ATE379836T1 - Halbreflektierende und reflektierende schicht für ein optisches informationsaufzeichnungsmedium, informationsaufzeichnungsmedium, und sputter target - Google Patents

Halbreflektierende und reflektierende schicht für ein optisches informationsaufzeichnungsmedium, informationsaufzeichnungsmedium, und sputter target

Info

Publication number
ATE379836T1
ATE379836T1 AT05013364T AT05013364T ATE379836T1 AT E379836 T1 ATE379836 T1 AT E379836T1 AT 05013364 T AT05013364 T AT 05013364T AT 05013364 T AT05013364 T AT 05013364T AT E379836 T1 ATE379836 T1 AT E379836T1
Authority
AT
Austria
Prior art keywords
recording medium
information recording
semi
reflective film
based alloy
Prior art date
Application number
AT05013364T
Other languages
English (en)
Inventor
Katsutoshi Takagi
Yuuki Tauchi
Junichi Nakai
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Application granted granted Critical
Publication of ATE379836T1 publication Critical patent/ATE379836T1/de

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/259—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on silver
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/06—Alloys based on silver
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/20—Metallic material, boron or silicon on organic substrates
    • C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/2403—Layers; Shape, structure or physical properties thereof
    • G11B7/24035—Recording layers
    • G11B7/24038—Multiple laminated recording layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/21—Circular sheet or circular blank

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
AT05013364T 2004-06-29 2005-06-21 Halbreflektierende und reflektierende schicht für ein optisches informationsaufzeichnungsmedium, informationsaufzeichnungsmedium, und sputter target ATE379836T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004190704 2004-06-29

Publications (1)

Publication Number Publication Date
ATE379836T1 true ATE379836T1 (de) 2007-12-15

Family

ID=34937582

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05013364T ATE379836T1 (de) 2004-06-29 2005-06-21 Halbreflektierende und reflektierende schicht für ein optisches informationsaufzeichnungsmedium, informationsaufzeichnungsmedium, und sputter target

Country Status (8)

Country Link
US (1) US7507458B2 (de)
EP (1) EP1612784B1 (de)
KR (1) KR100789059B1 (de)
CN (1) CN100416681C (de)
AT (1) ATE379836T1 (de)
DE (1) DE602005003508T2 (de)
SG (1) SG118417A1 (de)
TW (1) TW200614187A (de)

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EP1612784B1 (de) 2004-06-29 2007-11-28 Kabushiki Kaisha Kobe Seiko Sho Halbreflektierende und reflektierende Schicht für ein optisches Informationsaufzeichnungsmedium, Informationsaufzeichnungsmedium, und Sputter Target
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EP2048664A1 (de) * 2006-11-17 2009-04-15 Tanaka Kikinzoku Kogyo K.K. Dünnfilm für einen reflektionsfilm oder halbtransparenten reflektionsfilm, sputter-target und optisches aufzeichnungsmedium
JP4540687B2 (ja) * 2007-04-13 2010-09-08 株式会社ソニー・ディスクアンドデジタルソリューションズ 読み出し専用の光情報記録媒体
JP4694543B2 (ja) * 2007-08-29 2011-06-08 株式会社コベルコ科研 Ａｇ基合金スパッタリングターゲット、およびその製造方法
JP4833942B2 (ja) * 2007-08-29 2011-12-07 株式会社コベルコ科研 Ａｇ基合金スパッタリングターゲット
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JP5046890B2 (ja) * 2007-11-29 2012-10-10 株式会社コベルコ科研 Ａｇ系スパッタリングターゲット
JP5331420B2 (ja) 2008-09-11 2013-10-30 株式会社神戸製鋼所 読み出し専用の光情報記録媒体および該光情報記録媒体の半透過反射膜形成用スパッタリングターゲット
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EP1612784B1 (de) 2004-06-29 2007-11-28 Kabushiki Kaisha Kobe Seiko Sho Halbreflektierende und reflektierende Schicht für ein optisches Informationsaufzeichnungsmedium, Informationsaufzeichnungsmedium, und Sputter Target

Also Published As

Publication number Publication date
US7507458B2 (en) 2009-03-24
CN100416681C (zh) 2008-09-03
CN1725334A (zh) 2006-01-25
DE602005003508T2 (de) 2008-10-23
EP1612784B1 (de) 2007-11-28
TW200614187A (en) 2006-05-01
DE602005003508D1 (de) 2008-01-10
KR20060048628A (ko) 2006-05-18
SG118417A1 (en) 2006-01-27
KR100789059B1 (ko) 2007-12-26
US20050287333A1 (en) 2005-12-29
EP1612784A1 (de) 2006-01-04

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