US5255153A
(en)
*
|
1990-07-20 |
1993-10-19 |
Tokyo Electron Limited |
Electrostatic chuck and plasma apparatus equipped therewith
|
EP0493089B1
(de)
*
|
1990-12-25 |
1998-09-16 |
Ngk Insulators, Ltd. |
Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben
|
US5166856A
(en)
*
|
1991-01-31 |
1992-11-24 |
International Business Machines Corporation |
Electrostatic chuck with diamond coating
|
EP0506537A1
(de)
*
|
1991-03-28 |
1992-09-30 |
Shin-Etsu Chemical Co., Ltd. |
Elektrostatische Halteplatte
|
US5191506A
(en)
*
|
1991-05-02 |
1993-03-02 |
International Business Machines Corporation |
Ceramic electrostatic chuck
|
US5155652A
(en)
*
|
1991-05-02 |
1992-10-13 |
International Business Machines Corporation |
Temperature cycling ceramic electrostatic chuck
|
US5207437A
(en)
*
|
1991-10-29 |
1993-05-04 |
International Business Machines Corporation |
Ceramic electrostatic wafer chuck
|
DE69231299T2
(de)
*
|
1991-11-07 |
2001-01-18 |
Varian Semiconductor Equipment |
Verfahren zur Herstellung einer elektrostatischen Halteplatte
|
US5539609A
(en)
*
|
1992-12-02 |
1996-07-23 |
Applied Materials, Inc. |
Electrostatic chuck usable in high density plasma
|
JP2938679B2
(ja)
*
|
1992-06-26 |
1999-08-23 |
信越化学工業株式会社 |
セラミックス製静電チャック
|
US5600530A
(en)
*
|
1992-08-04 |
1997-02-04 |
The Morgan Crucible Company Plc |
Electrostatic chuck
|
US5413360A
(en)
*
|
1992-12-01 |
1995-05-09 |
Kyocera Corporation |
Electrostatic chuck
|
US5350479A
(en)
*
|
1992-12-02 |
1994-09-27 |
Applied Materials, Inc. |
Electrostatic chuck for high power plasma processing
|
US5384681A
(en)
*
|
1993-03-01 |
1995-01-24 |
Toto Ltd. |
Electrostatic chuck
|
US5384682A
(en)
*
|
1993-03-22 |
1995-01-24 |
Toto Ltd. |
Electrostatic chuck
|
JPH06326175A
(ja)
*
|
1993-04-22 |
1994-11-25 |
Applied Materials Inc |
集積回路処理装置において使用されるウエハサポートの誘電材への保護被覆とその形成方法
|
KR100260587B1
(ko)
*
|
1993-06-01 |
2000-08-01 |
히가시 데쓰로 |
정전척 및 그의 제조방법
|
US5463526A
(en)
*
|
1994-01-21 |
1995-10-31 |
Lam Research Corporation |
Hybrid electrostatic chuck
|
US5801915A
(en)
*
|
1994-01-31 |
1998-09-01 |
Applied Materials, Inc. |
Electrostatic chuck having a unidirectionally conducting coupler layer
|
US6278600B1
(en)
*
|
1994-01-31 |
2001-08-21 |
Applied Materials, Inc. |
Electrostatic chuck with improved temperature control and puncture resistance
|
US5729423A
(en)
*
|
1994-01-31 |
1998-03-17 |
Applied Materials, Inc. |
Puncture resistant electrostatic chuck
|
TW288253B
(de)
*
|
1994-02-03 |
1996-10-11 |
Aneruba Kk |
|
EP0669644B1
(de)
*
|
1994-02-28 |
1997-08-20 |
Applied Materials, Inc. |
Elektrostatische Halteplatte
|
FR2724269B1
(fr)
*
|
1994-09-06 |
1996-10-18 |
Commissariat Energie Atomique |
Porte-substrat electrostatique
|
US5792562A
(en)
*
|
1995-01-12 |
1998-08-11 |
Applied Materials, Inc. |
Electrostatic chuck with polymeric impregnation and method of making
|
US5671116A
(en)
*
|
1995-03-10 |
1997-09-23 |
Lam Research Corporation |
Multilayered electrostatic chuck and method of manufacture thereof
|
US5670066A
(en)
*
|
1995-03-17 |
1997-09-23 |
Lam Research Corporation |
Vacuum plasma processing wherein workpiece position is detected prior to chuck being activated
|
US6042686A
(en)
*
|
1995-06-30 |
2000-03-28 |
Lam Research Corporation |
