DE602005012891D1 - Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht - Google Patents

Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht

Info

Publication number
DE602005012891D1
DE602005012891D1 DE602005012891T DE602005012891T DE602005012891D1 DE 602005012891 D1 DE602005012891 D1 DE 602005012891D1 DE 602005012891 T DE602005012891 T DE 602005012891T DE 602005012891 T DE602005012891 T DE 602005012891T DE 602005012891 D1 DE602005012891 D1 DE 602005012891D1
Authority
DE
Germany
Prior art keywords
layer
sputtering target
optical disk
silver alloy
reflection layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602005012891T
Other languages
German (de)
English (en)
Inventor
Yuuki Tauchi
Junichi Nakai
Katsutoshi Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of DE602005012891D1 publication Critical patent/DE602005012891D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/007—Arrangement of the information on the record carrier, e.g. form of tracks, actual track shape, e.g. wobbled, or cross-section, e.g. v-shaped; Sequential information structures, e.g. sectoring or header formats within a track
    • G11B7/00736—Auxiliary data, e.g. lead-in, lead-out, Power Calibration Area [PCA], Burst Cutting Area [BCA], control information
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
DE602005012891T 2004-07-15 2005-06-30 Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht Expired - Lifetime DE602005012891D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004208686 2004-07-15
JP2005067262A JP3907666B2 (ja) 2004-07-15 2005-03-10 レーザーマーキング用再生専用光情報記録媒体

Publications (1)

Publication Number Publication Date
DE602005012891D1 true DE602005012891D1 (de) 2009-04-09

Family

ID=35241160

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005012891T Expired - Lifetime DE602005012891D1 (de) 2004-07-15 2005-06-30 Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht

Country Status (8)

Country Link
US (1) US7695790B2 (enExample)
EP (3) EP2043097A1 (enExample)
JP (1) JP3907666B2 (enExample)
KR (1) KR100720203B1 (enExample)
AT (1) ATE424025T1 (enExample)
DE (1) DE602005012891D1 (enExample)
SG (1) SG119296A1 (enExample)
TW (1) TWI327602B (enExample)

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JP4527624B2 (ja) * 2005-07-22 2010-08-18 株式会社神戸製鋼所 Ａｇ合金反射膜を有する光情報媒体
JP2007035104A (ja) * 2005-07-22 2007-02-08 Kobe Steel Ltd 光情報記録媒体用Ａｇ合金反射膜、光情報記録媒体および光情報記録媒体用Ａｇ合金反射膜の形成用のＡｇ合金スパッタリングターゲット
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US8092889B2 (en) * 2006-08-28 2012-01-10 Kobe Steel, Ltd. Silver alloy reflective film for optical information storage media, optical information storage medium, and sputtering target for the deposition of silver alloy reflective film for optical information storage media
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JP4694543B2 (ja) * 2007-08-29 2011-06-08 株式会社コベルコ科研 Ａｇ基合金スパッタリングターゲット、およびその製造方法
JP4833942B2 (ja) * 2007-08-29 2011-12-07 株式会社コベルコ科研 Ａｇ基合金スパッタリングターゲット
JP2009076129A (ja) * 2007-09-19 2009-04-09 Kobe Steel Ltd 読み出し専用の光情報記録媒体
US8399100B2 (en) * 2007-09-25 2013-03-19 Kobe Steel, Ltd. Reflection film, reflection film laminate, LED, organic EL display, and organic EL illuminating instrument
JP5046890B2 (ja) * 2007-11-29 2012-10-10 株式会社コベルコ科研 Ａｇ系スパッタリングターゲット
JP2010049736A (ja) * 2008-08-21 2010-03-04 Taiyo Yuden Co Ltd 光情報記録媒体
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JP5719179B2 (ja) * 2010-01-25 2015-05-13 株式会社神戸製鋼所 反射膜積層体
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Also Published As

Publication number Publication date
KR100720203B1 (ko) 2007-05-21
EP1617427A3 (en) 2006-03-15
KR20060050179A (ko) 2006-05-19
EP1617427B1 (en) 2009-02-25
US20060013988A1 (en) 2006-01-19
TWI327602B (en) 2010-07-21
EP2077556A1 (en) 2009-07-08
SG119296A1 (en) 2006-02-28
JP2006054032A (ja) 2006-02-23
ATE424025T1 (de) 2009-03-15
US7695790B2 (en) 2010-04-13
EP1617427A2 (en) 2006-01-18
EP2043097A1 (en) 2009-04-01
TW200622011A (en) 2006-07-01
JP3907666B2 (ja) 2007-04-18

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