USD490827S1 - Electrostatic chuck - Google Patents
Electrostatic chuck Download PDFInfo
- Publication number
- USD490827S1 USD490827S1 US29/183,943 US18394303F USD490827S US D490827 S1 USD490827 S1 US D490827S1 US 18394303 F US18394303 F US 18394303F US D490827 S USD490827 S US D490827S
- Authority
- US
- United States
- Prior art keywords
- electrostatic chuck
- view
- elevational view
- electrostatic
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.
Claims (1)
- The ornamental design for a electrostatic chuck, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002035559 | 2002-12-20 | ||
| JP2002-035559 | 2002-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD490827S1 true USD490827S1 (en) | 2004-06-01 |
Family
ID=32321576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/183,943 Expired - Lifetime USD490827S1 (en) | 2002-12-20 | 2003-06-20 | Electrostatic chuck |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD490827S1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD931240S1 (en) * | 2019-07-30 | 2021-09-21 | Applied Materials, Inc. | Substrate support pedestal |
| USD947802S1 (en) | 2020-05-20 | 2022-04-05 | Applied Materials, Inc. | Replaceable substrate carrier interfacing film |
| USD984972S1 (en) * | 2021-03-29 | 2023-05-02 | Beijing Naura Microelectronics Equipment Co., Ltd. | Electrostatic chuck for semiconductor manufacture |
-
2003
- 2003-06-20 US US29/183,943 patent/USD490827S1/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD931240S1 (en) * | 2019-07-30 | 2021-09-21 | Applied Materials, Inc. | Substrate support pedestal |
| USD947802S1 (en) | 2020-05-20 | 2022-04-05 | Applied Materials, Inc. | Replaceable substrate carrier interfacing film |
| USD984972S1 (en) * | 2021-03-29 | 2023-05-02 | Beijing Naura Microelectronics Equipment Co., Ltd. | Electrostatic chuck for semiconductor manufacture |
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