Power segmented electrode
|
JP2971369B2
(ja)
*
|
1995-08-31 |
1999-11-02 |
トーカロ株式会社 |
静電チャック部材およびその製造方法
|
JP3457477B2
(ja)
*
|
1995-09-06 |
2003-10-20 |
日本碍子株式会社 |
静電チャック
|
US5835333A
(en)
*
|
1995-10-30 |
1998-11-10 |
Lam Research Corporation |
Negative offset bipolar electrostatic chucks
|
US5841623A
(en)
*
|
1995-12-22 |
1998-11-24 |
Lam Research Corporation |
Chuck for substrate processing and method for depositing a film in a radio frequency biased plasma chemical depositing system
|
JPH09260474A
(ja)
*
|
1996-03-22 |
1997-10-03 |
Sony Corp |
静電チャックおよびウエハステージ
|
US5812361A
(en)
*
|
1996-03-29 |
1998-09-22 |
Lam Research Corporation |
Dynamic feedback electrostatic wafer chuck
|
US5761023A
(en)
*
|
1996-04-25 |
1998-06-02 |
Applied Materials, Inc. |
Substrate support with pressure zones having reduced contact area and temperature feedback
|
US6108189A
(en)
|
1996-04-26 |
2000-08-22 |
Applied Materials, Inc. |
Electrostatic chuck having improved gas conduits
|
US5751537A
(en)
*
|
1996-05-02 |
1998-05-12 |
Applied Materials, Inc. |
Multielectrode electrostatic chuck with fuses
|
US6055150A
(en)
*
|
1996-05-02 |
2000-04-25 |
Applied Materials, Inc. |
Multi-electrode electrostatic chuck having fuses in hollow cavities
|
US6175485B1
(en)
|
1996-07-19 |
2001-01-16 |
Applied Materials, Inc. |
Electrostatic chuck and method for fabricating the same
|
TW334609B
(en)
*
|
1996-09-19 |
1998-06-21 |
Hitachi Ltd |
Electrostatic chuck, method and device for processing sanyle use the same
|
US5978202A
(en)
*
|
1997-06-27 |
1999-11-02 |
Applied Materials, Inc. |
Electrostatic chuck having a thermal transfer regulator pad
|
GB2329515B
(en)
*
|
1997-09-18 |
2002-03-13 |
Trikon Equip Ltd |
Platen for semiconductor workpieces
|
JPH11111828A
(ja)
*
|
1997-09-30 |
1999-04-23 |
Shin Etsu Chem Co Ltd |
静電吸着装置
|
US5880924A
(en)
*
|
1997-12-01 |
1999-03-09 |
Applied Materials, Inc. |
Electrostatic chuck capable of rapidly dechucking a substrate
|
US5909355A
(en)
*
|
1997-12-02 |
1999-06-01 |
Applied Materials, Inc. |
Ceramic electrostatic chuck and method of fabricating same
|
JPH11168134A
(ja)
*
|
1997-12-03 |
1999-06-22 |
Shin Etsu Chem Co Ltd |
静電吸着装置およびその製造方法
|
US5905626A
(en)
*
|
1998-04-12 |
1999-05-18 |
Dorsey Gage, Inc. |
Electrostatic chuck with ceramic pole protection
|
US6140236A
(en)
*
|
1998-04-21 |
2000-10-31 |
Kabushiki Kaisha Toshiba |
High throughput A1-Cu thin film sputtering process on small contact via for manufacturable beol wiring
|
US6641939B1
(en)
|
1998-07-01 |
2003-11-04 |
The Morgan Crucible Company Plc |
Transition metal oxide doped alumina and methods of making and using
|
US6259592B1
(en)
*
|
1998-11-19 |
2001-07-10 |
Applied Materials, Inc. |
Apparatus for retaining a workpiece upon a workpiece support and method of manufacturing same
|
US6263829B1
(en)
|
1999-01-22 |
2001-07-24 |
Applied Materials, Inc. |
Process chamber having improved gas distributor and method of manufacture
|
JP3805134B2
(ja)
*
|
1999-05-25 |
2006-08-02 |
東陶機器株式会社 |
絶縁性基板吸着用静電チャック
|
US6273958B2
(en)
|
1999-06-09 |
2001-08-14 |
Applied Materials, Inc. |
Substrate support for plasma processing
|
US6268994B1
(en)
|
1999-07-09 |
2001-07-31 |
Dorsey Gage, Inc. |
Electrostatic chuck and method of manufacture
|
US6500299B1
