DE69015494D1 - Selbstausrichtende Justiermarke für die Herstellung von integrierten Schaltungen. - Google Patents
Selbstausrichtende Justiermarke für die Herstellung von integrierten Schaltungen.Info
- Publication number
- DE69015494D1 DE69015494D1 DE69015494T DE69015494T DE69015494D1 DE 69015494 D1 DE69015494 D1 DE 69015494D1 DE 69015494 T DE69015494 T DE 69015494T DE 69015494 T DE69015494 T DE 69015494T DE 69015494 D1 DE69015494 D1 DE 69015494D1
- Authority
- DE
- Germany
- Prior art keywords
- self
- production
- integrated circuits
- alignment mark
- aligning alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/975—Substrate or mask aligning feature
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Electron Beam Exposure (AREA)
- Bipolar Transistors (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/387,721 US4992394A (en) | 1989-07-31 | 1989-07-31 | Self aligned registration marks for integrated circuit fabrication |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69015494D1 true DE69015494D1 (de) | 1995-02-09 |
DE69015494T2 DE69015494T2 (de) | 1995-05-04 |
Family
ID=23531108
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69015494T Expired - Fee Related DE69015494T2 (de) | 1989-07-31 | 1990-07-20 | Selbstausrichtende Justiermarke für die Herstellung von integrierten Schaltungen. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4992394A (de) |
EP (1) | EP0411797B1 (de) |
JP (1) | JP2803734B2 (de) |
DE (1) | DE69015494T2 (de) |
HK (1) | HK49296A (de) |
SG (1) | SG31595G (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0453644B1 (de) * | 1990-04-27 | 1995-05-10 | Siemens Aktiengesellschaft | Verfahren zur Herstellung einer Öffnung in einem Halbleiterschichtaufbau und dessen Verwendung zur Herstellung von Kontaktlöchern |
US5162259A (en) * | 1991-02-04 | 1992-11-10 | Motorola, Inc. | Method for forming a buried contact in a semiconductor device |
IT1251393B (it) * | 1991-09-04 | 1995-05-09 | St Microelectronics Srl | Procedimento per la realizzazione di strutture metrologiche particolarmente per l'analisi dell'accuratezza di strumenti di misura di allineamento su substrati processati. |
JP3115107B2 (ja) * | 1992-07-02 | 2000-12-04 | 株式会社東芝 | レチクルとそのレチクルを用いた半導体装置およびその製造方法 |
KR960014963B1 (ko) * | 1993-10-15 | 1996-10-23 | 현대전자산업 주식회사 | 반도체 장치의 제조 방법 |
US5650629A (en) * | 1994-06-28 | 1997-07-22 | The United States Of America As Represented By The Secretary Of The Air Force | Field-symmetric beam detector for semiconductors |
JPH0927529A (ja) * | 1995-07-12 | 1997-01-28 | Sony Corp | 位置合わせ検出用半導体装置 |
DE19534784C1 (de) * | 1995-09-19 | 1997-04-24 | Siemens Ag | Halbleiter-Schaltungselement und Verfahren zu seiner Herstellung |
US5764366A (en) * | 1995-11-30 | 1998-06-09 | Lucent Technologies Inc. | Method and apparatus for alignment and bonding |
US5757503A (en) * | 1995-12-26 | 1998-05-26 | Lucent Technologies Inc. | Method and apparatus for fabricating products using alignment measuring technique |
US6307273B1 (en) | 1996-06-07 | 2001-10-23 | Vanguard International Semiconductor Corporation | High contrast, low noise alignment mark for laser trimming of redundant memory arrays |
