KR930021984A - 온도안정화 매스 플로우 컨트롤러 센서 - Google Patents

온도안정화 매스 플로우 컨트롤러 센서 Download PDF

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Publication number
KR930021984A
KR930021984A KR1019920006299A KR920006299A KR930021984A KR 930021984 A KR930021984 A KR 930021984A KR 1019920006299 A KR1019920006299 A KR 1019920006299A KR 920006299 A KR920006299 A KR 920006299A KR 930021984 A KR930021984 A KR 930021984A
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KR
South Korea
Prior art keywords
sensor
temperature
mass flow
flow controller
case
Prior art date
Application number
KR1019920006299A
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English (en)
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KR940011791B1 (ko
Inventor
황창환
Original Assignee
문정환
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 문정환, 금성일렉트론 주식회사 filed Critical 문정환
Priority to KR1019920006299A priority Critical patent/KR940011791B1/ko
Priority to US08/031,403 priority patent/US5373737A/en
Priority to DE4309782A priority patent/DE4309782B4/de
Priority to JP5083002A priority patent/JPH0618305A/ja
Publication of KR930021984A publication Critical patent/KR930021984A/ko
Application granted granted Critical
Publication of KR940011791B1 publication Critical patent/KR940011791B1/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K5/00—Plug valves; Taps or cocks comprising only cut-off apparatus having at least one of the sealing faces shaped as a more or less complete surface of a solid of revolution, the opening and closing movement being predominantly rotary
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Volume Flow (AREA)
  • Fluid Mechanics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Flow Control (AREA)

Abstract

본 발명은 온도안정화 매스 플로우 컨트롤러 센서에 관한 것으로, 인-슈트 케이스의 내부에 센서튜브가 설치되고, 그 센서튜브에는 업-스트림코일 다운-스트림 코일이 장착되어, 센서튜브 내를 흐르는 가스의 열량차를 감지하는 매스 플로우 컨트롤러 센서에 있어서, 센서 내부의 온도를 일정하게 유지시키기 위한 온도유지 수단과, 센서 내부의 온도변화를 감지하여 상기 온도 유지수단의 전원을 선택적으로 단, 속하는 써모스텟을 구비하여, 센서의 감지동작을 안정화시키도록 구성한 것이다.
상기 온도유지 수단은, 인-슈트 케이스의 내부에 설치되는 냉각판과, 그 냉각판은 전원 콘넥터를 연결하는 펠티어 냉각선으로 구성되며, 상기 펠티어 냉각선은 전원 콘넥터의-15VDC단에 연결되는 안티몬와이어와 그라운드단에 연결되는 비스무트와이어로 구성된다.

Description

온도안정화 매스 플로우 컨트롤러 센서
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제3도는 본 발명에 의한 온도안정화 MFC 센서의 구성 및 작용을 보인 구조도.

Claims (3)

  1. 인-슈트케이스(12)의 내부에 센서튜브(13)가 설치되고, 그 센서튜브(13)에는 업-스트림코일(14)과 다운-스트림코일(15)이 장착되어, 센서튜브(13)내를 흐르는 가스의 열량차를 감지하는 매스플로우컨트롤러 센서에 있어서, 센서 내부의 온도를 일정하게 유지시키기 위한 온도유지 수단과, 센서 내부의 온도변화를 감지하여 상기온도 유지수단의 전원을 선택적으로 단속하는 써모스텟(24)을 구비하여, 센서의 감지동작을 안정화시키도록 구성함을 특징으로 하는 온도안정화 매스 플로우 컨트롤러 센서.
  2. 제1항에 있어서, 상기 온도유지 수단은 인-슈트케이스(12)의 내부에 설치되는 냉각판(21)과, 그 냉각판(21)과 전원콘넥터(23)를 연결하는 펠티어 냉각선(22)으로 구성됨을 특징으로 하는 온도안정화 매스 플로우 컨트롤러 센서.
  3. 제2항에 있어서, 상기 펠티어 냉각선(22)는 전원 콘넥터(23)의-15VDC단(23a)에 연결되는 안티몬와이어(22a)와 그라운드단(23b)에 연결되는 비스무트와이어(22b)로 이루어짐을 특징으로 하는 온도안정화 매스 플로우 컨트롤러 센서.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920006299A 1992-04-15 1992-04-15 온도안정화 매스 플로우 컨트롤러 센서 KR940011791B1 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1019920006299A KR940011791B1 (ko) 1992-04-15 1992-04-15 온도안정화 매스 플로우 컨트롤러 센서
US08/031,403 US5373737A (en) 1992-04-15 1993-03-15 Sensor device for mass flow controller
DE4309782A DE4309782B4 (de) 1992-04-15 1993-03-25 Sensoranordnung für eine Massenstrom-Steuerung
JP5083002A JPH0618305A (ja) 1992-04-15 1993-04-09 マスフローコントローラのセンサ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019920006299A KR940011791B1 (ko) 1992-04-15 1992-04-15 온도안정화 매스 플로우 컨트롤러 센서

Publications (2)

Publication Number Publication Date
KR930021984A true KR930021984A (ko) 1993-11-23
KR940011791B1 KR940011791B1 (ko) 1994-12-26

Family

ID=19331825

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920006299A KR940011791B1 (ko) 1992-04-15 1992-04-15 온도안정화 매스 플로우 컨트롤러 센서

Country Status (4)

Country Link
US (1) US5373737A (ko)
JP (1) JPH0618305A (ko)
KR (1) KR940011791B1 (ko)
DE (1) DE4309782B4 (ko)

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US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
US6078030A (en) * 1998-09-09 2000-06-20 Millipore Corporation Component heater for use in semiconductor manufacturing equipment
US6627465B2 (en) * 2001-08-30 2003-09-30 Micron Technology, Inc. System and method for detecting flow in a mass flow controller
US6909271B2 (en) * 2001-12-05 2005-06-21 Kenneth C. Sloneker Devices, systems, and methods for measuring differential temperature
JP3896594B2 (ja) * 2004-10-01 2007-03-22 株式会社ユーテック Ｃｖｄ用気化器、溶液気化式ｃｖｄ装置及びｃｖｄ用気化方法
US7874208B2 (en) * 2007-10-10 2011-01-25 Brooks Instrument, Llc System for and method of providing a wide-range flow controller
HUE032774T2 (en) 2010-04-21 2017-10-30 Ventirx Pharmaceuticals Inc Increase antibody-dependent cellular cytotoxicity
US20120103425A1 (en) * 2010-10-29 2012-05-03 Applied Materials, Inc. Flow Meter With Improved Thermal Stability And Methods Of Use
US9146172B2 (en) * 2011-01-03 2015-09-29 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with chronometric monitor for fluid leak detection
US11608618B2 (en) 2011-01-03 2023-03-21 Sentinel Hydrosolutions, Llc Thermal dispersion flow meter with fluid leak detection and freeze burst prevention
US11814821B2 (en) 2011-01-03 2023-11-14 Sentinel Hydrosolutions, Llc Non-invasive thermal dispersion flow meter with fluid leak detection and geo-fencing control
DE102011120899B4 (de) 2011-12-12 2015-08-20 Karlsruher Institut für Technologie Verfahren und Verwendung einer Vorrichtung zur Bestimmung des Massenstroms eines Fluids
US10508943B2 (en) * 2014-03-31 2019-12-17 Hitachi Metals, Ltd. Thermal mass flow rate measurement method, thermal mass flow meter using said method, and thermal mass flow controller using said thermal mass flow meter
US10861692B2 (en) 2017-10-26 2020-12-08 Taiwan Semiconductor Manufacturing Co., Ltd. Substrate carrier deterioration detection and repair

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US3326040A (en) * 1964-06-15 1967-06-20 Cons Systems Corp Thermal flow meter
GB1127568A (en) * 1967-06-01 1968-09-18 Ford Motor Co Flowmeters
DE2816650A1 (de) * 1978-04-17 1979-10-18 Kernforschungsanlage Juelich Messgeraet zur bestimmung des durchflusses und/oder der stroemungsgeschwindigkeit von gasen
US4440021A (en) * 1980-07-29 1984-04-03 Abouchar John W Mass flow meter with reduced attitude sensitivity
US4464932A (en) * 1982-07-12 1984-08-14 Mks Instruments, Inc. Thermal mass flowmetering
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JP2789458B2 (ja) * 1988-11-22 1998-08-20 株式会社エステック 液体気化のための流量制御装置

Also Published As

Publication number Publication date
KR940011791B1 (ko) 1994-12-26
US5373737A (en) 1994-12-20
DE4309782A1 (de) 1993-10-21
JPH0618305A (ja) 1994-01-25
DE4309782B4 (de) 2004-01-22

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