(en)
|
1999-07-22 |
2002-12-31 |
Applied Materials Inc. |
Chamber having improved gas feed-through and method
|
US6488820B1
(en)
*
|
1999-08-23 |
2002-12-03 |
Applied Materials, Inc. |
Method and apparatus for reducing migration of conductive material on a component
|
KR20020059438A
(ko)
|
1999-12-09 |
2002-07-12 |
보스트 스티븐 엘. |
편평한 막 전극을 갖는 정전 척
|
US6603650B1
(en)
|
1999-12-09 |
2003-08-05 |
Saint-Gobain Ceramics And Plastics, Inc. |
Electrostatic chuck susceptor and method for fabrication
|
US6723274B1
(en)
|
1999-12-09 |
2004-04-20 |
Saint-Gobain Ceramics & Plastics, Inc. |
High-purity low-resistivity electrostatic chucks
|
US6478924B1
(en)
|
2000-03-07 |
2002-11-12 |
Applied Materials, Inc. |
Plasma chamber support having dual electrodes
|
EP1383168A1
(de)
*
|
2000-03-15 |
2004-01-21 |
Ibiden Co., Ltd. |
Verfahren zur herstellung elektrostatischer futter und verfahren zur herstellung keramischer heizelemente
|
US6598559B1
(en)
|
2000-03-24 |
2003-07-29 |
Applied Materials, Inc. |
Temperature controlled chamber
|
US6731496B2
(en)
*
|
2000-05-10 |
2004-05-04 |
Ibiden Co., Ltd. |
Electrostatic chuck
|
TWI254403B
(en)
|
2000-05-19 |
2006-05-01 |
Ngk Insulators Ltd |
Electrostatic clamper, and electrostatic attracting structures
|
JP4156788B2
(ja)
*
|
2000-10-23 |
2008-09-24 |
日本碍子株式会社 |
半導体製造装置用サセプター
|
KR20020046214A
(ko)
*
|
2000-12-11 |
2002-06-20 |
어드밴스드 세라믹스 인터내셔날 코포레이션 |
정전척 및 그 제조방법
|
US20030107865A1
(en)
*
|
2000-12-11 |
2003-06-12 |
Shinsuke Masuda |
Wafer handling apparatus and method of manufacturing the same
|
US6581275B2
(en)
|
2001-01-22 |
2003-06-24 |
Applied Materials Inc. |
Fabricating an electrostatic chuck having plasma resistant gas conduits
|
DE10122036B4
(de)
*
|
2001-05-07 |
2009-12-24 |
Karl Suss Dresden Gmbh |
Substrathaltevorrichtung für Prober zum Testen von Schaltungsanordnungen auf scheibenförmigen Substraten
|
US6483690B1
(en)
*
|
2001-06-28 |
2002-11-19 |
Lam Research Corporation |
Ceramic electrostatic chuck assembly and method of making
|
KR20030020072A
(ko)
*
|
2001-09-01 |
2003-03-08 |
주성엔지니어링(주) |
유니폴라 정전척
|
US6682627B2
(en)
|
2001-09-24 |
2004-01-27 |
Applied Materials, Inc. |
Process chamber having a corrosion-resistant wall and method
|
US20030188685A1
(en)
*
|
2002-04-08 |
2003-10-09 |
Applied Materials, Inc. |
Laser drilled surfaces for substrate processing chambers
|
US7910218B2
(en)
|
2003-10-22 |
2011-03-22 |
Applied Materials, Inc. |
Cleaning and refurbishing chamber components having metal coatings
|
JP2005133876A
(ja)
|
2003-10-31 |
2005-05-26 |
Ntn Corp |
電食防止型転がり軸受
|
DE102004041049A1
(de)
*
|
2004-07-02 |
2006-01-26 |
VenTec Gesellschaft für Venturekapital und Unternehmensberatung mbH |
Mobiler, elektrostatischer Substrathalter und Verfahren zur Herstellung des Substrathalters
|
US7670436B2
(en)
|
2004-11-03 |
2010-03-02 |
Applied Materials, Inc. |
Support ring assembly
|
WO2006049085A1
(ja)
*
|
2004-11-04 |
2006-05-11 |
Ulvac, Inc. |
静電チャック装置
|
US7993489B2
(en)
*
|
2005-03-31 |
2011-08-09 |
Tokyo Electron Limited |
Capacitive coupling plasma processing apparatus and method for using the same
|
JP4704088B2
(ja)
|
2005-03-31 |
2011-06-15 |
東京エレクトロン株式会社 |
プラズマ処理装置
|
US8617672B2
(en)
|
2005-07-13 |
2013-12-31 |
Applied Materials, Inc. |
Localized surface annealing of components for substrate processing chambers
|
DE202005011367U1
(de)
|
2005-07-18 |
2005-09-29 |
Retzlaff, Udo, Dr. |
Transfer-ESC auf Wafer-Basis
|
US20070029046A1
(en)
*
|
2005-08-04 |
2007-02-08 |
Applied Materials, Inc. |
Methods and systems for increasing substrate temperature in plasma reactors
|
US7762114B2
(en)
|
2005-09-09 |
2010-07-27 |
Applied Materials, Inc. |
Flow-formed chamber component having a textured surface
|
US7717574B1
(en)
*
|
2005-09-30 |
2010-05-18 |
Obscura Digital, Inc. |
Method for simplifying the imaging of objects with non-Lambertian surfaces
|
US9127362B2
(en)
|
2005-10-31 |
2015-09-08 |
Applied Materials, Inc. |
Process kit and target for substrate processing chamber
|
US7248457B2
(en)
*
|
2005-11-15 |
2007-07-24 |
Toto Ltd. |
Electrostatic chuck
|
US8647484B2
(en)
|
2005-11-25 |
2014-02-11 |
Applied Materials, Inc. |
Target for sputtering chamber
|
DE202006007122U1
(de)
*
|
2006-05-03 |
2006-09-07 |
Retzlaff, Udo, Dr. |
Mobiler, transportabler, elektrostatischer Substrathalter aus Halbleitermaterial
|
US20070283884A1
(en)
*
|
2006-05-30 |
2007-12-13 |
Applied Materials, Inc. |
Ring assembly for substrate processing chamber
|
WO2008082978A2
(en)
*
|
2006-12-26 |
2008-07-10 |
Saint-Gobain Ceramics & Plastics, Inc. |
Electrostatic chuck and method of forming
|
US7981262B2
(en)
|
2007-01-29 |
2011-07-19 |
Applied Materials, Inc. |
Process kit for substrate processing chamber
|
JP5036339B2
(ja)
*
|
2007-02-07 |
2012-09-26 |
日本碍子株式会社 |
静電チャック及びその製造方法
|
US20080274626A1
(en)
*
|
2007-05-04 |
2008-11-06 |
Frederique Glowacki |
Method for depositing a high quality silicon dielectric film on a germanium substrate with high quality interface
|
US7942969B2
(en)
|
2007-05-30 |
2011-05-17 |
Applied Materials, Inc. |
Substrate cleaning chamber and components
|
JP2008103753A
(ja)
*
|
2007-12-10 |
2008-05-01 |
Canon Anelva Corp |
半導体製造装置用静電吸着ステージ
|
IT1398430B1
(it)
*
|
2009-09-03 |
2013-02-22 |
Applied Materials Inc |
Dispositivo per l'alloggiamento di un substrato, e relativo procedimento
|
JP4920066B2
(ja)
*
|
2009-09-18 |
2012-04-18 |
Ntn株式会社 |
電食防止型転がり軸受
|
US9494875B2
(en)
|
2011-10-06 |
2016-11-15 |
Asml Netherlands B.V. |
Chuck, a chuck control system, a lithography apparatus and a method of using a chuck
|
JP5583877B1
(ja)
*
|
2012-11-06 |
2014-09-03 |
日本碍子株式会社 |
サセプタ
|
US9293926B2
(en)
*
|
2012-11-21 |
2016-03-22 |
Lam Research Corporation |
Plasma processing systems having multi-layer segmented electrodes and methods therefor
|
JP5654083B2
(ja)
*
|
2013-05-09 |
2015-01-14 |
東京エレクトロン株式会社 |
静電チャック及び基板処理装置
|
US10153139B2
(en)
*
|
2015-06-17 |
2018-12-11 |
Applied Materials, Inc. |
Multiple electrode substrate support assembly and phase control system
|
KR20180130535A
(ko)
*
|
2016-04-07 |
2018-12-07 |
마테리온 코포레이션 |
산화 베릴륨 일체형 저항 히터
|
JP2018046179A
(ja)
|
2016-09-15 |
2018-03-22 |
株式会社東芝 |
静電チャック及び半導体製造装置
|
JP7012454B2
(ja)
*
|
2017-04-27 |
2022-01-28 |
株式会社岡本工作機械製作所 |
静電吸着チャックの製造方法並びに半導体装置の製造方法
|
US10190216B1
(en)
|
2017-07-25 |
2019-01-29 |
Lam Research Corporation |
Showerhead tilt mechanism
|
JP7059064B2
(ja)
*
|
2018-03-26 |
2022-04-25 |
株式会社日立ハイテク |
プラズマ処理装置
|
TWD223375S
(zh)
*
|
2021-03-29 |
2023-02-01 |
大陸商北京北方華創微電子裝備有限公司 |
靜電卡盤
|