DE60119821D1 - Massendurchflussmesser - Google Patents

Massendurchflussmesser

Info

Publication number
DE60119821D1
DE60119821D1 DE60119821T DE60119821T DE60119821D1 DE 60119821 D1 DE60119821 D1 DE 60119821D1 DE 60119821 T DE60119821 T DE 60119821T DE 60119821 T DE60119821 T DE 60119821T DE 60119821 D1 DE60119821 D1 DE 60119821D1
Authority
DE
Germany
Prior art keywords
temperature sensor
conduit
resistor element
temperature
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60119821T
Other languages
English (en)
Other versions
DE60119821T2 (de
Inventor
Joost Conrad Loetters
Hendrik Jan Boer
Wybren Jouwsma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Berkin BV
Original Assignee
Berkin BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berkin BV filed Critical Berkin BV
Publication of DE60119821D1 publication Critical patent/DE60119821D1/de
Application granted granted Critical
Publication of DE60119821T2 publication Critical patent/DE60119821T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G01F1/699—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters by control of a separate heating or cooling element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Drying Of Semiconductors (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Glass Compositions (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
DE60119821T 2000-03-30 2001-03-28 Massendurchflussmesser Expired - Lifetime DE60119821T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL1014797 2000-03-30
NL1014797A NL1014797C2 (nl) 2000-03-30 2000-03-30 Massadebietmeter.

Publications (2)

Publication Number Publication Date
DE60119821D1 true DE60119821D1 (de) 2006-06-29
DE60119821T2 DE60119821T2 (de) 2006-10-19

Family

ID=19771110

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60119821T Expired - Lifetime DE60119821T2 (de) 2000-03-30 2001-03-28 Massendurchflussmesser

Country Status (8)

Country Link
US (1) US6637264B2 (de)
EP (2) EP1139073B1 (de)
JP (1) JP4831879B2 (de)
AT (1) ATE327498T1 (de)
DE (1) DE60119821T2 (de)
DK (1) DK1139073T3 (de)
ES (1) ES2262598T3 (de)
NL (1) NL1014797C2 (de)

