DE602004013154D1 - Reinigungs- bzw. spülverfahren - Google Patents

Reinigungs- bzw. spülverfahren

Info

Publication number
DE602004013154D1
DE602004013154D1 DE602004013154T DE602004013154T DE602004013154D1 DE 602004013154 D1 DE602004013154 D1 DE 602004013154D1 DE 602004013154 T DE602004013154 T DE 602004013154T DE 602004013154 T DE602004013154 T DE 602004013154T DE 602004013154 D1 DE602004013154 D1 DE 602004013154D1
Authority
DE
Germany
Prior art keywords
rinsing
cleaning
article
contacting
formula
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE602004013154T
Other languages
English (en)
Other versions
DE602004013154T2 (de
Inventor
Tsuyoshi Hanada
Hidekazu Okamoto
Masaaki Tsuzaki
Maki Shigematsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of DE602004013154D1 publication Critical patent/DE602004013154D1/de
Application granted granted Critical
Publication of DE602004013154T2 publication Critical patent/DE602004013154T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/20—Organic compounds containing oxygen
    • C11D3/2068—Ethers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/18—Hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16—Organic compounds
    • C11D3/24—Organic compounds containing halogen
    • C11D3/245—Organic compounds containing halogen containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/24—Hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/24—Hydrocarbons
    • C11D7/247—Hydrocarbons aromatic
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/26—Organic compounds containing oxygen
    • C11D7/263—Ethers
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5018—Halogenated solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5022—Organic solvents containing oxygen
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/50—Solvents
    • C11D7/5004—Organic solvents
    • C11D7/5027—Hydrocarbons
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/032—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents containing oxygen-containing compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/18—Glass; Plastics
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/40—Specific cleaning or washing processes
    • C11D2111/44—Multi-step processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Detergent Compositions (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Registering, Tensioning, Guiding Webs, And Rollers Therefor (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE602004013154T 2003-06-27 2004-06-25 Reinigungs/spülverfahren Expired - Lifetime DE602004013154T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003184722 2003-06-27
JP2003184722 2003-06-27
PCT/JP2004/008981 WO2005001015A1 (ja) 2003-06-27 2004-06-25 洗浄すすぎ方法

Publications (2)

Publication Number Publication Date
DE602004013154D1 true DE602004013154D1 (de) 2008-05-29
DE602004013154T2 DE602004013154T2 (de) 2009-05-14

Family

ID=33549625

Family Applications (2)

Application Number Title Priority Date Filing Date
DE602004024253T Expired - Lifetime DE602004024253D1 (de) 2003-06-27 2004-06-25 Reinigungs-/Spülverfahren
DE602004013154T Expired - Lifetime DE602004013154T2 (de) 2003-06-27 2004-06-25 Reinigungs/spülverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE602004024253T Expired - Lifetime DE602004024253D1 (de) 2003-06-27 2004-06-25 Reinigungs-/Spülverfahren

Country Status (12)

Country Link
US (1) US7662192B2 (de)
EP (2) EP1867709B1 (de)
JP (2) JP4655931B2 (de)
KR (2) KR101026095B1 (de)
CN (1) CN100412184C (de)
AT (2) ATE449156T1 (de)
AU (2) AU2004252335B2 (de)
CA (1) CA2530180C (de)
DE (2) DE602004024253D1 (de)
ES (2) ES2304613T3 (de)
SG (1) SG161108A1 (de)
WO (1) WO2005001015A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4761293B2 (ja) * 2005-03-08 2011-08-31 Ｊｘ日鉱日石エネルギー株式会社 洗浄剤組成物及び洗浄方法
JP4749006B2 (ja) * 2005-03-15 2011-08-17 新オオツカ株式会社 被洗浄物防錆方法及び被洗浄物防錆装置
JP4894307B2 (ja) * 2005-03-29 2012-03-14 旭硝子株式会社 潜熱輸送装置用作動液および潜熱輸送装置の作動方法
WO2007007780A1 (ja) * 2005-07-12 2007-01-18 Tokyo Ohka Kogyo Co., Ltd. 保護膜形成用材料およびこれを用いたホトレジストパターン形成方法
US8084367B2 (en) * 2006-05-24 2011-12-27 Samsung Electronics Co., Ltd Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods
JPWO2008149907A1 (ja) * 2007-06-08 2010-08-26 旭硝子株式会社 洗浄溶剤および洗浄方法
JP4995910B2 (ja) * 2007-07-05 2012-08-08 日本曹達株式会社 有機薄膜洗浄用溶剤
JP2011072967A (ja) * 2009-10-01 2011-04-14 Asahi Glass Co Ltd 含フッ素ポリマーの除去方法
JP5960439B2 (ja) * 2012-01-27 2016-08-02 スリーエム イノベイティブ プロパティズ カンパニー 除塵洗浄液およびそれを用いた洗浄方法
KR102478194B1 (ko) * 2017-06-26 2022-12-15 에이지씨 가부시키가이샤 진공 증착용의 마스크의 세정 방법 및 린스 조성물

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9007645D0 (en) * 1990-04-04 1990-05-30 Ici Plc Solvent cleaning of articles
DE4013369A1 (de) * 1990-04-26 1991-10-31 Hoechst Ag Neues azeotropes oder azeotropartiges gemisch aus 2,2,2-trifluorethyl-1,1,2,2-tetrafluorethylether und ethanol sowie dessen verwendung
JP3056239B2 (ja) * 1990-11-15 2000-06-26 昭和電工株式会社 ハンダフラックス除去液
JPH04270799A (ja) * 1991-02-25 1992-09-28 Arakawa Chem Ind Co Ltd 非ハロゲン系の工業用脱脂洗浄剤及び該洗浄剤を用いてなる物品の洗浄処理方法
JPH06128592A (ja) * 1992-10-15 1994-05-10 Tokuyama Sekiyu Kagaku Kk ワックス溶解組成物
JP3312758B2 (ja) * 1992-12-22 2002-08-12 山口日本電気株式会社 エレクトロニクス用洗浄液
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JPH10202209A (ja) * 1997-01-20 1998-08-04 Otsuka Giken Kogyo Kk 洗浄装置
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JP2881195B1 (ja) * 1998-03-30 1999-04-12 工業技術院長 共沸様組成物
JP5013562B2 (ja) * 1998-06-25 2012-08-29 三井・デュポンフロロケミカル株式会社 洗浄方法及び装置
JP4227695B2 (ja) 1999-02-09 2009-02-18 株式会社リコー 画像形成装置
JP3404541B2 (ja) * 1999-12-15 2003-05-12 独立行政法人産業技術総合研究所 １，１，２，２−テトラフルオロ−３−（１，１，２，２−テトラフルオロエトキシ）−プロパンとアルコール類からなる組成物
KR100632536B1 (ko) * 2000-03-20 2006-10-09 에스케이 주식회사 파울링 제거용 세정제 조성물 및 이의 사용방법
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US6372700B1 (en) 2000-03-31 2002-04-16 3M Innovative Properties Company Fluorinated solvent compositions containing ozone
JP2001300446A (ja) * 2000-04-28 2001-10-30 Nippon Zeon Co Ltd 被洗浄物の洗浄方法
TWI250206B (en) * 2000-06-01 2006-03-01 Asahi Kasei Corp Cleaning agent, cleaning method and cleaning apparatus
TWI315301B (en) * 2002-03-06 2009-10-01 Asahi Glass Co Ltd Solvent composition
JP2003327999A (ja) * 2002-03-06 2003-11-19 Asahi Glass Co Ltd 溶剤組成物
JP4270799B2 (ja) 2002-03-22 2009-06-03 オリンパス株式会社 画像記録装置
JP3833650B2 (ja) * 2003-12-04 2006-10-18 関東化学株式会社 低分子型有機ｅｌ素子製造の真空蒸着工程において使用するマスクの洗浄液組成物および洗浄方法
JP4182062B2 (ja) 2005-01-21 2008-11-19 新明和工業株式会社 車両の荷役装置

Also Published As

Publication number Publication date
JP2010242097A (ja) 2010-10-28
DE602004013154T2 (de) 2009-05-14
EP1867709B1 (de) 2009-11-18
WO2005001015A1 (ja) 2005-01-06
CA2530180C (en) 2011-05-24
AU2004252335B2 (en) 2009-04-09
SG161108A1 (en) 2010-05-27
EP1640443B1 (de) 2008-04-16
CN1809627A (zh) 2006-07-26
AU2004252335A1 (en) 2005-01-06
KR20100123928A (ko) 2010-11-25
AU2009200896B2 (en) 2010-11-11
AU2009200896A1 (en) 2009-03-26
ES2304613T3 (es) 2008-10-16
ATE449156T1 (de) 2009-12-15
KR101080657B1 (ko) 2011-11-08
EP1640443A4 (de) 2006-12-06
ES2335362T3 (es) 2010-03-25
CN100412184C (zh) 2008-08-20
US20060135390A1 (en) 2006-06-22
EP1867709A1 (de) 2007-12-19
KR20060029217A (ko) 2006-04-05
US7662192B2 (en) 2010-02-16
JP4655931B2 (ja) 2011-03-23
JPWO2005001015A1 (ja) 2006-08-10
EP1640443A1 (de) 2006-03-29
DE602004024253D1 (de) 2009-12-31
ATE392466T1 (de) 2008-05-15
KR101026095B1 (ko) 2011-03-31
CA2530180A1 (en) 2005-01-06

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