DE68917016D1 - Verfahren zur Herstellung eines elektrolumineszenten Films. - Google Patents

Verfahren zur Herstellung eines elektrolumineszenten Films.

Info

Publication number
DE68917016D1
DE68917016D1 DE68917016T DE68917016T DE68917016D1 DE 68917016 D1 DE68917016 D1 DE 68917016D1 DE 68917016 T DE68917016 T DE 68917016T DE 68917016 T DE68917016 T DE 68917016T DE 68917016 D1 DE68917016 D1 DE 68917016D1
Authority
DE
Germany
Prior art keywords
producing
electroluminescent film
electroluminescent
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68917016T
Other languages
English (en)
Other versions
DE68917016T2 (de
Inventor
Akiyoshi Mikami
Koichi Tanaka
Kouji Taniguchi
Masaru Yoshida
Shigeo Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Application granted granted Critical
Publication of DE68917016D1 publication Critical patent/DE68917016D1/de
Publication of DE68917016T2 publication Critical patent/DE68917016T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/305—Sulfides, selenides, or tellurides
    • C23C16/306—AII BVI compounds, where A is Zn, Cd or Hg and B is S, Se or Te
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/61—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing fluorine, chlorine, bromine, iodine or unspecified halogen elements
    • C09K11/611—Chalcogenides
    • C09K11/612—Chalcogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/61—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing fluorine, chlorine, bromine, iodine or unspecified halogen elements
    • C09K11/611—Chalcogenides
    • C09K11/613—Chalcogenides with alkali or alkakine earth metals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7701—Chalogenides
    • C09K11/7702—Chalogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/77—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing rare earth metals
    • C09K11/7701—Chalogenides
    • C09K11/7703—Chalogenides with alkaline earth metals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/88—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing selenium, tellurium or unspecified chalcogen elements
    • C09K11/881—Chalcogenides
    • C09K11/883—Chalcogenides with zinc or cadmium
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/88—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing selenium, tellurium or unspecified chalcogen elements
    • C09K11/881—Chalcogenides
    • C09K11/885—Chalcogenides with alkaline earth metals
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00—Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/88—Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing selenium, tellurium or unspecified chalcogen elements
    • C09K11/881—Chalcogenides
    • C09K11/886—Chalcogenides with rare earth metals
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional radiating surfaces
    • H05B33/14—Light sources with substantially two-dimensional radiating surfaces characterised by the chemical or physical composition or the arrangement of the electroluminescent material, or by the simultaneous addition of the electroluminescent material in or onto the light source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Luminescent Compositions (AREA)
DE1989617016 1988-05-13 1989-05-12 Verfahren zur Herstellung eines elektrolumineszenten Films. Expired - Fee Related DE68917016T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63117943A JPH0760738B2 (ja) 1988-05-13 1988-05-13 エレクトロルミネッセンス発光膜の製造方法

Publications (2)

Publication Number Publication Date
DE68917016D1 true DE68917016D1 (de) 1994-09-01
DE68917016T2 DE68917016T2 (de) 1995-03-16

Family

ID=14724066

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989617016 Expired - Fee Related DE68917016T2 (de) 1988-05-13 1989-05-12 Verfahren zur Herstellung eines elektrolumineszenten Films.

Country Status (4)

Country Link
EP (1) EP0342063B1 (de)
JP (1) JPH0760738B2 (de)
DE (1) DE68917016T2 (de)
FI (1) FI103226B1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3502106A1 (de) * 1985-01-23 1986-07-24 Bayer Ag, 5090 Leverkusen Verfahren zur herstellung von cyclischen, aliphatischen orthokohlensaeureestern sowie neue cyclische orthokohlensaeureester
US5087531A (en) * 1988-11-30 1992-02-11 Sharp Kabushiki Kaisha Electroluminescent device
JPH0818902B2 (ja) * 1989-11-02 1996-02-28 シャープ株式会社 気相成長装置
JPH0793191B2 (ja) * 1990-01-09 1995-10-09 シャープ株式会社 薄膜ｅｌ素子の製造方法
JPH0421780A (ja) * 1990-05-14 1992-01-24 Sharp Corp 気相成長装置
JP2680725B2 (ja) * 1990-08-13 1997-11-19 シャープ株式会社 エレクトロルミネッセンス薄膜の作製方法
JP2809235B2 (ja) * 1991-01-24 1998-10-08 富士電機株式会社 エレクトロルミネッセンス表示パネルの発光膜の成膜方法
FI106689B (fi) * 1991-04-01 2001-03-15 Sharp Kk Menetelmä elektroluminenssiohutkalvon valmistamiseksi
DE4435016A1 (de) * 1994-09-23 1996-03-28 Hertz Inst Heinrich Elektrolumineszenzdisplay mit einem Blau/Grün-Strahler, Verfahren zu dessen Herstellung und Vorrichtungen zur Verfahrensdurchführung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054153A (ja) * 1983-09-02 1985-03-28 Sumitomo Electric Ind Ltd 荷電粒子モニタ−用発光体
JPH0674416B2 (ja) * 1984-07-30 1994-09-21 セイコーエプソン株式会社 ケイ光物質薄膜の製法および製造装置
JPH0744067B2 (ja) * 1985-04-17 1995-05-15 セイコーエプソン株式会社 Ｅｌ発光素子の製造方法
JPH0744071B2 (ja) * 1985-05-08 1995-05-15 キヤノン株式会社 電場発光素子の製造方法
US4720436A (en) * 1985-09-11 1988-01-19 Ricoh Company, Ltd. Electroluminescence devices and method of fabricating the same
JPS6279285A (ja) * 1985-10-01 1987-04-11 Ricoh Co Ltd 薄膜エレクトロルミネツセンス素子
WO1988003161A1 (en) * 1986-10-24 1988-05-05 Sunstone, Inc. Phosphors and methods of preparing the same

Also Published As

Publication number Publication date
FI892309A (fi) 1989-11-14
DE68917016T2 (de) 1995-03-16
EP0342063B1 (de) 1994-07-27
FI103226B (fi) 1999-05-14
JPH01289091A (ja) 1989-11-21
EP0342063A3 (de) 1991-02-27
JPH0760738B2 (ja) 1995-06-28
FI892309A0 (fi) 1989-05-12
EP0342063A2 (de) 1989-11-15
FI103226B1 (fi) 1999-05-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8339 Ceased/non-payment of the annual fee