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EP1418408B1 (de) * 2001-08-14 2014-07-09 Hitachi, Ltd. Thermischer Durchfluss-Sensor
KR100395656B1 (ko) * 2001-12-19 2003-08-21 김욱현 질량유량제어기의 질량유량측정센서
JP3969167B2 (ja) * 2002-04-22 2007-09-05 三菱電機株式会社 流体流量測定装置
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US6883370B2 (en) * 2002-06-28 2005-04-26 Heetronix Mass flow meter with chip-type sensors
JP3650384B2 (ja) * 2002-08-29 2005-05-18 三菱電機株式会社 熱式流量検出装置
NL1023405C2 (nl) 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter.
NL1023406C2 (nl) * 2003-05-13 2004-11-18 Berkin Bv Massadebietmeter voor het meten volgens de CT methode.
NL1023404C2 (nl) * 2003-05-13 2004-11-16 Berkin Bv Inrichting voor het regelen van het massadebiet van een vloeistofstroom in een vloeistofkanaal.
DE102004019189B3 (de) * 2004-04-16 2005-08-18 Krohne Ag Magnetisch-induktives Durchflußmeßverfahren und magnetisch-induktives Durchflußmeßgerät
DE102004033049B4 (de) * 2004-07-08 2016-05-04 Robert Bosch Gmbh Messeinrichtung für einen Durchflusssensor, insbesondere einen Luftmassensensor für Brennkraftmaschinen und Verfahren zum Messen von Luftströmen
US7107835B2 (en) * 2004-09-08 2006-09-19 Honeywell International Inc. Thermal mass flow sensor
US7000465B1 (en) * 2004-09-17 2006-02-21 Mks Instruments, Inc. Attitude error self-correction for thermal sensors of mass flow meters and controllers
JP2006153634A (ja) * 2004-11-29 2006-06-15 Mitsui Mining & Smelting Co Ltd タンク内液体の漏れ検知装置
DE102004061883A1 (de) * 2004-12-22 2006-07-06 Vishay Electronic Gmbh Heizeinrichtung für ein Inhalationsgerät, Inhalationsgerät und Erwärmungsverfahren
US20070084280A1 (en) * 2005-08-26 2007-04-19 Gill Rajinder S Semi-constant temperature excitation method for fluid flow sensors
JP4805091B2 (ja) * 2006-10-24 2011-11-02 株式会社堀場エステック 熱式質量流量センサ及びマスフローコントローラ
GB2446414A (en) * 2007-02-06 2008-08-13 Thorn Security A Detector
US7469583B2 (en) * 2007-02-21 2008-12-30 Mks Japan, Inc. Flow sensor
JP5714911B2 (ja) * 2008-01-18 2015-05-07 ウオーターズ・テクノロジーズ・コーポレイシヨン 熱ループフローセンサ
US7971480B2 (en) * 2008-10-13 2011-07-05 Hitachi Metals, Ltd. Mass flow controller having a first pair of thermal sensing elements opposing a second pair of thermal sensing elements
NO332832B1 (no) * 2009-01-30 2013-01-21 Statoil Asa Fremgangsmate for a male tykkelsen av avsetninger
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
US9759632B2 (en) * 2011-01-03 2017-09-12 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection and freeze burst prevention
NL1038574C2 (nl) 2011-02-11 2011-11-23 Berkin Bv Sensor voor een massadebietmeter.
DE102011120899B4 (de) * 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids
JP5969760B2 (ja) * 2011-12-27 2016-08-17 株式会社堀場エステック 熱式流量センサ
NL2011975C2 (nl) * 2013-12-17 2015-06-18 Berkin Bv Stromingsmeetapparaat van het thermische type.
US10508943B2 (en) * 2014-03-31 2019-12-17 Hitachi Metals, Ltd. Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
CA2961646C (en) 2014-09-18 2023-09-05 Csir Electronically deriving a conclusion of the condition of slurry flow in a non-vertical conduit
DE102014119556A1 (de) * 2014-12-23 2016-06-23 Endress + Hauser Flowtec Ag Thermisches Durchflussmessgerät
GB2553681B (en) 2015-01-07 2019-06-26 Homeserve Plc Flow detection device
GB201501935D0 (en) 2015-02-05 2015-03-25 Tooms Moore Consulting Ltd And Trow Consulting Ltd Water flow analysis
US9791307B2 (en) 2015-03-06 2017-10-17 Alicat Scientific, Inc. Systems and methods for detecting flow of a fluid
US10724882B2 (en) * 2015-11-24 2020-07-28 Ifm Electronic Gmbh Thermal flowmeter and method having a self-heated element controlled to operate differently under high and low phases of square wave signal
USD800591S1 (en) 2016-03-31 2017-10-24 Homeserve Plc Flowmeter
EP4122515A1 (de) * 2016-09-16 2023-01-25 Fisher & Paykel Healthcare Limited Thermistordurchflusssensor mit mehreren temperaturpunkten
EP3460369B1 (de) * 2017-09-22 2020-04-22 Vestel Elektronik Sanayi ve Ticaret A.S. Induktionsgesteuerte kühlung
CN113366285A (zh) * 2018-12-20 2021-09-07 爱德华兹生命科学公司 热质流体流量传感器
CN110274649B (zh) * 2019-06-13 2020-09-01 武汉大学 一种基于mems技术的热温差型流量传感器及其制备方法
US11073415B2 (en) 2019-10-21 2021-07-27 Flusso Limited Thermal fluid flow sensor having a dielectric membrane comprising discontinuities between the heating element and an edge
CN110672187B (zh) * 2019-11-05 2021-08-31 北京七星华创流量计有限公司 传感器对称性检测方法和装置
CN112212928A (zh) * 2020-09-11 2021-01-12 中国石油天然气股份有限公司 井下全井眼热式流量测量装置

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US2594618A (en) * 1945-08-11 1952-04-29 Atomic Energy Commission Thermal flowmeter
JPS5543447A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Hot-wire type flow rate measuring device
US4433329A (en) * 1980-09-05 1984-02-21 Chevron Research Company Ultrasensitive apparatus and method for detecting change in fluid flow during the occurrence of a transient condition
US4471655A (en) * 1980-10-24 1984-09-18 Nippon Soken, Inc. Gas flow rate measuring apparatus
JPS57170065A (en) * 1981-04-14 1982-10-20 Toshiba Corp Inspection of gate photosignal of photo thyristor converter
US4433575A (en) * 1981-05-19 1984-02-28 Rutherford Ralph E Flow splitting device for fluid flow meter
DE3229609A1 (de) * 1982-08-09 1984-02-09 Trasidex AG, 9490 Vaduz Thermischer durchflussmesser
JPS59197827A (ja) * 1983-04-26 1984-11-09 Nippon Soken Inc 燃性流体の流量の測定装置
GB2173905A (en) * 1985-04-12 1986-10-22 Radyne Ltd Fluid-flow monitoring apparatus
JPH0676897B2 (ja) * 1986-05-27 1994-09-28 株式会社エステツク 熱式流量計
JPH0682056B2 (ja) * 1987-07-13 1994-10-19 株式会社日立製作所 流量計用抵抗素子
JP2631481B2 (ja) * 1987-12-08 1997-07-16 株式会社 リンテック 質量流量計とその計測方法
US4843881A (en) * 1987-12-24 1989-07-04 Aalborg Instruments & Controls Fluid flow sensor system
US4972707A (en) * 1988-05-18 1990-11-27 Brooks Instrument B.V. Apparatus for measuring the flow of a fluid
JP2789458B2 (ja) * 1988-11-22 1998-08-20 株式会社エステック 液体気化のための流量制御装置
NL8900474A (nl) * 1989-02-24 1990-09-17 Bronkhorst High Tech Bv Massa-debietmeter met temperatuursensoren.
JP3047184B2 (ja) * 1989-11-27 2000-05-29 株式会社エステック 質量流量計
US5069066A (en) * 1990-05-10 1991-12-03 Djorup Robert Sonny Constant temperature anemometer
JPH0421917A (ja) * 1990-05-15 1992-01-24 Matsushita Electric Ind Co Ltd 磁気ヘッド装置
JPH086268Y2 (ja) * 1990-06-15 1996-02-21 オーバル機器工業株式会社 熱式流量計
JPH04178527A (ja) * 1990-11-14 1992-06-25 Oval Corp 熱式質量流量計
US5359878A (en) * 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
JP3266707B2 (ja) * 1993-07-10 2002-03-18 株式会社エステック 質量流量センサ
JP3150510B2 (ja) * 1993-12-07 2001-03-26 株式会社日立製作所 発熱抵抗式空気流量計
DE4404395C2 (de) * 1994-02-11 1996-12-19 Fresenius Ag Verfahren und Vorrichtung zum Messen der Durchflußgeschwindigkeit einer in einer Leitung strömenden Flüssigkeit
US5461913A (en) * 1994-06-23 1995-10-31 Mks Instruments, Inc. Differential current thermal mass flow transducer
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
JP3865159B2 (ja) * 1997-07-31 2007-01-10 日立金属株式会社 熱式質量流量計
US6269692B1 (en) * 1999-02-01 2001-08-07 Dxl Usa Inc. Mass flow measuring assembly having low pressure drop and fast response time

Also Published As

Publication number Publication date
JP2001304934A (ja) 2001-10-31
ATE327498T1 (de) 2006-06-15
DK1139073T3 (da) 2006-09-18
EP1615001A2 (de) 2006-01-11
ES2262598T3 (es) 2006-12-01
US6637264B2 (en) 2003-10-28
EP1139073A1 (de) 2001-10-04
US20010027684A1 (en) 2001-10-11
EP1139073B1 (de) 2006-05-24
NL1014797C2 (nl) 2001-10-02
DE60119821T2 (de) 2006-10-19
EP1615001A3 (de) 2011-01-19
JP4831879B2 (ja) 2011-12-07

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Legal Events

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