DE68910360T2 - Methode zur Herstellung eines MOS-Halbleiter-Leistungsbauelementes (HIMOS) mit Leitfähigkeitsmodulation. - Google Patents
Methode zur Herstellung eines MOS-Halbleiter-Leistungsbauelementes (HIMOS) mit Leitfähigkeitsmodulation.Info
- Publication number
- DE68910360T2 DE68910360T2 DE89200717T DE68910360T DE68910360T2 DE 68910360 T2 DE68910360 T2 DE 68910360T2 DE 89200717 T DE89200717 T DE 89200717T DE 68910360 T DE68910360 T DE 68910360T DE 68910360 T2 DE68910360 T2 DE 68910360T2
- Authority
- DE
- Germany
- Prior art keywords
- himos
- producing
- power component
- semiconductor power
- mos semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
- H01L29/66333—Vertical insulated gate bipolar transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
- H01L29/7395—Vertical transistors, e.g. vertical IGBT
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/126—Power FETs
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT20005/88A IT1218200B (it) | 1988-03-29 | 1988-03-29 | Procedimento di fabbricazione di un dispositivo semiconduttore mos di poterza a modulazione di conducibilita' (himos) e dispositivi con esso ottenuti |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68910360D1 DE68910360D1 (de) | 1993-12-09 |
DE68910360T2 true DE68910360T2 (de) | 1994-03-31 |
Family
ID=11163042
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE89200717T Expired - Fee Related DE68910360T2 (de) | 1988-03-29 | 1989-03-21 | Methode zur Herstellung eines MOS-Halbleiter-Leistungsbauelementes (HIMOS) mit Leitfähigkeitsmodulation. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5073511A (de) |
EP (1) | EP0335445B1 (de) |
JP (1) | JP3012246B2 (de) |
KR (1) | KR890015353A (de) |
DE (1) | DE68910360T2 (de) |
IT (1) | IT1218200B (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5262336A (en) * | 1986-03-21 | 1993-11-16 | Advanced Power Technology, Inc. | IGBT process to produce platinum lifetime control |
JPH0691263B2 (ja) * | 1988-10-19 | 1994-11-14 | 株式会社東芝 | 半導体装置の製造方法 |
IT1241049B (it) * | 1990-03-08 | 1993-12-29 | Cons Ric Microelettronica | Dispositivo a semiconduttore igbt ad elevata tensione di rottura inversa e relativo processo di fabbricazione |
WO1992020007A1 (en) * | 1991-05-07 | 1992-11-12 | Inframetrics, Inc. | Apparatus for operating a conventional film camera in an electronic mode operation |
JP2810821B2 (ja) * | 1992-03-30 | 1998-10-15 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
EP0671770B1 (de) * | 1993-02-09 | 2000-08-02 | GENERAL SEMICONDUCTOR, Inc. | Mehrschichtige Epitaxie für eine Siliziumdiode |
US5892787A (en) * | 1994-10-27 | 1999-04-06 | Hewlett-Packard Company | N-drive, p-common light-emitting devices fabricated on an n-type substrate and method of making same |
EP0725446A1 (de) * | 1995-02-02 | 1996-08-07 | Motorola, Inc. | Bipolare Halbleiteranordnung mit isolierter Gateelektrode und Verfahren zur Herstellung |
US5770880A (en) * | 1996-09-03 | 1998-06-23 | Harris Corporation | P-collector H.V. PMOS switch VT adjusted source/drain |
US5872028A (en) * | 1996-09-05 | 1999-02-16 | Harris Corporation | Method of forming power semiconductor devices with controllable integrated buffer |
DE19811297B4 (de) | 1997-03-17 | 2009-03-19 | Fuji Electric Co., Ltd., Kawasaki | MOS-Halbleitervorrichtung mit hoher Durchbruchspannung |
KR20020045241A (ko) * | 2000-12-08 | 2002-06-19 | 윤종용 | 공기조화기의 표시부 전원제어장치 |
WO2004102671A1 (en) * | 2003-05-19 | 2004-11-25 | Stmicroelectronics S.R.L. | Power device with high switching speed and manufacturing method thereof |
EP4084070A4 (de) * | 2019-12-28 | 2024-02-07 | Keming Wang | Neue prinzipien und technologie für halbleiterelektronik und vorrichtung |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4364073A (en) * | 1980-03-25 | 1982-12-14 | Rca Corporation | Power MOSFET with an anode region |
FR2535901A1 (fr) * | 1982-11-10 | 1984-05-11 | Silicium Semiconducteur Ssc | Thyristor asymetrique a forte tenue en tension inverse |
JPS60260152A (ja) * | 1984-06-07 | 1985-12-23 | Nec Corp | 半導体装置 |
JPS6134753A (ja) * | 1984-07-25 | 1986-02-19 | Hitachi Ltd | 回転ヘツド型磁気記録再生装置 |
JPS6134753U (ja) * | 1984-07-31 | 1986-03-03 | 株式会社明電舎 | 半導体装置 |
US4696701A (en) * | 1986-11-12 | 1987-09-29 | Motorola, Inc. | Epitaxial front seal for a wafer |
-
1988
- 1988-03-29 IT IT20005/88A patent/IT1218200B/it active
-
1989
- 1989-03-21 EP EP89200717A patent/EP0335445B1/de not_active Expired - Lifetime
- 1989-03-21 DE DE89200717T patent/DE68910360T2/de not_active Expired - Fee Related
- 1989-03-28 JP JP1074109A patent/JP3012246B2/ja not_active Expired - Fee Related
- 1989-03-29 KR KR1019890003978A patent/KR890015353A/ko not_active Application Discontinuation
- 1989-03-29 US US07/330,182 patent/US5073511A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
KR890015353A (ko) | 1989-10-30 |
IT8820005A0 (it) | 1988-03-29 |
US5073511A (en) | 1991-12-17 |
JP3012246B2 (ja) | 2000-02-21 |
EP0335445B1 (de) | 1993-11-03 |
IT1218200B (it) | 1990-04-12 |
DE68910360D1 (de) | 1993-12-09 |
EP0335445A1 (de) | 1989-10-04 |
JPH0210874A (ja) | 1990-01-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |