DE602006009984D1 - Hängebahnlaufwagensystem - Google Patents

Hängebahnlaufwagensystem

Info

Publication number
DE602006009984D1
DE602006009984D1 DE602006009984T DE602006009984T DE602006009984D1 DE 602006009984 D1 DE602006009984 D1 DE 602006009984D1 DE 602006009984 T DE602006009984 T DE 602006009984T DE 602006009984 T DE602006009984 T DE 602006009984T DE 602006009984 D1 DE602006009984 D1 DE 602006009984D1
Authority
DE
Germany
Prior art keywords
overhead rail
trolley system
rail trolley
overhead
trolley
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602006009984T
Other languages
German (de)
English (en)
Inventor
Tamotsu Shiwaku
Takashi Nakao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Machinery Ltd
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of DE602006009984D1 publication Critical patent/DE602006009984D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0464—Storage devices mechanical with access from above
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/34—Devices for discharging articles or materials from conveyor 
    • B65G47/46—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points
    • B65G47/51—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination
    • B65G47/5104—Devices for discharging articles or materials from conveyor  and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination for articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
DE602006009984T 2005-03-31 2006-03-28 Hängebahnlaufwagensystem Active DE602006009984D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005102660A JP4221603B2 (ja) 2005-03-31 2005-03-31 天井走行車システム

Publications (1)

Publication Number Publication Date
DE602006009984D1 true DE602006009984D1 (de) 2009-12-10

Family

ID=36593823

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602006009984T Active DE602006009984D1 (de) 2005-03-31 2006-03-28 Hängebahnlaufwagensystem

Country Status (5)

Country Link
US (1) US7972104B2 (enExample)
EP (1) EP1707507B1 (enExample)
JP (1) JP4221603B2 (enExample)
DE (1) DE602006009984D1 (enExample)
TW (1) TW200700299A (enExample)

Families Citing this family (62)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
JP4296601B2 (ja) * 2005-01-20 2009-07-15 村田機械株式会社 搬送台車システム
JP4720267B2 (ja) * 2005-04-14 2011-07-13 村田機械株式会社 天井走行車システム
JP4264834B2 (ja) * 2005-07-04 2009-05-20 村田機械株式会社 有軌道台車システム
JP4632091B2 (ja) * 2005-08-30 2011-02-16 株式会社ダイフク 物品搬送設備
JP2007191235A (ja) * 2006-01-17 2007-08-02 Murata Mach Ltd 天井走行車システム
JP2007331906A (ja) * 2006-06-16 2007-12-27 Murata Mach Ltd 天井走行車システム
JP4858018B2 (ja) * 2006-09-01 2012-01-18 ムラテックオートメーション株式会社 被搬送物保管システム
JP5041207B2 (ja) * 2006-11-14 2012-10-03 株式会社ダイフク 物品搬送設備
JP4277287B2 (ja) * 2006-11-27 2009-06-10 村田機械株式会社 天井走行車
JP4688824B2 (ja) * 2007-01-12 2011-05-25 村田機械株式会社 天井走行車システム及び天井走行車システムの周囲の処理装置の搬出入方法
JP4378655B2 (ja) * 2007-03-07 2009-12-09 株式会社ダイフク 物品処理設備
JP4389181B2 (ja) 2007-03-07 2009-12-24 株式会社ダイフク 物品処理設備
JP4366663B2 (ja) * 2007-06-28 2009-11-18 村田機械株式会社 搬送台車システム
JP2009018877A (ja) * 2007-07-10 2009-01-29 Asyst Technologies Japan Inc 搬送装置
JP5266680B2 (ja) * 2007-07-23 2013-08-21 村田機械株式会社 搬送装置、搬送システム及び伸長機構
DE102007035839B4 (de) * 2007-07-31 2017-06-22 Globalfoundries Dresden Module One Limited Liability Company & Co. Kg Verfahren und System zum lokalen Aufbewahren von Substratbehältern in einem Deckentransportsystem zum Verbessern der Aufnahme/Abgabe-Kapazitäten von Prozessanlagen
JP5266683B2 (ja) * 2007-08-03 2013-08-21 村田機械株式会社 搬送システム、及び該搬送システムにおける教示方法
JP4543338B2 (ja) * 2007-11-13 2010-09-15 村田機械株式会社 天井走行車システムとそのバッファの施工方法
TW201004853A (en) * 2008-07-25 2010-02-01 Inotera Memories Inc Method for carrying wafer cassette and carrying system thereof
DE102008059711A1 (de) * 2008-11-29 2010-06-10 Eisenmann Anlagenbau Gmbh & Co. Kg Vorrichtung zum Umsetzen von Gegenständen sowie Förderanlagen mit einer solchen Vorrichtung
JP2010184760A (ja) * 2009-02-10 2010-08-26 Muratec Automation Co Ltd 移載システム
JP4807424B2 (ja) * 2009-03-17 2011-11-02 村田機械株式会社 天井搬送システムと物品の移載方法
JP2011035022A (ja) * 2009-07-30 2011-02-17 Murata Machinery Ltd 天井搬送車
TWI496732B (zh) * 2009-07-31 2015-08-21 Murata Machinery Ltd 供工具利用之緩衝儲存和運輸裝置
JP5382341B2 (ja) * 2009-11-26 2014-01-08 村田機械株式会社 走行車システムと走行車への非接触給電方法
KR101359682B1 (ko) * 2010-04-02 2014-02-06 무라다기카이가부시끼가이샤 천장을 주행하는 반송차의 사이드 버퍼 및 반송차 시스템
JP5024422B2 (ja) * 2010-05-06 2012-09-12 株式会社デンソー 搬送システム
CN103119517B (zh) * 2010-09-13 2015-05-13 村田机械株式会社 自动仓库以及物品搬出方法
JP5273118B2 (ja) * 2010-10-04 2013-08-28 村田機械株式会社 搬送車及び搬送システム
EP2636614A4 (en) 2010-11-04 2017-02-22 Murata Machinery, Ltd. Conveying system and conveying method
JP5229363B2 (ja) * 2010-11-04 2013-07-03 村田機械株式会社 搬送システム及び搬送方法
JP5750926B2 (ja) * 2011-02-15 2015-07-22 村田機械株式会社 天井搬送車
US9566193B2 (en) * 2011-02-25 2017-02-14 Curt G. Joa, Inc. Methods and apparatus for forming disposable products at high speeds with small machine footprint
JP5674041B2 (ja) * 2011-08-11 2015-02-18 株式会社ダイフク 物品搬送設備
TWI473194B (zh) * 2011-09-08 2015-02-11 Inotera Memories Inc 懸吊式晶圓傳輸系統
JP5527619B2 (ja) 2011-11-24 2014-06-18 株式会社ダイフク 天井設置型の物品搬送設備
KR101874320B1 (ko) * 2011-11-29 2018-07-05 삼성전자주식회사 호이스트 장치 및 이를 포함하는 호이스트 반송시스템
TWI447058B (zh) * 2011-11-30 2014-08-01 Inotera Memories Inc 天車輸送系統及其運轉方法
US9385019B2 (en) * 2012-06-21 2016-07-05 Globalfoundries Inc. Overhead substrate handling and storage system
EP3093258B1 (en) * 2014-01-07 2020-10-21 Murata Machinery, Ltd. Transfer device and control method of transfer device
KR101999836B1 (ko) * 2014-08-26 2019-07-12 무라다기카이가부시끼가이샤 분류 시스템과 분류 방법
KR102207870B1 (ko) * 2014-12-02 2021-01-26 세메스 주식회사 그립부 지지유닛 및 이를 갖는 캐리어 이송 장치
JP6168477B2 (ja) * 2015-03-31 2017-07-26 村田機械株式会社 走行台車システム及び走行台車の走行方法
KR102441186B1 (ko) * 2015-08-28 2022-09-08 삼성전자주식회사 기판 이송 장치
EP3362389A4 (en) 2015-10-13 2019-07-10 Curt G. Joa, Inc. DISPOSABLE PRODUCTION ARRANGEMENT SYSTEMS AND METHODS
NO342469B1 (en) 2016-02-01 2018-05-28 Autostore Tech As Cleaning bin for cleaning a storage grid of a storage system and method for the same
CN109415163B (zh) * 2016-06-27 2020-12-29 村田机械株式会社 输送系统
WO2018055883A1 (ja) * 2016-09-26 2018-03-29 村田機械株式会社 天井搬送システム、及び天井搬送車
CN107934330A (zh) * 2017-11-17 2018-04-20 苏州大成电子科技有限公司 一种悬吊式立体化仓库
US10418263B2 (en) * 2018-01-20 2019-09-17 Boris Kesil Overhead transportation system for transporting objects between multiple work stations
KR102166348B1 (ko) * 2018-10-05 2020-10-15 세메스 주식회사 이송 장치의 동작 제어 방법
JP7256360B2 (ja) * 2018-12-14 2023-04-12 シンフォニアテクノロジー株式会社 搬送異常検知システム
IL286528B1 (en) * 2019-03-22 2025-09-01 Murata Machinery Ltd Transportation system
US11912608B2 (en) 2019-10-01 2024-02-27 Owens-Brockway Glass Container Inc. Glass manufacturing
US11658053B2 (en) 2019-10-21 2023-05-23 Globalfoundries U.S. Inc. Conversion plate for reticle pod storage and a reticle pod storage system
KR102233475B1 (ko) * 2019-11-14 2021-03-26 시너스텍 주식회사 슬라이드 처짐 방지용 지그를 구비한 oht
KR102256132B1 (ko) * 2020-02-18 2021-05-25 (주)캔탑스 캐리어 내부의 오염 관리 기능을 갖는 자동 반송시스템
US11569108B2 (en) 2020-06-15 2023-01-31 Globalfoundries U.S. Inc. Reticle pod conversion plate for interfacing with a tool
US12291410B2 (en) 2020-10-01 2025-05-06 Owens-Brockway Glass Container Inc. Bulk material handling methods, systems, subsystems, and apparatuses
KR102181492B1 (ko) * 2020-10-08 2020-11-23 세메스 주식회사 이송 장치의 동작 제어 방법
KR102884707B1 (ko) * 2021-12-28 2025-11-13 세메스 주식회사 오버헤드 호이스트 이송 장치

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6078532A (ja) 1983-10-05 1985-05-04 Toppan Printing Co Ltd カズノコの包装方法
US5564890A (en) * 1994-12-21 1996-10-15 Progressive Solutions, Inc. Product handling process
JP3577183B2 (ja) 1996-06-17 2004-10-13 花王株式会社 動脈硬化症予防・治療剤
JP3067656B2 (ja) 1996-09-30 2000-07-17 村田機械株式会社 ワーク搬送システム
TW348162B (en) * 1996-09-30 1998-12-21 Murada Kikai Kk Work carrying system
JP3067682B2 (ja) * 1997-03-13 2000-07-17 村田機械株式会社 天井走行車システム
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
JP3484104B2 (ja) * 1998-12-25 2004-01-06 平田機工株式会社 自動倉庫及び自動倉庫の管理方法
KR100729986B1 (ko) * 1999-12-20 2007-06-20 아시스트 신꼬, 인코포레이티드 자동반송시스템
JP2002137137A (ja) * 2000-10-27 2002-05-14 Mori Seiki Co Ltd 工作機械及びそのパレット交換装置
JP2003188229A (ja) * 2001-12-18 2003-07-04 Hitachi Kasado Eng Co Ltd ウエハ製造システムおよびウエハ製造方法
JP2003233422A (ja) * 2002-02-06 2003-08-22 Mitsubishi Electric Corp 搬送システムおよびその制御方法
JP4220173B2 (ja) * 2002-03-26 2009-02-04 株式会社日立ハイテクノロジーズ 基板の搬送方法
TWI233913B (en) * 2002-06-06 2005-06-11 Murata Machinery Ltd Automated guided vehicle system
WO2004001582A1 (en) * 2002-06-19 2003-12-31 Brooks Automation, Inc. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
KR101323337B1 (ko) * 2002-10-11 2013-10-30 무라타 기카이 가부시키가이샤 자동 재료 핸들링 시스템
JP2004189361A (ja) * 2002-12-09 2004-07-08 Murata Mach Ltd 天井搬送車及びそのシステム
JP3991852B2 (ja) * 2002-12-09 2007-10-17 村田機械株式会社 天井搬送車システム
US6779760B2 (en) * 2002-12-19 2004-08-24 Taiwan Semiconductor Manufacturing Co., Ltd Safety system for overhead transport vehicle
TWI246501B (en) * 2003-02-03 2006-01-01 Murata Machinery Ltd Overhead traveling carriage system
US6745102B1 (en) * 2003-04-10 2004-06-01 Powerchip Semiconductor Corp. Automatic transporting system and method for operating the same
JP3874192B2 (ja) * 2004-01-09 2007-01-31 村田機械株式会社 有軌道台車システム
JP4074999B2 (ja) * 2004-01-13 2008-04-16 村田機械株式会社 搬送台車システム
JP2006051886A (ja) * 2004-08-12 2006-02-23 Murata Mach Ltd 天井走行車システム
JP4337683B2 (ja) * 2004-08-16 2009-09-30 村田機械株式会社 搬送システム
JP4296601B2 (ja) * 2005-01-20 2009-07-15 村田機械株式会社 搬送台車システム

Also Published As

Publication number Publication date
US20060222479A1 (en) 2006-10-05
TWI344437B (enExample) 2011-07-01
TW200700299A (en) 2007-01-01
JP4221603B2 (ja) 2009-02-12
EP1707507A1 (en) 2006-10-04
US7972104B2 (en) 2011-07-05
EP1707507B1 (en) 2009-10-28
JP2006282303A (ja) 2006-10-19

Similar Documents

Publication Publication Date Title
DE602006009984D1 (de) Hängebahnlaufwagensystem
DE602005014423D1 (de) Hängebahnlaufwagensystem
DE602004023366D1 (de) Schienenlaufwagensystem
DE602005002505D1 (de) Schienenlaufwagensystem
DE602005009649D1 (de) Wagensystem
DE602006010967D1 (de) Reise-Verknüpfungsidentifikationssystem
BRPI0818043A2 (pt) Sistema de trole de trilho fendido
FI20050128L (fi) Hissijärjestelmä
FI20050840L (fi) Hissijärjestelmä
FI20050130A0 (fi) Hissijärjestelmä
FI20051038L (fi) Hissijärjestelmä
DE602005001586D1 (de) Zugortungssystem
FI20050504A0 (fi) Hissijärjestelmä
DK2063047T3 (da) Profilskinnesystem
DE602004004745D1 (de) Wagensystem
DE602005013152D1 (de) Hängebahnwagen
FI20050127A0 (fi) Hissijärjestelmä
FI20050361L (fi) Hissijärjestelmä
BRPI0914911A2 (pt) carrinho de guindaste aéreo
DE602005018859D1 (de) Hängebahnwagen
IL172823A0 (en) Track jack system
DK1817475T3 (da) Hybridt stigrørsystem
FI20050960L (sv) Hiss-system
GB2429445B (en) Overhead lines for rail vehicles
DK1797272T3 (da) Ophængningsskinne

Legal Events

Date Code Title Description
8364 No opposition during term of opposition