DE60326962D1 - Durch ein halbleiterherstellungsverfahren gebildetes elektrostatisches stellglied - Google Patents

Durch ein halbleiterherstellungsverfahren gebildetes elektrostatisches stellglied

Info

Publication number
DE60326962D1
DE60326962D1 DE60326962T DE60326962T DE60326962D1 DE 60326962 D1 DE60326962 D1 DE 60326962D1 DE 60326962 T DE60326962 T DE 60326962T DE 60326962 T DE60326962 T DE 60326962T DE 60326962 D1 DE60326962 D1 DE 60326962D1
Authority
DE
Germany
Prior art keywords
semiconductor manufacturing
electrostatic actuator
actuator made
electrostatic
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60326962T
Other languages
English (en)
Inventor
Manabu Nishimura
Takahiko Kuroda
Shuya Abe
Makoto Tanaka
Mitsugu Irinoda
Kenichiroh Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002228117A external-priority patent/JP2004066606A/ja
Priority claimed from JP2002262345A external-priority patent/JP4039557B2/ja
Priority claimed from JP2002264243A external-priority patent/JP4115210B2/ja
Priority claimed from JP2002266332A external-priority patent/JP4043895B2/ja
Priority claimed from JP2002270139A external-priority patent/JP2004106089A/ja
Priority claimed from JP2002341752A external-priority patent/JP4111809B2/ja
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Application granted granted Critical
Publication of DE60326962D1 publication Critical patent/DE60326962D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Micromachines (AREA)
DE60326962T 2002-08-06 2003-08-05 Durch ein halbleiterherstellungsverfahren gebildetes elektrostatisches stellglied Expired - Lifetime DE60326962D1 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2002228117A JP2004066606A (ja) 2002-08-06 2002-08-06 液滴吐出ヘッド及びその製造方法並びにインクジェット記録装置
JP2002262345A JP4039557B2 (ja) 2002-09-09 2002-09-09 液滴吐出ヘッド及びその製造方法、インクカートリッジ並びにインクジェット記録装置、画像形成装置、液滴を吐出する装置
JP2002264243A JP4115210B2 (ja) 2002-09-10 2002-09-10 静電型アクチュエータ、液滴吐出ヘッド及びその製造方法、インクカートリッジ、マイクロポンプ、光学デバイス、画像形成装置、液滴を吐出する装置
JP2002266332A JP4043895B2 (ja) 2002-09-12 2002-09-12 液滴吐出ヘッドの製造方法
JP2002270139A JP2004106089A (ja) 2002-09-17 2002-09-17 アクチュエータ、その製造方法、液滴吐出ヘッド、インクカートリッジ、インクジェット記録装置、マイクロポンプ及び光変調デバイス
JP2002341752A JP4111809B2 (ja) 2002-11-26 2002-11-26 静電型アクチュエータ、液滴吐出ヘッド及びその製造方法、インクカートリッジ、インクジェット記録装置、マイクロポンプ、光学デバイス、画像形成装置、液滴を吐出する装置
PCT/JP2003/009929 WO2004012942A1 (en) 2002-08-06 2003-08-05 Electrostatic actuator formed by a semiconductor manufacturing process

Publications (1)

Publication Number Publication Date
DE60326962D1 true DE60326962D1 (de) 2009-05-14

Family

ID=31499680

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60326962T Expired - Lifetime DE60326962D1 (de) 2002-08-06 2003-08-05 Durch ein halbleiterherstellungsverfahren gebildetes elektrostatisches stellglied

Country Status (6)

Country Link
US (2) US7416281B2 (de)
EP (1) EP1534525B1 (de)
CN (1) CN100340405C (de)
DE (1) DE60326962D1 (de)
HK (1) HK1072036A1 (de)
WO (1) WO2004012942A1 (de)

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CN103210515B (zh) * 2010-09-15 2015-06-03 株式会社理光 机电转换器件及其制造方法及液滴排出头和液滴排出设备
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JP5821429B2 (ja) * 2011-09-01 2015-11-24 三菱電機株式会社 半導体装置及びその製造方法
JP6098099B2 (ja) 2011-12-13 2017-03-22 株式会社リコー 液体吐出ヘッド及び画像形成装置
JP5943292B2 (ja) 2012-03-19 2016-07-05 株式会社リコー 液体吐出ヘッド、画像形成装置、液体吐出ヘッドの製造方法
JP2014198461A (ja) 2013-03-15 2014-10-23 株式会社リコー アクチュエータ素子、液滴吐出ヘッド、液滴吐出装置及び画像形成装置
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EP3175988B1 (de) * 2014-07-30 2020-03-18 Kyocera Corporation Tintenstrahlkopf und drucker
US20160300996A1 (en) * 2015-04-10 2016-10-13 Samsung Electro-Mechanics Co., Ltd. Bulk acoustic wave resonator and filter including the same
US9809024B2 (en) 2015-06-11 2017-11-07 Ricoh Company, Ltd. Image forming apparatus
JP6672647B2 (ja) * 2015-09-08 2020-03-25 セイコーエプソン株式会社 Ｍｅｍｓデバイス、液体噴射ヘッド、及び液体噴射装置
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CN109373914B (zh) * 2018-10-25 2020-08-04 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 非平行可动电极厚度测量方法、装置以及系统
FR3093944B1 (fr) * 2019-03-22 2021-03-19 Poietis Cartouche pour bioimpression
JP7293909B2 (ja) * 2019-06-26 2023-06-20 セイコーエプソン株式会社 振動片、電子機器、および移動体
TWI707821B (zh) * 2019-11-18 2020-10-21 研能科技股份有限公司 微型流體致動器
CN112919403A (zh) * 2019-12-06 2021-06-08 研能科技股份有限公司 微流体致动器装置

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CN100340405C (zh) 2007-10-03
EP1534525B1 (de) 2009-04-01
EP1534525A4 (de) 2007-10-31
US20080309734A1 (en) 2008-12-18
US7416281B2 (en) 2008-08-26
US8052249B2 (en) 2011-11-08
HK1072036A1 (en) 2005-08-12
US20050264617A1 (en) 2005-12-01
WO2004012942A1 (en) 2004-02-12
CN1681658A (zh) 2005-10-12

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