US5668065A (en) * | 1996-08-01 | 1997-09-16 | Winbond Electronics Corp. | Process for simultaneous formation of silicide-based self-aligned contacts and local interconnects |
US5872042A (en) * | 1996-08-22 | 1999-02-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for alignment mark regeneration |
JP3519579B2 (ja) * | 1997-09-09 | 2004-04-19 | 株式会社ルネサステクノロジ | 半導体装置及びその製造方法 |
US5863825A (en) * | 1997-09-29 | 1999-01-26 | Lsi Logic Corporation | Alignment mark contrast enhancement |
US6008060A (en) * | 1998-04-14 | 1999-12-28 | Etec Systems, Inc. | Detecting registration marks with a low energy electron beam |
US6120607A (en) * | 1998-12-03 | 2000-09-19 | Lsi Logic Corporation | Apparatus and method for blocking the deposition of oxide on a wafer |
US6146910A (en) * | 1999-02-02 | 2000-11-14 | The United States Of America, As Represented By The Secretary Of Commerce | Target configuration and method for extraction of overlay vectors from targets having concealed features |
DE19904571C1 (de) * | 1999-02-04 | 2000-04-20 | Siemens Ag | Verfahren zur Herstellung einer integrierten Schaltungsanordnung aus zwei Substraten, wobei die Schaltungsstrukturen des Substrate exakt gegeneinander ausgerichtet sind |
US6294018B1 (en) * | 1999-09-15 | 2001-09-25 | Lucent Technologies | Alignment techniques for epitaxial growth processes |
US6423555B1 (en) | 2000-08-07 | 2002-07-23 | Advanced Micro Devices, Inc. | System for determining overlay error |
TWI288428B (en) * | 2004-01-21 | 2007-10-11 | Seiko Epson Corp | Alignment method, method for manufacturing a semiconductor device, substrate for a semiconductor device, electronic equipment |
KR100695876B1 (ko) * | 2005-06-24 | 2007-03-19 | 삼성전자주식회사 | 오버레이 키 및 그 형성 방법, 오버레이 키를 이용하여형성된 반도체 장치 및 그 제조 방법. |
JP2011040687A (ja) * | 2009-08-18 | 2011-02-24 | Sumitomo Electric Ind Ltd | 半導体レーザの製造方法 |
CN102543733B (zh) * | 2010-12-08 | 2016-03-02 | 无锡华润上华科技有限公司 | Dmos工艺流程中的对位标记方法 |
GB201816838D0 (en) * | 2018-10-16 | 2018-11-28 | Smith & Nephew | Systems and method for applying biocompatible encapsulation to sensor enabled wound monitoring and therapy dressings |
CN110400752B (zh) * | 2019-08-29 | 2020-06-16 | 武汉新芯集成电路制造有限公司 | Ldmos器件及其制作方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1550867A (en) * | 1975-08-04 | 1979-08-22 | Hughes Aircraft Co | Positioning method and apparatus for fabricating microcircuit devices |
JPS5534442A (en) * | 1978-08-31 | 1980-03-11 | Fujitsu Ltd | Preparation of semiconductor device |
JPS5575229A (en) * | 1978-12-01 | 1980-06-06 | Mitsubishi Electric Corp | Semiconductor device |
JPS564229A (en) * | 1979-06-26 | 1981-01-17 | Toshiba Corp | Semiconductor device |
JPS5694741A (en) * | 1979-12-28 | 1981-07-31 | Fujitsu Ltd | Positioning mark for electronic beam exposure |
US4351892A (en) * | 1981-05-04 | 1982-09-28 | Fairchild Camera & Instrument Corp. | Alignment target for electron-beam write system |
US4407933A (en) * | 1981-06-11 | 1983-10-04 | Bell Telephone Laboratories, Incorporated | Alignment marks for electron beam lithography |
JPS5875838A (ja) * | 1981-10-30 | 1983-05-07 | Seiko Instr & Electronics Ltd | シリコン基板の加工方法 |
JPS5972724A (ja) * | 1982-10-20 | 1984-04-24 | Hitachi Ltd | 位置合せ方法 |
