 0.000 claims description 33
- 239000011347 resin Substances 0.000 claims description 33
- 230000005855 radiation Effects 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 31
- 230000000694 effects Effects 0.000 description 23
- 239000000463 material Substances 0.000 description 16
- 238000001816 cooling Methods 0.000 description 15
- 230000017525 heat dissipation Effects 0.000 description 12
- 239000007769 metal material Substances 0.000 description 7
- 229910000679 solder Inorganic materials 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Description
本発明の半導体装置は、ベース板と、ケースと、パワー半導体素子と、制御用半導体素子とを備えている。ケースはベース板上に設置されている。パワー半導体素子はケース内のベース板上に配置されている。制御用半導体素子はケースの内部に配置されている。ケースのベース板と反対側には開口部が形成されている。ケースの開口部を塞ぐ蓋をさらに備えている。蓋には制御用半導体素子と平面視において重なる領域の少なくとも一部に孔部が形成されている。孔部は、平面視において制御用半導体素子の平面視における全体と重なる。孔部内に制御用半導体素子が配置される。蓋のベース板と反対側の主表面は、制御用半導体素子のベース板と反対側の主表面と同一の面上の位置、または制御用半導体素子のベース板と反対側の主表面よりもベース板側の位置に配置される。
本発明の半導体装置は、ベース板と、ケースと、パワー半導体素子と、制御用半導体素子とを備えている。ケースはベース板上に設置されている。パワー半導体素子はケース内のベース板上に配置されている。制御用半導体素子はケースの内部に配置されている。ケースのベース板と反対側には開口部が形成されている。ケースの開口部を塞ぐ蓋をさらに備えている。蓋には制御用半導体素子と平面視において重なる領域の少なくとも一部に孔部が形成されている。
(実施の形態1)
まず図1を用いて、本実施の形態の半導体装置100の構成について説明する。図1を参照して、本実施の形態の半導体装置100は、ベース板1と、ケース3と、パワー半導体素子5と、制御用半導体素子6とを主に有する、インテリジェントパワーモジュールである。
図6を参照して、本実施の形態の半導体装置200は、図1に示す実施の形態1の半導体装置100と基本的に同様の構成を有する。このため図6の半導体装置200において図1の半導体装置100と同一の構成要素については同一の参照符号を付し、その説明を繰り返さない。半導体装置200は半導体装置100と比べて、制御用半導体素子6の、図6の上下方向に関する位置において異なっている。
図9を参照して、本実施の形態の半導体装置300は、図1に示す実施の形態1の半導体装置100と基本的に同様の構成を有する。このため図9の半導体装置300において図1の半導体装置100と同一の構成要素については同一の参照符号を付し、その説明を繰り返さない。半導体装置300は半導体装置100と比べて、制御用半導体素子6のベース板1と反対側の一方の主表面6A上に放熱板41をさらに備えており、放熱板41が制御用半導体素子6の真上にある蓋23の孔部25を塞ぐように配置されている点において異なっている。
図10を参照して、本実施の形態の半導体装置400は、図1に示す実施の形態1の半導体装置100、および図9に示す実施の形態3の半導体装置300と基本的に同様の構成を有する。このため図10の半導体装置400において図1、図9の半導体装置100,300と同一の構成要素については同一の参照符号を付し、その説明を繰り返さない。
