DE60332638D1 - Verfahren zur Herstellung eines optischen Gerätes - Google Patents

Verfahren zur Herstellung eines optischen Gerätes

Info

Publication number
DE60332638D1
DE60332638D1 DE60332638T DE60332638T DE60332638D1 DE 60332638 D1 DE60332638 D1 DE 60332638D1 DE 60332638 T DE60332638 T DE 60332638T DE 60332638 T DE60332638 T DE 60332638T DE 60332638 D1 DE60332638 D1 DE 60332638D1
Authority
DE
Germany
Prior art keywords
layer
semiconducting material
forming
solvent
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60332638T
Other languages
German (de)
English (en)
Inventor
Robert Archer
Nicholas Baynes
Timothy Butler
Salvatore Cina
Clare Foden
Daniel Forsythe
Mark Leadbeater
Graig Murphy
Nalinkumar Patel
Nathan Phillips
Matthew Roberts
Anil Raj Duggal
Jie Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Display Technology Ltd
General Electric Co
Original Assignee
Cambridge Display Technology Ltd
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0220404.8A external-priority patent/GB0220404D0/en
Application filed by Cambridge Display Technology Ltd, General Electric Co filed Critical Cambridge Display Technology Ltd
Application granted granted Critical
Publication of DE60332638D1 publication Critical patent/DE60332638D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/115Polyfluorene; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/151Copolymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Glass Compositions (AREA)
  • Optical Communication System (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Eyeglasses (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Light Receiving Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Laser Beam Printer (AREA)
  • Optical Integrated Circuits (AREA)
DE60332638T 2002-09-03 2003-09-03 Verfahren zur Herstellung eines optischen Gerätes Expired - Lifetime DE60332638D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0220404.8A GB0220404D0 (en) 2002-09-03 2002-09-03 Optical device
US48050203P 2003-06-20 2003-06-20
PCT/GB2003/003960 WO2004023573A2 (en) 2002-09-03 2003-09-03 Optical device

Publications (1)

Publication Number Publication Date
DE60332638D1 true DE60332638D1 (de) 2010-07-01

Family

ID=31980008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60332638T Expired - Lifetime DE60332638D1 (de) 2002-09-03 2003-09-03 Verfahren zur Herstellung eines optischen Gerätes

Country Status (8)

