USD489739S1 - Electrostatic chuck - Google Patents
Electrostatic chuck Download PDFInfo
- Publication number
- USD489739S1 USD489739S1 US29/183,941 US18394103F USD489739S US D489739 S1 USD489739 S1 US D489739S1 US 18394103 F US18394103 F US 18394103F US D489739 S USD489739 S US D489739S
- Authority
- US
- United States
- Prior art keywords
- electrostatic chuck
- view
- elevational view
- electrostatic
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;
FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;
FIG. 3 is a right side elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a sectional view taking along the line 7—7 in FIG. 5.
Claims (1)
- The ornamental design for a electrostatic chuck, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002035561 | 2002-12-20 | ||
JP2002-035561 | 2002-12-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD489739S1 true USD489739S1 (en) | 2004-05-11 |
Family
ID=32211483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/183,941 Expired - Lifetime USD489739S1 (en) | 2002-12-20 | 2003-06-20 | Electrostatic chuck |
Country Status (1)
Country | Link |
---|---|
US (1) | USD489739S1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD795208S1 (en) * | 2015-08-18 | 2017-08-22 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
USD802472S1 (en) * | 2015-08-06 | 2017-11-14 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
USD803802S1 (en) * | 2015-08-18 | 2017-11-28 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
USD947802S1 (en) | 2020-05-20 | 2022-04-05 | Applied Materials, Inc. | Replaceable substrate carrier interfacing film |
USD980176S1 (en) * | 2020-06-02 | 2023-03-07 | Applied Materials, Inc. | Substrate processing system carrier |
USD984972S1 (en) * | 2021-03-29 | 2023-05-02 | Beijing Naura Microelectronics Equipment Co., Ltd. | Electrostatic chuck for semiconductor manufacture |
US11842917B2 (en) | 2019-05-20 | 2023-12-12 | Applied Materials, Inc. | Process kit ring adaptor |
-
2003
- 2003-06-20 US US29/183,941 patent/USD489739S1/en not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD802472S1 (en) * | 2015-08-06 | 2017-11-14 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
USD795208S1 (en) * | 2015-08-18 | 2017-08-22 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
USD803802S1 (en) * | 2015-08-18 | 2017-11-28 | Tokyo Electron Limited | Electrostatic chuck for semiconductor manufacturing equipment |
US11842917B2 (en) | 2019-05-20 | 2023-12-12 | Applied Materials, Inc. | Process kit ring adaptor |
USD947802S1 (en) | 2020-05-20 | 2022-04-05 | Applied Materials, Inc. | Replaceable substrate carrier interfacing film |
USD980176S1 (en) * | 2020-06-02 | 2023-03-07 | Applied Materials, Inc. | Substrate processing system carrier |
USD984972S1 (en) * | 2021-03-29 | 2023-05-02 | Beijing Naura Microelectronics Equipment Co., Ltd. | Electrostatic chuck for semiconductor manufacture |
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