DE602004006938D1 - Sputtertarget aus einer Aluminiumlegierung, und reflektierender Film. - Google Patents

Sputtertarget aus einer Aluminiumlegierung, und reflektierender Film.

Info

Publication number
DE602004006938D1
DE602004006938D1 DE602004006938T DE602004006938T DE602004006938D1 DE 602004006938 D1 DE602004006938 D1 DE 602004006938D1 DE 602004006938 T DE602004006938 T DE 602004006938T DE 602004006938 T DE602004006938 T DE 602004006938T DE 602004006938 D1 DE602004006938 D1 DE 602004006938D1
Authority
DE
Germany
Prior art keywords
aluminum
sputtering target
optical information
alloy
reflection film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004006938T
Other languages
English (en)
Other versions
DE602004006938T2 (de
Inventor
Junichi Nakai
Yuuki Tauchi
Katsutoshi Takagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Publication of DE602004006938D1 publication Critical patent/DE602004006938D1/de
Application granted granted Critical
Publication of DE602004006938T2 publication Critical patent/DE602004006938T2/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/241—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material
    • G11B7/252—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers
    • G11B7/258—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers
    • G11B7/2585—Record carriers characterised by shape, structure or physical properties, or by the selection of the material characterised by the selection of the material of layers other than recording layers of reflective layers based on aluminium

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Record Carriers And Manufacture Thereof (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Optical Elements Other Than Lenses (AREA)
DE602004006938T 2003-10-30 2004-10-26 Sputtertarget aus einer Aluminiumlegierung, und reflektierender Film. Active DE602004006938T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003370740 2003-10-30
JP2003370740 2003-10-30

Publications (2)

Publication Number Publication Date
DE602004006938D1 true DE602004006938D1 (de) 2007-07-26
DE602004006938T2 DE602004006938T2 (de) 2008-02-07

Family

ID=34420205

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004006938T Active DE602004006938T2 (de) 2003-10-30 2004-10-26 Sputtertarget aus einer Aluminiumlegierung, und reflektierender Film.

Country Status (7)

Country Link
US (2) US20050112019A1 (de)
EP (1) EP1528119B1 (de)
JP (1) JP4774094B2 (de)
CN (1) CN100339900C (de)
AT (1) ATE364737T1 (de)
DE (1) DE602004006938T2 (de)
TW (1) TWI303056B (de)

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CN104711460B (zh) * 2015-03-23 2016-08-17 苏州劲元油压机械有限公司 一种含钛耐腐蚀铝合金材料及其处理工艺
CN105154799A (zh) * 2015-09-07 2015-12-16 基迈克材料科技（苏州）有限公司 用于tft平板显示器的超高纯铝板细晶靶材的制备方法
JP6228631B1 (ja) * 2016-06-07 2017-11-08 株式会社コベルコ科研 Ａｌ合金スパッタリングターゲット
CN106702231B (zh) * 2016-12-05 2018-07-03 佛山新瑞科创金属材料有限公司 一种具有高导热性能的铝基高阻尼合金及其制备方法
CN106676347A (zh) * 2016-12-09 2017-05-17 安徽银龙泵阀股份有限公司 一种高热膨胀系数铝合金
CN107904538A (zh) * 2017-11-21 2018-04-13 广西吉宽太阳能设备有限公司 一种含Nb的平板太阳能铝合金镀层及其制备方法
CN110468312B (zh) * 2019-09-26 2021-03-23 常州斯威克新材料科技有限公司 一种光伏反光膜用耐腐蚀铝合金靶材及其制备方法和铝合金薄膜
CN110951999A (zh) * 2019-12-18 2020-04-03 西安西工大超晶科技发展有限责任公司 一种反重力浇注的合金铸件的生产方法
WO2022004491A1 (ja) * 2020-06-30 2022-01-06 株式会社アルバック 金属配線構造体、金属配線構造体の製造方法及びスパッタリングターゲット
CN113430422B (zh) * 2021-06-25 2022-04-22 中南大学 一种高强高韧耐热铝铁合金及其3d打印方法

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Also Published As

Publication number Publication date
ATE364737T1 (de) 2007-07-15
JP4774094B2 (ja) 2011-09-14
EP1528119B1 (de) 2007-06-13
TW200521964A (en) 2005-07-01
CN1612243A (zh) 2005-05-04
JP2009087527A (ja) 2009-04-23
CN100339900C (zh) 2007-09-26
US20100202280A1 (en) 2010-08-12
EP1528119A1 (de) 2005-05-04
TWI303056B (en) 2008-11-11
DE602004006938T2 (de) 2008-02-07
US20050112019A1 (en) 2005-05-26

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