DE60224273D1 - Mehrstrahl-halbleiterlaserelement - Google Patents
Mehrstrahl-halbleiterlaserelementInfo
- Publication number
- DE60224273D1 DE60224273D1 DE60224273T DE60224273T DE60224273D1 DE 60224273 D1 DE60224273 D1 DE 60224273D1 DE 60224273 T DE60224273 T DE 60224273T DE 60224273 T DE60224273 T DE 60224273T DE 60224273 D1 DE60224273 D1 DE 60224273D1
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor laser
- laser element
- multiple semiconductor
- semiconductor
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4031—Edge-emitting structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
- H01S5/0234—Up-side down mountings, e.g. Flip-chip, epi-side down mountings or junction down mountings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
- H01S5/02345—Wire-bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04252—Electrodes, e.g. characterised by the structure characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04256—Electrodes, e.g. characterised by the structure characterised by the configuration
- H01S5/04257—Electrodes, e.g. characterised by the structure characterised by the configuration having positive and negative electrodes on the same side of the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
- H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001182305 | 2001-06-15 | ||
JP2001182306 | 2001-06-15 | ||
JP2001182306 | 2001-06-15 | ||
JP2001182305 | 2001-06-15 | ||
PCT/JP2002/005967 WO2002103868A1 (fr) | 2001-06-15 | 2002-06-14 | Element laser a semi-conducteurs a faisceaux multiples |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60224273D1 true DE60224273D1 (de) | 2008-02-07 |
DE60224273T2 DE60224273T2 (de) | 2008-12-24 |
Family
ID=26617038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60224273T Expired - Fee Related DE60224273T2 (de) | 2001-06-15 | 2002-06-14 | Mehrstrahlhalbleiterlasereinrichtung |
Country Status (7)
Country | Link |
---|---|
US (2) | US6950451B2 (de) |
EP (1) | EP1396914B1 (de) |
JP (1) | JP2003069152A (de) |
KR (2) | KR100872734B1 (de) |
CN (1) | CN1305193C (de) |
DE (1) | DE60224273T2 (de) |
WO (1) | WO2002103868A1 (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003069152A (ja) * | 2001-06-15 | 2003-03-07 | Sony Corp | マルチビーム半導体レーザ素子 |
JP4337520B2 (ja) * | 2002-11-25 | 2009-09-30 | 日亜化学工業株式会社 | リッジ導波路型半導体レーザ |
JP2004319915A (ja) * | 2003-04-18 | 2004-11-11 | Sharp Corp | 半導体レーザー装置の製造方法および半導体レーザー装置 |
JP3916584B2 (ja) * | 2003-04-24 | 2007-05-16 | シャープ株式会社 | 窒化物半導体レーザ装置 |
JP2005150451A (ja) | 2003-11-17 | 2005-06-09 | Samsung Electronics Co Ltd | マルチビーム発光素子および光走査装置 |
JP2006093466A (ja) * | 2004-09-24 | 2006-04-06 | Toshiba Corp | 多波長半導体レーザ素子および多波長半導体レーザ装置 |
JP2006351966A (ja) * | 2005-06-17 | 2006-12-28 | Sony Corp | 多波長半導体レーザ素子 |
JP4411540B2 (ja) * | 2005-09-15 | 2010-02-10 | ソニー株式会社 | 半導体レーザ装置 |
