DE60332638D1 - Verfahren zur Herstellung eines optischen Gerätes - Google Patents

Verfahren zur Herstellung eines optischen Gerätes

Info

Publication number
DE60332638D1
DE60332638D1 DE60332638T DE60332638T DE60332638D1 DE 60332638 D1 DE60332638 D1 DE 60332638D1 DE 60332638 T DE60332638 T DE 60332638T DE 60332638 T DE60332638 T DE 60332638T DE 60332638 D1 DE60332638 D1 DE 60332638D1
Authority
DE
Germany
Prior art keywords
layer
semiconducting material
forming
solvent
optical device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60332638T
Other languages
German (de)
English (en)
Inventor
Robert Archer
Nicholas Baynes
Timothy Butler
Salvatore Cina
Clare Foden
Daniel Forsythe
Mark Leadbeater
Graig Murphy
Nalinkumar Patel
Nathan Phillips
Matthew Roberts
Anil Raj Duggal
Jie Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cambridge Display Technology Ltd
General Electric Co
Original Assignee
Cambridge Display Technology Ltd
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0220404.8A external-priority patent/GB0220404D0/en
Application filed by Cambridge Display Technology Ltd, General Electric Co filed Critical Cambridge Display Technology Ltd
Application granted granted Critical
Publication of DE60332638D1 publication Critical patent/DE60332638D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/12Deposition of organic active material using liquid deposition, e.g. spin coating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/115Polyfluorene; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/151Copolymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/11OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/10OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/14Carrier transporting layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/60Organic compounds having low molecular weight
    • H10K85/631Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Glass Compositions (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Polyoxymethylene Polymers And Polymers With Carbon-To-Carbon Bonds (AREA)
  • Optical Communication System (AREA)
  • Optical Integrated Circuits (AREA)
  • Laser Beam Printer (AREA)
  • Light Receiving Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Eyeglasses (AREA)
DE60332638T 2002-09-03 2003-09-03 Verfahren zur Herstellung eines optischen Gerätes Expired - Lifetime DE60332638D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0220404.8A GB0220404D0 (en) 2002-09-03 2002-09-03 Optical device
US48050203P 2003-06-20 2003-06-20
PCT/GB2003/003960 WO2004023573A2 (en) 2002-09-03 2003-09-03 Optical device

Publications (1)

Publication Number Publication Date
DE60332638D1 true DE60332638D1 (de) 2010-07-01

Family

ID=31980008

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60332638T Expired - Lifetime DE60332638D1 (de) 2002-09-03 2003-09-03 Verfahren zur Herstellung eines optischen Gerätes

Country Status (8)