Country Link
US (2) US7531377B2 (enExample)
EP (1) EP1537612B1 (enExample)
JP (3) JP5247975B2 (enExample)
KR (1) KR100694364B1 (enExample)
AT (1) ATE468618T1 (enExample)
AU (1) AU2003263360A1 (enExample)
DE (1) DE60332638D1 (enExample)
WO (1) WO2004023573A2 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100694364B1 (ko) * 2002-09-03 2007-03-12 캠브리지 디스플레이 테크놀로지 리미티드 광학 디바이스
GB0306414D0 (en) 2003-03-20 2003-04-23 Cambridge Display Tech Ltd Polymers,their preparations and uses
DE10340711A1 (de) 2003-09-04 2005-04-07 Covion Organic Semiconductors Gmbh Elektronische Vorrichtung enthaltend organische Halbleiter
US7652126B2 (en) * 2003-10-07 2010-01-26 General Electric Company Monomers and polymers comprising conjugated groups and methods for making thereof
GB0422391D0 (en) 2004-10-08 2004-11-10 Cambridge Display Tech Ltd Light emitting device
WO2006040530A1 (en) 2004-10-11 2006-04-20 Cambridge Display Technology Limited Polar semiconductive hole transporting material
GB0423006D0 (en) 2004-10-15 2004-11-17 Cambridge Display Tech Ltd Organic transistor
ITMI20050051A1 (it) * 2005-01-18 2006-07-19 Milano Politecnico Fotodiodio organico di poli-9,9-diottil-fluorene
GB2425654B (en) * 2005-04-29 2010-03-17 Seiko Epson Corp A method of fabricating a heterojunction of organic semiconducting polymers
GB2433509A (en) 2005-12-22 2007-06-27 Cambridge Display Tech Ltd Arylamine polymer
GB0526185D0 (en) 2005-12-22 2006-02-01 Cambridge Display Tech Ltd Electronic device
GB2433833A (en) 2005-12-28 2007-07-04 Cdt Oxford Ltd Micro-cavity OLED layer structure with transparent electrode
GB2440934B (en) 2006-04-28 2009-12-16 Cdt Oxford Ltd Opto-electrical polymers and devices
GB2454890B (en) * 2007-11-21 2010-08-25 Limited Cambridge Display Technology Light-emitting device and materials therefor
GB0803950D0 (en) 2008-03-03 2008-04-09 Cambridge Display Technology O Solvent for printing composition
GB2461527B (en) * 2008-07-01 2011-08-03 Limited Cambridge Display Technology Organic electronic device
WO2010016555A1 (ja) 2008-08-07 2010-02-11 三菱化学株式会社 重合体、発光層材料、有機電界発光素子材料、有機電界発光素子用組成物、これらを利用した有機電界発光素子、太陽電池素子、有機el表示装置、及び有機el照明
US20120211729A1 (en) * 2009-07-31 2012-08-23 Sumitomo Chemical Company, Limited Polymer light-emitting device
US20110077373A1 (en) * 2009-09-29 2011-03-31 General Electric Company Polymer and optoelectronic device comprising the same
JPWO2012098577A1 (ja) 2011-01-19 2014-06-09 パナソニック株式会社 有機発光素子の製造方法、有機表示パネル、有機発光装置、機能層の形成方法、インク、基板、有機発光素子、有機表示装置、および、インクジェット装置
US9153782B2 (en) 2011-01-19 2015-10-06 Joled Inc. Method for producing organic light-emitting element, organic display panel, organic light-emitting device, method for forming functional layer, ink, substrate, organic light-emitting element, organic display device, and inkjet device
US9318722B2 (en) 2011-01-19 2016-04-19 Joled Inc. Method for producing organic light-emitting element, organic display panel, organic light-emitting device, method for forming functional layer, ink, substrate, organic light-emitting element, organic display device, and inkjet device
US8980678B2 (en) 2011-01-19 2015-03-17 Panasonic Corporation Method for producing organic light-emitting element, organic display panel, organic light-emitting device, method for forming functional layer, ink, substrate, organic light-emitting element, organic display device, and inkjet device
GB201108865D0 (en) * 2011-05-26 2011-07-06 Ct For Process Innovation The Ltd Semiconductor compounds
GB201108864D0 (en) 2011-05-26 2011-07-06 Ct For Process Innovation The Ltd Transistors and methods of making them
GB2524747B (en) 2014-03-31 2017-03-01 Cambridge Display Tech Ltd Amine/fluorene copolymers and organic electronic devices comprising said copolymers
JP6382781B2 (ja) * 2015-09-15 2018-08-29 株式会社東芝 半導体素子の製造方法および製造装置
US11542237B2 (en) 2017-07-28 2023-01-03 Lg Chem, Ltd. Fluorene derivative and organic light emitting device comprising same
WO2022230821A1 (ja) 2021-04-28 2022-11-03 三菱ケミカル株式会社 有機半導体素子の製造方法

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1182583A (en) 1966-03-28 1970-02-25 Secr Defence Improvements in Teaching Devices
GB8909011D0 (en) 1989-04-20 1989-06-07 Friend Richard H Electroluminescent devices
GB9215928D0 (en) * 1992-07-27 1992-09-09 Cambridge Display Tech Ltd Manufacture of electroluminescent devices
US5723873A (en) 1994-03-03 1998-03-03 Yang; Yang Bilayer composite electrodes for diodes
US5523555A (en) 1994-09-14 1996-06-04 Cambridge Display Technology Photodetector device having a semiconductive conjugated polymer
GB9423692D0 (en) 1994-11-23 1995-01-11 Philips Electronics Uk Ltd A photoresponsive device
JP3865406B2 (ja) 1995-07-28 2007-01-10 住友化学株式会社 2,7−アリール−9−置換フルオレン及び9−置換フルオレンオリゴマー及びポリマー
JPH09148066A (ja) 1995-11-24 1997-06-06 Pioneer Electron Corp 有機el素子
US5929194A (en) * 1996-02-23 1999-07-27 The Dow Chemical Company Crosslinkable or chain extendable polyarylpolyamines and films thereof
US5798170A (en) 1996-02-29 1998-08-25 Uniax Corporation Long operating life for polymer light-emitting diodes
JP3724589B2 (ja) * 1996-07-29 2005-12-07 ケンブリッジ ディスプレイ テクノロジー リミテッド エレクトロルミネセンス素子
JPH1077467A (ja) * 1996-09-04 1998-03-24 Sumitomo Chem Co Ltd 有機エレクトロルミネッセンス素子の製造方法
US6255774B1 (en) 1996-09-04 2001-07-03 Cambridge Display Technology, Ltd. Multilayer cathode for organic light-emitting device
JP3899566B2 (ja) 1996-11-25 2007-03-28 セイコーエプソン株式会社 有機el表示装置の製造方法
KR100195175B1 (ko) 1996-12-23 1999-06-15 손욱 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자
US6309763B1 (en) * 1997-05-21 2001-10-30 The Dow Chemical Company Fluorene-containing polymers and electroluminescent devices therefrom
GB9718393D0 (en) 1997-08-29 1997-11-05 Cambridge Display Tech Ltd Electroluminescent Device
GB9718516D0 (en) 1997-09-01 1997-11-05 Cambridge Display Tech Ltd Methods of Increasing the Efficiency of Organic Electroluminescent Devices
KR100697861B1 (ko) * 1998-03-13 2007-03-22 캠브리지 디스플레이 테크놀로지 리미티드 전장 발광 디바이스들
GB9805476D0 (en) 1998-03-13 1998-05-13 Cambridge Display Tech Ltd Electroluminescent devices
GB2335884A (en) 1998-04-02 1999-10-06 Cambridge Display Tech Ltd Flexible substrates for electronic or optoelectronic devices
JPH11307254A (ja) * 1998-04-17 1999-11-05 Oki Electric Ind Co Ltd 有機el素子およびその製造方法
US6107452A (en) 1998-10-09 2000-08-22 International Business Machines Corporation Thermally and/or photochemically crosslinked electroactive polymers in the manufacture of opto-electronic devices
US6268695B1 (en) 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
GB2346316B (en) 1999-02-03 2002-08-07 Richard Martin Massey Food binder and holder
KR100663052B1 (ko) 1999-02-04 2007-01-02 다우 글로벌 테크놀로지스 인크. 플루오렌 공중합체 및 이로부터 제조된 디바이스
GB9903251D0 (en) 1999-02-12 1999-04-07 Cambridge Display Tech Ltd Opto-electric devices
GB2347013A (en) 1999-02-16 2000-08-23 Sharp Kk Charge-transport structures
JP3310658B1 (ja) 1999-03-05 2002-08-05 ケンブリッジ ディスプレイ テクノロジー リミテッド 高分子の合成方法
