WO1992020006A3 - Thermal mass flow sensor - Google Patents

Thermal mass flow sensor Download PDF

Info

Publication number
WO1992020006A3
WO1992020006A3 PCT/US1992/003341 US9203341W WO9220006A3 WO 1992020006 A3 WO1992020006 A3 WO 1992020006A3 US 9203341 W US9203341 W US 9203341W WO 9220006 A3 WO9220006 A3 WO 9220006A3
Authority
WO
WIPO (PCT)
Prior art keywords
tube
mass flow
sensor
fluid
flow rate
Prior art date
Application number
PCT/US1992/003341
Other languages
French (fr)
Other versions
WO1992020006A2 (en
Inventor
Michael John Doyle
Kim Ngoc Vu
Randall James Vavra
Dan Brown Lemay
Original Assignee
Unit Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Unit Instr Inc filed Critical Unit Instr Inc
Publication of WO1992020006A2 publication Critical patent/WO1992020006A2/en
Publication of WO1992020006A3 publication Critical patent/WO1992020006A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00—Measuring a proportion of the volume flow

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Details Of Flowmeters (AREA)

Abstract

An apparatus for sensing a mass flow rate of a fluid in a thermal mass flow meter has a sensor tube. The sensor tube has a tube for carrying the fluid flow at the flow rate to be sensed. A temperature responsive member is disposed in good heat transfer relation with the tube. The temperature responsive member, when energized, produces at a sensor signal node a sensor signal responsive to the rate of mass flow of the fluid through the tube. The sensor signal is offset from a null signal condition by an unsymmetrical temperature distribution along the sensor tube when the mass flow rate of the fluid is zero. A means for modifying the temperature distribution along the sensor tube alters the unsymmetrical temperature distribution and causes the sensor signal node to produce a substantially null signal condition when the mass flow rate of the fluid through the tube is zero.
PCT/US1992/003341 1991-04-26 1992-04-23 Thermal mass flow sensor WO1992020006A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US69218191A 1991-04-26 1991-04-26
US692,181 1991-04-26

Publications (2)

Publication Number Publication Date
WO1992020006A2 WO1992020006A2 (en) 1992-11-12
WO1992020006A3 true WO1992020006A3 (en) 1992-12-23

Family

ID=24779576

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1992/003341 WO1992020006A2 (en) 1991-04-26 1992-04-23 Thermal mass flow sensor

Country Status (2)

Country Link
EP (1) EP0581896A1 (en)
WO (1) WO1992020006A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6062077A (en) * 1997-10-17 2000-05-16 Azima; Faramarz Techniques for making and using a sensing assembly for a mass flow controller
WO1999021067A2 (en) * 1997-10-17 1999-04-29 Faramarz Frank Azima Mass flow controller and related methods
US6779394B2 (en) * 2001-12-21 2004-08-24 Mks Instruments, Inc. Apparatus and method for thermal management of a mass flow controller
US6668642B2 (en) * 2001-12-21 2003-12-30 Mks Instruments, Inc. Apparatus and method for thermal isolation of thermal mass flow sensor
NL1023406C2 (en) * 2003-05-13 2004-11-18 Berkin Bv Mass flow meter for measuring according to the CT method.
MX2010011725A (en) 2008-05-01 2010-11-30 Micro Motion Inc Method for generating a diagnostic from a deviation of a flow meter parameter.
AU2011239253B2 (en) * 2008-05-01 2012-10-18 Micro Motion, Inc. Method for Generating a Diagnostic from a Deviation of a Flow Meter Parameter
NL2011975C2 (en) * 2013-12-17 2015-06-18 Berkin Bv FLOW MEASURING DEVICE OF THE THERMAL TYPE.
CN110081956A (en) * 2019-04-29 2019-08-02 新乡航空工业(集团)有限公司 Variable viscosity lubricating oil micro flow standard device
NL2026167B1 (en) 2020-07-30 2022-04-08 Berkin Bv Thermal-type flow sensor with a thermally conductive frame element in the form of a printed circuit board (PCB)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
EP0395126A1 (en) * 1989-02-24 1990-10-31 Berkin B.V. Mass-flow meter with temperature sensors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013219A (en) * 1983-07-04 1985-01-23 Ohkura Electric Co Ltd Thermal sensor of mass flowmeter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4686856A (en) * 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
US4815280A (en) * 1986-05-27 1989-03-28 Stec Inc. Thermal flow meter
EP0395126A1 (en) * 1989-02-24 1990-10-31 Berkin B.V. Mass-flow meter with temperature sensors

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 16, no. 182 (P-1346)30 April 1992 & JP,A,40 22 822 ( OVAL ENG. ) 27 January 1992 *
PATENT ABSTRACTS OF JAPAN vol. 9, no. 129 (P-361)(1852) 5 June 1985 & JP,A,60 013 219 ( OOKURA DENKI ) 23 January 1985 *

Also Published As

Publication number Publication date
EP0581896A1 (en) 1994-02-09
WO1992020006A2 (en) 1992-11-12

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