Country Link
US (2) US7531377B2 (enExample)
EP (1) EP1537612B1 (enExample)
JP (3) JP5247975B2 (enExample)
KR (1) KR100694364B1 (enExample)
AT (1) ATE468618T1 (enExample)
AU (1) AU2003263360A1 (enExample)
DE (1) DE60332638D1 (enExample)
WO (1) WO2004023573A2 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5247975B2 (ja) * 2002-09-03 2013-07-24 ケンブリッジ ディスプレイ テクノロジー リミテッド 光学装置
GB0306414D0 (en) 2003-03-20 2003-04-23 Cambridge Display Tech Ltd Polymers,their preparations and uses
DE10340711A1 (de) 2003-09-04 2005-04-07 Covion Organic Semiconductors Gmbh Elektronische Vorrichtung enthaltend organische Halbleiter
US7652126B2 (en) * 2003-10-07 2010-01-26 General Electric Company Monomers and polymers comprising conjugated groups and methods for making thereof
GB0422391D0 (en) 2004-10-08 2004-11-10 Cambridge Display Tech Ltd Light emitting device
GB2433512B (en) 2004-10-11 2009-06-03 Cambridge Display Tech Ltd Polar semiconductive hole transporting material
GB0423006D0 (en) 2004-10-15 2004-11-17 Cambridge Display Tech Ltd Organic transistor
ITMI20050051A1 (it) * 2005-01-18 2006-07-19 Milano Politecnico Fotodiodio organico di poli-9,9-diottil-fluorene
GB2425654B (en) * 2005-04-29 2010-03-17 Seiko Epson Corp A method of fabricating a heterojunction of organic semiconducting polymers
GB0526185D0 (en) 2005-12-22 2006-02-01 Cambridge Display Tech Ltd Electronic device
GB2433509A (en) 2005-12-22 2007-06-27 Cambridge Display Tech Ltd Arylamine polymer
GB2433833A (en) 2005-12-28 2007-07-04 Cdt Oxford Ltd Micro-cavity OLED layer structure with transparent electrode
GB2440934B (en) 2006-04-28 2009-12-16 Cdt Oxford Ltd Opto-electrical polymers and devices
GB2454890B (en) 2007-11-21 2010-08-25 Limited Cambridge Display Technology Light-emitting device and materials therefor
GB0803950D0 (en) 2008-03-03 2008-04-09 Cambridge Display Technology O Solvent for printing composition
GB2461527B (en) * 2008-07-01 2011-08-03 Limited Cambridge Display Technology Organic electronic device
CN102105507B (zh) 2008-08-07 2014-09-03 三菱化学株式会社 聚合物、发光层材料、有机电致发光元件材料、有机电致发光元件用组合物、利用它们的有机电致发光元件、太阳能电池元件、有机el显示装置和有机el照明
GB2484054B (en) * 2009-07-31 2014-09-03 Sumitomo Chemical Co Polymer light-emitting device
US20110077373A1 (en) * 2009-09-29 2011-03-31 General Electric Company Polymer and optoelectronic device comprising the same
US9373822B2 (en) 2011-01-19 2016-06-21 Joled Inc. Method for producing organic light-emitting element, organic display panel, organic light-emitting device, method for forming functional layer, ink, substrate, organic light-emitting element, organic display device, and inkjet device
WO2012098578A1 (ja) 2011-01-19 2012-07-26 パナソニック株式会社 有機発光素子の製造方法、有機表示パネル、有機発光装置、機能層の形成方法、インク、基板、有機発光素子、有機表示装置、および、インクジェット装置
JPWO2012098580A1 (ja) 2011-01-19 2014-06-09 パナソニック株式会社 有機発光素子の製造方法、有機表示パネル、有機発光装置、機能層の形成方法、インク、基板、有機発光素子、有機表示装置、および、インクジェット装置
US9153782B2 (en) 2011-01-19 2015-10-06 Joled Inc. Method for producing organic light-emitting element, organic display panel, organic light-emitting device, method for forming functional layer, ink, substrate, organic light-emitting element, organic display device, and inkjet device
GB201108865D0 (en) * 2011-05-26 2011-07-06 Ct For Process Innovation The Ltd Semiconductor compounds
GB201108864D0 (en) 2011-05-26 2011-07-06 Ct For Process Innovation The Ltd Transistors and methods of making them
GB2524747B (en) 2014-03-31 2017-03-01 Cambridge Display Tech Ltd Amine/fluorene copolymers and organic electronic devices comprising said copolymers
JP6382781B2 (ja) * 2015-09-15 2018-08-29 株式会社東芝 半導体素子の製造方法および製造装置
US11542237B2 (en) 2017-07-28 2023-01-03 Lg Chem, Ltd. Fluorene derivative and organic light emitting device comprising same
JPWO2022230821A1 (enExample) 2021-04-28 2022-11-03

Family Cites Families (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1182583A (en) 1966-03-28 1970-02-25 Secr Defence Improvements in Teaching Devices
GB8909011D0 (en) 1989-04-20 1989-06-07 Friend Richard H Electroluminescent devices
GB9215928D0 (en) * 1992-07-27 1992-09-09 Cambridge Display Tech Ltd Manufacture of electroluminescent devices
US5723873A (en) * 1994-03-03 1998-03-03 Yang; Yang Bilayer composite electrodes for diodes
US5523555A (en) * 1994-09-14 1996-06-04 Cambridge Display Technology Photodetector device having a semiconductive conjugated polymer
GB9423692D0 (en) 1994-11-23 1995-01-11 Philips Electronics Uk Ltd A photoresponsive device
CN1229415C (zh) 1995-07-28 2005-11-30 陶氏环球技术公司 2,7-芳基-9-取代的芴和9-取代的芴的低聚物和聚合物
JPH09148066A (ja) 1995-11-24 1997-06-06 Pioneer Electron Corp 有機el素子
US5929194A (en) * 1996-02-23 1999-07-27 The Dow Chemical Company Crosslinkable or chain extendable polyarylpolyamines and films thereof
US5798170A (en) * 1996-02-29 1998-08-25 Uniax Corporation Long operating life for polymer light-emitting diodes
CN1130956C (zh) 1996-07-29 2003-12-10 剑桥显示技术有限公司 具有电极保护的场致发光元件
US6255774B1 (en) 1996-09-04 2001-07-03 Cambridge Display Technology, Ltd. Multilayer cathode for organic light-emitting device
JPH1077467A (ja) * 1996-09-04 1998-03-24 Sumitomo Chem Co Ltd 有機エレクトロルミネッセンス素子の製造方法
JP3899566B2 (ja) 1996-11-25 2007-03-28 セイコーエプソン株式会社 有機el表示装置の製造方法
KR100195175B1 (ko) 1996-12-23 1999-06-15 손욱 유기전자발광소자 유기박막용 도너필름, 이를 이용한 유기전자발광소자의 제조방법 및 그 방법에 따라 제조된 유기전자발광소자
US6309763B1 (en) * 1997-05-21 2001-10-30 The Dow Chemical Company Fluorene-containing polymers and electroluminescent devices therefrom
GB9718393D0 (en) 1997-08-29 1997-11-05 Cambridge Display Tech Ltd Electroluminescent Device
GB9718516D0 (en) 1997-09-01 1997-11-05 Cambridge Display Tech Ltd Methods of Increasing the Efficiency of Organic Electroluminescent Devices
GB9805476D0 (en) 1998-03-13 1998-05-13 Cambridge Display Tech Ltd Electroluminescent devices
KR100697861B1 (ko) 1998-03-13 2007-03-22 캠브리지 디스플레이 테크놀로지 리미티드 전장 발광 디바이스들
GB2335884A (en) 1998-04-02 1999-10-06 Cambridge Display Tech Ltd Flexible substrates for electronic or optoelectronic devices
JPH11307254A (ja) * 1998-04-17 1999-11-05 Oki Electric Ind Co Ltd 有機el素子およびその製造方法
US6107452A (en) * 1998-10-09 2000-08-22 International Business Machines Corporation Thermally and/or photochemically crosslinked electroactive polymers in the manufacture of opto-electronic devices
US6268695B1 (en) * 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
GB2346316B (en) 1999-02-03 2002-08-07 Richard Martin Massey Food binder and holder
EP1155096B1 (en) 1999-02-04 2005-03-09 Dow Global Technologies Inc. Fluorene copolymers and devices made therefrom
GB9903251D0 (en) 1999-02-12 1999-04-07 Cambridge Display Tech Ltd Opto-electric devices
GB2347013A (en) 1999-02-16 2000-08-23 Sharp Kk Charge-transport structures
ATE370176T1 (de) 1999-03-05 2007-09-15 Cambridge Display Tech Ltd Polymerherstellung
CN1310930A (zh) * 1999-03-29 2001-08-29 精工爱普生株式会社 组合物及膜的制造方法以及功能元件及其制造方法
KR20020066321A (ko) 1999-09-03 2002-08-14 듀폰 디스플레이즈, 인크. 유기 전자 장치의 캡슐 밀봉
JP3895077B2 (ja) * 1999-09-10 2007-03-22 シャープ株式会社 有機ledディスプレイの製造方法
TW468283B (en) 1999-10-12 2001-12-11 Semiconductor Energy Lab EL display device and a method of manufacturing the same
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
JP2001203081A (ja) * 1999-11-09 2001-07-27 Matsushita Electric Ind Co Ltd 薄膜el素子およびその製造方法
JP2001151868A (ja) * 1999-11-24 2001-06-05 Toyota Central Res & Dev Lab Inc 機能性共重合高分子及びそれを使用した有機電界発光素子、光メモリ、正孔移動素子
ATE284910T1 (de) * 2000-01-05 2005-01-15 Cambridge Display Tech Ltd Polymere, ihre herstellung und verwendung
ATE283302T1 (de) 2000-01-05 2004-12-15 Cambridge Display Tech Ltd Lumineszente polymere
GB0004541D0 (en) 2000-02-25 2000-04-19 Cambridge Display Tech Ltd Luminescent polymer
JP2001284049A (ja) * 2000-03-31 2001-10-12 Fuji Photo Film Co Ltd 色変換膜及びそれを用いた発光装置
JP4796685B2 (ja) * 2000-05-12 2011-10-19 ケミプロ化成株式会社 新規高分子緩衝剤およびそれを用いたエレクトロルミネッセント素子
KR100360308B1 (ko) * 2000-07-03 2002-11-18 한국화학연구원 아세틸렌기를 포함하는 유기화합물, 그 화합물을 이용한증착중합법, 그 방법에 의하여 제조된 증착중합 박막 및그 박막을 사용한 전기 발광소자
US6517958B1 (en) * 2000-07-14 2003-02-11 Canon Kabushiki Kaisha Organic-inorganic hybrid light emitting devices (HLED)
JP2002203674A (ja) * 2000-10-30 2002-07-19 Fuji Name Plate Kk 有機エレクトロルミネッセンス素子及び有機エレクトロルミネッセンス素子の製造方法
JP2002215065A (ja) * 2000-11-02 2002-07-31 Seiko Epson Corp 有機エレクトロルミネッセンス装置及びその製造方法、並びに電子機器
JP2002208481A (ja) * 2001-01-11 2002-07-26 Canon Inc 有機発光素子およびその製造方法
JP3953776B2 (ja) 2001-01-15 2007-08-08 セイコーエプソン株式会社 材料の吐出装置、及び吐出方法、カラーフィルタの製造装置及び製造方法、液晶装置の製造装置及び製造方法、el装置の製造装置及び製造方法
US7681032B2 (en) * 2001-03-12 2010-03-16 Portauthority Technologies Inc. System and method for monitoring unauthorized transport of digital content
JP2002324670A (ja) * 2001-04-24 2002-11-08 Tdk Corp 有機el素子の製造方法
US6649433B2 (en) * 2001-06-26 2003-11-18 Sigma Technologies International, Inc. Self-healing flexible photonic composites for light sources
GB0118258D0 (en) 2001-07-26 2001-09-19 Cambridge Display Tech Ltd Electrode compositions
US7049757B2 (en) * 2002-08-05 2006-05-23 General Electric Company Series connected OLED structure and fabrication method
JP5247975B2 (ja) * 2002-09-03 2013-07-24 ケンブリッジ ディスプレイ テクノロジー リミテッド 光学装置
JP5319732B2 (ja) * 2011-05-20 2013-10-16 Eizo株式会社 光センサユニット及び画像表示装置。

Also Published As

Publication number Publication date
HK1077921A1 (en) 2006-02-24
EP1537612A2 (en) 2005-06-08
US20090227052A1 (en) 2009-09-10
ATE468618T1 (de) 2010-06-15
JP2015057785A (ja) 2015-03-26
JP2005537628A (ja) 2005-12-08
AU2003263360A1 (en) 2004-03-29
EP1537612B1 (en) 2010-05-19
KR20050059166A (ko) 2005-06-17
US7989255B2 (en) 2011-08-02
JP2013065564A (ja) 2013-04-11
AU2003263360A8 (en) 2004-03-29
KR100694364B1 (ko) 2007-03-12
US20060154384A1 (en) 2006-07-13
JP5774571B2 (ja) 2015-09-09
US7531377B2 (en) 2009-05-12
WO2004023573A3 (en) 2004-09-16
JP5247975B2 (ja) 2013-07-24
WO2004023573A2 (en) 2004-03-18

Similar Documents

Publication Publication Date Title
ATE468618T1 (de) Verfahren zur herstellung eines optischen gerätes
BR9006718A (pt) Dispositivo eletroluminescente,matriz de dispositivos eletroluminescentes,processo para sua fabricacao e equipamento
GB0329364D0 (en) Optical device
ATE440385T1 (de) Verfahren zur grosstechnischen herstellung von cdte/cds dünnschicht-solarzellen
EP0825657A3 (de) Methode zur Herstellung eines organischen Dünnschichttransistors und bei dieser Methode hergestelltes Produkt
ATE429525T1 (de) Metallisierte folie und verfahren zu deren herstellung sowie deren anwendung
WO2009001935A1 (ja) 薄膜形成方法、有機エレクトロルミネッセンス素子の製造方法、半導体素子の製造方法及び光学素子の製造方法
EP1113087A3 (en) Film formation apparatus and method for forming a film
WO2006036366A3 (en) Method of forming a solution processed device
WO2015073064A1 (en) Patterning for selective area deposition
CN110444675B (zh) 一种改性的pedot:pss薄膜及改性方法与采用该薄膜制备的有机电致发光器件
TW200503076A (en) III-V compound semiconductor crystal and method for production thereof
WO2004049403A3 (en) Depositing nanowires on a substrate
CN107195781A (zh) 一种基于pmma掺杂小分子的高迁移率晶体管及其制备方法
WO2020072203A3 (en) A thin film treatment process
KR960019584A (ko) 화학 증착에 의해 증착된 개선된 티탄 질화물 층 및 그 제조 방법
WO2006039029A3 (en) A method for forming a thin complete high-permittivity dielectric layer
ATE541315T1 (de) Verfahren zur herstellung einer gruppe elektronischer vorrichtungen
KR101465436B1 (ko) 홍합유래 폴리도파민을 이용한 유기 박막 포토트랜지스터 및 이의 제조방법
ATE450058T1 (de) Verfahren zur herstellung von organischen elektrolumineszenten vorrichtungen
WO2007044530A3 (en) Methods and apparatus for epitaxial film formation
EP2019155A3 (en) Gallium nitride substrate and gallium nitride film deposition method
CN108508075A (zh) 一种界面修饰底接触电极有机薄膜晶体管气体传感器的制备方法
WO2005088717A3 (en) Flexible organic electronic device and methods for preparing the same
CN115605064B (zh) 一种钙钛矿单晶阵列光电探测器及其制备方法

Legal Events

Date Code Title Description
8364 No opposition during term of opposition