JPS60111424A (ja) * | 1983-11-22 | 1985-06-17 | Toshiba Corp | 位置合わせ用マ−クの形成方法 |
JPS6143424A (ja) * | 1984-08-08 | 1986-03-03 | Hitachi Ltd | 高精度の位置合せ方法 |
JPS61100928A (ja) * | 1984-10-22 | 1986-05-19 | Mitsubishi Electric Corp | 半導体基板の位置合せマ−ク形成方法 |
JPS62211957A (ja) * | 1986-03-13 | 1987-09-17 | Fujitsu Ltd | 電界効果トランジスタの製造方法 |
JPS62271427A (ja) * | 1986-05-20 | 1987-11-25 | Matsushita Electric Ind Co Ltd | マスク位置合わせ方法 |
-
1989
- 1989-07-31 US US07/387,721 patent/US4992394A/en not_active Expired - Lifetime
-
1990
- 1990-07-13 JP JP2184435A patent/JP2803734B2/ja not_active Expired - Lifetime
- 1990-07-20 EP EP90307971A patent/EP0411797B1/de not_active Expired - Lifetime
- 1990-07-20 DE DE69015494T patent/DE69015494T2/de not_active Expired - Fee Related
-
1995
- 1995-02-22 SG SG31595A patent/SG31595G/en unknown
-
1996
- 1996-03-21 HK HK49296A patent/HK49296A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2803734B2 (ja) | 1998-09-24 |
SG31595G (en) | 1995-08-18 |
JPH0366116A (ja) | 1991-03-20 |
US4992394A (en) | 1991-02-12 |
HK49296A (en) | 1996-03-29 |
EP0411797A1 (de) | 1991-02-06 |
DE69015494T2 (de) | 1995-05-04 |
EP0411797B1 (de) | 1994-12-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69015494D1 (de) | Selbstausrichtende Justiermarke für die Herstellung von integrierten Schaltungen. | |
DE3482990D1 (de) | Einbelichtungsverfahren fuer die herstellung von gedruckten schaltungen. | |
DE3853456D1 (de) | Harzzusammensetzung für gedruckte Schaltungen. | |
DE68918975D1 (de) | Verfahren für die Herstellung von Leiterplatten. | |
DE69014998D1 (de) | Lokalverbindungen für integrierte Schaltungen. | |
DE3889069D1 (de) | Verzögerungsschaltungen für integrierte Schaltungen. | |
DE3485684D1 (de) | Vorrichtung fuer die kontrolle von masken fuer die herstellung von integrierten schaltungen. | |
DE69016962D1 (de) | Dynamische Isolierschaltung für integrierte Schaltungen. | |
DE3768881D1 (de) | Integrierte schaltungen mit stufenfoermigen dielektrikum. | |
DE69023891D1 (de) | Fassung für integrierte Schaltung. | |
DE3850519D1 (de) | Vorrichtung zur Herstellung von Halbleiter-Bauelementen. | |
DE69017140D1 (de) | Isolation für integrierte Schaltungsanordnung. | |
DE3768876D1 (de) | Zusammensetzung fuer die herstellung von integrierten schaltungen, anwendungs- und herstellungsmethode. | |
DE68916774D1 (de) | Temperaturregler für die Kennzeichen eines integrierten Schaltkreises. | |
DE3879345D1 (de) | Knopf. | |
DE3763488D1 (de) | Knopf. | |
DE3784149D1 (de) | Entfernbare aetzresistente beschichtung fuer die laserprogrammierung integrierter schaltungen. | |
DE3687785D1 (de) | Integrierte schaltungen. | |
DE3872307D1 (de) | Knopf. | |
DE69009031D1 (de) | Positionierungsvorrichtung für die Herstellung von gedruckten Leiterplatten. | |
DE69020607D1 (de) | Träger für integrierte Schaltungen. | |
ATE100612T1 (de) | Integrierte schaltungen. | |
NO871029D0 (no) | Fremgangsmaate for fremstilling av metallvirenetting. | |
TH8601000389EX (th) | สิทธิบัตรยังไม่ประกาศโฆษณา | |
TH8602000048EX (th) | สิทธิบัตรยังไม่ประกาศโฆษณา |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN |
|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |