DE3881077D1 - Verfahren zur herstellung eines diamantfilms. - Google Patents

Verfahren zur herstellung eines diamantfilms.

Info

Publication number
DE3881077D1
DE3881077D1 DE8888102852T DE3881077T DE3881077D1 DE 3881077 D1 DE3881077 D1 DE 3881077D1 DE 8888102852 T DE8888102852 T DE 8888102852T DE 3881077 T DE3881077 T DE 3881077T DE 3881077 D1 DE3881077 D1 DE 3881077D1
Authority
DE
Germany
Prior art keywords
producing
diamond film
diamond
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888102852T
Other languages
English (en)
Other versions
DE3881077T2 (de
Inventor
Koji C O Nissin Electr Okamoto
Masayasu C O Nissin Elec Tanjo
Eiji C O Nissin Electri Kamijo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Application granted granted Critical
Publication of DE3881077D1 publication Critical patent/DE3881077D1/de
Publication of DE3881077T2 publication Critical patent/DE3881077T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
DE8888102852T 1987-02-26 1988-02-25 Verfahren zur herstellung eines diamantfilms. Expired - Fee Related DE3881077T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62043861A JPS63210099A (ja) 1987-02-26 1987-02-26 ダイヤモンド膜の作製方法

Publications (2)

Publication Number Publication Date
DE3881077D1 true DE3881077D1 (de) 1993-06-24
DE3881077T2 DE3881077T2 (de) 1993-09-02

Family

ID=12675479

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888102852T Expired - Fee Related DE3881077T2 (de) 1987-02-26 1988-02-25 Verfahren zur herstellung eines diamantfilms.

Country Status (4)

