CN109415163B - 输送系统 - Google Patents
输送系统 Download PDFInfo
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- CN109415163B CN109415163B CN201780037187.4A CN201780037187A CN109415163B CN 109415163 B CN109415163 B CN 109415163B CN 201780037187 A CN201780037187 A CN 201780037187A CN 109415163 B CN109415163 B CN 109415163B
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Abstract
本发明提供能够在与处理装置之间迅速地交接物品的输送系统。输送系统(1A)具备:高空输送车(12),其在第一轨道(11)上行驶,并能够与处理装置(2)的装载端口(4)进行物品(3)的交接;储物架(13),其沿铅垂方向排列有多个收纳物品的架(41、42);起重机(15),其在与第一轨道平行的第二轨道(14)上行驶,并能够分别与装载端口和储物架进行物品的交接;以及第一暂存区(16),其配置于在与装载端口进行物品的交接的位置处停止了行驶的起重机能够进行物品的交接的位置。
Description
技术领域
本发明涉及输送系统。
背景技术
输送系统例如利用在半导体器件的制造工厂等中对收容有半导体晶圆或者中间掩模的物品进行输送这种情况(例如,参照下述的专利文献1)。该输送系统具备:输送物品的高空输送车、和将物品与储物架交接的堆垛机。高空输送车例如向半导体制造装置等处理装置的装载端口搬入物品。储物架配置于半导体制造装置等处理装置的附近,在装载端口已经有物品的情况下,高空输送车例如向储物架的最上层的架搬入物品。堆垛机例如将搬入了储物架的最上层的架处的物品收纳于其他的架,或者在储物架与装载端口间移载物品。
专利文献1:国际公开第2013/150859号
上述那样的输送系统在与装载端口交接物品所需要的时间较长的情况下,导致处理装置的运转率降低。例如,若装载端口被等待搬出的物品堆满,则处理装置无法将新的物品搬入装载端口,从而运转率降低。另外,处理装置在向下一个处理转移时装载端口处没有物品的情况下,进行待机直至物品被运至装载端口,故运转率降低。
发明内容
本发明鉴于上述的状况,目的在于提供能够在自身与处理装置之间迅速地交接物品的输送系统。
本发明的输送系统具备:高空输送车,其在第一轨道上行驶,并能够与处理装置的装载端口进行物品的交接;储物架,其沿铅垂方向排列有多个收纳物品的架;起重机,其在与第一轨道平行的第二轨道上行驶,并能够分别与装载端口和储物架进行物品的交接;以及第一暂存区,其配置于在与装载端口进行物品的交接的位置处停止了行驶的起重机能够进行物品的交接的位置。
另外,也可以是,高空输送车具备:使物品沿水平方向移动的横向移动机构,第一暂存区配置于高空输送车能够使用横向移动机构进行物品的交接的位置。另外,也可以是,第一暂存区配置于在与装载端口进行物品的交接的位置处停止了行驶的高空输送车能够使用横向移动机构进行物品的交接的位置。另外,也可以具备第二暂存区,该第二暂存区与第一暂存区邻接,并能够供起重机进行物品的交接。另外,也可以是,高空输送车具备:使物品沿水平方向移动的横向移动机构,第二暂存区配置于高空输送车能够使用横向移动机构进行物品的交接的位置。另外,也可以是,储物架与处理装置邻接配置,高空输送车能够与储物架的多个架中的最上层的架进行物品的交接。另外,也可以是,第一轨道设置于装载端口的正上方。
