DE60218790D1 - Halbleiterlaser mit kontrollierter Sauerstoffgrenzfläche an beiden Facetten - Google Patents
Halbleiterlaser mit kontrollierter Sauerstoffgrenzfläche an beiden FacettenInfo
- Publication number
- DE60218790D1 DE60218790D1 DE60218790T DE60218790T DE60218790D1 DE 60218790 D1 DE60218790 D1 DE 60218790D1 DE 60218790 T DE60218790 T DE 60218790T DE 60218790 T DE60218790 T DE 60218790T DE 60218790 D1 DE60218790 D1 DE 60218790D1
- Authority
- DE
- Germany
- Prior art keywords
- facets
- semiconductor laser
- controlled oxygen
- oxygen interface
- interface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0282—Passivation layers or treatments
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001265356 | 2001-09-03 | ||
JP2001265356A JP2003078199A (ja) | 2001-09-03 | 2001-09-03 | 半導体レーザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60218790D1 true DE60218790D1 (de) | 2007-04-26 |
DE60218790T2 DE60218790T2 (de) | 2007-12-06 |
Family
ID=19091832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60218790T Expired - Lifetime DE60218790T2 (de) | 2001-09-03 | 2002-09-02 | Halbleiterlaser mit kontrollierter Sauerstoffgrenzfläche an beiden Facetten |
Country Status (4)
Country | Link |
---|---|
US (1) | US6798805B2 (de) |
EP (1) | EP1289080B1 (de) |
JP (1) | JP2003078199A (de) |
DE (1) | DE60218790T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101039967B1 (ko) | 2003-10-31 | 2011-06-09 | 엘지이노텍 주식회사 | 반도체 레이저 다이오드 및 그 제조방법 |
JP2006059881A (ja) * | 2004-08-17 | 2006-03-02 | Sharp Corp | 半導体レーザ素子及びその製造方法 |
JP2006286870A (ja) * | 2005-03-31 | 2006-10-19 | Fuji Photo Film Co Ltd | 半導体レーザおよびそれを用いた光通信システム |
JP5285835B2 (ja) * | 2005-07-13 | 2013-09-11 | 株式会社東芝 | 半導体素子およびその製造方法 |
CN100449888C (zh) * | 2005-07-29 | 2009-01-07 | 日亚化学工业株式会社 | 半导体激光元件 |
JP2007109737A (ja) * | 2005-10-11 | 2007-04-26 | Toshiba Corp | 窒化物半導体レーザ装置及びその製造方法 |
KR100853241B1 (ko) * | 2005-12-16 | 2008-08-20 | 샤프 가부시키가이샤 | 질화물 반도체 발광소자 및 질화물 반도체 레이저 소자의제조방법 |
JP5191650B2 (ja) * | 2005-12-16 | 2013-05-08 | シャープ株式会社 | 窒化物半導体発光素子および窒化物半導体発光素子の製造方法 |
JP5004597B2 (ja) * | 2006-03-06 | 2012-08-22 | シャープ株式会社 | 窒化物半導体発光素子および窒化物半導体発光素子の製造方法 |
JP5430826B2 (ja) * | 2006-03-08 | 2014-03-05 | シャープ株式会社 | 窒化物半導体レーザ素子 |
JP4444304B2 (ja) * | 2006-04-24 | 2010-03-31 | シャープ株式会社 | 窒化物半導体発光素子および窒化物半導体発光素子の製造方法 |
TWI425639B (zh) * | 2007-10-22 | 2014-02-01 | Au Optronics Corp | 一種薄膜電晶體及其製造方法 |
JP2009170801A (ja) | 2008-01-18 | 2009-07-30 | Mitsubishi Electric Corp | 半導体レーザ |
JP2009176812A (ja) * | 2008-01-22 | 2009-08-06 | Mitsubishi Electric Corp | 半導体レーザ |
DE102009054912A1 (de) | 2009-08-28 | 2011-03-10 | M2K-Laser Gmbh | Hochleistungs-Diodenlaser und Verfahren zum Herstellen eines Hochleistungs-Diodenlasers |
