DE602005012891D1 - Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht - Google Patents

Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht

Info

Publication number
DE602005012891D1
DE602005012891D1 DE602005012891T DE602005012891T DE602005012891D1 DE 602005012891 D1 DE602005012891 D1 DE 602005012891D1 DE 602005012891 T DE602005012891 T DE 602005012891T DE 602005012891 T DE602005012891 T DE 602005012891T DE 602005012891 D1 DE602005012891 D1 DE 602005012891D1
Authority
DE
Germany
Prior art keywords
layer
sputtering target
optical disk
silver alloy
reflection layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005012891T
Other languages
English (en)
Inventor
Yuuki Tauchi
Junichi Nakai
Katsutoshi Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of DE602005012891D1 publication Critical patent/DE602005012891D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/259Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26Apparatus or processes specially adapted for the manufacture of record carriers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/007Arrangement of the information on the record carrier, e.g. form of tracks, actual track shape, e.g. wobbled, or cross-section, e.g. v-shaped; Sequential information structures, e.g. sectoring or header formats within a track
    • G11B7/00736Auxiliary data, e.g. lead-in, lead-out, Power Calibration Area [PCA], Burst Cutting Area [BCA], control information
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/21Circular sheet or circular blank

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
DE602005012891T 2004-07-15 2005-06-30 Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht Active DE602005012891D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004208686 2004-07-15
JP2005067262A JP3907666B2 (ja) 2004-07-15 2005-03-10 レーザーマーキング用再生専用光情報記録媒体

Publications (1)

Publication Number Publication Date
DE602005012891D1 true DE602005012891D1 (de) 2009-04-09

Family

ID=35241160

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005012891T Active DE602005012891D1 (de) 2004-07-15 2005-06-30 Reflexionsschicht aus einer Silberlegierung, Sputter Target dafür, und optischer Datenträger mit einer solchen Schicht

Country Status (8)

Country Link
US (1) US7695790B2 (de)
EP (3) EP1617427B1 (de)
JP (1) JP3907666B2 (de)
KR (1) KR100720203B1 (de)
AT (1) ATE424025T1 (de)
DE (1) DE602005012891D1 (de)
SG (1) SG119296A1 (de)
TW (1) TWI327602B (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004001093A1 (ja) * 2002-06-24 2003-12-31 Kobelco Research Institute, Inc. 銀合金スパッタリングターゲットとその製造方法
US7514037B2 (en) * 2002-08-08 2009-04-07 Kobe Steel, Ltd. AG base alloy thin film and sputtering target for forming AG base alloy thin film
JP3993530B2 (ja) * 2003-05-16 2007-10-17 株式会社神戸製鋼所 Ag−Bi系合金スパッタリングターゲットおよびその製造方法
JP2006294195A (ja) * 2005-04-14 2006-10-26 Kobe Steel Ltd 光情報記録用Ag合金反射膜、光情報記録媒体および光情報記録用Ag合金反射膜の形成用のAg合金スパッタリングターゲット
JP2007035104A (ja) * 2005-07-22 2007-02-08 Kobe Steel Ltd 光情報記録媒体用Ag合金反射膜、光情報記録媒体および光情報記録媒体用Ag合金反射膜の形成用のAg合金スパッタリングターゲット
JP4377861B2 (ja) * 2005-07-22 2009-12-02 株式会社神戸製鋼所 光情報記録媒体用Ag合金反射膜、光情報記録媒体および光情報記録媒体用Ag合金反射膜の形成用のAg合金スパッタリングターゲット
JP4527624B2 (ja) * 2005-07-22 2010-08-18 株式会社神戸製鋼所 Ag合金反射膜を有する光情報媒体
JP4377877B2 (ja) 2005-12-21 2009-12-02 ソニー株式会社 光情報記録媒体用Ag合金反射膜、光情報記録媒体および光情報記録媒体用Ag合金反射膜の形成用のAg合金スパッタリングターゲット
JP2007335061A (ja) 2006-05-16 2007-12-27 Sony Corp 光情報記録媒体とそのBCA(BurstCuttingArea)マーキング方法
JP2008021393A (ja) * 2006-07-14 2008-01-31 Mitsubishi Kagaku Media Co Ltd 光記録媒体およびディスク媒体認識信号の記録方法
WO2008026601A1 (fr) * 2006-08-28 2008-03-06 Kabushiki Kaisha Kobe Seiko Sho FILM RÉFLÉCHISSANT EN ALLIAGE Ag POUR SUPPORT D'ENREGISTREMENT D'INFORMATIONS OPTIQUE, SUPPORT D'ENREGISTREMENT D'INFORMATIONS OPTIQUE ET CIBLE DE PULVÉRISATION POUR FILM RÉFLÉCHISSANT EN ALLIAGE Ag POUR FORMATION DE SUPPORT D'ENREGISTREMENT D'INFORMATIONS OPTIQUE
JP2008117470A (ja) * 2006-11-02 2008-05-22 Sony Corp 光情報記録媒体および光情報記録媒体の製造方法、BCA(BurstCuttingArea)マーキング方法
JP4540687B2 (ja) * 2007-04-13 2010-09-08 株式会社ソニー・ディスクアンドデジタルソリューションズ 読み出し専用の光情報記録媒体
JP4694543B2 (ja) * 2007-08-29 2011-06-08 株式会社コベルコ科研 Ag基合金スパッタリングターゲット、およびその製造方法
JP4833942B2 (ja) * 2007-08-29 2011-12-07 株式会社コベルコ科研 Ag基合金スパッタリングターゲット
JP2009076129A (ja) * 2007-09-19 2009-04-09 Kobe Steel Ltd 読み出し専用の光情報記録媒体
CN101809467B (zh) * 2007-09-25 2012-12-12 株式会社神户制钢所 反射膜、反射膜层叠体、led、有机el显示器及有机el照明器具
JP5046890B2 (ja) * 2007-11-29 2012-10-10 株式会社コベルコ科研 Ag系スパッタリングターゲット
JP2010049736A (ja) * 2008-08-21 2010-03-04 Taiyo Yuden Co Ltd 光情報記録媒体
JP5331420B2 (ja) 2008-09-11 2013-10-30 株式会社神戸製鋼所 読み出し専用の光情報記録媒体および該光情報記録媒体の半透過反射膜形成用スパッタリングターゲット
JP2010225572A (ja) * 2008-11-10 2010-10-07 Kobe Steel Ltd 有機elディスプレイ用の反射アノード電極および配線膜
WO2010089882A1 (ja) 2009-02-06 2010-08-12 Dewaki Kenji 銀含有合金メッキ浴、およびこれを用いた電解メッキ方法
US8530023B2 (en) 2009-04-14 2013-09-10 Kobe Steel, Ltd. Optical information recording medium and sputtering target for forming reflective film for optical information recording medium
JP4531128B1 (ja) 2009-07-31 2010-08-25 謙治 出分 スズ含有合金メッキ浴、これを用いた電解メッキ方法および該電解メッキが堆積された基体
JP5719179B2 (ja) * 2010-01-25 2015-05-13 株式会社神戸製鋼所 反射膜積層体
KR101432362B1 (ko) 2011-06-29 2014-08-20 후지쯔 콤포넌트 가부시끼가이샤 프린터 장치
JP2013077547A (ja) * 2011-09-15 2013-04-25 Mitsubishi Materials Corp 導電性膜及びその製造方法並びに導電性膜形成用銀合金スパッタリングターゲット及びその製造方法
JP5159962B1 (ja) * 2012-01-10 2013-03-13 三菱マテリアル株式会社 導電性膜形成用銀合金スパッタリングターゲットおよびその製造方法
JP5159963B1 (ja) * 2012-01-13 2013-03-13 三菱マテリアル株式会社 導電性膜形成用銀合金スパッタリングターゲットおよびその製造方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US292662A (en) * 1884-01-29 Centrifugal creamer
US293072A (en) * 1884-02-05 Fire-escape
US292651A (en) * 1884-01-29 Refuse attachment for table-plates
US274205A (en) * 1883-03-20 Straw-stacker
US4998239A (en) * 1987-10-07 1991-03-05 The Dow Chemical Company Optical information recording medium containing a metal alloy as a reflective material
US5948497A (en) 1992-10-19 1999-09-07 Eastman Kodak Company High stability silver based alloy reflectors for use in a writable compact disk
JP3404165B2 (ja) 1994-03-30 2003-05-06 日本板硝子株式会社 熱線遮蔽ガラス
CN1190785C (zh) * 1996-09-24 2005-02-23 富士写真菲林株式会社 光信息记录盘
US6007889A (en) 1998-06-22 1999-12-28 Target Technology, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US6852384B2 (en) 1998-06-22 2005-02-08 Han H. Nee Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
US6544616B2 (en) 2000-07-21 2003-04-08 Target Technology Company, Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
JP2000169959A (ja) 1998-12-04 2000-06-20 Japan Energy Corp 光ディスク反射膜形成用スパッタリングターゲット
JP4433654B2 (ja) * 1999-07-22 2010-03-17 ソニー株式会社 光記録媒体
JP3365762B2 (ja) 2000-04-28 2003-01-14 株式会社神戸製鋼所 光情報記録媒体用の反射層または半透明反射層、光情報記録媒体及び光情報記録媒体用スパッタリングターゲット
US7018696B2 (en) * 2003-04-18 2006-03-28 Target Technology Company Llc Metal alloys for the reflective or the semi-reflective layer of an optical storage medium
SG116432A1 (en) 2000-12-26 2005-11-28 Kobe Steel Ltd Reflective layer or semi-transparent reflective layer for use in optical information recording media, optical information recording media and sputtering target for use in the optical information recording media.
US7465424B2 (en) 2001-03-16 2008-12-16 Ishifuku Metal Industry Co., Ltd. Sputtering target material
TW583323B (en) 2001-08-20 2004-04-11 Cosmos Vacuum Technology Corp Manufacturing process of depositing anti-reflection film at room temperature and low reflectivity polarizer manufactured by the same
JP3772972B2 (ja) 2001-11-26 2006-05-10 三菱マテリアル株式会社 光記録媒体の反射層形成用銀合金スパッタリングターゲット
KR100491931B1 (ko) 2002-01-25 2005-05-30 가부시키가이샤 고베 세이코쇼 반사 필름, 반사형 액정 표시소자 및 상기 반사 필름을형성하기 위한 스퍼터링 타겟
WO2004001093A1 (ja) 2002-06-24 2003-12-31 Kobelco Research Institute, Inc. 銀合金スパッタリングターゲットとその製造方法
AU2003248890A1 (en) 2002-07-08 2004-01-23 Academy Corporation Reflective or semi-reflective metal alloy coatings
US7514037B2 (en) * 2002-08-08 2009-04-07 Kobe Steel, Ltd. AG base alloy thin film and sputtering target for forming AG base alloy thin film
JP3655907B2 (ja) 2002-08-20 2005-06-02 株式会社神戸製鋼所 光情報記録媒体用反射膜と半透過反射膜、および光情報記録媒体
JP3993530B2 (ja) 2003-05-16 2007-10-17 株式会社神戸製鋼所 Ag−Bi系合金スパッタリングターゲットおよびその製造方法
JP4009564B2 (ja) * 2003-06-27 2007-11-14 株式会社神戸製鋼所 リフレクター用Ag合金反射膜、及び、このAg合金反射膜を用いたリフレクター、並びに、このAg合金反射膜のAg合金薄膜の形成用のAg合金スパッタリングターゲット
JP2005029849A (ja) * 2003-07-07 2005-02-03 Kobe Steel Ltd リフレクター用Ag合金反射膜、及び、このAg合金反射膜を用いたリフレクター、並びに、このAg合金反射膜の形成用のAg合金スパッタリングターゲット
US20050112019A1 (en) * 2003-10-30 2005-05-26 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Aluminum-alloy reflection film for optical information-recording, optical information-recording medium, and aluminum-alloy sputtering target for formation of the aluminum-alloy reflection film for optical information-recording
TWI325134B (en) 2004-04-21 2010-05-21 Kobe Steel Ltd Semi-reflective film and reflective film for optical information recording medium, optical information recording medium, and sputtering target

Also Published As

Publication number Publication date
KR20060050179A (ko) 2006-05-19
SG119296A1 (en) 2006-02-28
EP2043097A1 (de) 2009-04-01
EP1617427A3 (de) 2006-03-15
TWI327602B (en) 2010-07-21
TW200622011A (en) 2006-07-01
EP1617427B1 (de) 2009-02-25
JP2006054032A (ja) 2006-02-23
EP2077556A1 (de) 2009-07-08
EP1617427A2 (de) 2006-01-18
US7695790B2 (en) 2010-04-13
JP3907666B2 (ja) 2007-04-18
KR100720203B1 (ko) 2007-05-21
US20060013988A1 (en) 2006-01-19
ATE424025T1 (de) 2009-03-15

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