DE60225110D1 - Doppel-III-V-Nitridlaserstruktur mit reduziertem thermischen Übersprechen - Google Patents

Doppel-III-V-Nitridlaserstruktur mit reduziertem thermischen Übersprechen

Info

Publication number
DE60225110D1
DE60225110D1 DE60225110T DE60225110T DE60225110D1 DE 60225110 D1 DE60225110 D1 DE 60225110D1 DE 60225110 T DE60225110 T DE 60225110T DE 60225110 T DE60225110 T DE 60225110T DE 60225110 D1 DE60225110 D1 DE 60225110D1
Authority
DE
Germany
Prior art keywords
laser structure
reduced thermal
thermal crosstalk
nitride laser
iii
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60225110T
Other languages
English (en)
Other versions
DE60225110T2 (de
Inventor
John E Northup
Michael A Kneissl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of DE60225110D1 publication Critical patent/DE60225110D1/de
Application granted granted Critical
Publication of DE60225110T2 publication Critical patent/DE60225110T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
    • H01S5/4031—Edge-emitting structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Semiconductor Lasers (AREA)
DE60225110T 2001-11-15 2002-11-15 Doppel-III-V-Nitridlaserstruktur mit reduziertem thermischen Übersprechen Expired - Lifetime DE60225110T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/000,898 US6618418B2 (en) 2001-11-15 2001-11-15 Dual III-V nitride laser structure with reduced thermal cross-talk
US898 2007-10-30

Publications (2)

Publication Number Publication Date
DE60225110D1 true DE60225110D1 (de) 2008-04-03
DE60225110T2 DE60225110T2 (de) 2009-03-05

Family

ID=21693488

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60225110T Expired - Lifetime DE60225110T2 (de) 2001-11-15 2002-11-15 Doppel-III-V-Nitridlaserstruktur mit reduziertem thermischen Übersprechen

Country Status (5)

Country Link
US (1) US6618418B2 (de)
EP (1) EP1324444B1 (de)
JP (1) JP2003158342A (de)
BR (1) BR0204641A (de)
DE (1) DE60225110T2 (de)

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WO2003077391A1 (fr) * 2002-03-08 2003-09-18 Matsushita Electric Industrial Co., Ltd. Laser a semi-conducteur et procede de fabrication de ce laser
KR101034055B1 (ko) 2003-07-18 2011-05-12 엘지이노텍 주식회사 발광 다이오드 및 그 제조방법
JP2005109102A (ja) * 2003-09-30 2005-04-21 Mitsubishi Electric Corp モノリシック半導体レーザおよびその製造方法
WO2005086243A1 (en) * 2004-03-08 2005-09-15 Showa Denko K.K. Pn junction type croup iii nitride semiconductor light-emitting device
US7800097B2 (en) * 2004-12-13 2010-09-21 Panasonic Corporation Semiconductor device including independent active layers and method for fabricating the same
KR100665284B1 (ko) * 2005-11-07 2007-01-09 삼성전기주식회사 반도체 발광 소자
DE102006051745B4 (de) * 2006-09-28 2024-02-08 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung LED-Halbleiterkörper und Verwendung eines LED-Halbleiterkörpers
FI121902B (fi) * 2007-06-20 2011-05-31 Optogan Oy Valoa säteilevä diodi
DE102007058723A1 (de) 2007-09-10 2009-03-12 Osram Opto Semiconductors Gmbh Lichtemittierende Struktur
JP4599442B2 (ja) 2008-08-27 2010-12-15 株式会社東芝 半導体発光素子の製造方法
DE102010014667A1 (de) * 2010-04-12 2011-10-13 Osram Opto Semiconductors Gmbh Leuchtdiodenchip mit Stromaufweitungsschicht
SE535945C2 (sv) * 2010-11-19 2013-02-26 Rosenqvist Rail Ab Handmanövrerbart arrangemang och förfarande för att avbefästa rälsclips
CN102545058B (zh) * 2012-01-16 2013-10-09 苏州纳睿光电有限公司 一种氮化镓基激光器外延结构及其制作方法
US9306373B2 (en) * 2013-02-15 2016-04-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Semiconductor lasers and etched-facet integrated devices having non-uniform trenches
US9768259B2 (en) 2013-07-26 2017-09-19 Cree, Inc. Controlled ion implantation into silicon carbide using channeling and devices fabricated using controlled ion implantation into silicon carbide using channeling
CN107810377B (zh) 2015-06-10 2020-06-19 康宁股份有限公司 耐热串扰的流动反应器
US10183269B2 (en) 2015-06-10 2019-01-22 Corning Incorporated Continuous flow reactor with tunable heat transfer capability
US20200185883A1 (en) * 2018-12-11 2020-06-11 Sharp Kabushiki Kaisha Nitride semiconductor laser device and method for producing nitride semiconductor laser device

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153889A (en) * 1989-05-31 1992-10-06 Kabushiki Kaisha Toshiba Semiconductor light emitting device
BE1007282A3 (nl) 1993-07-12 1995-05-09 Philips Electronics Nv Opto-electronische halfgeleiderinrichting met een array van halfgeleiderdiodelasers en werkwijze ter vervaardiging daarvan.
US5812576A (en) * 1996-08-26 1998-09-22 Xerox Corporation Loss-guided semiconductor lasers
US6031858A (en) * 1996-09-09 2000-02-29 Kabushiki Kaisha Toshiba Semiconductor laser and method of fabricating same
US6239033B1 (en) * 1998-05-28 2001-05-29 Sony Corporation Manufacturing method of semiconductor device
US5831960A (en) * 1997-07-17 1998-11-03 Motorola, Inc. Integrated vertical cavity surface emitting laser pair for high density data storage and method of fabrication
US5917847A (en) * 1997-09-26 1999-06-29 Xerox Corporation Independently addressable semiconductor laser arrays with buried selectively oxidized native oxide apertures
US6058124A (en) * 1997-11-25 2000-05-02 Xerox Corporation Monolithic independently addressable Red/IR side by side laser
US6389051B1 (en) * 1999-04-09 2002-05-14 Xerox Corporation Structure and method for asymmetric waveguide nitride laser diode

Also Published As

Publication number Publication date
JP2003158342A (ja) 2003-05-30
BR0204641A (pt) 2003-09-16
EP1324444B1 (de) 2008-02-20
US20030091085A1 (en) 2003-05-15
EP1324444A3 (de) 2005-04-13
EP1324444A2 (de) 2003-07-02
US6618418B2 (en) 2003-09-09
DE60225110T2 (de) 2009-03-05

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