TWD223375S - 靜電卡盤 - Google Patents

靜電卡盤 Download PDF

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Publication number
TWD223375S
TWD223375S TW110304948F TW110304948F TWD223375S TW D223375 S TWD223375 S TW D223375S TW 110304948 F TW110304948 F TW 110304948F TW 110304948 F TW110304948 F TW 110304948F TW D223375 S TWD223375 S TW D223375S
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TW
Taiwan
Prior art keywords
mark
design
case
chip
electrostatic chuck
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TW110304948F
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English (en)
Inventor
史全宇
Original Assignee
大陸商北京北方華創微電子裝備有限公司
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Application filed by 大陸商北京北方華創微電子裝備有限公司 filed Critical 大陸商北京北方華創微電子裝備有限公司
Publication of TWD223375S publication Critical patent/TWD223375S/zh

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Abstract

【物品用途】;用於對晶片進行承載和固定，避免晶片在製程中出現移位或錯位，並在連接射頻電源後，為晶片提供射頻偏壓和控制晶片表面的溫度;【設計說明】;本案設計係新穎獨特之樣式，藉由形狀和圖案的結合設計靜電卡盤，可顯現出現有技術所未有之視覺效果。;本案最能表明設計要點的圖片或照片為:立體圖1。本案省略無設計要點的後視圖。;A部放大圖中標記1為靜電卡盤上的凸起，凸起高度很小，在3至8微米之間；標記2為氣道；標記3為用於定位的槽；標記4為孔。B部放大圖中標記5為中心氣孔；標記6為C形塗層；標記7為長圓形槽。;圖式所揭露之文字，為本案不主張設計之部分。

Description

靜電卡盤
用於對晶片進行承載和固定，避免晶片在製程中出現移位或錯位，並在連接射頻電源後，為晶片提供射頻偏壓和控制晶片表面的溫度
本案設計係新穎獨特之樣式，藉由形狀和圖案的結合設計靜電卡盤，可顯現出現有技術所未有之視覺效果。
本案最能表明設計要點的圖片或照片為:立體圖1。本案省略無設計要點的後視圖。
A部放大圖中標記1為靜電卡盤上的凸起，凸起高度很小，在3至8微米之間；標記2為氣道；標記3為用於定位的槽；標記4為孔。B部放大圖中標記5為中心氣孔；標記6為C形塗層；標記7為長圓形槽。
圖式所揭露之文字，為本案不主張設計之部分。
TW110304948F 2021-03-29 2021-09-14 靜電卡盤 TWD223375S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202130170686.X 2021-03-29
CN202130170686 2021-03-29

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TWD223375S true TWD223375S (zh) 2023-02-01

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ID=83059681

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TW110304948F TWD223375S (zh) 2021-03-29 2021-09-14 靜電卡盤

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US (1) USD984972S1 (zh)
JP (1) JP1723603S (zh)
TW (1) TWD223375S (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD206653S (zh) 2019-07-18 2020-08-21 日商國際電氣股份有限公司 基板處理裝置用吸頂式加熱器的保持板

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TWD206653S (zh) 2019-07-18 2020-08-21 日商國際電氣股份有限公司 基板處理裝置用吸頂式加熱器的保持板

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USD984972S1 (en) 2023-05-02
JP1723603S (ja) 2022-08-31

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