Country Link
US (1) US4915977A (de)
EP (1) EP0280315B1 (de)
JP (1) JPS63210099A (de)
DE (1) DE3881077T2 (de)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5268201A (en) * 1987-10-20 1993-12-07 Showa Denko Kabushiki Kaisha Composite diamond grain and method for production thereof
WO1993013015A1 (en) * 1987-10-20 1993-07-08 Kunio Komaki Composite diamond grains and process for their production
US5275850A (en) * 1988-04-20 1994-01-04 Hitachi, Ltd. Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
FR2639363B1 (fr) * 1988-11-23 1991-02-22 Centre Nat Rech Scient Procede et dispositif de traitement de surface par plasma, pour un substrat porte par une electrode
DE3841731C1 (en) * 1988-12-10 1990-04-12 Krupp Widia Gmbh, 4300 Essen, De Process for coating a tool base, and tool produced by this process
US5223337A (en) * 1988-12-10 1993-06-29 Fried. Krupp Gmbh Tool produced by a plasma-activated CVD process
DE3841730C2 (de) * 1988-12-10 1997-06-19 Widia Gmbh Verfahren zum Beschichten eines metallischen Grundkörpers mit einem nichtleitenden Beschichtungsmaterial
US5340401A (en) * 1989-01-06 1994-08-23 Celestech Inc. Diamond deposition cell
US5182093A (en) * 1990-01-08 1993-01-26 Celestech, Inc. Diamond deposition cell
IL93399A (en) * 1989-02-16 1994-06-24 De Beers Ind Diamond Epithelium of a diamond or a layer of diamond figures
JPH02248397A (ja) * 1989-03-20 1990-10-04 Onoda Cement Co Ltd ダイヤモンドの製造装置および製造方法
US5296274A (en) * 1989-05-10 1994-03-22 Movchan Boris A Method of producing carbon-containing materials by electron beam vacuum evaporation of graphite and subsequent condensation
US5106452A (en) * 1989-06-05 1992-04-21 Semiconductor Energy Laboratory Co., Ltd. Method of depositing diamond and diamond light emitting device
US5190823A (en) * 1989-07-31 1993-03-02 General Electric Company Method for improving adhesion of synthetic diamond coatings to substrates
JPH0780718B2 (ja) * 1989-08-04 1995-08-30 トヨタ自動車株式会社 ダイヤモンドの合成方法および合成装置
WO1991004353A1 (en) * 1989-09-22 1991-04-04 Showa Denko Kabushiki Kaisha Vapor deposited diamond synthesizing method on electrochemically treated substrate
JPH03122091A (ja) * 1989-09-29 1991-05-24 Natl Inst For Res In Inorg Mater ダイヤモンドの高速合成法
DE3941202A1 (de) * 1989-12-14 1990-06-07 Krupp Gmbh Verfahren zur erzeugung von schichten aus harten kohlenstoffmodifikationen und vorrichtung zur durchfuehrung des verfahrens
US5110577A (en) * 1990-01-12 1992-05-05 Ford Motor Company Process of depositing a carbon film having metallic properties
US5132105A (en) * 1990-02-02 1992-07-21 Quantametrics, Inc. Materials with diamond-like properties and method and means for manufacturing them
US5071670A (en) * 1990-06-11 1991-12-10 Kelly Michael A Method for chemical vapor deposition under a single reactor vessel divided into separate reaction chambers each with its own depositing and exhausting means
US5492770A (en) * 1990-08-03 1996-02-20 Fujitsu Limited Method and apparatus for vapor deposition of diamond film
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
DE69101756T2 (de) * 1990-08-07 1994-08-04 Sumitomo Electric Industries Verfahren zur Diamantenherstellung.
US7494638B1 (en) 1990-08-30 2009-02-24 Mitsubishi Corporation Form of carbon
CA2049673A1 (en) * 1990-11-26 1992-05-27 James F. Fleischer Cvd diamond by alternating chemical reactions
FR2670218B1 (fr) * 1990-12-06 1993-02-05 Innovatique Sa Procede de traitement de metaux par depot de matiere, et pour la mise en óoeuvre dudit procede.
US5397558A (en) * 1991-03-26 1995-03-14 Semiconductor Energy Laboratory Co., Ltd. Method of forming diamond or diamond containing carbon film
US5427827A (en) * 1991-03-29 1995-06-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamond-like films by ECR microwave plasma
US5221411A (en) * 1991-04-08 1993-06-22 North Carolina State University Method for synthesis and processing of continuous monocrystalline diamond thin films
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US5718976A (en) * 1991-05-03 1998-02-17 Advanced Refractory Technologies, Inc. Erosion resistant diamond-like nanocomposite coatings for optical components
US5786068A (en) * 1991-05-03 1998-07-28 Advanced Refractory Technologies, Inc. Electrically tunable coatings
US5352493A (en) * 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5728465A (en) * 1991-05-03 1998-03-17 Advanced Refractory Technologies, Inc. Diamond-like nanocomposite corrosion resistant coatings
US5221501A (en) * 1991-06-11 1993-06-22 The United States Of America As Represented By The Secretary Of Commerce Method of producing a smooth plate of diamond
US5227038A (en) * 1991-10-04 1993-07-13 William Marsh Rice University Electric arc process for making fullerenes
US5397428A (en) * 1991-12-20 1995-03-14 The University Of North Carolina At Chapel Hill Nucleation enhancement for chemical vapor deposition of diamond
US5425983A (en) * 1992-08-10 1995-06-20 Santa Barbara Research Center Infrared window protected by multilayer antireflective coating
DE4233085C2 (de) 1992-10-01 1996-10-10 Fraunhofer Ges Forschung Verfahren zur Herstellung heteroepitaktischer Diamantschichten
US5470661A (en) * 1993-01-07 1995-11-28 International Business Machines Corporation Diamond-like carbon films from a hydrocarbon helium plasma
US5674572A (en) * 1993-05-21 1997-10-07 Trustees Of Boston University Enhanced adherence of diamond coatings employing pretreatment process
US5433977A (en) * 1993-05-21 1995-07-18 Trustees Of Boston University Enhanced adherence of diamond coatings by combustion flame CVD
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
US5691010A (en) * 1993-10-19 1997-11-25 Sanyo Electric Co., Ltd. Arc discharge plasma CVD method for forming diamond-like carbon films
US5401543A (en) * 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
WO1995027806A1 (en) * 1994-04-06 1995-10-19 The Regents Of The University Of California Process to produce diamond films
US5551959A (en) * 1994-08-24 1996-09-03 Minnesota Mining And Manufacturing Company Abrasive article having a diamond-like coating layer and method for making same
US6246168B1 (en) * 1994-08-29 2001-06-12 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus as well as method of manufacturing the same
US5638251A (en) * 1995-10-03 1997-06-10 Advanced Refractory Technologies, Inc. Capacitive thin films using diamond-like nanocomposite materials
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US5795648A (en) * 1995-10-03 1998-08-18 Advanced Refractory Technologies, Inc. Method for preserving precision edges using diamond-like nanocomposite film coatings
US5837331A (en) * 1996-03-13 1998-11-17 Motorola, Inc. Amorphous multi-layered structure and method of making the same
EP1067210A3 (de) * 1996-09-06 2002-11-13 Sanyo Electric Co., Ltd. Verfahren zur Abscheidung eines harten Kohlenstoff-Filmes auf einem Substrat und Klinge für einen elektrischen Rasierer
JP2001506319A (ja) * 1997-03-20 2001-05-15 モトローラ・インコーポレイテッド 炭素膜を形成する方法
US6013980A (en) 1997-05-09 2000-01-11 Advanced Refractory Technologies, Inc. Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings
US6964731B1 (en) * 1998-12-21 2005-11-15 Cardinal Cg Company Soil-resistant coating for glass surfaces
US6660365B1 (en) 1998-12-21 2003-12-09 Cardinal Cg Company Soil-resistant coating for glass surfaces
US6974629B1 (en) 1999-08-06 2005-12-13 Cardinal Cg Company Low-emissivity, soil-resistant coating for glass surfaces
EP1303644A4 (de) * 2000-07-17 2008-01-09 Commw Scient Ind Res Org Herstellung von carbon- und auf carbonbasierende materialien
JP4679004B2 (ja) * 2000-09-26 2011-04-27 新明和工業株式会社 アーク蒸発源装置、その駆動方法、及びイオンプレーティング装置
US6660329B2 (en) * 2001-09-05 2003-12-09 Kennametal Inc. Method for making diamond coated cutting tool
CA2550331A1 (en) * 2003-12-22 2005-07-14 Cardinal Cg Compagny Graded photocatalytic coatings
JP4373252B2 (ja) * 2004-03-16 2009-11-25 浩史 滝川 プラズマ生成装置
ATE377579T1 (de) * 2004-07-12 2007-11-15 Cardinal Cg Co Wartungsarme beschichtungen
US8092660B2 (en) * 2004-12-03 2012-01-10 Cardinal Cg Company Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
US7923114B2 (en) * 2004-12-03 2011-04-12 Cardinal Cg Company Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
JP2009534563A (ja) * 2006-04-19 2009-09-24 日本板硝子株式会社 同等の単独の表面反射率を有する対向機能コーティング
US20080011599A1 (en) 2006-07-12 2008-01-17 Brabender Dennis M Sputtering apparatus including novel target mounting and/or control
EP2066594B1 (de) * 2007-09-14 2016-12-07 Cardinal CG Company Pflegeleichte beschichtungen und verfahren zur herstellung pflegeleichter beschichtungen
CN101806928B (zh) * 2010-03-31 2011-11-16 西安交通大学 一种树脂镜片、有机玻璃镜片表面超硬涂层镀膜方法
US10604442B2 (en) 2016-11-17 2020-03-31 Cardinal Cg Company Static-dissipative coating technology