EP1770836B1 (de) | 2005-09-29 | 2015-04-22 | OSRAM Opto Semiconductors GmbH | Laserdiodenvorrichtung, Laseranordnung mit mindestens einer Laserdiodevorrichtung und optisch gepumpter Laser |
JP2007171851A (ja) | 2005-12-26 | 2007-07-05 | Sharp Corp | レーザ走査光学系及び画像形成装置 |
US7679098B2 (en) * | 2006-01-30 | 2010-03-16 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Highly directional light emitting diode using photonic bandgap waveguides |
WO2007097411A1 (ja) * | 2006-02-23 | 2007-08-30 | Rohm Co., Ltd. | 2波長半導体発光装置及びその製造方法 |
JP2007324312A (ja) * | 2006-05-31 | 2007-12-13 | Sony Corp | 半導体レーザアレイおよび光学装置 |
US20080130698A1 (en) * | 2006-11-30 | 2008-06-05 | Sanyo Electric Co., Ltd. | Nitride-based semiconductor device and method of fabricating the same |
JP4573863B2 (ja) * | 2006-11-30 | 2010-11-04 | 三洋電機株式会社 | 窒化物系半導体素子の製造方法 |
US9595813B2 (en) * | 2011-01-24 | 2017-03-14 | Soraa Laser Diode, Inc. | Laser package having multiple emitters configured on a substrate member |
US9025635B2 (en) | 2011-01-24 | 2015-05-05 | Soraa Laser Diode, Inc. | Laser package having multiple emitters configured on a support member |
CN105489746B (zh) * | 2014-09-19 | 2018-02-23 | 展晶科技(深圳)有限公司 | 发光芯片模组、发光二极管以及发光芯片模组的制造方法 |
CN104538844B (zh) * | 2015-01-27 | 2018-10-26 | 中国科学院上海微系统与信息技术研究所 | 太赫兹量子级联激光器器件结构及其制作方法 |
JP2016028450A (ja) * | 2015-10-23 | 2016-02-25 | 株式会社日立製作所 | 光モジュール |
CN105633790A (zh) * | 2016-03-09 | 2016-06-01 | 中国科学院合肥物质科学研究院 | 一种利用GaN激光二极管泵浦稀土离子掺杂钽铌酸盐实现可见激光的方法 |
DE102017119664A1 (de) * | 2017-08-28 | 2019-02-28 | Osram Opto Semiconductors Gmbh | Kantenemittierender Laserbarren |
DE102017121480B4 (de) | 2017-09-15 | 2024-04-18 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Lichtemittierendes Halbleiterbauteil |
US10720758B2 (en) * | 2018-03-28 | 2020-07-21 | Lumentum Operations Llc | Emitter array with shared via to an ohmic metal shared between adjacent emitters |
US11522344B2 (en) | 2018-03-28 | 2022-12-06 | Lumentum Operations Llc | Optimizing a layout of an emitter array |
CN115244805A (zh) * | 2020-06-12 | 2022-10-25 | 日亚化学工业株式会社 | 激光二极管元件及其制造方法 |
GB202010596D0 (en) * | 2020-07-09 | 2020-08-26 | Rockley Photonics Ltd | Optoelectronic device and method of manufacture thereof |
WO2022258756A1 (de) * | 2021-06-11 | 2022-12-15 | Osram Opto Semiconductors Gmbh | Halbleiterchip und bauelement |
WO2023144960A1 (ja) * | 2022-01-27 | 2023-08-03 | 三菱電機株式会社 | 光半導体装置 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2870082B2 (ja) * | 1990-01-19 | 1999-03-10 | ソニー株式会社 | 半導体レーザ |
WO1997011518A1 (en) | 1995-09-18 | 1997-03-27 | Hitachi, Ltd. | Semiconductor material, method of producing the semiconductor material, and semiconductor device |
US6031858A (en) * | 1996-09-09 | 2000-02-29 | Kabushiki Kaisha Toshiba | Semiconductor laser and method of fabricating same |