在本发明中,第一暂存区配置于在与装载端口进行物品的交接的位置处停止了行驶的起重机能够交接物品的位置。因此,起重机能够在停止了行驶的状态下在第一暂存区与装载端口间移载物品。由此,输送系统能够在输送系统与处理装置之间迅速地交接物品。
另外,高空输送车具备:使物品沿水平方向移动的横向移动机构,在第一暂存区配置于高空输送车能够使用横向移动机构进行物品的交接的位置的情况下,高空输送车能够在第一暂存区与装载端口之间移载物品,即使是例如起重机正在使用中,也能够通过高空输送车在其与处理装置之间迅速地交接物品。另外,在第一暂存区配置于在与装载端口进行物品的交接的位置处停止了行驶的高空输送车能够使用横向移动机构进行物品的交接的位置的情况下,在高空输送车停止了行驶的状态下,能够在第一暂存区与装载端口间移载物品,因此能够在输送系统与处理装置之间迅速地交接物品。另外,在具备与第一暂存区邻接且能够供起重机进行物品的交接的第二暂存区的情况下,能够增加能够保管与处理装置交接的物品的数量。另外,第二暂存区与第一暂存区邻接,因此起重机能够在装载端口与第二暂存区间迅速地移载物品,能够在输送系统与处理装置之间迅速地交接物品。另外,高空输送车具备:使物品沿水平方向移动的横向移动机构,在第二暂存区配置于高空输送车能够使用横向移动机构进行物品的交接的位置的情况下,高空输送车能够在第二暂存区与装载端口间移载物品,即使是例如起重机正在使用中,也能够通过高空输送车,在输送系统与处理装置之间迅速地交接物品。另外,在储物架与处理装置邻接配置,高空输送车能够与储物架的多个架中的最上层的架进行物品的交接的情况下,能够增加保管与处理装置交接的物品的数量。另外,在第一轨道设置于装载端口的正上方的情况下,高空输送车能够通过使物品从装载端口的正上方升降而交接物品,从而能够在输送系统与处理装置之间迅速地交接物品。
附图说明
图1是表示第一实施方式的输送系统的图。
图2是表示物品和高空输送车的图。
图3是高空输送车的横向移动机构的说明图。
图4是表示储物架的立体图。
图5是表示第一暂存区和第二暂存区的图。
图6是表示移载部的动作和供第一暂存区配置的范围的图。
图7是表示第二实施方式的输送系统的图。
图8是表示第三实施方式的输送系统的图。
具体实施方式
以下,参照附图对实施方式进行说明。在以下的各图中,使用XYZ坐标系对图中的方向进行说明。在该XYZ坐标系中,将铅垂方向作为Z方向,将水平方向作为X方向、Y方向。另外,在X、Y、Z各方向中,适当地将箭头侧称为+侧(例+X侧),将其相反一侧称为-侧(例-Y侧)。
[第一实施方式]
对第一实施方式进行说明。图1是表示本实施方式的输送系统的图。图1的(A)是从+Z侧观察到的俯视图,图1的(B)是从-Y侧观察到的侧视图。输送系统1A例如设置于半导体器件的制造工厂,在处理装置2与保管物品的储料器(未图示)之间,或者在处理装置2与其他处理装置之间等输送物品3(后面图2也示出)。处理装置2例如是曝光装置、涂布机、制膜装置或者蚀刻装置等。处理装置2例如在interbay等排列多个。
物品3例如是半导体器件的制造中使用的收容半导体晶圆的FOUP、或者收容中间掩模等加工用部件的中间掩模盒等容器等。处理装置2具备配置物品3的装载端口4。能够配置于装载端口4(参照+Y侧的处理装置2)的物品3的数量例如为两个,其中一个(用实线表示)是向处理装置2搬入的物品3,另一个(用虚线表示)是从处理装置2搬出的物品3。此外,能够配置于装载端口4的物品3的数量也可以是一个,也可以是三个。
输送系统1A具备第一轨道11、高空输送车12、储物架13、第二轨道14、起重机15、第一暂存区16以及第二暂存区17。第一轨道11设置于无尘室等设备的顶棚18(参照图1的(B))等。第一轨道11例如沿着多个处理装置2排列的方向设置,并沿Y方向延伸。高空输送车12在第一轨道11上行驶,并能够与处理装置2的装载端口4进行物品3的交接。
在本实施方式中,第一轨道11设置于装载端口4的正上方。即,第一轨道11铺设为在装载端口4的正上方通过。高空输送车12在将物品3向装载端口4交付时,保持物品3并在装载端口4的正上方停止行驶,使物品3向装载端口4下降。另外,高空输送车12在从装载端口4接受物品3时,在装载端口4的正上方停止行驶,使物品3从装载端口4上升。
图2是表示物品和高空输送车的图。物品3具有:收容输送对象的半导体晶圆等的主体部21、和设置于主体部21的上方(+Z侧)并在由输送系统1A保持物品3时使用的连接部(此处采用凸缘部22)。高空输送车12通过把持物品3的凸缘部22,来保持物品3。凸缘部22具有:从主体部21向上方(+Z侧)延伸的柱状部24、和设置于柱状部24的末端侧的板状部25。板状部25例如为矩形板状,但也可以是圆板状。板状部25比柱状部24向外侧伸出。
高空输送车12被称为OHT(Overhead Hoist Transport)或者OHV(Overhead HoistVehicle)等。高空输送车12具备行驶驱动部26、升降驱动部27、横向移动机构28以及控制部29。升降驱动部27使物品3沿铅垂方向(Z方向)升降。行驶驱动部26保持升降驱动部27,并能够沿着第一轨道11在水平方向上移动。横向移动机构28能够使升降驱动部27在相对于第一轨道11而言的侧方(X方向)移动。控制部29对高空输送车12的各部分进行控制。
高空输送车12由于行驶驱动部26的驱动力而沿着第一轨道11行驶。高空输送车12具备配置于物品3侧方的罩30。罩30相对于高空输送车12中保持物品3的位置,设置于高空输送车12的行驶方向(图2中-Y侧、+Y侧)。罩30之间是在高空输送车12的行驶中保持(收容)物品3的收容空间SP。行驶驱动部26具有电动马达、减速机、驱动轮、编码器等。驱动轮配置为与第一轨道11接触,并经由减速机而与电动马达的输出轴连接。电动马达的输出轴的旋转经由减速机而向驱动轮传递,通过驱动轮的旋转使高空输送车12行驶。编码器对电动马达的输出轴的转速等进行检测,并将其检测结果向控制部29输出。控制部29基于编码器的检测结果来控制电动马达的旋转,进行高空输送车12的速度或停止位置的控制。此外,高空输送车12的停止位置的设定也可以通过对沿着第一轨道11预先设置的指标板等进行识别来进行。
升降驱动部27经由横向移动机构28而被行驶驱动部26支承。升降驱动部27具备:保持物品3的保持部23、和使保持部23沿铅垂方向移动的驱动部31。保持部23通过把持物品3的凸缘部22,从而吊挂并保持物品3。保持部23例如是具有能够在水平方向上移动的爪部32的卡盘,其通过将爪部32插入凸缘部22的板状部25的下方,来保持物品3。保持部23与线或带等吊挂部件33(参照图3)连接。驱动部31例如是吊车,并通过陆续送出吊挂部件33而使保持部23下降,通过卷取吊挂部件33而使保持部23上升。控制部29控制升降驱动部27,以规定的速度使保持部23下降或上升。另外,控制部29控制升降驱动部27而使保持部23保持为目标的高度。
横向移动机构28配置在行驶驱动部26下方的罩30之间。横向移动机构28经由支承轴34而与行驶驱动部26连接。支承轴34从行驶驱动部26向下方延伸,行驶驱动部26安装于支承轴34的下部。横向移动机构28具备固定部35和可动部(上板36、下板37)。固定部35被支承轴34支承,相对于行驶驱动部26固定。上板36配置于固定部35的下方,在图2中与固定部35重叠。上板36能够沿着与X方向平行的引导件相对于固定部35在X方向上移动(参照图3)。上板36因从驱动部供给的驱动力而移动。下板37配置于上板36的下方,并图2中与上板36重叠。下板37能够沿着与X方向平行的引导件,相对于上板36在X方向上移动(参照图3)。下板37因从驱动部供给的驱动力而移动。
横向移动机构28例如彼此独立地设置有上板36的驱动部和下板37的驱动部,上板36与下板37独立,能够沿X方向移动。例如,横向移动机构28也能够仅使上板36与下板37中一者在X方向上移动,也能够使上板36和下板37双方在X方向上移动,可动部的行程(X方向的移动量)可变。
此外,横向移动机构28可以由上板36和下板37共用驱动部,也可以通过连杆机构等并行地能够沿X方向移动。另外,上述的横向移动机构28的结构是一个例子,能够适当地变更。例如,可动部可以仅为上板36,也可以具备三个以上沿X方向可动的部件。另外,高空输送车12也可以不具备横向移动机构28。另外,高空输送车12也可以具备使升降驱动部27绕与Z方向平行的轴线旋转的转动部(未图示)。该转动部通过使升降驱动部27旋转,来调整被保持部23保持的物品3的朝向。
在高空输送车12通过横向移动机构28来交付物品3的情况下,如图3所示,横向移动机构28的驱动部使上板36相对于固定部35向+X侧移动,使下板37相对于上板36向+X侧移动,从而能够使被下板37支承的升降驱动部27移动至目的位置。升降驱动部27通过将吊挂部件33向下方陆续送出而使保持部23下降,从而使物品3载置于目的位置。
另外,在高空输送车12通过横向移动机构28接受物品3的情况下,在横向移动机构28使升降驱动部27向+X侧移动的状态下,升降驱动部27通过将吊挂部件33向下方陆续送出而使保持部23下降,通过保持部23把持物品3的凸缘部22。另外,升降驱动部27通过卷取吊挂部件33而使物品3上升至规定的高度。在物品3上升至规定的高度的状态下,横向移动机构28的驱动部使上板36相对于固定部35向-X侧移动,使下板37相对于上板36向-X侧移动。由此,横向移动机构28使被下板37支承的升降驱动部27向目的位置移动,将被升降驱动部27的保持部23保持的物品3收容于罩30之间的收容空间SP。
接下来,参照图1和图4对储物架13进行说明。图4是表示储物架的立体图。如图1所示,储物架13在自身与装载端口4之间具有间隙、或者与装载端口4接触地与装载端口4邻接配置。储物架13相对于装载端口4而设置于-Y侧和+Y侧中至少一侧,例如配置于装载端口4之间。在图4中,与装载端口4邻接地设置有两个储物架13,但储物架13的数量可以是一个,也可以是三个以上。另外,储物架13与多个装载端口4中至少一个并列设置即可,也可以存在未并列设置有储物架13的装载端口4。
储物架13具备多个架(41、42)(参照图4)。架41、42沿铅垂方向(Z方向)排列。架41是储物架13中的最上层的架,架42是比架41靠下方(-Z侧)的架。最上层的架41是储物架13的顶板部,并向上方敞开。最上层的架41设置于第一轨道11的正下方,与处理装置2的装载端口4同样,高空输送车12能够与最上层的架41进行物品3的交接。最上层的架41能够作为对高空输送车12所输送的物品3暂时进行保管的暂存区(例,UTB;轨道下暂存区)而利用。储物架13所具备的架的数量是2以上的任意数。例如,在图4中,对于储物架13所具备的架的数量而言,最上层的架41为一个且架42为四个从而合计为五个,但也可以最上层的架41为一个且架42为一个而合计为两个,架42的数量也可以为2以上。
此外,储物架13也可以不将其顶板部作为架41而利用,该情况下,将架42的数量设定为2以上。另外,输送系统1A也可以在储物架13的上方具备UTB(轨道下暂存区)。在图4中,架41、42分别能够在Y方向上排列载置三个物品3,但能够载置于一个架的物品3的数量可以是一个,也可以是2以上的任意数。
接下来,参照图1,对第二轨道14和起重机15进行说明。第二轨道14其至少局部与第一轨道11几乎平行地设置。例如,也可以是,第二轨道14沿着装载端口4和储物架13铺设的部分与第一轨道11几乎平行,其他部分不与第一轨道11平行。例如,第二轨道14可以是跑道状(长圆状)的环绕轨道,也可以是其直线部与第一轨道11几乎平行。第二轨道14铺设于图1的(B)中地板面43,但也可以铺设于顶棚18。
起重机15能够在第二轨道14上行驶,分别与装载端口4和储物架13进行物品3的交接。起重机15能够在X方向、Y方向和Z方向各方向上输送物品3。如图1的(B)所示,起重机15具备行驶转向架45、支承柱46、升降部47、移载部48以及控制部49。
行驶转向架45例如具有多个车轮(未图示),并沿着第二轨道14在水平方向(Y方向)上移动。支承柱46是桅杆等,并从行驶转向架45的上表面沿铅垂方向(Z方向)延伸。支承柱46固定于行驶转向架45,并被行驶转向架45支承。支承柱46也被设置于顶棚18的引导50支承,与行驶转向架45一起沿Y方向移动。升降部47被支承柱46支承,并能够沿着支承柱46在Z方向上滑动。移载部48(参照图1的(A))例如具备多关节的臂部51、和设置于臂部51的末端侧的保持部52。
移载部48通过在关节处使臂部51折弯,从而使保持部52能够沿水平方向(X方向和Y方向)移动。移载部48通过保持部52来保持物品3的凸缘部22(参照图2)。保持部52例如是U字状,移载部48通过使保持部52插入凸缘部22的板状部25的下方,从而保持物品3。另外,移载部48通过在利用保持部52保持着物品3的状态下使升降部47升降,从而使物品3升降。另外,移载部48在通过保持部23保持着物品3的状态下,在关节处使臂部51折弯,从而能够使物品3在保持部52的可动范围内沿X方向移动。此外,上述的移载部48是一个例子,也可以是其他结构。另外,起重机15在保持部52保持着物品3的状态下,行驶转向架45沿Y方向行驶,从而使物品3沿Y方向移动。此外,移载部48可以采用支承物品3的底面而输送物品3的结构,也可以采用把持物品3的侧面而进行输送的结构。
起重机15能够从装载端口4接受物品3,并将该物品3向储物架13的架41或架42交付。另外,起重机15能够从储物架13的架41或架42接受物品3,并将该物品3向装载端口4交付。另外,起重机15也能够从储物架13的一个架(例,最上层的架41)向其他的架(例,下方的架42)移载物品3。控制部49控制起重机15的各部分。控制部49对行驶转向架45进行控制而使行驶转向架行驶或者停止行驶。另外,控制部49控制升降部47和移载部48,而使保持部52移动至目标位置,从而执行通过保持部52来保持物品3、以及使被保持部52保持的物品3载置于规定的位置。
接下来,参照图1、图5,对第一暂存区16和第二暂存区17进行说明。图5是表示第一暂存区16和第二暂存区17的概念图。第一暂存区16例如是STB(轨道侧暂存区),如图1的(A)所示,设置于第一轨道11的侧方(+X侧)。第一暂存区16例如用于暂时保管等待向装载端口4搬入的物品3、或者等待由高空输送车12开始输送的物品3。第一暂存区16配置于高空输送车12能够使用横向移动机构28(参照图3)来进行物品3的交接的位置。
如图5所示,第一暂存区16具备支承部55和载置部56。支承部55例如固定于顶棚18,并从顶棚18向下方延伸。支承部55例如为侧板状,但也可以是柱状等其他形状。载置部56固定于支承部55的下端侧,物品3载置于载置部56的上表面。载置部56配置得比高空输送车12在收容空间SP内保持物品3的位置靠下方(参照图1的(B))。第二暂存区17是与第一暂存区16相同的结构,且与第一暂存区16邻接设置。第二暂存区17配置于起重机15能够进行物品3的交接的位置。另外,第二暂存区17配置于高空输送车12能够使用横向移动机构28来进行物品3的交接的位置。此外,输送系统1A也可以不具备第二暂存区17。
高空输送车12在通过横向移动机构28(参照图3)将物品3向第一暂存区16交付的情况下,通过横向移动机构28使升降驱动部27向+X侧移动,使升降驱动部27配置于第一暂存区16的正上方。在该状态下,升降驱动部27通过使吊挂部件33向下方陆续送出而使物品3下降,将物品3载置于载置部56。另外,高空输送车12在通过横向移动机构28(参照图3)从第一暂存区16接受物品3的情况下,通过横向移动机构28使升降驱动部27向+X侧移动,使升降驱动部27配置于第一暂存区16的正上方。在该状态下,升降驱动部27通过使吊挂部件33向下方陆续送出而使保持部23下降,通过保持部23来把持物品3的凸缘部22。另外,升降驱动部27通过卷取吊挂部件33而使物品3上升至规定的高度。横向移动机构28在物品3上升至规定的高度的状态下使升降驱动部27向-X侧移动,将物品3收容于罩30之间的收容空间SP。
另外,高空输送车12也能够在停止了行驶的状态下在装载端口4和第一暂存区16间移载物品3。高空输送车12被控制部29控制,在装载端口4的正上方停止行驶后,使用横向移动机构28,将载置于第一暂存区16的物品3收容于收容空间SP。而且,高空输送车12被控制部29控制,从收容空间SP向正下方吊挂物品3,从而将该物品3载置于装载端口4。高空输送车12同样也能够在从装载端口4向收容空间SP吊起物品3后,使用横向移动机构28,使该物品3载置于第一暂存区16。
另外,第一暂存区16配置于在与装载端口4进行物品3的交接的位置处停止了行驶的起重机15能够进行物品3的交接的位置。图5的附图标记P1是起重机15与装载端口4进行物品3的交接时的起重机15的行驶停止位置。第一暂存区16配置于在位置P1处停止了行驶的起重机15能够进行物品3的交接的位置。即,起重机15也能够在位置P1处停止了行驶的状态下,执行从装载端口4接受物品3、向装载端口4交付物品3、从第一暂存区16接受物品3、以及向第一暂存区16交付物品3中的任一个动作。
起重机15例如为了在装载端口4载置有物品3的状态下,空出高空输送车12向装载端口4搬入物品3的空间,而在位置P1处停止了行驶的状态下从装载端口4向第一暂存区16移载物品3。此时,控制部49控制行驶转向架45而使行驶转向架45在位置P1处停止行驶。另外,控制部49在行驶转向架45在位置P1处停止了行驶的状态下,控制升降部47和移载部48,使保持部52向载置于装载端口4的物品3的位置移动,并使保持部52保持物品3。另外,控制部49控制升降部47和移载部48,而一边抬起物品3一边使其沿水平方向移动,将物品3保持在升降部47的上方。另外,控制部49在通过升降部47使物品3上升至第一暂存区16的高度后,控制升降部47和移载部48而使物品3载置于第一暂存区16的载置部56。
另外,起重机15例如为了在装载端口4未载置有物品3的状态下,供给处理装置2所处理的物品3,而从第一暂存区16向装载端口4移载物品3。控制部49例如通过以与从装载端口4向第一暂存区16移载物品3时相反的顺序使起重机15的各部分动作,从而能够使物品3从第一暂存区16向装载端口4移载。这样,起重机15即使不使行驶转向架45行驶,也能够从装载端口4向第一暂存区16移载物品3。因此,输送系统1A能够在省去移载物品3时使行驶转向架45移动所需要的时间,从而能够迅速地交接物品3。
图6是表示移载部48的动作和第一暂存区16的位置的图。在移载部48中,臂部51通过连杆机构等而折弯,从而能够使保持部52沿与第二轨道14垂直的方向(X方向)移动,并使保持部52相对于装载端口4进退。以下,在移载部48移载容器3时,将连结移载源的位置与移载目的地的位置的方向称为移载方向。在图6中,移载方向是几乎与第二轨道14垂直的方向(X方向)。
图6的(A)是臂部51伸长而使保持部52在装载端口4上进出的状态,保持部52对装载端口4上的容器3的凸缘部22进行保持。另外,图6的(B)是臂部51收缩而使保持部52从装载端口4退避的状态,保持部52对第一暂存区16上的容器3的凸缘部22进行保持。在图6的(B)中,附图标记AR1是与第二轨道14平行的方向(Y方向)上的装载端口4上的容器3的范围。另外,附图标记AR2是在与第二轨道14平行的方向(Y方向)上能够在第一暂存区16载置容器3的范围。设定第一暂存区16的位置,以使得范围AR1落入范围AR2。另外,第一暂存区16配置于在与第二轨道14垂直的方向(X方向)上移载部48能够移载容器3的范围AR3内。
此外,在装载端口4存在多个容器3的载置位置的情况下,第一暂存区16与多个载置位置中的至少一个位置对应设置即可。例如,如图1那样,在载置位置为两处的情况下,第一暂存区16也可以能够载置两个以上容器3,以便能够将容器3分别从两处载置位置移载。另外,第一暂存区16也可以分别设置于能够从一个载置位置移载容器3的位置、和能够从另一个载置位置移载容器3的位置。另外,也可以是,第一暂存区16设置于能够从一个载置位置移载容器3的位置,而未设置于能够从另一个载置位置移载容器3的位置。
[第二实施方式]
对第二实施方式进行说明。在本实施方式中,对与上述的实施方式相同的结构,标注相同的附图标记而省略其说明或简化其说明。图7是表示本实施方式的输送系统的图。对于输送系统1B而言,在处理装置2的装载端口4与第一轨道11间的位置关系、第一暂存区16与第一轨道11间的位置关系上,和第一实施方式不同。第一轨道11铺设于从装载端口4的正上方向X方向偏离的位置。第一轨道11相对于装载端口4而配置于与第二轨道14相同侧。第一轨道11铺设为在第一暂存区16的正上方通过。第一暂存区16、第二暂存区17例如是UTB(轨道下暂存区)。第一暂存区16设置为不妨碍第一轨道11的高空输送车12的行驶。如图7的(B)所示,第一暂存区16在相对于高空输送车12而靠X方向的外侧的部分安装于顶棚18,但也可以设置于被地板面43支承的框架等。
高空输送车12在与第一暂存区16进行物品3的交接时,在第一暂存区16的正上方停止行驶,相对于收容空间SP而使物品3向正下方升降。在本实施方式中,高空输送车12的横向移动机构28能够使升降驱动部27(参照图3)向-X侧移动。高空输送车12在与装载端口4进行物品3的交接时,在第一暂存区16的正上方停止行驶,通过横向移动机构28使升降驱动部27向装载端口4的正上方移动,并使物品3升降。高空输送车12也能够在第一暂存区16的正上方处停止了行驶的状态下,与第一暂存区16进行物品3的交接、以及与装载端口4进行物品的交接。由此,高空输送车12也能够在行驶停止的状态下在装载端口4与第一暂存区16间移载物品3。此外,输送系统1B也可以具备:高空输送车12能够使用横向移动机构28进行物品3的交接的STB。
[第三实施方式]
对第三实施方式进行说明。在本实施方式中,对与上述的实施方式相同的结构标注相同的附图标记并省略或简化其说明。图8是表示本实施方式的输送系统的图。对于输送系统1C而言,在处理装置2的装载端口4与第一轨道11间的位置关系、和第一暂存区16与起重机15间的位置关系上,同第一实施方式、第二实施方式不同。第一轨道11铺设于从装载端口4的正上方向X方向偏离的位置。第一轨道11相对于装载端口4而配置于与第二轨道14相反一侧。第一轨道11铺设于处理装置2的上方,以使第一轨道11上的高空输送车12能够通过横向移动机构28而与装载端口4进行物品3的交接。第一暂存区16例如是UTB(轨道下暂存区),并配置于第一轨道11的正下方。这样的输送系统1C利用处理装置2的上方的空间,因此能够在X方向上省空间。此外,输送系统1C也可以具备:高空输送车12能够使用横向移动机构28来进行物品3的交接的STB。
此外,本发明的技术范围不限定于上述的实施方式等所说明的方式。有将上述的实施方式等所说明的要件的一个以上省略的情况。另外,能够将上述的实施方式等所说明的技术特征适当地组合。另外,只要法条允许,则引用日本专利申请的特愿2016-126180和本说明书中引用的所有的文献的公开而成为正文的记载的一部分。
附图标记说明
1A、1B、1C...输送系统;2...处理装置;3...物品;4...装载端口;11...第一轨道;12...高空输送车;13...储物架;14...第二轨道;15...起重机;16...第一暂存区;17...第二暂存区。
Claims (10)
1.一种输送系统,其特征在于,具备:
高空输送车,其在第一轨道上行驶,并能够与处理装置的装载端口进行物品的交接;
储物架,其沿铅垂方向排列有多个收纳所述物品的架;
起重机,其在与所述第一轨道平行的第二轨道上行驶,并能够分别与所述装载端口和所述储物架进行所述物品的交接;以及
第一暂存区,其独立于所述储物架,并配置于在与所述装载端口进行所述物品的交接的位置处停止了行驶的所述起重机能够进行所述物品的交接的位置。
2.根据权利要求1所述的输送系统,其特征在于,
所述高空输送车具备:使所述物品沿水平方向移动的横向移动机构,
所述第一暂存区配置于所述高空输送车能够使用所述横向移动机构进行所述物品的交接的位置。
3.根据权利要求2所述的输送系统,其特征在于,
所述第一暂存区配置于在与所述装载端口进行所述物品的交接的位置处停止了行驶的所述高空输送车能够使用所述横向移动机构进行所述物品的交接的位置。
4.根据权利要求1~3中任一项所述的输送系统,其特征在于,
具备第二暂存区,该第二暂存区与所述第一暂存区邻接,且能够供所述起重机进行所述物品的交接。
5.根据权利要求4所述的输送系统,其特征在于,
所述高空输送车具备:使所述物品沿水平方向移动的横向移动机构,
所述第二暂存区配置于所述高空输送车能够使用所述横向移动机构进行所述物品的交接的位置。
6.根据权利要求1~3、5中任一项所述的输送系统,其特征在于,
所述储物架与所述处理装置邻接配置,
所述高空输送车能够与所述储物架的多个架中的最上层的架进行所述物品的交接。
7.根据权利要求4所述的输送系统,其特征在于,
所述储物架与所述处理装置邻接配置,
所述高空输送车能够与所述储物架的多个架中的最上层的架进行所述物品的交接。
8.根据权利要求1~3、5、7中任一项所述的输送系统,其特征在于,
所述第一轨道设置于所述装载端口的正上方。
9.根据权利要求4所述的输送系统,其特征在于,
所述第一轨道设置于所述装载端口的正上方。
10.根据权利要求6所述的输送系统,其特征在于,
所述第一轨道设置于所述装载端口的正上方。
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CN108792472A (zh) * | 2018-06-27 | 2018-11-13 | 上海新创达智能科技有限公司 | 一种新型的架空运输系统 |
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JP4539124B2 (ja) * | 2004-03-04 | 2010-09-08 | 凸版印刷株式会社 | パターン形成方法及びパターン形成装置 |
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