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1395648A (en) * 1972-05-18 1975-05-29 Standard Telephones Cables Ltd Diamond synthesis
US3961103A (en) * 1972-07-12 1976-06-01 Space Sciences, Inc. Film deposition
US4228142A (en) * 1979-08-31 1980-10-14 Holcombe Cressie E Jun Process for producing diamond-like carbon
US4437962A (en) * 1983-05-17 1984-03-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Diamondlike flake composites
JPS60118693A (ja) * 1983-11-25 1985-06-26 Mitsubishi Metal Corp ダイヤモンドの低圧合成方法
JPS60171294A (ja) * 1984-02-13 1985-09-04 Mitsubishi Metal Corp 人工ダイヤモンドを蒸着生成する方法
US4490229A (en) * 1984-07-09 1984-12-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamondlike carbon films
US4725345A (en) * 1985-04-22 1988-02-16 Kabushiki Kaisha Kenwood Method for forming a hard carbon thin film on article and applications thereof
JPS63107898A (ja) * 1986-10-23 1988-05-12 Natl Inst For Res In Inorg Mater プラズマを用いるダイヤモンドの合成法

Also Published As

Publication number Publication date
EP0280315A2 (de) 1988-08-31
DE3881077T2 (de) 1993-09-02
EP0280315B1 (de) 1993-05-19
EP0280315A3 (en) 1989-07-19
US4915977A (en) 1990-04-10
JPS63210099A (ja) 1988-08-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee