JPS6220322U - - Google Patents

Info

Publication number
JPS6220322U
JPS6220322U JP11056685U JP11056685U JPS6220322U JP S6220322 U JPS6220322 U JP S6220322U JP 11056685 U JP11056685 U JP 11056685U JP 11056685 U JP11056685 U JP 11056685U JP S6220322 U JPS6220322 U JP S6220322U
Authority
JP
Japan
Prior art keywords
sensor pipe
sensor
resistant material
temperature difference
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11056685U
Other languages
Japanese (ja)
Other versions
JPH0520978Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985110566U priority Critical patent/JPH0520978Y2/ja
Publication of JPS6220322U publication Critical patent/JPS6220322U/ja
Application granted granted Critical
Publication of JPH0520978Y2 publication Critical patent/JPH0520978Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案になる熱式質量流量計の一実施
例を説明するための図、第２図は第１図に示す熱
式質量流量計を適用された流量制御装置の縦断面
図、第３図は本考案の第２実施例を説明するため
の図である。 ２……流量計測部、１１……センサパイプ、１
２，１３……自己加熱抵抗体、１４……ブリツジ
回路、１７，１８……耐熱材、１９……隔壁、２
０……ケース、２１……繊維材。 FIG. 1 is a diagram for explaining one embodiment of the thermal mass flowmeter according to the present invention, and FIG. 2 is a longitudinal sectional view of a flow rate control device to which the thermal mass flowmeter shown in FIG. 1 is applied. FIG. 3 is a diagram for explaining a second embodiment of the present invention. 2...Flow rate measuring section, 11...Sensor pipe, 1
2, 13... Self-heating resistor, 14... Bridge circuit, 17, 18... Heat resistant material, 19... Partition wall, 2
0...Case, 21...Fiber material.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] センサパイプで形成されたセンサ流路に給送さ
れる被測流体を加熱し、該センサパイプの２点間
の温度差を検出する温度差検出手段を有し、該温
度差に応じて該被測流体の質量流量を計測する熱
式質量流量計において、熱伝導率の高い耐熱材に
より該センサパイプの外周を包み、さらに該耐熱
材の周囲を金属より熱伝導率の低いケースにより
包囲するよう構成した熱式質量流量計。 It has a temperature difference detection means that heats the measured fluid fed to the sensor flow path formed by the sensor pipe and detects the temperature difference between two points of the sensor pipe. In a thermal mass flow meter that measures the mass flow rate of a measuring fluid, the outer periphery of the sensor pipe is wrapped in a heat-resistant material with high thermal conductivity, and the heat-resistant material is further surrounded by a case with lower thermal conductivity than metal. Thermal mass flowmeter configured.
JP1985110566U 1985-07-19 1985-07-19 Expired - Lifetime JPH0520978Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985110566U JPH0520978Y2 (en) 1985-07-19 1985-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985110566U JPH0520978Y2 (en) 1985-07-19 1985-07-19

Publications (2)

Publication Number Publication Date
JPS6220322U true JPS6220322U (en) 1987-02-06
JPH0520978Y2 JPH0520978Y2 (en) 1993-05-31

Family

ID=30989682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985110566U Expired - Lifetime JPH0520978Y2 (en) 1985-07-19 1985-07-19

Country Status (1)

Country Link
JP (1) JPH0520978Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01238724A (en) * 1988-03-17 1989-09-22 Mitsubishi Steel Mfg Co Ltd Load transmitting mechanism having nonlinear load characteristics
WO2000063006A1 (en) * 1999-04-19 2000-10-26 Kikusui Seisakusyo Ltd. Rotary type powder compression molding machine

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122148A (en) * 1978-03-15 1979-09-21 Kankiyou Rikagaku Kenkiyuushiy Mass flow meter
JPS5792124U (en) * 1980-11-26 1982-06-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122148A (en) * 1978-03-15 1979-09-21 Kankiyou Rikagaku Kenkiyuushiy Mass flow meter
JPS5792124U (en) * 1980-11-26 1982-06-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01238724A (en) * 1988-03-17 1989-09-22 Mitsubishi Steel Mfg Co Ltd Load transmitting mechanism having nonlinear load characteristics
WO2000063006A1 (en) * 1999-04-19 2000-10-26 Kikusui Seisakusyo Ltd. Rotary type powder compression molding machine

Also Published As

Publication number Publication date
JPH0520978Y2 (en) 1993-05-31

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