US10186833B2 (en) * | 2015-02-18 | 2019-01-22 | Ii-Vi Incorporated | Densely-spaced laser diode configurations |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58125832A (ja) | 1982-01-22 | 1983-07-27 | Hitachi Ltd | 3−5族化合物半導体のパツシベ−シヨン法 |
US4563368A (en) * | 1983-02-14 | 1986-01-07 | Xerox Corporation | Passivation for surfaces and interfaces of semiconductor laser facets or the like |
US4656638A (en) * | 1983-02-14 | 1987-04-07 | Xerox Corporation | Passivation for surfaces and interfaces of semiconductor laser facets or the like |
JPH0642582B2 (ja) * | 1988-06-27 | 1994-06-01 | シャープ株式会社 | 誘電体多層被覆膜 |
US5144634A (en) | 1989-09-07 | 1992-09-01 | International Business Machines Corporation | Method for mirror passivation of semiconductor laser diodes |
JPH03293791A (ja) * | 1990-04-12 | 1991-12-25 | Canon Inc | 半導体光素子、半導体光増幅器及びそれらの製造方法 |
JPH10509283A (ja) * | 1995-09-14 | 1998-09-08 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | 半導体ダイオードレーザ及びその製造方法 |
JPH09162496A (ja) * | 1995-12-12 | 1997-06-20 | Nippon Telegr & Teleph Corp <Ntt> | 半導体レーザ及びその製造方法 |
JPH10112566A (ja) * | 1996-10-07 | 1998-04-28 | Furukawa Electric Co Ltd:The | 半導体レーザ |
JP3710627B2 (ja) | 1997-08-13 | 2005-10-26 | 三菱化学株式会社 | 化合物半導体発光素子 |
EP0898345A3 (de) | 1997-08-13 | 2004-01-02 | Mitsubishi Chemical Corporation | Lichtemittierende Halbleitervorrichtung und Herstellungsverfahren |
JP3699851B2 (ja) * | 1998-05-11 | 2005-09-28 | 三菱化学株式会社 | 半導体発光素子の製造方法 |
US6438150B1 (en) * | 1999-03-09 | 2002-08-20 | Telecordia Technologies, Inc. | Edge-emitting semiconductor laser having asymmetric interference filters |
JP2000332340A (ja) * | 1999-05-21 | 2000-11-30 | Fuji Photo Film Co Ltd | 半導体レーザ装置およびその製造方法 |
JP2001068780A (ja) * | 1999-08-30 | 2001-03-16 | Fuji Photo Film Co Ltd | 半導体レーザ素子およびその製造方法 |
JP2001230483A (ja) * | 2000-02-14 | 2001-08-24 | Fuji Photo Film Co Ltd | 半導体レーザ装置 |
US6618409B1 (en) * | 2000-05-03 | 2003-09-09 | Corning Incorporated | Passivation of semiconductor laser facets |
-
2001
- 2001-09-03 JP JP2001265356A patent/JP2003078199A/ja active Pending
-
2002
- 2002-09-02 DE DE60218790T patent/DE60218790T2/de not_active Expired - Lifetime
- 2002-09-02 EP EP02019709A patent/EP1289080B1/de not_active Expired - Lifetime
- 2002-09-03 US US10/232,525 patent/US6798805B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20030048823A1 (en) | 2003-03-13 |
EP1289080A2 (de) | 2003-03-05 |
EP1289080A3 (de) | 2005-06-22 |
US6798805B2 (en) | 2004-09-28 |
DE60218790T2 (de) | 2007-12-06 |
EP1289080B1 (de) | 2007-03-14 |
JP2003078199A (ja) | 2003-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
R082 | Change of representative |
Ref document number: 1289080 Country of ref document: EP Representative=s name: KLUNKER, SCHMITT-NILSON, HIRSCH, 80796 MUENCHEN, D |