CN1310930A (zh) * 1999-03-29 2001-08-29 精工爱普生株式会社 组合物及膜的制造方法以及功能元件及其制造方法
EP1208726A1 (en) 1999-09-03 2002-05-29 Uniax Corporation Encapsulation of organic electronic devices
JP3895077B2 (ja) * 1999-09-10 2007-03-22 シャープ株式会社 有機ledディスプレイの製造方法
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
JP2001203081A (ja) * 1999-11-09 2001-07-27 Matsushita Electric Ind Co Ltd 薄膜el素子およびその製造方法
JP2001151868A (ja) * 1999-11-24 2001-06-05 Toyota Central Res & Dev Lab Inc 機能性共重合高分子及びそれを使用した有機電界発光素子、光メモリ、正孔移動素子
EP1246860B1 (en) * 2000-01-05 2004-12-15 Cambridge Display Technology Limited Polymers, their preparation and uses
WO2001049768A2 (en) 2000-01-05 2001-07-12 Cambridge Display Technology Limited Luminescent polymer
GB0004541D0 (en) 2000-02-25 2000-04-19 Cambridge Display Tech Ltd Luminescent polymer
JP2001284049A (ja) * 2000-03-31 2001-10-12 Fuji Photo Film Co Ltd 色変換膜及びそれを用いた発光装置
JP4796685B2 (ja) * 2000-05-12 2011-10-19 ケミプロ化成株式会社 新規高分子緩衝剤およびそれを用いたエレクトロルミネッセント素子
KR100360308B1 (ko) * 2000-07-03 2002-11-18 한국화학연구원 아세틸렌기를 포함하는 유기화합물, 그 화합물을 이용한증착중합법, 그 방법에 의하여 제조된 증착중합 박막 및그 박막을 사용한 전기 발광소자
US6517958B1 (en) * 2000-07-14 2003-02-11 Canon Kabushiki Kaisha Organic-inorganic hybrid light emitting devices (HLED)
JP2002203674A (ja) * 2000-10-30 2002-07-19 Fuji Name Plate Kk 有機エレクトロルミネッセンス素子及び有機エレクトロルミネッセンス素子の製造方法
JP2002215065A (ja) * 2000-11-02 2002-07-31 Seiko Epson Corp 有機エレクトロルミネッセンス装置及びその製造方法、並びに電子機器
JP2002208481A (ja) * 2001-01-11 2002-07-26 Canon Inc 有機発光素子およびその製造方法
JP3953776B2 (ja) 2001-01-15 2007-08-08 セイコーエプソン株式会社 材料の吐出装置、及び吐出方法、カラーフィルタの製造装置及び製造方法、液晶装置の製造装置及び製造方法、el装置の製造装置及び製造方法
US7681032B2 (en) * 2001-03-12 2010-03-16 Portauthority Technologies Inc. System and method for monitoring unauthorized transport of digital content
JP2002324670A (ja) * 2001-04-24 2002-11-08 Tdk Corp 有機el素子の製造方法
US6649433B2 (en) * 2001-06-26 2003-11-18 Sigma Technologies International, Inc. Self-healing flexible photonic composites for light sources
GB0118258D0 (en) 2001-07-26 2001-09-19 Cambridge Display Tech Ltd Electrode compositions
US7049757B2 (en) * 2002-08-05 2006-05-23 General Electric Company Series connected OLED structure and fabrication method
KR100694364B1 (ko) * 2002-09-03 2007-03-12 캠브리지 디스플레이 테크놀로지 리미티드 광학 디바이스
JP5319732B2 (ja) * 2011-05-20 2013-10-16 Eizo株式会社 光センサユニット及び画像表示装置。

Also Published As

Publication number Publication date
AU2003263360A1 (en) 2004-03-29
JP2005537628A (ja) 2005-12-08
HK1077921A1 (en) 2006-02-24
AU2003263360A8 (en) 2004-03-29
JP5247975B2 (ja) 2013-07-24
JP5774571B2 (ja) 2015-09-09
US20090227052A1 (en) 2009-09-10
WO2004023573A3 (en) 2004-09-16
EP1537612A2 (en) 2005-06-08
KR20050059166A (ko) 2005-06-17
JP2013065564A (ja) 2013-04-11
JP2015057785A (ja) 2015-03-26
US7989255B2 (en) 2011-08-02
US7531377B2 (en) 2009-05-12
ATE468618T1 (de) 2010-06-15
WO2004023573A2 (en) 2004-03-18
US20060154384A1 (en) 2006-07-13
KR100694364B1 (ko) 2007-03-12
EP1537612B1 (en) 2010-05-19

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