DE60310222T2 - Halbleiterkapselung und verfahren zu ihrer herstellung - Google Patents
Halbleiterkapselung und verfahren zu ihrer herstellung Download PDFInfo
- Publication number
- DE60310222T2 DE60310222T2 DE60310222T DE60310222T DE60310222T2 DE 60310222 T2 DE60310222 T2 DE 60310222T2 DE 60310222 T DE60310222 T DE 60310222T DE 60310222 T DE60310222 T DE 60310222T DE 60310222 T2 DE60310222 T2 DE 60310222T2
- Authority
- DE
- Germany
- Prior art keywords
- silicone
- semiconductor package
- sio
- silicon
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/5329—Insulating materials
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- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H01L2924/10251—Elemental semiconductors, i.e. Group IV
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- H01L2924/14—Integrated circuits
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- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/068,755 US6940177B2 (en) | 2002-05-16 | 2002-05-16 | Semiconductor package and method of preparing same |
| US68755 | 2002-05-16 | ||
| PCT/US2003/008345 WO2003098682A1 (en) | 2002-05-16 | 2003-03-19 | Semiconductor package and method of preparing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60310222D1 DE60310222D1 (de) | 2007-01-18 |
| DE60310222T2 true DE60310222T2 (de) | 2007-09-13 |
Family
ID=29418266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60310222T Expired - Lifetime DE60310222T2 (de) | 2002-05-16 | 2003-03-19 | Halbleiterkapselung und verfahren zu ihrer herstellung |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6940177B2 (enExample) |
| EP (1) | EP1504469B1 (enExample) |
| JP (1) | JP4773089B2 (enExample) |
| CN (1) | CN1328770C (enExample) |
| AT (1) | ATE347737T1 (enExample) |
| AU (1) | AU2003230678A1 (enExample) |
| DE (1) | DE60310222T2 (enExample) |
| TW (1) | TWI265578B (enExample) |
| WO (1) | WO2003098682A1 (enExample) |
Families Citing this family (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6870272B2 (en) * | 1994-09-20 | 2005-03-22 | Tessera, Inc. | Methods of making microelectronic assemblies including compliant interfaces |
| US6211572B1 (en) | 1995-10-31 | 2001-04-03 | Tessera, Inc. | Semiconductor chip package with fan-in leads |
| US6284563B1 (en) | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| US20040102022A1 (en) * | 2002-11-22 | 2004-05-27 | Tongbi Jiang | Methods of fabricating integrated circuitry |
| JP4193052B2 (ja) * | 2003-08-25 | 2008-12-10 | 信越化学工業株式会社 | 高熱伝導性シリコーンゴム組成物並びに定着ロール及び定着ベルト |
| CN100481415C (zh) * | 2004-03-12 | 2009-04-22 | 联华电子股份有限公司 | 芯片封装体及其制造方法 |
| US7190157B2 (en) * | 2004-10-25 | 2007-03-13 | Agilent Technologies, Inc. | Method and apparatus for layout independent test point placement on a printed circuit board |
| JP4741230B2 (ja) * | 2004-12-28 | 2011-08-03 | 東レ・ダウコーニング株式会社 | フィルム状シリコーンゴム接着剤 |
| CN101128931B (zh) | 2005-02-25 | 2010-05-19 | 德塞拉股份有限公司 | 具有顺应性的微电子组件 |
| US7695819B2 (en) * | 2005-09-30 | 2010-04-13 | Wacker Chemical Corporation | Two piece curable HCR silicone elastomers |
| JP4993555B2 (ja) * | 2005-12-07 | 2012-08-08 | モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社 | 付加反応硬化型シリコーン組成物 |
| TWI296037B (en) * | 2006-04-28 | 2008-04-21 | Delta Electronics Inc | Light emitting apparatus |
| GB2444775B (en) * | 2006-12-13 | 2011-06-08 | Cambridge Silicon Radio Ltd | Chip mounting |
| US7749886B2 (en) * | 2006-12-20 | 2010-07-06 | Tessera, Inc. | Microelectronic assemblies having compliancy and methods therefor |
| CN100580914C (zh) * | 2007-02-16 | 2010-01-13 | 南茂科技股份有限公司 | 封装导电结构及其形成方法 |
| US20080308932A1 (en) * | 2007-06-12 | 2008-12-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor package structures |
| US7772691B2 (en) * | 2007-10-12 | 2010-08-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Thermally enhanced wafer level package |
| US20110046242A1 (en) * | 2008-01-17 | 2011-02-24 | Jean-Luc Garaud | Film Forming, Silicone Containing Compositions |
| CN102449073B (zh) | 2009-07-03 | 2013-11-13 | 道康宁公司 | 成膜的含硅酮组合物 |
| US8421226B2 (en) * | 2010-02-25 | 2013-04-16 | Infineon Technologies Ag | Device including an encapsulated semiconductor chip and manufacturing method thereof |
| JP5384443B2 (ja) * | 2010-07-28 | 2014-01-08 | 日東電工株式会社 | フリップチップ型半導体裏面用フィルム、ダイシングテープ一体型半導体裏面用フィルム、半導体装置の製造方法、及び、フリップチップ型半導体装置 |
| JP6300218B2 (ja) | 2010-12-31 | 2018-03-28 | サムスン エスディアイ カンパニー, リミテッドSamsung Sdi Co., Ltd. | 封止材用透光性樹脂組成物、該透光性樹脂を含む封止材および電子素子 |
| TWI575684B (zh) * | 2011-06-13 | 2017-03-21 | 矽品精密工業股份有限公司 | 晶片尺寸封裝件 |
| JP2013095809A (ja) * | 2011-10-31 | 2013-05-20 | Nitto Denko Corp | シリコーン樹脂組成物、シリコーン樹脂シート、光半導体素子装置、および、シリコーン樹脂シートの製造方法。 |
| JP5563695B2 (ja) * | 2013-04-17 | 2014-07-30 | 株式会社カネカ | 半導体のパッケージ用硬化性樹脂組成物および半導体 |
| TW201601358A (zh) * | 2014-06-19 | 2016-01-01 | 道康寧公司 | 用於晶圓級z軸熱中介層的可光圖案化聚矽氧 |
| EP3306674B1 (en) * | 2015-05-27 | 2021-06-23 | Kyocera Corporation | Solar cell element and method for manufacturing same |
| US9812414B1 (en) | 2016-06-17 | 2017-11-07 | Nanya Technology Corporation | Chip package and a manufacturing method thereof |
| WO2018121706A1 (en) | 2016-12-30 | 2018-07-05 | Elkem Silicones Shanghai Co., Ltd. | Curable silicone compositions |
| CN108165014A (zh) * | 2017-12-23 | 2018-06-15 | 苏州赛源微电子有限公司 | 一种集成电路芯片的封装方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171716A (en) | 1986-12-19 | 1992-12-15 | North American Philips Corp. | Method of manufacturing semiconductor device with reduced packaging stress |
| US5907190A (en) * | 1994-11-24 | 1999-05-25 | Dow Corning Toray Silicone Co., Ltd. | Semiconductor device having a cured silicone coating with non uniformly dispersed filler |
| US6284563B1 (en) * | 1995-10-31 | 2001-09-04 | Tessera, Inc. | Method of making compliant microelectronic assemblies |
| JPH09286971A (ja) * | 1996-04-19 | 1997-11-04 | Toray Dow Corning Silicone Co Ltd | シリコーン系ダイボンディング剤、半導体装置の製造方法および半導体装置 |
| CN1244038A (zh) * | 1998-08-04 | 2000-02-09 | 长兴化学工业股份有限公司 | 半导体封装用树脂组合物 |
| US6103552A (en) | 1998-08-10 | 2000-08-15 | Lin; Mou-Shiung | Wafer scale packaging scheme |
| KR20010101419A (ko) * | 1999-01-07 | 2001-11-14 | 크리스 로저 에이취. | 유기히드리도실록산 수지로부터 생성된 유전막 |
| US6239378B1 (en) * | 1999-02-02 | 2001-05-29 | Dow Corning Corporation | Flame resistant silicone rubber wire and cable coating composition |
| US6197613B1 (en) | 1999-03-23 | 2001-03-06 | Industrial Technology Research Institute | Wafer level packaging method and devices formed |
| US6369185B1 (en) * | 1999-03-31 | 2002-04-09 | Dow Corning Toray Silicone Co., Ltd. | Curable organopolysiloxane composition, cured products formed therefrom and unified articles |
| US6277669B1 (en) | 1999-09-15 | 2001-08-21 | Industrial Technology Research Institute | Wafer level packaging method and packages formed |
| US7271219B2 (en) * | 2001-01-25 | 2007-09-18 | Sanyo Chemical Industries, Ltd. | Curable resin, curable resin material, curable film, and insulator |
-
2002
- 2002-05-16 US US10/068,755 patent/US6940177B2/en not_active Expired - Fee Related
-
2003
- 2003-03-19 EP EP03723768A patent/EP1504469B1/en not_active Expired - Lifetime
- 2003-03-19 AU AU2003230678A patent/AU2003230678A1/en not_active Abandoned
- 2003-03-19 AT AT03723768T patent/ATE347737T1/de not_active IP Right Cessation
- 2003-03-19 JP JP2004506078A patent/JP4773089B2/ja not_active Expired - Fee Related
- 2003-03-19 WO PCT/US2003/008345 patent/WO2003098682A1/en not_active Ceased
- 2003-03-19 CN CNB038155664A patent/CN1328770C/zh not_active Expired - Fee Related
- 2003-03-19 DE DE60310222T patent/DE60310222T2/de not_active Expired - Lifetime
- 2003-04-07 TW TW092107882A patent/TWI265578B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1504469A1 (en) | 2005-02-09 |
| DE60310222D1 (de) | 2007-01-18 |
| AU2003230678A1 (en) | 2003-12-02 |
| CN1328770C (zh) | 2007-07-25 |
| WO2003098682A1 (en) | 2003-11-27 |
| EP1504469B1 (en) | 2006-12-06 |
| ATE347737T1 (de) | 2006-12-15 |
| JP4773089B2 (ja) | 2011-09-14 |
| TWI265578B (en) | 2006-11-01 |
| US20030214051A1 (en) | 2003-11-20 |
| JP2005526398A (ja) | 2005-09-02 |
| CN1666326A (zh) | 2005-09-07 |
| TW200308030A (en) | 2003-12-16 |
| US6940177B2 (en) | 2005-09-06 |
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