図11を参照して、本実施の形態の半導体装置500は、図6に示す実施の形態2の半導体装置200と基本的に同様の構成を有する。このため図11の半導体装置500において図6の半導体装置200と同一の構成要素については同一の参照符号を付し、その説明を繰り返さない。半導体装置500は半導体装置200と比べて、蓋23のベース板1と反対側の一方の主表面23Aの上方にペルチェ素子71をさらに備える構成を有している点において異なっている。
上記のように、各実施の形態において用いられる制御用半導体素子6は、パッケージ61およびリードフレーム62(図3参照)を有している。図13を参照して、本実施の形態においては、パッケージ61の表面の少なくとも一部に、深さが500μm以上の凹部63を複数含んでいる。これら複数すなわち2つ以上の凹部63は、互いに間隔をあけてパッケージ61の表面に形成されている。凹部63は、パッケージ61の表面において、これが形成される領域以外の領域に比べて深さすなわち図13の上下方向の寸法が500μm以上となっている。この凹部63の深さは600μm以上であることがより好ましい。
図14を参照して、本実施の形態の半導体装置600においては、ベース板1とケース3とからなる容器状の部材の内部の、特に制御回路基板9の下側の領域に、樹脂材料35の代わりに高放熱性樹脂36が配置されている。高放熱性樹脂36は図1などの樹脂材料35と同様に、パワー半導体用基板8およびパワー半導体素子5の表面、制御回路基板9の他方の主表面9B、ケース壁部3Aの内側の表面の一部、主電極端子15の表面の一部などを覆うように配置されている。このように、高放熱性樹脂36はケース3内においてパワー半導体素子5を封止するように充填されている。
Claims (9)
- ベース板と、
前記ベース板上に設置されたケースと、
前記ケース内の前記ベース板上に配置されたパワー半導体素子と、
前記ケースの内部に配置される制御用半導体素子とを備え、
前記ケースの前記ベース板と反対側には開口部が形成されており、
前記ケースの前記開口部を塞ぐ蓋をさらに備え、
前記蓋には前記制御用半導体素子と平面視において重なる領域の少なくとも一部に孔部が形成されており、
前記制御用半導体素子の前記ベース板と反対側の主表面上に放熱板をさらに備え、
前記放熱板は前記蓋の前記孔部を塞ぐように配置される、半導体装置。 - 前記放熱板は、前記蓋の前記孔部内に収まる第1の放熱板の部分と、
前記第1の放熱板の部分から前記ケースの内部側に延びる第2の放熱板の部分とを含み、
前記第2の放熱板の部分が前記制御用半導体素子の前記ベース板と反対側の主表面上に接触する、請求項1に記載の半導体装置。 - 前記蓋の前記ベース板と反対側の主表面の上方にペルチェ素子をさらに備える、請求項2に記載の半導体装置。
- 前記制御用半導体素子はパッケージを含み、
前記パッケージの表面の少なくとも一部に、深さが500μm以上の凹部を複数含んでいる、請求項1〜3のいずれか1項に記載の半導体装置。 - 前記ケース内に、前記パワー半導体素子を封止するように充填された、熱伝導率が0.5W/(m・K)以上の高放熱性樹脂をさらに備える、請求項1〜4のいずれか1項に記載の半導体装置。
- ベース板と、
前記ベース板上に設置されたケースと、
前記ケース内の前記ベース板上に配置されたパワー半導体素子と、
前記ケースの内部に配置される制御用半導体素子とを備え、
前記ケースの前記ベース板と反対側には開口部が形成されており、
前記ケースの前記開口部を塞ぐ蓋をさらに備え、
前記蓋には前記制御用半導体素子と平面視において重なる領域の少なくとも一部に孔部が形成されており、
前記孔部は、平面視において前記制御用半導体素子の平面視における全体と重なり、
前記孔部内に前記制御用半導体素子が配置され、
前記蓋の前記ベース板と反対側の主表面は、前記制御用半導体素子の前記ベース板と反対側の主表面と同一の面上の位置、または前記制御用半導体素子の前記ベース板と反対側の主表面よりも前記ベース板側の位置に配置される、半導体装置。 - 前記蓋の前記ベース板と反対側の主表面の上方にペルチェ素子をさらに備える、請求項6に記載の半導体装置。
- 前記制御用半導体素子はパッケージを含み、
前記パッケージの表面の少なくとも一部に、深さが500μm以上の凹部を複数含んでいる、請求項6または7に記載の半導体装置。 - 前記ケース内に、前記パワー半導体素子を封止するように充填された、熱伝導率が0.5W/(m・K)以上の高放熱性樹脂をさらに備える、請求項6〜8のいずれか1項に記載の半導体装置。
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