US6185238B1 (en) * | 1997-02-21 | 2001-02-06 | Kabushiki Kaisha Toshiba | Nitride compound semiconductor laser and its manufacturing method |
JP4169821B2 (ja) * | 1998-02-18 | 2008-10-22 | シャープ株式会社 | 発光ダイオード |
JP4032538B2 (ja) * | 1998-11-26 | 2008-01-16 | ソニー株式会社 | 半導体薄膜および半導体素子の製造方法 |
JP2000196197A (ja) | 1998-12-30 | 2000-07-14 | Xerox Corp | 成長基板が除去された窒化物レ―ザダイオ―ドの構造及び窒化物レ―ザダイオ―ドアレイ構造の製造方法 |
US6744800B1 (en) * | 1998-12-30 | 2004-06-01 | Xerox Corporation | Method and structure for nitride based laser diode arrays on an insulating substrate |
JP2000277863A (ja) | 1999-03-24 | 2000-10-06 | Sanyo Electric Co Ltd | 半導体発光素子およびその製造方法 |
JP3328227B2 (ja) | 1999-06-22 | 2002-09-24 | 株式会社エヌ・ティ・ティ・データ | データ通信システム |
JP2001007443A (ja) * | 1999-06-25 | 2001-01-12 | Matsushita Electric Ind Co Ltd | 半導体発光装置の製造方法 |
EP1104031B1 (de) * | 1999-11-15 | 2012-04-11 | Panasonic Corporation | Nitrid-Halbleiterlaserdiode und deren Herstellungsverfahren |
JP2001217503A (ja) | 2000-02-03 | 2001-08-10 | Matsushita Electric Ind Co Ltd | GaN系半導体発光素子およびその製造方法 |
JP3889910B2 (ja) * | 2000-03-10 | 2007-03-07 | 三菱化学株式会社 | 半導体発光装置およびその製造方法 |
JP4120184B2 (ja) * | 2000-06-30 | 2008-07-16 | セイコーエプソン株式会社 | 実装用微小構造体および光伝送装置 |
JP3455500B2 (ja) * | 2000-06-30 | 2003-10-14 | 学校法人 名城大学 | 半導体レーザ及び半導体レーザの製造方法 |
JP2002076522A (ja) * | 2000-09-01 | 2002-03-15 | Nec Corp | 窒化物半導体レーザ |
CN1136207C (zh) * | 2000-10-19 | 2004-01-28 | 大连化学工业股份有限公司 | 制备内酯用的催化剂及内酯的制备方法 |
JP2003069152A (ja) * | 2001-06-15 | 2003-03-07 | Sony Corp | マルチビーム半導体レーザ素子 |
-
2002
- 2002-06-10 JP JP2002168293A patent/JP2003069152A/ja active Pending
- 2002-06-14 DE DE60224273T patent/DE60224273T2/de not_active Expired - Fee Related
- 2002-06-14 KR KR1020037016308A patent/KR100872734B1/ko not_active IP Right Cessation
- 2002-06-14 EP EP02738719A patent/EP1396914B1/de not_active Expired - Fee Related
- 2002-06-14 CN CNB028117514A patent/CN1305193C/zh not_active Expired - Fee Related
- 2002-06-14 US US10/480,568 patent/US6950451B2/en not_active Expired - Fee Related
- 2002-06-14 KR KR1020087009464A patent/KR100890717B1/ko not_active IP Right Cessation
- 2002-06-14 WO PCT/JP2002/005967 patent/WO2002103868A1/ja active Application Filing
-
2005
- 2005-05-19 US US11/132,981 patent/US7149235B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR100872734B1 (ko) | 2008-12-08 |
KR100890717B1 (ko) | 2009-03-27 |
DE60224273T2 (de) | 2008-12-24 |
EP1396914A1 (de) | 2004-03-10 |
EP1396914B1 (de) | 2007-12-26 |
US7149235B2 (en) | 2006-12-12 |
WO2002103868A1 (fr) | 2002-12-27 |
EP1396914A4 (de) | 2004-12-22 |
JP2003069152A (ja) | 2003-03-07 |
US20040170203A1 (en) | 2004-09-02 |
US20050218422A1 (en) | 2005-10-06 |
KR20080051182A (ko) | 2008-06-10 |
CN1515053A (zh) | 2004-07-21 |
CN1305193C (zh) | 2007-03-14 |
KR20040006034A (ko) | 2004-01-16 |
US6950451B2 (en) | 2005-09-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |